543 lines
22 KiB
C#
543 lines
22 KiB
C#
using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Devices;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.DBCore;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.MFCs;
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using SicModules.PMs.Routines.Base;
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using System;
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using System.Collections.Generic;
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using System.Diagnostics;
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namespace SicModules.PMs.Routines
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{
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public class PMLeakCheckRoutine : PMBaseRoutine
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{
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private enum RoutineStep
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{
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RotationEnable,
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HeatEnable,
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VentPumpClose,
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ArSupply,
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SetGroupA,
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SetGroupB,
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SetGroupC,
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SetGroupE,
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SetGroupF,
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SetGroupH,
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SetGroupD,
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SetGroupG,
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SetGroupK,
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SetMFCMode,
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SetPCMode,
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SetM1toM17,
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SetPC,
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SetGroupJ,
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SetM291519to38,
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SetGasOut,
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SetTv,
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SetGasIn1, //V68
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OpenFinal1, //V91-96
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SetMfcFinal1, //M32-38
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SetMfc19to26,
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SetTVCloseMode,
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SetTvPositionToZero,
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SetGasIn2,
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SetGroupJOpen,
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SetM18toM40,
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SetM17M18,
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OpenFinal2,
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CloseFinal2,
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SetMfcFinal2,
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SetEPV1,
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SetEPV2,
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SetTvMode,
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SetTVEnable,
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SetTVPressMode,
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SetTv1,
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WaitTv1,
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Set0M18toM40,
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SetM18,
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SetTVPositionMode,
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SetTVPositionMode_1,
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SetTVPositionMax,
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SetTVPositionMax_1,
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SetTVPressMode1,
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SetM2TOM40Default,
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SetM2toM40_1,
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SetM18Default,
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SetM18_1,
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SetTvOpen,
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SetTvModeToPress,
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SetTVtoCurrent,
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RoutinePre,
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SetPressureUp,
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SetPressureDown,
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WaitPressureDown,
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WaitPressureUp,
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VentPumpOpen,
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PressureToMax,
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PressureToMin,
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StartLoop,
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EndLoop,
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SetMfc28to31,
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SetReactorPress,
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CloseFinal1,
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CloseFinanl2,
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CloseEPV2,
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SetTVCloseMode2,
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CLoseTvvvv,
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SetEPVVV2,
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CLoseEPV1,
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CheckPM1000,
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WaitPressUpTo1000,
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WaitPressUpTo1020,
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SetPressUpOrDown1,
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SetPressUpOrDown2,
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SetMfc28to40Special,
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WaitPmPressureUp,
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SetMfc28to40Default,
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SetV75,
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SetV76,
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SetV751,
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SetV761,
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SetPC567Close,
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SetPC567Mode,
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SetPC567Default,
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OpenEPV2,
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WaitPressUpTo20,
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SetMfc291519to38,
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WaitPressUpTo0,
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SetMfc291519to38ToDefault,
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WaitPressDownTo20,
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SetPmPressureTo20,
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CloseMfcFinal1,
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CloseMfcFinal2,
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CloseMfc2915,
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CheckFinal1Open,
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DoLeakCheck,
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CalcLeakCheck,
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SetTVClose,
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CloseTV,
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CloseV27,
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CloseV28,
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CloseV69,
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CloseV70,
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SetGroupV25,
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SetV31,
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SetV32,
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SetV35V36,
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CloseV68,
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SetV92V93V95,
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SetV94,
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SetV96,
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SetV68,
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SetM32M35M37,
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SetM36,
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SetM38,
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CloseM32M35M37,
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CloseM36,
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CloseM38,
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SetV103,
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SetV105,
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CloseGasIn1,
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SetTVCloseMode1,
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CLoseTV1,
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SetEPV2_1,
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SetEPV2_2,
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SetTVEnable_2,
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TimeDelay1,
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TimeDelay2,
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TimeDelay3,
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TimeDelay4,
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TimeDelay5,
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TimeDelay6,
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TimeDelay7,
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TimeDelay8,
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TimeDelay9,
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TimeDelay10,
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TimeDelay11,
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TimeDelay12,
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TimeDelay13,
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TimeDelay14,
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TimeDelay15,
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TimeDelay16,
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TimeDelay17,
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LoopSetTVPressMode1,
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LoopSetM18toM40,
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LoopSetTv1,
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LoopSet0M18toM40,
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LoopSetM18Default,
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LoopWaitTv1,
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LoopSetDefault_M18toM40, LoopSetTVCloseMode, LoopSetTvPositionToZero, LoopSetEPV2, LoopWaitPressureUp, LoopSetEPV2_2, LoopSet0_M18toM40, LoopSetTVEnable_1, LoopSetTVPressMode
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}
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enum LeakCheckType
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{
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ChamberOnly,
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ChamberAndGasline,
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ChamberAndGaslineToFacility,
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}
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private ModuleName moduleName;
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private IoThrottleValve2 _IoThrottle;
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private int _rotationCheckSpeed = 0; //设置旋转速度为0后检查是否转速低于此数值
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private int _rotationCloseTimeout; //旋转停止超时
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private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间
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private double _pressureMax; //Loop压力上限可设置600-800）
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private double _pressureMin; //Loop压力下限可设置 0-400）
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private int _pressureLoopCount; //Loop次数
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private int _pressureMinDelay;
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private int _pressureMaxDelay;
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private int _pressureMinTimeout;
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private int _pressureMaxTimeout;
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private int _IoValueOpenCloseTimeout = 10; //开关阀门超时时间
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private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了)
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private int _throttleTimeout; //蝶阀调整到指定压力的超时时间
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private int _paramContinuePumpTime;
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private int _paramLeakCheckTime;
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private double _beginPressure;
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private double _beginTime;
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private int _calTimes; //第几次计算LeakCheck的值（每60秒计算一次）
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private double _leakSpec;
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private int _routineTimeOut;
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//private int _EPV2OpenDelayTime = 9;
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private bool _useSettingValue = false;
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private Stopwatch _swTimer = new Stopwatch();
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public int ElapsedTime
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{
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get { return _swTimer.IsRunning ? (int)(_swTimer.ElapsedMilliseconds / 1000) : 0; }
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}
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public PMLeakCheckRoutine(ModuleName module, PMModule pm1) : base(module, pm1)
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{
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Module = module.ToString();
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Name = "Leak Check";
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_IoThrottle = DEVICE.GetDevice<IoThrottleValve2>($"{Module}.TV");
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}
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internal void Init(int pumpTime, int leakCheckTime)
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{
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_paramContinuePumpTime = pumpTime;
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_paramLeakCheckTime = leakCheckTime;
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_useSettingValue = true;
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}
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internal void Init()
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{
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_useSettingValue = false;
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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_swTimer.Restart();
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_rotationCloseTimeout = SC.GetValue<int>($"PM.{Module}.RotationCloseTimeout");
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_pmPressureMaxDiff = SC.GetValue<double>($"PM.{Module}.ThrottlePressureMaxDiff");
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_throttleTimeout = SC.GetValue<int>($"PM.{Module}.ThrottlePressureTimeout");
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_rotationCloseTimeout = SC.GetValue<int>($"PM.{Module}.RotationCloseTimeout");
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_pressureLoopCount = SC.GetValue<int>($"PM.{Module}.LeakCheck.CyclePurgeCount");
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_pressureMin = SC.GetValue<double>($"PM.{Module}.LeakCheck.PumpBasePressure");
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_pressureMinDelay = SC.GetValue<int>($"PM.{Module}.LeakCheck.PumpDelayTime");
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_pressureMinTimeout = SC.GetValue<int>($"PM.{Module}.LeakCheck.PumpTimeout");
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_pressureMax = SC.GetValue<double>($"PM.{Module}.LeakCheck.VentBasePressure");
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_pressureMaxDelay = SC.GetValue<int>($"PM.{Module}.LeakCheck.VentDelayTime");
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_pressureMaxTimeout = SC.GetValue<int>($"PM.{Module}.LeakCheck.VentTimeout");
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_routineTimeOut = SC.GetValue<int>($"PM.{Module}.LeakCheck.RoutineTimeOut");
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//_EPV2OpenDelayTime = SC.GetValue<int>($"PM.{Module}.TimeDelayAlterEPV2Open");
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if (!_useSettingValue)
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{
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_paramContinuePumpTime = SC.GetValue<int>($"PM.{Module}.LeakCheck.ContinuePumpTime");
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_paramLeakCheckTime = SC.GetValue<int>($"PM.{Module}.LeakCheck.LeakCheckDelayTime");
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}
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_leakSpec = SC.GetValue<double>($"PM.{Module}.LeakCheck.LeakSpec");
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if (!PmDevice.SetIOValueByGroup(IoGroupName.V70, false))
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{
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EV.PostAlarmLog(Module, "Can not close V70-1");
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return Result.FAIL;
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}
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Notify($"Start LoopCount:{_pressureLoopCount}");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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CheckRoutineTimeOut();
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//关闭V76,打开V75
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SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout);
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//旋转停止,加热停止
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SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut);
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SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout);
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//3、 关闭 V72(GasBox.Vent.Pump） 。
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SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout);
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//4、 打开 V31(H2.Supply)、 V32(N2Supply)。
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SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout);
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//5、 打开 V35(H2N2.Line1)、 V36(H2N2.Line2)，关闭 B/C/E/F/H/KValves,打开 D/G Valves； 打开 J valve。
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SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupA, IoGroupName.A, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupJ, IoGroupName.J, true, _IoValueOpenCloseTimeout);
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//6、 M1-M17 设定为 default 值，所有 PC 设定为 default 值(PC1-PC9)， M18-M40（除M30\M34\M39）） MFC 3s ramp 到 default 值。
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SetMfcToDefaultByGroup((int)RoutineStep.SetM1toM17, MfcGroupName.M1toM17, 0);
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SetPcToDefault((int)RoutineStep.SetPC, _lstPcList);
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SetMfcToDefaultByGroup((int)RoutineStep.SetM18toM40, MfcGroupName.M18toM40No303439, 3);
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//7、打开 EPV2，等待 3s, 打开 TV enable, 压力模式，伺服压力默认设定为 0mbar；
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SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
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TimeDelay((int)RoutineStep.TimeDelay1, 3);
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SetThrottleEnableAndWait((int)RoutineStep.SetTVEnable, _IoThrottle, 5);
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SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode, _IoThrottle, 5);
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SetThrottleToTargetAndNoWait((int)RoutineStep.SetTv1, _IoThrottle, _pressureMin);
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//8、当蝶阀设定值 ramp 到 0 后，将 M18-M40（除 M30\M34\M39）） MFC 3s ramp 到 0；
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SetMfcByGroup((int)RoutineStep.Set0M18toM40, MfcGroupName.M18toM40No303439, 0, 3);
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//9、等待腔体压力到 Pump Base Pressure（可配置），蝶阀改为位置模式，开度设定 100%
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WaitChamberPressDownTo((int)RoutineStep.WaitTv1, _pressureMin, _pressureMinTimeout);
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TimeDelay((int)RoutineStep.TimeDelay8, 3);
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SetThrottleToPositionMode((int)RoutineStep.SetTVPositionMode, _IoThrottle, _throttleTimeout);
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TimeDelay((int)RoutineStep.TimeDelay11, 3);
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SetThrottleSetPosition((int)RoutineStep.SetTVPositionMax, _IoThrottle, 100, _throttleTimeout);
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TimeDelay((int)RoutineStep.TimeDelay9, 3);
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//循环开始
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Loop((int)RoutineStep.StartLoop, _pressureLoopCount);
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//M18 - M40（除 M30\M34\M39）） MFC 3s ramp 到 default 值。
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//关闭蝶阀， 再关闭 EPV2，等待压力达到设定值，压力达到后，打开 EPV2
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//M18 - M40（除 M30\M34\M39）） MFC 5s ramp 到 0。
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//打开 TV enable, 压力模式，伺服压力默认设定为 0mbar;
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//等待压力到达 0（可配置）
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SetMfcToDefaultByGroup((int)RoutineStep.LoopSetDefault_M18toM40, MfcGroupName.M18toM40No303439, 3);
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SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown2, PressureUpOrDown.Uping);
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SetThrottleToCloseMode((int)RoutineStep.LoopSetTVCloseMode, _IoThrottle, 8);
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SetThrottleDisable((int)RoutineStep.LoopSetTvPositionToZero, _IoThrottle, 8);
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SetIoValueByGroup((int)RoutineStep.LoopSetEPV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout);
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WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.LoopWaitPressureUp, _IoThrottle, _pressureMax, _pressureMaxTimeout);
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SetIoValueByGroup((int)RoutineStep.LoopSetEPV2_2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
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SetMfcByGroup((int)RoutineStep.LoopSet0_M18toM40, MfcGroupName.M18toM40No303439, 0, 5);
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SetThrottleEnableAndWait((int)RoutineStep.LoopSetTVEnable_1, _IoThrottle, 5);
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SetThrottleToPressModeAndWait((int)RoutineStep.LoopSetTVPressMode, _IoThrottle, 5);
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SetThrottleToTargetAndNoWait((int)RoutineStep.LoopSetTv1, _IoThrottle, _pressureMin);
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WaitChamberPressDownTo((int)RoutineStep.LoopWaitTv1, _pressureMin, _pressureMinTimeout);
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EndLoop((int)RoutineStep.EndLoop);
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//11、 依次关闭 Final valves；
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//先 关 闭 V93 （ ChamberPurge.Final ）、 V94 （ RotationUpPurge.Final ）、 V95（ConfinementRing.Final）、 V96（HeaterWF.Final）；
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//再关闭 V87（ SHPurge.Final）、 V88（ OuterGas.Final）、 V89（ InnerGas.Final）、 V90（ MiddleGas.Final ）、 V91 （ OpticPurge.Final ）、 V92 （ GasRingPurge.Final ）、 V97（CarryGas.Final）；
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SetIoValueByGroup((int)RoutineStep.CloseFinal1, IoGroupName.Final1, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.CloseFinal2, IoGroupName.Final2, false, _IoValueOpenCloseTimeout);
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//12、延时一定时间后（参数配置）， 关闭蝶阀，再关闭 EPV2， 开始测漏记录腔体压力 P1（mbar）和时间 T1，测试时间 T（秒） 结束后， 记录腔体压力 P2 和时间 T2
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//计算腔体漏率
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//腔体漏率 =（P2 - P1） /（T2 - T1） *60
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//所得漏率与设定范围对比，小于范围，测漏成功，否则报错提示
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TimeDelay((int)RoutineStep.TimeDelay15, _paramContinuePumpTime);
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SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode2, _IoThrottle, 8);
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SetThrottleDisable((int)RoutineStep.CLoseTvvvv, _IoThrottle, 8);
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TimeDelay((int)RoutineStep.TimeDelay16, 1);
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SetIoValueByGroup((int)RoutineStep.SetEPVVV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout);
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//计算漏率
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DoLeakCheck((int)RoutineStep.DoLeakCheck, _paramLeakCheckTime);
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TimeDelay((int)RoutineStep.TimeDelay17, _paramLeakCheckTime);
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CalcLeakCheck((int)RoutineStep.CalcLeakCheck, _paramLeakCheckTime);
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//CalcLeackCheckPerMinute(_paramLeakCheckTime);
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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return Result.FAIL;
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}
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_swTimer.Stop();
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return Result.DONE;
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}
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public override void Abort()
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{
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//Stop($"{Module} leak check aborted");
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_swTimer.Stop();
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PmDevice._ioThrottleValve.StopRamp();
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PmDevice.SetMfcStopRamp(PmDevice.GetMfcListByGroupName(MfcGroupName.All));
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PmDevice.SetRotationServo(0, 0);
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base.Abort();
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}
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private void CheckRoutineTimeOut()
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{
|
||
if (_routineTimeOut > 10)
|
||
{
|
||
if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
|
||
{
|
||
EV.PostAlarmLog(Module, $"Routine TimeOut! over {_routineTimeOut} s");
|
||
throw (new RoutineFaildException());
|
||
}
|
||
}
|
||
}
|
||
|
||
public void DoLeakCheck(int id, double time)
|
||
{
|
||
Tuple<bool, Result> ret = Execute(id, () =>
|
||
{
|
||
Notify($"Keep pressure for {time} seconds");
|
||
|
||
_beginTime = _swTimer.ElapsedMilliseconds;
|
||
//_beginPressure = PmDevice.ChamberPressure;
|
||
_beginPressure = PmDevice._ioThrottleValve.PressureFeedback;
|
||
|
||
_calTimes = 1;
|
||
return true;
|
||
});
|
||
if (ret.Item1)
|
||
{
|
||
if (ret.Item2 == Result.FAIL)
|
||
{
|
||
throw (new RoutineFaildException());
|
||
}
|
||
else
|
||
throw (new RoutineBreakException());
|
||
}
|
||
}
|
||
|
||
public void CalcLeackCheckPerMinute(int time)
|
||
{
|
||
//大于LeakCheck时间,
|
||
if ((int)((_swTimer.ElapsedMilliseconds - _beginTime) / 1000) >= time)
|
||
{
|
||
int leakSecond = (int)((_swTimer.ElapsedMilliseconds - _beginTime) / 1000);
|
||
double endPressure = PmDevice.ChamberPressure;
|
||
double leakSpan = endPressure - _beginPressure;
|
||
double leakRate = (endPressure - _beginPressure) / (leakSecond / 60.0);
|
||
if (leakRate > _leakSpec)
|
||
{
|
||
LeakCheckDataRecorder.Add(time, (int)_beginPressure, (int)endPressure, leakRate, Result.FAIL.ToString(), "", Module);
|
||
EV.PostInfoLog(Module, $"Leak check result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2}mbar, end: {endPressure:F2}mbar, using {time} seconds, leak rate: {leakRate:F2}");
|
||
|
||
}
|
||
else
|
||
{
|
||
LeakCheckDataRecorder.Add(time, (int)_beginPressure, (int)endPressure, leakRate, Result.Succeed.ToString(), "", Module);
|
||
EV.PostInfoLog(Module, $"Leak check result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2}mbar, end: {endPressure:F2}mbar, using {time} seconds, leak rate: {leakRate:F2}");
|
||
|
||
}
|
||
}
|
||
else
|
||
{
|
||
if ((int)((_swTimer.ElapsedMilliseconds - _beginTime) / 1000) >= 60 * _calTimes)
|
||
{
|
||
_calTimes++;
|
||
int leakSecond = (int)((_swTimer.ElapsedMilliseconds - _beginTime) / 1000);
|
||
double endPressure = PmDevice.ChamberPressure;
|
||
double leakSpan = endPressure - _beginPressure;
|
||
double leakRate = (endPressure - _beginPressure) / (leakSecond / 60.0);
|
||
if (leakRate > _leakSpec)
|
||
{
|
||
EV.PostInfoLog(Module, $"Leak check Failed Count {_calTimes - 1}: using {leakSecond} seconds, leak rate: {leakRate:F2} ,Rate over {_leakSpec}");
|
||
|
||
throw (new RoutineFaildException());
|
||
}
|
||
EV.PostInfoLog(Module, $"Leak check Count {_calTimes - 1}: using {leakSecond} seconds, leak rate: {leakRate:F2}");
|
||
}
|
||
throw (new RoutineBreakException());
|
||
}
|
||
}
|
||
|
||
|
||
public void CalcLeakCheck(int id, int time)
|
||
{
|
||
Tuple<bool, Result> ret = Execute(id, () =>
|
||
{
|
||
//double endPressure = PmDevice.ChamberPressure;
|
||
double endPressure = PmDevice._ioThrottleValve.PressureFeedback;
|
||
double leakSpan = endPressure - _beginPressure;
|
||
double leakRate = (endPressure - _beginPressure) / (time / 60.0);
|
||
if (leakRate > _leakSpec)
|
||
{
|
||
LeakCheckDataRecorder.Add(time, (int)_beginPressure, (int)endPressure, leakRate, Result.FAIL.ToString(), "", Module);
|
||
|
||
EV.PostInfoLog(Module, $"Leak check result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2}mbar, end: {endPressure:F2}mbar, using {time} seconds, leak rate: {leakRate:F2}");
|
||
return false;
|
||
}
|
||
else
|
||
{
|
||
LeakCheckDataRecorder.Add(time, (int)_beginPressure, (int)endPressure, leakRate, Result.Succeed.ToString(), "", Module);
|
||
|
||
EV.PostInfoLog(Module, $"Leak check result: end at {DateTime.Now.ToString("HH:mm:ss")}, start: {_beginPressure:F2}mbar, end: {endPressure:F2}mbar, using {time} seconds, leak rate: {leakRate:F2}");
|
||
return true;
|
||
}
|
||
});
|
||
}
|
||
}
|
||
}
|