262 lines
9.9 KiB
C#
262 lines
9.9 KiB
C#
using System.Collections.Generic;
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using System.Diagnostics;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Devices;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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using SicModules.PMs.Routines.Base;
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namespace SicModules.PMs.Routines
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{
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public class PMPumpRoutine : PMBaseRoutine
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{
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private enum RoutineStep
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{
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RotationEnable,
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HeatEnable,
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VentPumpClose,
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ArSupply,
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SetGroupB,
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SetGroupC,
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SetGroupE,
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SetGroupF,
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SetGroupH,
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SetGroupD,
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SetGroupG,
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SetGroupK,
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SetGroupJ,
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SetM1toM17,
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SetM17M18,
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SetPC,
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SetGroupI, //V87-96
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SetM18,
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SetM2to40,
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SetM2to40_1,
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MfcAll,
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SetGasOut,
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SetTv,
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SetTv1,
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WaitTv1,
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SetGasIn1, //V65,V67,V68
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OpenFinal1, //V91-96
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SetMfcFinal1, //M32-38
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SetGasIn2,
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SetGroupJOpen,
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OpenFinal2,
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SetMfcFinal2,
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PumpDownTimeout,
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SetTvMode,
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SetEPV1,
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SetEPV2,
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SetTVEnable,
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SetTVPressMode,
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SetTvPositionToZero,
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SetMFCMode,
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SetPCMode,
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SetTvOpen,
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SetTvModeToPress,
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SetTVto1050,
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OpenGasIn1,
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CloseGasIn1,
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CloseFinanl1,
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CloseFinanl2,
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SetGroupV38,
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SetV76,
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SetV75,
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SetGroupV25,
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SetV31,
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SetV32,
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SetV35V36,
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SetV87V97,
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SetV65,
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SetV103,
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SetV105,
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SetTVPositionMode,
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SetTVPositionMax,
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CloseM32M35M37,
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CloseM36,
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CloseM38,
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TimeDelay1,
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TimeDelay2,
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TimeDelay3,
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TimeDelay4,
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TimeDelay5,
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TimeDelay6,
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TimeDelay7,
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TimeDelay8,
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TimeDelay9,
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TimeDelay10,
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TimeDelay11,
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TimeDelay12,
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TimeDelay13,
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TimeDelay14, SetM18to40, SetM18to40_1,
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}
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private PMModule _pm1Module;
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private IoThrottleValve2 _IoThrottle;
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private IoInterLock _pmIoInterLock;
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private int _rotationCheckSpeed = 0; //设置旋转速度为0后检查是否转速低于此数值
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private int _rotationCloseTimeout; //旋转停止超时
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private int _IoValueOpenCloseTimeout = 10; //开关超时时间
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private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间
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private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了)
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private int _throttleTimeout; //蝶阀调整到指定压力的超时时间
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private double _pumpBasePressure;
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private int _routineTimeOut;
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private int _pumpTimeOut;
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private Stopwatch _swTimer = new Stopwatch();
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public PMPumpRoutine(ModuleName module, PMModule pm1) : base(module, pm1)
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{
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Module = module.ToString();
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_pm1Module = pm1;
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Name = "PumpDown";
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_IoThrottle = DEVICE.GetDevice<IoThrottleValve2>($"{Module}.TV");
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_pmIoInterLock = DEVICE.GetDevice<IoInterLock>($"{Module}.PMInterLock");
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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_rotationCloseTimeout = SC.GetValue<int>($"PM.{Module}.RotationCloseTimeout");
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_pmPressureMaxDiff = SC.GetValue<double>($"PM.{Module}.ThrottlePressureMaxDiff");
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_throttleTimeout = SC.GetValue<int>($"PM.{Module}.ThrottlePressureTimeout");
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_pumpBasePressure = SC.GetValue<double>($"PM.{Module}.Pump.PumpBasePressure");
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_routineTimeOut = SC.GetValue<int>($"PM.{Module}.Pump.RoutineTimeOut");
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_pumpTimeOut = SC.GetValue<int>($"PM.{Module}.Pump.PumpTimeOut");
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if (!_pmIoInterLock.SetPMPumpRoutineRunning(true, out string reason))
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{
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EV.PostAlarmLog(Module, $"can not Pump,{reason}");
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return Result.FAIL;
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}
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_swTimer.Restart();
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Notify("Start");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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CheckRoutineTimeOut();
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//关闭V76,打开V75
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SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout);
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//旋转停止,加热停止
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SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut);
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SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout);
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//关闭V72,打开V25
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SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout);
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//打开V31,打开V32
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SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout);
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//打开V35,打开V36
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SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout);
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//关闭B/C/E/F/H/K 阀门
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SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
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//打开D/G 阀门
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SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
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//6、 M1-M17 设定为 default 值，所有 PC 设定为 default 值(PC1-PC9)
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SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All);
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SetMfcToDefaultByGroup((int)RoutineStep.SetM1toM17, MfcGroupName.M1toM17, 0);
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SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList);
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SetPcToDefault((int)RoutineStep.SetPC, _lstPcList);
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//7、 M18-M40（除 M30\M34\M39）） 3s ramp 到 default 值。。
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SetMfcToDefaultByGroup((int)RoutineStep.SetM18to40, MfcGroupName.M18toM40No303439, 3);
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//9、 打开 A Valves，打开 J valve。
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SetIoValueByGroup((int)RoutineStep.OpenGasIn1, IoGroupName.A, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupJ, IoGroupName.J, true, _IoValueOpenCloseTimeout);
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//10、 打开 EPV2，等待 3s, 打开 TV enable, 压力模式，伺服压力默认设定为 0mbar；
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SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
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TimeDelay((int)RoutineStep.TimeDelay5, 3);
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SetThrottleEnableAndWait((int)RoutineStep.SetTVEnable, _IoThrottle, 5);
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SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode, _IoThrottle, 5);
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SetThrottleToTargetAndNoWait((int)RoutineStep.SetTv1, _IoThrottle, _pumpBasePressure);
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//11、当蝶阀设定值 ramp 到 0 后，将 M18-M40（除 M30\M34\M39）） MFC 5s ramp 到0； 关闭 V87、 V97。
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SetMfcByGroup((int)RoutineStep.SetM18to40_1, MfcGroupName.M18toM40No303439, 0, 3);
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SetIoValueByGroup((int)RoutineStep.SetV87V97, IoGroupName.V87V97, false, _IoValueOpenCloseTimeout);
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//12、等待腔体压力到 Pump Base Pressure（可配置）， 蝶阀改为位置模式，开度设定 100%
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WaitChamberPressDownTo((int)RoutineStep.WaitTv1, _pumpBasePressure, _pumpTimeOut);
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SetThrottleToPositionMode((int)RoutineStep.SetTVPositionMode, _IoThrottle, _throttleTimeout);
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SetThrottleSetPosition((int)RoutineStep.SetTVPositionMax, _IoThrottle, 100, _throttleTimeout);
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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return Result.FAIL;
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}
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_pmIoInterLock.SetPMPumpRoutineRunning(false, out _);
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Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
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_swTimer.Stop();
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return Result.DONE;
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}
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public override void Abort()
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{
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_pmIoInterLock.SetPMPumpRoutineRunning(false, out _);
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PmDevice.SetRotationServo(0, 0);
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base.Abort();
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}
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private void CheckRoutineTimeOut()
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{
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if (_routineTimeOut > 10)
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{
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if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
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{
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EV.PostAlarmLog(Module, $"Routine TimeOut! over {_routineTimeOut} s");
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throw (new RoutineFaildException());
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}
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}
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}
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}
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}
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