263 lines
10 KiB
C#
263 lines
10 KiB
C#
using System.Collections.Generic;
|
||
using System.Diagnostics;
|
||
using Aitex.Core.RT.Device;
|
||
using Aitex.Core.RT.Device.Devices;
|
||
using Aitex.Core.RT.Event;
|
||
using Aitex.Core.RT.Routine;
|
||
using Aitex.Core.RT.SCCore;
|
||
using MECF.Framework.Common.Equipment;
|
||
using SicModules.PMs.Routines.Base;
|
||
|
||
namespace SicModules.PMs.Routines
|
||
{
|
||
public class PMPumpRoutine : PMBaseRoutine
|
||
{
|
||
private enum RoutineStep
|
||
{
|
||
RotationEnable,
|
||
HeatEnable,
|
||
VentPumpClose,
|
||
ArSupply,
|
||
SetGroupA,
|
||
SetGroupB,
|
||
SetGroupC,
|
||
SetGroupE,
|
||
SetGroupF,
|
||
SetGroupH,
|
||
SetGroupD,
|
||
SetGroupG,
|
||
SetGroupK,
|
||
SetGroupJ,
|
||
|
||
SetM1toM17,
|
||
SetM17M18,
|
||
SetPC,
|
||
SetGroupI, //V87-96
|
||
SetM18,
|
||
SetM2to40,
|
||
SetM2to40_1,
|
||
MfcAll,
|
||
|
||
SetGasOut,
|
||
SetTv,
|
||
SetTv1,
|
||
WaitTv1,
|
||
|
||
SetGasIn1, //V65,V67,V68
|
||
OpenFinal1, //V91-96
|
||
SetMfcFinal1, //M32-38
|
||
|
||
SetGasIn2,
|
||
SetGroupJOpen,
|
||
|
||
OpenFinal2,
|
||
SetMfcFinal2,
|
||
|
||
PumpDownTimeout,
|
||
SetTvMode,
|
||
|
||
SetEPV1,
|
||
SetEPV2,
|
||
SetTVEnable,
|
||
SetTVPressMode,
|
||
SetTvPositionToZero,
|
||
SetMFCMode,
|
||
SetPCMode,
|
||
|
||
SetTvOpen,
|
||
SetTvModeToPress,
|
||
SetTVto1050,
|
||
OpenGasIn1,
|
||
CloseGasIn1,
|
||
CloseFinanl1,
|
||
CloseFinanl2,
|
||
SetGroupV38,
|
||
|
||
SetV76,
|
||
SetV75,
|
||
SetGroupV25,
|
||
SetV31,
|
||
SetV32,
|
||
SetV35V36,
|
||
SetV87V97,
|
||
SetV65,
|
||
SetV103,
|
||
SetV105,
|
||
SetTVPositionMode,
|
||
SetTVPositionMax,
|
||
|
||
CloseM32M35M37,
|
||
CloseM36,
|
||
CloseM38,
|
||
|
||
TimeDelay1,
|
||
TimeDelay2,
|
||
TimeDelay3,
|
||
TimeDelay4,
|
||
TimeDelay5,
|
||
TimeDelay6,
|
||
TimeDelay7,
|
||
TimeDelay8,
|
||
TimeDelay9,
|
||
TimeDelay10,
|
||
TimeDelay11,
|
||
TimeDelay12,
|
||
TimeDelay13,
|
||
TimeDelay14, SetM18to40, SetM18to40_1,
|
||
}
|
||
|
||
private PMModule _pm1Module;
|
||
private IoThrottleValve2 _IoThrottle;
|
||
private IoInterLock _pmIoInterLock;
|
||
|
||
private int _rotationCheckSpeed = 0; //设置旋转速度为0后检查是否转速低于此数值
|
||
private int _rotationCloseTimeout; //旋转停止超时
|
||
private int _IoValueOpenCloseTimeout = 10; //开关超时时间
|
||
private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间
|
||
|
||
private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了)
|
||
private int _throttleTimeout; //蝶阀调整到指定压力的超时时间
|
||
|
||
private double _pumpBasePressure;
|
||
private int _routineTimeOut;
|
||
private int _pumpTimeOut;
|
||
|
||
private Stopwatch _swTimer = new Stopwatch();
|
||
public PMPumpRoutine(ModuleName module, PMModule pm1) : base(module, pm1)
|
||
{
|
||
Module = module.ToString();
|
||
_pm1Module = pm1;
|
||
Name = "PumpDown";
|
||
|
||
_IoThrottle = DEVICE.GetDevice<IoThrottleValve2>($"{Module}.TV");
|
||
_pmIoInterLock = DEVICE.GetDevice<IoInterLock>($"{Module}.PMInterLock");
|
||
}
|
||
|
||
public override Result Start(params object[] objs)
|
||
{
|
||
Reset();
|
||
|
||
_rotationCloseTimeout = SC.GetValue<int>($"PM.{Module}.RotationCloseTimeout");
|
||
_pmPressureMaxDiff = SC.GetValue<double>($"PM.{Module}.ThrottlePressureMaxDiff");
|
||
_throttleTimeout = SC.GetValue<int>($"PM.{Module}.ThrottlePressureTimeout");
|
||
|
||
_pumpBasePressure = SC.GetValue<double>($"PM.{Module}.Pump.PumpBasePressure");
|
||
_routineTimeOut = SC.GetValue<int>($"PM.{Module}.Pump.RoutineTimeOut");
|
||
_pumpTimeOut = SC.GetValue<int>($"PM.{Module}.Pump.PumpTimeOut");
|
||
|
||
if (!_pmIoInterLock.SetPMPumpRoutineRunning(true, out string reason))
|
||
{
|
||
EV.PostAlarmLog(Module, $"can not Pump,{reason}");
|
||
return Result.FAIL;
|
||
}
|
||
_swTimer.Restart();
|
||
Notify("Start");
|
||
return Result.RUN;
|
||
}
|
||
|
||
public override Result Monitor()
|
||
{
|
||
try
|
||
{
|
||
CheckRoutineTimeOut();
|
||
|
||
//关闭V76,打开V75
|
||
SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout);
|
||
SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout);
|
||
|
||
//旋转停止,加热停止
|
||
SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut);
|
||
SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout);
|
||
|
||
//关闭V72,打开V25
|
||
SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout);
|
||
SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout);
|
||
|
||
//打开V31,打开V32
|
||
SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout);
|
||
SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout);
|
||
|
||
//打开V35,打开V36
|
||
SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout);
|
||
|
||
//关闭B/C/E/F/H/K 阀门
|
||
SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout);
|
||
SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout);
|
||
SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout);
|
||
SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout);
|
||
SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
|
||
SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
|
||
|
||
//打开D/G 阀门
|
||
SetIoValueByGroup((int)RoutineStep.SetGroupA, IoGroupName.A, true, _IoValueOpenCloseTimeout);
|
||
SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
|
||
SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
|
||
|
||
//6、 M1-M17 设定为 default 值，所有 PC 设定为 default 值(PC1-PC9)
|
||
SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All);
|
||
SetMfcToDefaultByGroup((int)RoutineStep.SetM1toM17, MfcGroupName.M1toM17, 0);
|
||
SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList);
|
||
SetPcToDefault((int)RoutineStep.SetPC, _lstPcList);
|
||
|
||
//7、 M18-M40（除 M30\M34\M39）） 3s ramp 到 default 值。。
|
||
SetMfcToDefaultByGroup((int)RoutineStep.SetM18to40, MfcGroupName.M18toM40No303439, 3);
|
||
|
||
//9、 打开 A Valves，打开 J valve。
|
||
SetIoValueByGroup((int)RoutineStep.OpenGasIn1, IoGroupName.A, true, _IoValueOpenCloseTimeout);
|
||
SetIoValueByGroup((int)RoutineStep.SetGroupJ, IoGroupName.J, true, _IoValueOpenCloseTimeout);
|
||
|
||
//10、 打开 EPV2，等待 3s, 打开 TV enable, 压力模式，伺服压力默认设定为 0mbar；
|
||
SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
|
||
TimeDelay((int)RoutineStep.TimeDelay5, 3);
|
||
SetThrottleEnableAndWait((int)RoutineStep.SetTVEnable, _IoThrottle, 5);
|
||
SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode, _IoThrottle, 5);
|
||
SetThrottleToTargetAndNoWait((int)RoutineStep.SetTv1, _IoThrottle, _pumpBasePressure);
|
||
|
||
//11、当蝶阀设定值 ramp 到 0 后，将 M18-M40（除 M30\M34\M39）） MFC 5s ramp 到0； 关闭 V87、 V97。
|
||
SetMfcByGroup((int)RoutineStep.SetM18to40_1, MfcGroupName.M18toM40No303439, 0, 3);
|
||
SetIoValueByGroup((int)RoutineStep.SetV87V97, IoGroupName.V87V97, false, _IoValueOpenCloseTimeout);
|
||
|
||
//12、等待腔体压力到 Pump Base Pressure（可配置）， 蝶阀改为位置模式，开度设定 100%
|
||
WaitChamberPressDownTo((int)RoutineStep.WaitTv1, _pumpBasePressure, _pumpTimeOut);
|
||
SetThrottleToPositionMode((int)RoutineStep.SetTVPositionMode, _IoThrottle, _throttleTimeout);
|
||
SetThrottleSetPosition((int)RoutineStep.SetTVPositionMax, _IoThrottle, 100, _throttleTimeout);
|
||
|
||
}
|
||
catch (RoutineBreakException)
|
||
{
|
||
return Result.RUN;
|
||
}
|
||
catch (RoutineFaildException)
|
||
{
|
||
return Result.FAIL;
|
||
}
|
||
|
||
_pmIoInterLock.SetPMPumpRoutineRunning(false, out _);
|
||
Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
|
||
_swTimer.Stop();
|
||
|
||
return Result.DONE;
|
||
}
|
||
|
||
public override void Abort()
|
||
{
|
||
_pmIoInterLock.SetPMPumpRoutineRunning(false, out _);
|
||
PmDevice.SetRotationServo(0, 0);
|
||
|
||
base.Abort();
|
||
}
|
||
|
||
private void CheckRoutineTimeOut()
|
||
{
|
||
if (_routineTimeOut > 10)
|
||
{
|
||
if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
|
||
{
|
||
EV.PostAlarmLog(Module, $"Routine TimeOut! over {_routineTimeOut} s");
|
||
throw (new RoutineFaildException());
|
||
}
|
||
}
|
||
}
|
||
}
|
||
}
|