146 lines
4.4 KiB
C#
146 lines
4.4 KiB
C#
using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Unit;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.LoadLocks;
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using SicModules.EFEMs.Routines;
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using SicModules.TMs;
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using System;
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using System.Collections.Generic;
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using System.Linq;
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using System.Reflection;
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using System.Text;
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using System.Threading.Tasks;
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using System.Xml.Linq;
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namespace SicModules.LLs.Routines
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{
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public class LoadLockSlitValveRoutine : LoadLockBaseRoutine
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{
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enum RoutineStep
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{
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ServoRoutine,
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LiftRoutine,
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CheckPressureCondition,
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CheckPressure,
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SetSlitValve,
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CheckPressureCondition2,
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TimeDlay1
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}
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private int _motionTimeout = 30;
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private bool _paramIsOpen; //是否开门
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private SicTM _tm;
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private IoSlitValve _slitvalveLoadLockLeft;
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private LoadLockServoToRoutine _llServoToRoutine;
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private LoadLockLiftRoutine _llLiftRoutine;
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public void Init(bool isOpen)
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{
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_paramIsOpen = isOpen;
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Name = isOpen ? "Open Slit Valve" : "Close Slit Valve";
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}
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public LoadLockSlitValveRoutine()
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{
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Module = ModuleName.LoadLock.ToString();
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Name = "LoadLockSlitValue";
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_tm = DEVICE.GetDevice<SicTM>($"{ModuleName.System.ToString()}.{ModuleName.TM.ToString()}");
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_llServoToRoutine = new LoadLockServoToRoutine(ModuleName.LoadLock);
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_llLiftRoutine = new LoadLockLiftRoutine();
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_slitvalveLoadLockLeft = DEVICE.GetDevice<IoSlitValve>("LoadLock.LoadLockLSideDoor");
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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if (_paramIsOpen)
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{
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//判断TM到LoadLock或者UnLoad的门是否关上
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if (!_tm.CheckSlitValveClose(ModuleName.LoadLock))
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{
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EV.PostWarningLog(Module, $"can not open left slit valve,TM slit valve not closed, can not open at same time");
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return Result.FAIL;
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}
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_motionTimeout = SC.GetValue<int>("System.SlitValveMotionTimeout");
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_llServoToRoutine.Init(SC.GetValue<double>("LoadLock.AtmPressureBase"));
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_llLiftRoutine.Init(false);
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}
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Notify("Start");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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//开门之前需要对两边腔体进行气压调节,降Lift
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if (_paramIsOpen)
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{
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ExecuteRoutine((int)RoutineStep.ServoRoutine, _llServoToRoutine);
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ExecuteRoutine((int)RoutineStep.LiftRoutine, _llLiftRoutine);
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}
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SetSlitValve((int)RoutineStep.SetSlitValve, _paramIsOpen, _motionTimeout);
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TimeDelay((int)RoutineStep.TimeDlay1, 1);
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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return Result.FAIL;
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}
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Notify("Finished");
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return Result.DONE;
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}
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public void SetSlitValve(int id, bool isOpen, int timeout)
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{
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Tuple<bool, Result> ret = ExecuteAndWait(id, () =>
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{
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Notify($"set left slit valve " + (isOpen ? "Open" : "Close"));
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if (!_slitvalveLoadLockLeft.SetSlitValve(isOpen, out string reason))
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{
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Stop(reason);
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return false;
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}
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return true;
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}, () =>
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{
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return isOpen ? _slitvalveLoadLockLeft.IsOpen : _slitvalveLoadLockLeft.IsClose;
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}, timeout * 1000);
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if (ret.Item1)
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{
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if (ret.Item2 == Result.FAIL)
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{
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throw (new RoutineFaildException());
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}
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else if (ret.Item2 == Result.TIMEOUT) //timeout
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{
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Stop($"can not complete in {timeout} seconds");
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throw (new RoutineFaildException());
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}
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else
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throw (new RoutineBreakException());
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}
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}
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}
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}
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