733 lines
118 KiB
XML
733 lines
118 KiB
XML
<?xml version="1.0" encoding="utf-8"?>
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<DeviceModelDefine type="Sic" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
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<IoTCs classType="Aitex.Core.RT.Device.Devices.IoTC" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoTC id="TC1" display="TC1" schematicId="TC1" isDBSaveTemp="true" aioType="float" aiL1WorkingOPFeedBack="AI_PSUInnerWorkingOP" aiL2WorkingOPFeedBack="AI_PSUMiddleWorkingOP" aiL3WorkingOPFeedBack="AI_PSUOuterWorkingOP" aiL1PVFeedBack="AI_PSUInnerPV" aiL2PVFeedBack="AI_PSUMiddlePV" aiL3PVFeedBack="AI_PSUOuterPV" diL1TempHighAlarmFeedBack="DI_PSUInnerTempHAlarm" diL2TempHighAlarmFeedBack="DI_PSUMiddleTempHAlarm" diL3TempHighAlarmFeedBack="DI_PSUOuterTempHAlarm" diL1TempLowAlarmFeedBack="DI_PSUInnerTempLAlarm" diL2TempLowAlarmFeedBack="DI_PSUMiddleTempLAlarm" diL3TempLowAlarmFeedBack="DI_PSUOuterTempLAlarm" aoHeaterModeSetPoint="AO_PSUHeaterMode" aoPowerRefSetPoint="AO_PSUPowerRef" aoL1RatioSetPoint="AO_PSUInnerRatio" aoL2RatioSetPoint="AO_PSUMiddleRatio" aoL3RatioSetPoint="AO_PSUOuterRatio" aoL1RatedSetPoint="AO_PSUInnerRatedValue" aoL2RatedSetPoint="AO_PSUMiddleRatedValue" aoL3RatedSetPoint="AO_PSUOuterRatedValue" aoL1LoopModeSetPoint="AO_PSUInnerLoopMode" aoL2LoopModeSetPoint="AO_PSUMiddleLoopMode" aoL3LoopModeSetPoint="AO_PSUOuterLoopMode" aoL1TargetSPSetPoint="AO_PSUInnerTargetSP" aoL2TargetSPSetPoint="AO_PSUMiddleTargetSP" aoL3TargetSPSetPoint="AO_PSUOuterTargetSP" aoL1TargetOPSetPoint="AO_PSUInnerTargetOP" aoL2TargetOPSetPoint="AO_PSUMiddleTargetOP" aoL3TargetOPSetPoint="AO_PSUOuterTargetOP" aoPIDLimitLower="AO_PIDLimitLower" aoPIDLimitUpper="AO_PIDLimitUpper" aoPIDRateLimit="AO_PIDRateLimit" aoL1InputTempSetPoint="AO_PSUInnerTargetSP" aoL2InputTempSetPoint="AO_PSUMiddleTargetSP" aoL3InputTempSetPoint="AO_PSUOuterTargetSP" aoTCPyroModeSetPoint="AO_PSUTCPyroMode" aoL1VoltageLimited="AO_PSUInnerVoltageLimited" aoL2VoltageLimited="AO_PSUMiddleVoltageLimited" aoL3VoltageLimited="AO_PSUOuterVoltageLimited" aoL1TempHighLimitSetPoint="AO_PSUInnerTempHighLimit" aoL2TempHighLimitSetPoint="AO_PSUMiddleTempHighLimit" aoL3TempHighLimitSetPoint="AO_PSUOuterTempHighLimit" aoL1TempLowLimitSetPoint="AO_PSUInnerTempLowLimit" aoL2TempLowLimitSetPoint="AO_PSUMiddleTempLowLimit" aoL3TempLowLimitSetPoint="AO_PSUOuterTempLowLimit" aiTtempCtrlTCIN="AI_PSUTC" aoPSU1Y="AO_PSU1Y" aoPSU2Y="AO_PSU2Y" aoPSU3Y="AO_PSU3Y"
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diPSUInnerHeaterEnable="DI_InnerHeaterEnableFB"
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diPSUMiddleHeaterEnable="DI_MiddleHeaterEnableFB"
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diPSUOuterHeaterEnable="DI_OuterHeaterEnableFB"
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diSCRUpHeaterEnable="DI_SCR1Status"
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diSCRMiddleHeaterEnable="DI_SCR2Status"
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diSCRDownHeaterEnable="DI_SCR3Status"
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aoPLCTargetOPLowLimit="AO_PLCTargetOPLowLimit" aoPLCTargetOPUpLimit="AO_PLCTargetOPUpLimit"
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doPLCTempFilterEN="DO_PLCTempFilterEN" doPLCTargetOPCtrlEN="DO_PLCTargetOPCtrlEN" />
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<IoTC id="TC2" display="TC2" schematicId="TC2" isDBSaveTemp="false" aioType="float" aiL1WorkingOPFeedBack="AI_SCRUpperWorkingOP" aiL2WorkingOPFeedBack="AI_SCRMiddleWorkingOP" aiL3WorkingOPFeedBack="AI_SCRLowerWorkingOP" aiL1PVFeedBack="AI_SCRUpperPV" aiL2PVFeedBack="AI_SCRMiddlePV" aiL3PVFeedBack="AI_SCRLowerPV" diL1TempHighAlarmFeedBack="DI_SCRUpperTempHAlarm" diL2TempHighAlarmFeedBack="DI_SCRMiddleTempHAlarm" diL3TempHighAlarmFeedBack="DI_SCRLowerTempHAlarm" diL1TempLowAlarmFeedBack="DI_SCRUpperTempLAlarm" diL2TempLowAlarmFeedBack="DI_SCRMiddleTempLAlarm" diL3TempLowAlarmFeedBack="DI_SCRLowerTempLAlarm" aoHeaterModeSetPoint="AO_SCRHeaterMode" aoPowerRefSetPoint="AO_SCRPowerRef" aoL1RatioSetPoint="AO_SCRUpperRatio" aoL2RatioSetPoint="AO_SCRMiddleRatio" aoL3RatioSetPoint="AO_SCRLowerRatio" aoL1RatedSetPoint="AO_SCRUpperRatedValue" aoL2RatedSetPoint="AO_SCRMiddleRatedValue" aoL3RatedSetPoint="AO_SCRLowerRatedValue" aoL1LoopModeSetPoint="AO_SCRUpperLoopMode" aoL2LoopModeSetPoint="AO_SCRMiddleLoopMode" aoL3LoopModeSetPoint="AO_SCRLowerLoopMode" aoL1TargetSPSetPoint="AO_SCRUpperTargetSP" aoL2TargetSPSetPoint="AO_SCRMiddleTargetSP" aoL3TargetSPSetPoint="AO_SCRLowerTargetSP" aoL1TargetOPSetPoint="AO_SCRUpperTargetOP" aoL2TargetOPSetPoint="AO_SCRMiddleTargetOP" aoL3TargetOPSetPoint="AO_SCRLowerTargetOP" aoPIDLimitLower="AO_SCRUpperRecipeValue" aoPIDLimitUpper="AO_SCRMiddleRecipeValue" aoPIDRateLimit="AO_SCRLowerRecipeValue" aoL1InputTempSetPoint="AO_SCRUpperTargetSP" aoL2InputTempSetPoint="AO_SCRMiddleTargetSP" aoL3InputTempSetPoint="AO_SCRLowerTargetSP" aoTCPyroModeSetPoint="AO_SCRTCPyroMode" aoL1VoltageLimited="AO_SCRUpperVoltageLimited" aoL2VoltageLimited="AO_SCRMiddleVoltageLimited2" aoL3VoltageLimited="AO_SCRLowerVoltageLimited" aoL1TempHighLimitSetPoint="AO_SCRUpperTempHighLimit" aoL2TempHighLimitSetPoint="AO_SCRMiddleTempHighLimit" aoL3TempHighLimitSetPoint="AO_SCRLowerTempHighLimit" aoL1TempLowLimitSetPoint="AO_SCRUpperTempLowLimit" aoL2TempLowLimitSetPoint="AO_SCRMiddleTempLowLimit" aoL3TempLowLimitSetPoint="AO_SCRLowerTempLowLimit" aiTtempCtrlTCIN="AI_SCRTC"
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diPSUInnerHeaterEnable="DI_InnerHeaterEnableFB"
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diPSUMiddleHeaterEnable="DI_MiddleHeaterEnableFB"
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diPSUOuterHeaterEnable="DI_OuterHeaterEnableFB"
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diSCRUpHeaterEnable="DI_SCR1Status"
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diSCRMiddleHeaterEnable="DI_SCR2Status"
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diSCRDownHeaterEnable="DI_SCR3Status"/>
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</IoTCs>
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<IoOmronTemps classType="Aitex.Core.RT.Device.Devices.IoOmronTemp" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoTC id="OmronTemp" display="OmronTemp" schematicId="OmronTemp" aioType="float" aoCH1="" aoCH2="" aoCH3="" aoCH4="" aoCH5="" aoCH6="" aoCH7="" aoCH8="" aoCH9="" aoCH10="" aoCH11="" aoCH12="" doLineHeaterEnable="DO_LineHeaterEnable" />
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</IoOmronTemps>
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<IoPSUs classType="Aitex.Core.RT.Device.Devices.IoPSU" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoPSU id="PSU1" display="PSU1" schematicId="PSU1" aioType="float"
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scBasePath="PM.{module}.Heater" scResLimitMax="PSU1ResistanceMax"
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diPSUCommunicationError="DI_PSUdpCommunicationError" diSCRCommunicationError="DI_SCRTCDPCommunicationError"
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aiOutputVoltage="AI_PSU1OutputVoltage" aiOutputArms="AI_PSU1OutputArms" aiOutputPower="AI_PSU1OutputPower" aiSimVoltage="AI_PSU1SimVoltage" aiSimArms="AI_PSU1SimArms" doStatus="DO_PSU1Enable" doReset="DO_PSU1Reset" aoConstant="AO_PSU1Constant" diStatus="DI_InnerHeaterEnableFB" diAlarm="DI_PSU1Alarm" AlarmText="Alarm66 PSU1 Alarm[DI-320]" diCommunicationError="DI_PSU1dpCommunicationError" commAlarmText="" doHeatEnable="DO_HeaterEnable" diHeatEnable="DI_PSUEnableFB" doRelatedEnable="DO_InnerHeaterEnable" />
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<IoPSU id="PSU2" display="PSU2" schematicId="PSU2" aioType="float"
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scBasePath="PM.{module}.Heater" scResLimitMax="PSU2ResistanceMax"
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aoOutputLimitHigh="AO_PSU2OutputLimitHigh"
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aoOutputLimitLow="AO_PSU2OutputLimitLow"
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diPSUCommunicationError="DI_PSUdpCommunicationError" diSCRCommunicationError="DI_SCRTCDPCommunicationError"
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aiOutputVoltage="AI_PSU2OutputVoltage" aiOutputArms="AI_PSU2OutputArms" aiOutputPower="AI_PSU2OutputPower" aiSimVoltage="AI_PSU2SimVoltage" aiSimArms="AI_PSU2SimArms" doStatus="DO_PSU2Enable" doReset="DO_PSU2Reset" aoConstant="AO_PSU2Constant" diStatus="DI_MiddleHeaterEnableFB" diAlarm="DI_PSU2Alarm" AlarmText="Alarm67 PSU2 Alarm[DI-321]" diCommunicationError="DI_PSU2dpCommunicationError" commAlarmText="" doHeatEnable="DO_HeaterEnable" diHeatEnable="DI_PSUEnableFB" doRelatedEnable="DO_MiddleHeaterEnable" />
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<IoPSU id="PSU3" display="PSU3" schematicId="PSU3" aioType="float"
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scBasePath="PM.{module}.Heater" scResLimitMax="PSU3ResistanceMax"
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diPSUCommunicationError="DI_PSUdpCommunicationError" diSCRCommunicationError="DI_SCRTCDPCommunicationError"
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aiOutputVoltage="AI_PSU3OutputVoltage" aiOutputArms="AI_PSU3OutputArms" aiOutputPower="AI_PSU3OutputPower" iSimVoltage="AI_PSU3SimVoltage" aiSimArms="AI_PSU3SimArms" doStatus="DO_PSU3Enable" doReset="DO_PSU3Reset" aoConstant="AO_PSU3Constant" diStatus="DI_OuterHeaterEnableFB" diAlarm="DI_PSU3Alarm" AlarmText="Alarm68 PSU3 Alarm[DI-322]" diCommunicationError="DI_PSU3dpCommunicationError" commAlarmText="" doHeatEnable="DO_HeaterEnable" diHeatEnable="DI_PSUEnableFB" doRelatedEnable="DO_OuterHeaterEnable" />
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</IoPSUs>
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<IoSCRs classType="Aitex.Core.RT.Device.Devices.IoSCR" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoSCR id="SCR1" display="SCR1" schematicId="SCR1" aioType="float"
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scBasePath="PM.{module}.Heater" scResLimitMax="SCR1ResistanceMax"
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diPSUCommunicationError="DI_PSUdpCommunicationError" diSCRCommunicationError="DI_SCRTCDPCommunicationError"
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aiVoltage="AI_SCR1Voltage" aiArms="AI_SCR1Arms" aiPower="AI_SCR1Power" diStatus="DI_SCR1Status" doReset="DO_SCR1Reset" doStatus="DO_SCR1Enable" diAlarm="DI_SCR1Alarm" AlarmText="" />
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<IoSCR id="SCR2" display="SCR2" schematicId="SCR2" aioType="float"
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scBasePath="PM.{module}.Heater" scResLimitMax="SCR2ResistanceMax"
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diPSUCommunicationError="DI_PSUdpCommunicationError" diSCRCommunicationError="DI_SCRTCDPCommunicationError"
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aiVoltage="AI_SCR2Voltage" aiArms="AI_SCR2Arms" aiPower="AI_SCR2Power" diStatus="DI_SCR2Status" doReset="DO_SCR2Reset" doStatus="DO_SCR2Enable" diAlarm="DI_SCR2Alarm" AlarmText="" />
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<IoSCR id="SCR3" display="SCR3" schematicId="SCR3" aioType="float"
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scBasePath="PM.{module}.Heater" scResLimitMax="SCR3ResistanceMax"
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diPSUCommunicationError="DI_PSUdpCommunicationError" diSCRCommunicationError="DI_SCRTCDPCommunicationError"
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aiVoltage="AI_SCR3Voltage" aiArms="AI_SCR3Arms" aiPower="AI_SCR3Power" diStatus="DI_SCR3Status" doReset="DO_SCR3Reset" doStatus="DO_SCR3Enable" diAlarm="DI_SCR3Alarm" AlarmText="" />
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</IoSCRs>
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<IoPSUPowers classType="Aitex.Core.RT.Device.Devices.PSUPowerDetection" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoPSUPower id="PSU1Power" display="PSU1Power" schematicId="PSU1Power" aioType="float" aiPower="AI_PSU1OutputPower" scBasePath="PM.{module}.PowerDetection"/>
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<IoPSUPower id="PSU2Power" display="PSU2Power" schematicId="PSU2Power" aioType="float" aiPower="AI_PSU2OutputPower" scBasePath="PM.{module}.PowerDetection"/>
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<IoPSUPower id="PSU3Power" display="PSU3Power" schematicId="PSU3Power" aioType="float" aiPower="AI_PSU3OutputPower" scBasePath="PM.{module}.PowerDetection"/>
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<IoPSUPower id="SCR1Power" display="SCR1Power" schematicId="SCR1Power" aioType="float" aiPower="AI_SCR1Power" scBasePath="PM.{module}.PowerDetection"/>
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<IoPSUPower id="SCR2Power" display="SCR2Power" schematicId="SCR2Power" aioType="float" aiPower="AI_SCR2Power" scBasePath="PM.{module}.PowerDetection"/>
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<IoPSUPower id="SCR3Power" display="SCR3Power" schematicId="SCR3Power" aioType="float" aiPower="AI_SCR3Power" scBasePath="PM.{module}.PowerDetection"/>
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</IoPSUPowers>
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<IoPlcProcessAborts classType="Aitex.Core.RT.Device.Devices.IoPlcProcessAbort" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoPlcProcessAbort module="" id="IoPlcProcessAbort" display="IoPlcProcessAbort" schematicId="IoPlcProcessAbort" diAbortProcessRun="DI_AbortProcessRunning" doAbortProcessInterrupt="DO_AbortProcessInterrupt" doAbortProcessBuzzerOFF="DO_AbortProcessBuzzerOFF"/>
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</IoPlcProcessAborts>
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<IoHeats classType="Aitex.Core.RT.Device.Devices.IoHeat" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoHeat module="" id="PMHeatEnable" display="HeatEnable" schematicId="HeatEnable" diEnable="DI_PSUEnableFB" doEnable="DO_HeaterEnable" />
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</IoHeats>
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<IoValves classType="Aitex.Core.RT.Device.Devices.IoValve" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoValve id="V18" display="V18" schematicId="V18" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoCO6CarrierOutletFB(V18)" doOpen="DO_MoCO6CarrierOutlet(V18)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V18s" display="V18s" schematicId="V18s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoCO6CarrierOutletFB(V18)" doOpen="DO_MoCO6CarrierOutlet(V18)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V19" display="V19" schematicId="V19" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_MoCO6BypassFB(V19)" doOpen="DO_MoCO6Bypass(V19)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V20" display="V20" schematicId="V20" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoCO6InOutLeakTestFB(V20)" doOpen="DO_MoCO6InOutLeakTest(V20)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V20s" display="V20s" schematicId="V20s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoCO6InOutLeakTestFB(V20)" doOpen="DO_MoCO6InOutLeakTest(V20)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V21" display="V21" schematicId="V21" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoResrvCarrierOutletFB(V21)" doOpen="DO_MoResrvCarrierOutlet(V21)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V21s" display="V21s" schematicId="V21s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoResrvCarrierOutletFB(V21)" doOpen="DO_MoResrvCarrierOutlet(V21)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V22" display="V22" schematicId="V22" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_MoResrvBypassFB(V22)" doOpen="DO_MoResrvBypass(V22)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V25" display="V25" schematicId="V25" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SideLeakIsolateFB(V25)" doOpen="DO_SideLeakIsolate(V25)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V27" display="V27" schematicId="V27" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PMLeakTestIsolateFB(V27)" doOpen="DO_PMLeakTestIsolate(V27)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V23" display="V23" schematicId="V23" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoResrvInoutLeakTestFB(V23)" doOpen="DO_MoResrvInoutLeakTest(V23)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V23s" display="V23s" schematicId="V23s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoResrvInoutLeakTestFB(V23)" doOpen="DO_MoResrvInoutLeakTest(V23)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V31" display="V31" schematicId="V31" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2InletCutOffFB(V31)" doOpen="DO_H2InletCutOff(V31)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V32" display="V32" schematicId="V32" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_N2InletCutOffFB(V32)" doOpen="DO_N2InletCutOff(V32)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V33" display="V33" schematicId="V33" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SHH2ArSupplyFB(V33)" doOpen="DO_SHH2ArSupply(V33)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V33s" display="V33s" schematicId="V33s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SHH2ArSupplyFB(V33)" doOpen="DO_SHH2ArSupply(V33)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V35" display="V35" schematicId="V35" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PushGasSupplyFB(V35)" doOpen="DO_PushGasSupply(V35)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V36" display="V36" schematicId="V36" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_RunVentGasSupplyFB(V36)" doOpen="DO_RunVentGasSupply(V36)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V37" display="V37" schematicId="V37" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_O2CarrierSourceFB(V37)" doOpen="DO_O2CarrierSource(V37)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V37s" display="V37s" schematicId="V37s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_O2CarrierSourceFB(V37)" doOpen="DO_O2CarrierSource(V37)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V39" display="V39" schematicId="V39" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoCO6RunVentFB(V39)" doOpen="DO_MoCO6RunVent(V39)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V39s" display="V39s" schematicId="V39s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_MoCO6RunVentFB(V39)" doOpen="DO_MoCO6RunVent(V39)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V40" display="V40" schematicId="V40" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MoResrvRunVentFB(V40)" doOpen="DO_MoResrvRunVent(V40)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V40s" display="V40s" schematicId="V40s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_MoResrvRunVentFB(V40)" doOpen="DO_MoResrvRunVent(V40)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V41" display="V41" schematicId="V41" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6RunFB(V41)" doOpen="DO_WCO6Run(V41)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V42" display="V42" schematicId="V42" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_WCO6VentFB(V42)" doOpen="DO_WCO6Vent(V42)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V43" display="V43" schematicId="V43" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6CarrierFB(V43)" doOpen="DO_WCO6Carrier(V43)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V43s" display="V43s" schematicId="V43s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6CarrierFB(V43)" doOpen="DO_WCO6Carrier(V43)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V45" display="V45" schematicId="V45" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_WCO6BypassFB(V45)" doOpen="DO_WCO6Bypass(V45)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V46" display="V46" schematicId="V46" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6InLeakTestFB(V46)" doOpen="DO_WCO6InLeakTest(V46)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V46s" display="V46s" schematicId="V46s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_WCO6InLeakTestFB(V46)" doOpen="DO_WCO6InLeakTest(V46)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V47" display="V47" schematicId="V47" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_O2RunVentFB(V47)" doOpen="DO_O2RunVent(V47)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V47s" display="V47s" schematicId="V47s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_O2RunVentFB(V47)" doOpen="DO_O2RunVent(V47)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V48" display="V48" schematicId="V48" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2CarrierFB(V48)" doOpen="DO_CS2Carrier(V48)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V48s" display="V48s" schematicId="V48s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2CarrierFB(V48)" doOpen="DO_CS2Carrier(V48)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V49" display="V49" schematicId="V49" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_CS2BypassFB(V49)" doOpen="DO_CS2Bypass(V49)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V50" display="V50" schematicId="V50" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2InOutLeakTestFB(V50)" doOpen="DO_CS2InOutLeakTest(V50)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V50s" display="V50s" schematicId="V50s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2InOutLeakTestFB(V50)" doOpen="DO_CS2InOutLeakTest(V50)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V51" display="V51" schematicId="V51" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SSourceCarrierFB(V51)" doOpen="DO_H2SSourceCarrier(V51)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V51s" display="V51s" schematicId="V51s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2SSourceCarrierFB(V51)" doOpen="DO_H2SSourceCarrier(V51)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V52" display="V52" schematicId="V52" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SeSourceCarrierFB(V52)" doOpen="DO_H2SeSourceCarrier(V52)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V52s" display="V52s" schematicId="V52s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2SeSourceCarrierFB(V52)" doOpen="DO_H2SeSourceCarrier(V52)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V53" display="V53" schematicId="V53" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CS2RunVentFB(V53)" doOpen="DO_CS2RunVent(V53)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V53s" display="V53s" schematicId="V53s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_CS2RunVentFB(V53)" doOpen="DO_CS2RunVent(V53)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V54" display="V54" schematicId="V54" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SRunVentFB(V54)" doOpen="DO_H2SRunVent(V54)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V54s" display="V54s" schematicId="V54s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2SRunVentFB(V54)" doOpen="DO_H2SRunVent(V54)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V55" display="V55" schematicId="V55" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SeRunFB(V55)" doOpen="DO_H2SeRun(V55)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V56" display="V56" schematicId="V56" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SeVentFB(V56)" doOpen="DO_H2SeVent(V56)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V58" display="V58" schematicId="V58" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SO2SourceCarrierFB(V58)" doOpen="DO_SO2SourceCarrier(V58)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V58s" display="V58s" schematicId="V58s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SO2SourceCarrierFB(V58)" doOpen="DO_SO2SourceCarrier(V58)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V59" display="V59" schematicId="V59" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SO2RunVentFB(V59)" doOpen="DO_SO2RunVent(V59)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V59s" display="V59s" schematicId="V59s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SO2RunVentFB(V59)" doOpen="DO_SO2RunVent(V59)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V60" display="V60" schematicId="V60" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SO2VentFB(V60)" doOpen="DO_SO2Vent(V60)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V61" display="V61" schematicId="V61" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_Run1MoWFB(V61)" doOpen="DO_Run1MoW(V61)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V62" display="V62" schematicId="V62" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_Run2SSeFB(V62)" doOpen="DO_Run2SSe(V62)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V63" display="V63" schematicId="V63" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_Run3O2SO2FB(V63)" doOpen="DO_Run3O2SO2(V63)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V66" display="V66" schematicId="V66" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SHPurgeH2FB(V66)" doOpen="DO_SHPurgeH2(V66)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V67" display="V67" schematicId="V67" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SHPurgeN2FB(V67)" doOpen="DO_SHPurgeN2(V67)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V68" display="V68" schematicId="V68" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_PMPurgeN2FB(V68)" doOpen="DO_PMPurgeN2(V68)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V69" display="V69" schematicId="V69" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SrcLeakTestPreFilterFB(V69)" doOpen="DO_SrcLeakTestPreFilter(V69)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V70" display="V70" schematicId="V70" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PMTMBalanceFB(V70)" doOpen="DO_PMTMBalance(V70)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V72" display="V72" schematicId="V72" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_VentGasDumpFB(V72)" doOpen="DO_VentGasDump(V72)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V73" display="V73" schematicId="V73" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SrcLeakTestPrePumpFB(V73)" doOpen="DO_SrcLeakTestPrePump(V73)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V74" display="V74" schematicId="V74" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_GasboxLeakTestFB(V74)" doOpen="DO_GasboxLeakTest(V74)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V75" display="V75" schematicId="V75" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_DORVacuumFB(V75)" doOpen="DO_DORVacuum(V75)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V76" display="V76" schematicId="V76" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_DORPressureReliefFB(V76)" doOpen="DO_DORPressureRelief(V76)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V87" display="V87" schematicId="V87" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalSHPurgeFB(V87)" doOpen="DO_FinalSHPurge(V87)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V88" display="V88" schematicId="V88" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalOuterGasFB(V88)" doOpen="DO_FinalOuterGas(V88)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V89" display="V89" schematicId="V89" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalInnerGasFB(V89)" doOpen="DO_FinalInnerGas(V89)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V90" display="V90" schematicId="V90" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalMiddleGasFB(V90)" doOpen="DO_FinalMiddleGas(V90)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V91" display="V91" schematicId="V91" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalOpticPurgeFB(V91)" doOpen="DO_FinalOpticPurge(V91)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V92" display="V92" schematicId="V92" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalGasRingFB(V92)" doOpen="DO_FinalGasRing(V92)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V93" display="V93" schematicId="V93" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalChamberPurgeFB(V93)" doOpen="DO_FinalChamberPurge(V93)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V94" display="V94" schematicId="V94" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalRotationPurgeFB(V94)" doOpen="DO_FinalRotationPurge(V94)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V95" display="V95" schematicId="V95" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalShutterPurgeFB(V95)" doOpen="DO_FinalShutterPurge(V95)" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V96" display="V96" schematicId="V96" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalHeaterWFPurgeFB(V96)" doOpen="DO_FinalHeaterWFPurge(V96)" diCloseSensor="" diOpenSensor="" />
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|
<IoValve id="V97" display="V97" schematicId="V97" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_FinalCarryGasFB(V97)" doOpen="DO_FinalCarryGas(V97)" diCloseSensor="" diOpenSensor="" />
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|
<IoValve id="EPV1" display="EPV1" schematicId="EPV1" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_EPV1FB" doOpen="DO_EPV1" diCloseSensor="" diOpenSensor="" />
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|
<IoValve id="EPV2" display="EPV2" schematicId="EPV2" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_EPV2FB" doOpen="DO_EPV2" diCloseSensor="" diOpenSensor="" />
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<IoValve id="V111" display="OpenLidPurge" schematicId="V111" unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_PurgeValve" diCloseSensor="" diOpenSensor="" />
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</IoValves>
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<IoMfcs classType="Aitex.Core.RT.Device.Devices.IoMFC" assembly="MECF.Framework.RT.EquipmentLibrary">
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|
<IoMfc id="Mfc1" display="Mfc1" schematicId="Mfc1" unit="sccm" aiActMode="AI_M1ActMode" aoSetMode="AO_M1CtrlMode" aiFlow="AI_M1" aoFlow="AO_M1" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC01Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm101 MFC01 Offline[DI-351]" />
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|
<IoMfc id="Mfc3" display="Mfc3" schematicId="Mfc3" unit="sccm" aiActMode="AI_M3ActMode" aoSetMode="AO_M3CtrlMode" aiFlow="AI_M3" aoFlow="AO_M3" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC03Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm103 MFC03 Offline[DI-353]" />
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|
<IoMfc id="Mfc4" display="Mfc4" schematicId="Mfc4" unit="sccm" aiActMode="AI_M4ActMode" aoSetMode="AO_M4CtrlMode" aiFlow="AI_M4" aoFlow="AO_M4" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC04Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm104 MFC04 Offline[DI-354]" />
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|
<IoMfc id="Mfc6" display="Mfc6" schematicId="Mfc6" unit="sccm" aiActMode="AI_M6ActMode" aoSetMode="AO_M6CtrlMode" aiFlow="AI_M6" aoFlow="AO_M6" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC06Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm106 MFC06 Offline[DI-356]" />
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|
<IoMfc id="Mfc7" display="Mfc7" schematicId="Mfc7" unit="sccm" aiActMode="AI_M7ActMode" aoSetMode="AO_M7CtrlMode" aiFlow="AI_M7" aoFlow="AO_M7" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC07Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm107 MFC07 Offline[DI-357]" />
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|
<IoMfc id="Mfc8" display="Mfc8" schematicId="Mfc8" unit="sccm" aiActMode="AI_M8ActMode" aoSetMode="AO_M8CtrlMode" aiFlow="AI_M8" aoFlow="AO_M8" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC08Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm108 MFC08 Offline[DI-358]" />
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|
<IoMfc id="Mfc9" display="Mfc9" schematicId="Mfc9" unit="sccm" aiActMode="AI_M9ActMode" aoSetMode="AO_M9CtrlMode" aiFlow="AI_M9" aoFlow="AO_M9" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC09Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm109 MFC09 Offline[DI-359]" />
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|
<IoMfc id="Mfc10" display="Mfc10" schematicId="Mfc10" unit="sccm" aiActMode="AI_M10ActMode" aoSetMode="AO_M10CtrlMode" aiFlow="AI_M10" aoFlow="AO_M10" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC10Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm110 MFC10 Offline[DI-360]" />
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|
<IoMfc id="Mfc11" display="Mfc11" schematicId="Mfc11" unit="sccm" aiActMode="AI_M11ActMode" aoSetMode="AO_M11CtrlMode" aiFlow="AI_M11" aoFlow="AO_M11" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC11Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm111 MFC11 Offline[DI-361]" />
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|
<IoMfc id="Mfc12" display="Mfc12" schematicId="Mfc12" unit="sccm" aiActMode="AI_M12ActMode" aoSetMode="AO_M12CtrlMode" aiFlow="AI_M12" aoFlow="AO_M12" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC12Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm112 MFC12 Offline[DI-362]" />
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|
<IoMfc id="Mfc13" display="Mfc13" schematicId="Mfc13" unit="sccm" aiActMode="AI_M13ActMode" aoSetMode="AO_M13CtrlMode" aiFlow="AI_M13" aoFlow="AO_M13" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC13Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm113 MFC13 Offline[DI-363]" />
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|
<IoMfc id="Mfc14" display="Mfc14" schematicId="Mfc14" unit="sccm" aiActMode="AI_M14ActMode" aoSetMode="AO_M14CtrlMode" aiFlow="AI_M14" aoFlow="AO_M14" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC14Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm114 MFC14 Offline[DI-364]" />
|
|
<IoMfc id="Mfc15" display="Mfc15" schematicId="Mfc15" unit="sccm" aiActMode="AI_M15ActMode" aoSetMode="AO_M15CtrlMode" aiFlow="AI_M15" aoFlow="AO_M15" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC15Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm115 MFC15 Offline[DI-365]" />
|
|
<IoMfc id="Mfc16" display="Mfc16" schematicId="Mfc16" unit="sccm" aiActMode="AI_M16ActMode" aoSetMode="AO_M16CtrlMode" aiFlow="AI_M16" aoFlow="AO_M16" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC16Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm116 MFC16 Offline[DI-366]" />
|
|
<IoMfc id="Mfc17" display="Mfc17" schematicId="Mfc17" unit="sccm" aiActMode="AI_M17ActMode" aoSetMode="AO_M17CtrlMode" aiFlow="AI_M17" aoFlow="AO_M17" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC17Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm117 MFC17 Offline[DI-367]" />
|
|
<IoMfc id="Mfc18" display="Mfc18" schematicId="Mfc18" unit="sccm" aiActMode="AI_M18ActMode" aoSetMode="AO_M18CtrlMode" aiFlow="AI_M18" aoFlow="AO_M18" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC18Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm118 MFC18 Offline[DI-368]" />
|
|
<IoMfc id="Mfc19" display="Mfc19" schematicId="Mfc19" unit="sccm" aiActMode="AI_M19ActMode" aoSetMode="AO_M19CtrlMode" aiFlow="AI_M19" aoFlow="AO_M19" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC19Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm119 MFC19 Offline[DI-369]" />
|
|
<IoMfc id="Mfc20" display="Mfc20" schematicId="Mfc20" unit="sccm" aiActMode="AI_M20ActMode" aoSetMode="AO_M20CtrlMode" aiFlow="AI_M20" aoFlow="AO_M20" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC20Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm120 MFC20 Offline[DI-370]" />
|
|
<IoMfc id="Mfc21" display="Mfc21" schematicId="Mfc21" unit="sccm" aiActMode="AI_M21ActMode" aoSetMode="AO_M21CtrlMode" aiFlow="AI_M21" aoFlow="AO_M21" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC21Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm121 MFC21 Offline[DI-371]" />
|
|
<IoMfc id="Mfc22" display="Mfc22" schematicId="Mfc22" unit="sccm" aiActMode="AI_M22ActMode" aoSetMode="AO_M22CtrlMode" aiFlow="AI_M22" aoFlow="AO_M22" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC22Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm122 MFC22 Offline[DI-372]" />
|
|
<IoMfc id="Mfc23" display="Mfc23" schematicId="Mfc23" unit="sccm" aiActMode="AI_M23ActMode" aoSetMode="AO_M23CtrlMode" aiFlow="AI_M23" aoFlow="AO_M23" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC23Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm123 MFC23 Offline[DI-373]" />
|
|
<IoMfc id="Mfc24" display="Mfc24" schematicId="Mfc24" unit="sccm" aiActMode="AI_M24ActMode" aoSetMode="AO_M24CtrlMode" aiFlow="AI_M24" aoFlow="AO_M24" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC24Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm124 MFC24 Offline[DI-374]" />
|
|
<IoMfc id="Mfc25" display="Mfc25" schematicId="Mfc25" unit="sccm" aiActMode="AI_M25ActMode" aoSetMode="AO_M25CtrlMode" aiFlow="AI_M25" aoFlow="AO_M25" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC25Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm125 MFC25 Offline[DI-375]" />
|
|
<IoMfc id="Mfc26" display="Mfc26" schematicId="Mfc26" unit="sccm" aiActMode="AI_M26ActMode" aoSetMode="AO_M26CtrlMode" aiFlow="AI_M26" aoFlow="AO_M26" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC26Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm126 MFC26 Offline[DI-376]" />
|
|
<IoMfc id="Mfc27" display="Mfc27" schematicId="Mfc27" unit="sccm" aiActMode="AI_M27ActMode" aoSetMode="AO_M27CtrlMode" aiFlow="AI_M27" aoFlow="AO_M27" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC27Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm127 MFC27 Offline[DI-377]" />
|
|
<IoMfc id="Mfc28" display="Mfc28" schematicId="Mfc28" unit="sccm" aiActMode="AI_M28ActMode" aoSetMode="AO_M28CtrlMode" aiFlow="AI_M28" aoFlow="AO_M28" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC28Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm128 MFC28 Offline[DI-378]" />
|
|
<IoMfc id="Mfc29" display="Mfc29" schematicId="Mfc29" unit="sccm" aiActMode="AI_M29ActMode" aoSetMode="AO_M29CtrlMode" aiFlow="AI_M29" aoFlow="AO_M29" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC29Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm129 MFC29 Offline[DI-379]" />
|
|
<IoMfc id="Mfc31" display="Mfc31" schematicId="Mfc31" unit="sccm" aiActMode="AI_M31ActMode" aoSetMode="AO_M31CtrlMode" aiFlow="AI_M31" aoFlow="AO_M31" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC31Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm131 MFC31 Offline[DI-381]" />
|
|
<IoMfc id="Mfc32" display="Mfc32" schematicId="Mfc32" unit="sccm" aiActMode="AI_M32ActMode" aoSetMode="AO_M32CtrlMode" aiFlow="AI_M32" aoFlow="AO_M32" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC32Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm132 MFC32 Offline[DI-382]" />
|
|
<IoMfc id="Mfc33" display="Mfc33" schematicId="Mfc33" unit="sccm" aiActMode="AI_M33ActMode" aoSetMode="AO_M33CtrlMode" aiFlow="AI_M33" aoFlow="AO_M33" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC33Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm133 MFC33 Offline[DI-383]" />
|
|
<IoMfc id="Mfc35" display="Mfc35" schematicId="Mfc35" unit="sccm" aiActMode="AI_M35ActMode" aoSetMode="AO_M35CtrlMode" aiFlow="AI_M35" aoFlow="AO_M35" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC35Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm135 MFC35 Offline[DI-385]" />
|
|
<IoMfc id="Mfc36" display="Mfc36" schematicId="Mfc36" unit="sccm" aiActMode="AI_M36ActMode" aoSetMode="AO_M36CtrlMode" aiFlow="AI_M36" aoFlow="AO_M36" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC36Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm136 MFC36 Offline[DI-386]" />
|
|
<IoMfc id="Mfc37" display="Mfc37" schematicId="Mfc37" unit="sccm" aiActMode="AI_M37ActMode" aoSetMode="AO_M37CtrlMode" aiFlow="AI_M37" aoFlow="AO_M37" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC37Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm137 MFC37 Offline[DI-387]" />
|
|
<IoMfc id="Mfc38" display="Mfc38" schematicId="Mfc38" unit="sccm" aiActMode="AI_M38ActMode" aoSetMode="AO_M38CtrlMode" aiFlow="AI_M38" aoFlow="AO_M38" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC38Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm138 MFC38 Offline[DI-388]" />
|
|
<IoMfc id="Mfc40" display="Mfc40" schematicId="Mfc40" unit="sccm" aiActMode="AI_M40ActMode" aoSetMode="AO_M40CtrlMode" aiFlow="AI_M40" aoFlow="AO_M40" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC40Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm140 MFC40 Offline[DI-390]" />
|
|
</IoMfcs>
|
|
|
|
<IoPressures classType="Aitex.Core.RT.Device.Devices.IoPressure" assembly="MECF.Framework.RT.EquipmentLibrary">
|
|
<IoPressure id="Pressure1" display="PC1" schematicId="Pressure1" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC1Valve" aiActMode="AI_PC1ActMode" aoSetMode="AO_PC1CtrlMode" aiValue="AI_PressCtrl1" aoValue="AO_PressCtrl1" formatString="0.0" diAlarm="DI_PC01Offline" AlarmText="Alarm141 PC1 Offline[DI-391]" />
|
|
<IoPressure id="Pressure2" display="PC2" schematicId="Pressure2" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC2Valve" aiActMode="AI_PC2ActMode" aoSetMode="AO_PC2CtrlMode" aiValue="AI_PressCtrl2" aoValue="AO_PressCtrl2" formatString="0.0" diAlarm="DI_PC02Offline" AlarmText="Alarm142 PC2 Offline[DI-392]" />
|
|
<IoPressure id="Pressure3" display="PC3" schematicId="Pressure3" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC3Valve" aiActMode="AI_PC3ActMode" aoSetMode="AO_PC3CtrlMode" aiValue="AI_PressCtrl3" aoValue="AO_PressCtrl3" formatString="0.0" diAlarm="DI_PC03Offline" AlarmText="Alarm143 PC3 Offline[DI-393]" />
|
|
<IoPressure id="Pressure4" display="PC4" schematicId="Pressure4" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC4Valve" aiActMode="AI_PC4ActMode" aoSetMode="AO_PC4CtrlMode" aiValue="AI_PressCtrl4" aoValue="AO_PressCtrl4" formatString="0.0" diAlarm="DI_PC04Offline" AlarmText="Alarm144 PC4 Offline[DI-394]" />
|
|
<IoPressure id="Pressure5" display="PC5" schematicId="Pressure5" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC5Valve" aiActMode="AI_PC5ActMode" aoSetMode="AO_PC5CtrlMode" aiValue="AI_PressCtrl5" aoValue="AO_PressCtrl5" formatString="0.0" diAlarm="DI_PC05Offline" AlarmText="Alarm145 PC5 Offline[DI-395]" />
|
|
<IoPressure id="Pressure6" display="PC6" schematicId="Pressure6" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC6Valve" aiActMode="AI_PC6ActMode" aoSetMode="AO_PC6CtrlMode" aiValue="AI_PressCtrl6" aoValue="AO_PressCtrl6" formatString="0.0" diAlarm="DI_PC06Offline" AlarmText="Alarm146 PC6 Offline[DI-396]" />
|
|
<IoPressure id="Pressure7" display="PC7" schematicId="Pressure7" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC7Valve" aiActMode="AI_PC7ActMode" aoSetMode="AO_PC7CtrlMode" aiValue="AI_PressCtrl7" aoValue="AO_PressCtrl7" formatString="0.0" diAlarm="DI_PC07Offline" AlarmText="Alarm147 PC7 Offline[DI-397]" />
|
|
<IoPressure id="Pressure8" display="PC8" schematicId="Pressure8" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC8Valve" aiActMode="AI_PC8ActMode" aoSetMode="AO_PC8CtrlMode" aiValue="AI_PressCtrl8" aoValue="AO_PressCtrl8" formatString="0.0" diAlarm="DI_PC08Offline" AlarmText="Alarm141 PC8 Offline[DI-391]" />
|
|
<IoPressure id="Pressure9" display="PC9" schematicId="Pressure9" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC9Valve" aiActMode="AI_PC9ActMode" aoSetMode="AO_PC9CtrlMode" aiValue="AI_PressCtrl9" aoValue="AO_PressCtrl9" formatString="0.0" diAlarm="DI_PC09Offline" AlarmText="Alarm142 PC9 Offline[DI-392]" />
|
|
<IoPressure id="PT1" display="PT1" schematicId="PT1" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="" aiActMode="" aoSetMode="" aiValue="AI_ActualPressure" aoValue="" formatString="0.0" />
|
|
<IoPressure id="PT2" display="PT2" schematicId="PT2" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="" aiActMode="" aoSetMode="" aiValue="AI_ForelinePress" aoValue="" formatString="0.0" />
|
|
</IoPressures>
|
|
|
|
<IoThrottleValves classType="Aitex.Core.RT.Device.Devices.IoThrottleValve2" assembly="MECF.Framework.RT.EquipmentLibrary">
|
|
<IoThrottleValve id="TV" display="TV" schematicId="TV" unit="mbar" scBasePath="PM.{module}" modeValuePressure="5" modeValuePosition="2" modeValueClose="3" modeValueOpen="4" aioType="float"
|
|
aiStatus="AI_ValveMode" aiPositionFeedback="AI_ActualPositon" aiPressureFeedback="AI_ActualPressure"
|
|
aoPressureMode="AO_ValveModeSetpoint" aoPositionSetPoint="AO_SetpointPositon" aoPressureSetPoint="AO_SetpointPressure"
|
|
doTVValveEnable="DO_TVEnable" doTVReset="DO_TVReset"
|
|
diTVValveEnable="" />
|
|
</IoThrottleValves>
|
|
|
|
<IoSensorWaterFlowTemp classType="Aitex.Core.RT.Device.Devices.IoSensorWaterFlowTemp" assembly="MECF.Framework.RT.EquipmentLibrary">
|
|
<IoSensorWaterFlowTemp id="FlowTemp1" module="" display="SHFlow(U1)" schematicId="SHFlowTemp"
|
|
unit="℃"
|
|
ai="AI_SHFlowTemp"
|
|
ao=""
|
|
diFlowSW="DI_SHFlowSW"
|
|
doWarningLow=""
|
|
doWarningHigh=""
|
|
doAlarmLow=""
|
|
doAlarmHigh="DO_SHFlowTemp"
|
|
doActiveLevel="false"
|
|
scBasePath="PM.{module}.CoolingWater"
|
|
scWarningLow=""
|
|
scWarningHigh=""
|
|
scAlarmLow=""
|
|
scAlarmHigh="SHFlowTemp"
|
|
scWarningOffset="WarningOffset"
|
|
scFilterDuration="FilterDuration"/>
|
|
|
|
<IoSensorWaterFlowTemp id="FlowTemp2" module="" display="TopFlow(U2)" schematicId="ChamTopFlowTemp" unit="℃"
|
|
ai="AI_ChamTopFlowTemp"
|
|
diFlowSW="DI_ChamTopFlowSW"
|
|
doAlarmHigh="DO_ChamTopFlowTemp"
|
|
doActiveLevel="false"
|
|
scBasePath="PM.{module}.CoolingWater"
|
|
scAlarmHigh="ChamTopFlowTemp"
|
|
scWarningOffset="WarningOffset"
|
|
scFilterDuration="FilterDuration" />
|
|
|
|
<IoSensorWaterFlowTemp id="FlowTemp3" module="" display="MiddleFlow1(U3)" schematicId="ChamMiddleFlow1Temp" unit="℃"
|
|
ai="AI_ChamMiddleFlow1Temp"
|
|
diFlowSW="DI_ChamMiddleFlow1SW"
|
|
doAlarmHigh="DO_ChamMiddleFlow1Temp"
|
|
doActiveLevel="false"
|
|
scBasePath="PM.{module}.CoolingWater"
|
|
scAlarmHigh="ChamMiddleFlow1Temp"
|
|
scWarningOffset="WarningOffset"
|
|
scFilterDuration="FilterDuration"/>
|
|
|
|
<IoSensorWaterFlowTemp id="FlowTemp4" module="" display="MiddleFlow2(U4)" schematicId="ChamMiddleFlow2Temp" unit="℃"
|
|
ai="AI_ChamMiddleFlow2Temp"
|
|
diFlowSW="DI_ChamMiddleFlow2SW"
|
|
doAlarmHigh="DO_ChamMiddleFlow2Temp"
|
|
doActiveLevel="false"
|
|
scBasePath="PM.{module}.CoolingWater"
|
|
scAlarmHigh="ChamMiddleFlow2Temp"
|
|
scWarningOffset="WarningOffset"
|
|
scFilterDuration="FilterDuration" />
|
|
|
|
<IoSensorWaterFlowTemp id="FlowTemp5" module="" display="BottomFlow(U5)" schematicId="ChamBottomFlowTemp" unit="℃"
|
|
ai="AI_ChamBottomFlowTemp"
|
|
diFlowSW="DI_ChamBottomFlowSW"
|
|
doAlarmHigh="DO_ChamBottomFlowTemp"
|
|
doActiveLevel="false"
|
|
scBasePath="PM.{module}.CoolingWater"
|
|
scAlarmHigh="ChamBottomFlowTemp"
|
|
scWarningOffset="WarningOffset"
|
|
scFilterDuration="FilterDuration" />
|
|
|
|
<IoSensorWaterFlowTemp id="FlowTemp6" module="" display="Foreline1Flow(U6)" schematicId="Foreline1FlowTemp" unit="℃"
|
|
ai="AI_Foreline1FlowTemp"
|
|
diFlowSW="DI_Foreline1FlowSW"
|
|
doAlarmHigh="DO_SpareFlowTemp"
|
|
doActiveLevel="false"
|
|
scBasePath="PM.{module}.CoolingWater"
|
|
scAlarmHigh="SpareFlowTemp"
|
|
scWarningOffset="WarningOffset"
|
|
scFilterDuration="FilterDuration" />
|
|
|
|
<IoSensorWaterFlowTemp id="FlowTemp7" module="" display="PowerRod1Flow(U7)" schematicId="PowerRod1FlowTemp" unit="℃"
|
|
ai="AI_PowerRod1FlowTemp"
|
|
diFlowSW="DI_PowerRod1FlowSW"
|
|
doAlarmHigh="DO_PowerRod1FlowTemp"
|
|
doActiveLevel="false"
|
|
scBasePath="PM.{module}.CoolingWater"
|
|
scAlarmHigh="PowerRod1FlowTemp"
|
|
scWarningOffset="WarningOffset"
|
|
scFilterDuration="FilterDuration" />
|
|
|
|
<IoSensorWaterFlowTemp id="FlowTemp8" module="" display="PowerRod2Flow(U8)" schematicId="PowerRod2FlowTemp" unit="℃"
|
|
ai="AI_PowerRod2FlowTemp"
|
|
diFlowSW="DI_PowerRod2FlowSW"
|
|
doAlarmHigh="DO_PowerRod2FlowTemp"
|
|
doActiveLevel="false"
|
|
scBasePath="PM.{module}.CoolingWater"
|
|
scAlarmHigh="PowerRod2FlowTemp"
|
|
scWarningOffset="WarningOffset"
|
|
scFilterDuration="FilterDuration"/>
|
|
|
|
<IoSensorWaterFlowTemp id="FlowTemp9" module="" display="Foreline2Flow(U9)" schematicId="Foreline2FlowTemp" unit="℃"
|
|
ai="AI_Foreline2FlowTemp"
|
|
diFlowSW="DI_Foreline2FlowSW"
|
|
doAlarmHigh="DO_ForelineFlowTemp"
|
|
doActiveLevel="false"
|
|
scBasePath="PM.{module}.CoolingWater"
|
|
scAlarmHigh="ForelineFlowTemp"
|
|
scWarningOffset="WarningOffset"
|
|
scFilterDuration="FilterDuration" />
|
|
|
|
<IoSensorWaterFlowTemp id="FlowTemp10" module="" display="ElectrodeWFlow(U10)" schematicId="ElectrodeWFlowTemp" unit="℃"
|
|
ai="AI_ElectrodeWFlowTemp"
|
|
diFlowSW="DI_ElectrodeWFlowSW"
|
|
doAlarmHigh="DO_ElectrodeWFlowTemp"
|
|
doActiveLevel="false"
|
|
scBasePath="PM.{module}.CoolingWater"
|
|
scAlarmHigh="ElectrodeWFlowTemp"
|
|
scWarningOffset="WarningOffset"
|
|
scFilterDuration="FilterDuration" />
|
|
|
|
<IoSensorWaterFlowTemp id="FlowTemp11" module="" display="TMPump1Flow(U11)" schematicId="TMPump1FlowTemp" unit="℃"
|
|
ai="AI_TMPump1FlowTemp"
|
|
diFlowSW="DI_TMPump1FlowSW"
|
|
doAlarmHigh="DO_TMPump1FlowTemp"
|
|
doActiveLevel="false"
|
|
scBasePath="PM.{module}.CoolingWater"
|
|
scAlarmHigh="TMPump1FlowTemp"
|
|
scWarningOffset="WarningOffset"
|
|
scFilterDuration="FilterDuration" />
|
|
|
|
<IoSensorWaterFlowTemp id="FlowTemp12" module="" display="Spare1(U12)" schematicId="Spare1Temp" unit="℃"
|
|
ai="AI_Spare1Temp"
|
|
diFlowSW="DI_Spare1FlowSW"
|
|
doAlarmHigh="DO_Spare1FlowTemp"
|
|
doActiveLevel="false"
|
|
scBasePath="PM.{module}.CoolingWater"
|
|
scAlarmHigh="Spare1FlowTemp"
|
|
scWarningOffset="WarningOffset"
|
|
scFilterDuration="FilterDuration" />
|
|
|
|
<IoSensorWaterFlowTemp id="FlowTemp13" module="" display="Spare2(U13)" schematicId="Spare2Temp" unit="℃"
|
|
ai="AI_Spare2Temp"
|
|
diFlowSW="DI_Spare2FlowSW"
|
|
doAlarmHigh="DO_Spare2FlowTemp"
|
|
doActiveLevel="false"
|
|
scBasePath="PM.{module}.CoolingWater"
|
|
scAlarmHigh="Spare2FlowTemp"
|
|
scWarningOffset="WarningOffset"
|
|
scFilterDuration="FilterDuration" />
|
|
|
|
<IoSensorWaterFlowTemp id="FlowTemp14" module="" display="TransformerFlow(U14)" schematicId="TransformerFlowTemp" unit="℃"
|
|
ai="AI_TransformerFlowTemp"
|
|
diFlowSW="DI_TransformerFlowSW"
|
|
doAlarmHigh="DO_TransformerFlowTemp"
|
|
doActiveLevel="false"
|
|
scBasePath="PM.{module}.CoolingWater"
|
|
scAlarmHigh="TransformerFlowTemp"
|
|
scWarningOffset="WarningOffset"
|
|
scFilterDuration="FilterDuration" />
|
|
</IoSensorWaterFlowTemp>
|
|
|
|
<IoGasBoxTemps classType="Aitex.Core.RT.Device.Devices.IoLineHeater" assembly="MECF.Framework.RT.EquipmentLibrary">
|
|
<IoGasBoxTemp id="HeatTMAPanelTemp" display="TMAPanelTemp(ATC-1)" aiHeatTMA="AI_HeatTMA" scBasePath="PM.{module}.LineHeaterTemp" scAlarmHigh="加热带温区1" scWarningLog="" doLineHeaterEnable="DO_LineHeaterEnable"/>
|
|
<IoGasBoxTemp id="HeatTCSPanelTemp" display="TCSPanelTemp(ATC-2)" aiHeatTMA="AI_HeatTCSPanel" scBasePath="PM.{module}.LineHeaterTemp" scAlarmHigh="加热带温区2" scWarningLog="" doLineHeaterEnable="DO_LineHeaterEnable"/>
|
|
<IoGasBoxTemp id="HeatinsidePanelTemp" display="insidePanelTemp(ATC-3)" aiHeatTMA="AI_HeatinsidePanel" scBasePath="PM.{module}.LineHeaterTemp" scAlarmHigh="加热带温区3" scWarningLog="" doLineHeaterEnable="DO_LineHeaterEnable"/>
|
|
<IoGasBoxTemp id="HeatoutsidePanelTemp" display="outsidePanelTemp(ATC-4)" aiHeatTMA="AI_HeatoutsidePanel" scBasePath="PM.{module}.LineHeaterTemp" scAlarmHigh="加热带温区4" scWarningLog="" doLineHeaterEnable="DO_LineHeaterEnable"/>
|
|
<IoGasBoxTemp id="HeatoutsideSHTemp" display="outsideSHTemp(ATC-5)" aiHeatTMA="AI_HeatoutsideSH" scBasePath="PM.{module}.LineHeaterTemp" scAlarmHigh="加热带温区5" scWarningLog="" doLineHeaterEnable="DO_LineHeaterEnable"/>
|
|
<IoGasBoxTemp id="HeatLeakBypassTemp" display="LeakBypassTemp(ATC-6)" aiHeatTMA="AI_HeatLeakBypass" scBasePath="PM.{module}.LineHeaterTemp" scAlarmHigh="加热带温区6" scWarningLog="" doLineHeaterEnable="DO_LineHeaterEnable"/>
|
|
|
|
<!--<IoGasBoxTemp id="HeatTailFilter" display="HeatTailFilter" aiHeatTMA="AI_HeatTailFilter" scBasePath="PM.{module}.LineHeaterTemp" scAlarmHigh="PumpLineTempLimt" scWarningLog="PumpLineTempAlarm" doLineHeaterEnable="" />
|
|
<IoGasBoxTemp id="HeatTailPipe" display="HeatTailPipe" aiHeatTMA="AI_HeatTailPipe" scBasePath="PM.{module}.LineHeaterTemp" scAlarmHigh="PumpLineTempLimt" scWarningLog="PumpLineTempAlarm" doLineHeaterEnable=""/>-->
|
|
</IoGasBoxTemps>
|
|
<IoPumps classType="Aitex.Core.RT.Device.Devices.IoPump" assembly="MECF.Framework.RT.EquipmentLibrary">
|
|
<IoPump id="Pump" module="" display="Pump" schematicId="Pump" unit="" aioType="" diDryPumpAlarm="DI_DryPumpAlarm" diPumpExhaustPress="DI_PumpExhaustPressSW" diDryPumpFlow="DI_DryPumpFlowSW" diDryPump1Running="DI_DryPump1Running" diDryPump1Warning="DI_DryPump1Warning" />
|
|
</IoPumps>
|
|
<IoPTOffsetAndKs classType="Aitex.Core.RT.Device.Devices.IoPTOffsetAndK" assembly="MECF.Framework.RT.EquipmentLibrary">
|
|
<IoPTOffsetAndK id="PT1_Offset" module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT1_Offset" />
|
|
<IoPTOffsetAndK id="PT1_K" module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT1_K" />
|
|
<IoPTOffsetAndK id="PT2_Offset" module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT2_Offset" />
|
|
<IoPTOffsetAndK id="PT2_K" module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT2_K" />
|
|
<IoPTOffsetAndK id="PT3_Offset" module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT3_Offset" />
|
|
<IoPTOffsetAndK id="PT3_K" module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT3_K" />
|
|
<IoPTOffsetAndK id="PT4_Offset" module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT4_Offset" />
|
|
<IoPTOffsetAndK id="PT4_K" module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT4_K" />
|
|
<IoPTOffsetAndK id="PT9_Offset" module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT9_Offset" />
|
|
<IoPTOffsetAndK id="PT9_K" module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT9_K" />
|
|
<IoPTOffsetAndK id="PT10_Offset" module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT10_Offset" />
|
|
<IoPTOffsetAndK id="PT10_K" module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT10_K" />
|
|
<IoPTOffsetAndK id="U1_Water" module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI3_Offset" />
|
|
<IoPTOffsetAndK id="U2_Water" module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI4_Offset" />
|
|
<IoPTOffsetAndK id="U3_Water" module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI5_Offset" />
|
|
<IoPTOffsetAndK id="U4_Water" module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI2_Offset" />
|
|
<IoPTOffsetAndK id="U5_Water" module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI6_Offset" />
|
|
<IoPTOffsetAndK id="U6_Water" module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI7_Offset" />
|
|
<IoPTOffsetAndK id="U7_Water" module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI8_Offset" />
|
|
<IoPTOffsetAndK id="U8_Water" module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI9_Offset" />
|
|
<IoPTOffsetAndK id="U9_Water" module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI10_Offset" />
|
|
<IoPTOffsetAndK id="U10_Water" module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI11_Offset" />
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<IoPTOffsetAndK id="U11_Water" module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI12_Offset" />
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<IoPTOffsetAndK id="U12_Water" module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI14_Offset" />
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<IoPTOffsetAndK id="U13_Water" module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI15_Offset" />
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<IoPTOffsetAndK id="U14_Water" module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI13_Offset" />
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</IoPTOffsetAndKs>
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<DoSensors classType="Aitex.Core.RT.Device.Devices.DoSensor" assembly="MECF.Framework.RT.EquipmentLibrary">
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<DoSensor id="CleanRoutineSucceed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_CleanRoutineSuscessed" infoText="" warningText="" alarmText="" />
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</DoSensors>
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<IoSensors classType="Aitex.Core.RT.Device.Devices.IoSensor" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoSensor id="SensorChamLidClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamLidClosed" infoText="" warningText="" alarmText="Alarm1 Chamber Lid Opened [DI-0]" />
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<IoSensor id="SensorPMGasDetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMGasDetectorSW" infoText="" warningText="Warning1 PMGasDetectorFault1 [DI-1]" alarmText="" />
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<IoSensor id="SensorGBGasDetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBGasDetectorSW" infoText="" warningText="Warning2 GBGasDetectorFault [DI-2]" alarmText="" />
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<IoSensor id="SensorChamCabDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamCabDoorClosed" infoText="" warningText="Warning3 Chamber Cab Door Not Closed [DI-3]" alarmText="" />
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<IoSensor id="SensorChamPressAboveATMSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamPressAboveATMSW" infoText="" warningText="" alarmText="Alarm2 Chamber Press Above ATM [DI-4]" />
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<IoSensor id="SensorChamAtSafeProcessPressSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamAtSafeProcessPressSW" infoText="Information1 Chamber At Safe Process Press [DI-5]" warningText="" alarmText="" />
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<IoSensor id="SensorDORPressVacSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_DORPressVacSW" infoText="Information2 DOR Press Vac [DI-6]" warningText="" alarmText="" />
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<IoSensor id="SensorDORPressATMSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_DORPressATMSW" infoText="" warningText="Warning4 DOR Press ATM [DI-7]" alarmText="" />
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<IoSensor id="SensorPMH2SDetector1SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMH2SDetector1SW" infoText="" warningText="" alarmText="Alarm3 PM H2 Leak Detect [DI-8]" />
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<IoSensor id="SensorPMATMSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMATMSW" infoText="Information3 PM At ATM [DI-9]" warningText="" alarmText="" />
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<IoSensor id="SensorHeaterTempUpLimitSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_HeaterTempUpLimitSW" infoText="" warningText="" alarmText="Alarm4 Heater Controller1 Present Temp High [DI-10]" />
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<IoSensor id="SensorHeaterTempLowLimitSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_HeaterTempLowLimitSW" infoText="Information4 Heater Temp Below 900C [DI-11]" warningText="" alarmText="" />
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<IoSensor id="SensorConfinementRingUp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ConfinementRingUp" infoText="Information5 Confinement Ring At Up Position [DI-12]" warningText="" alarmText="" />
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<IoSensor id="SensorSusceptorAtSafeSpeed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SusceptorAtSafeSpeed" infoText="Information6 Susceptor At Safe Speed [DI-13]" warningText="" alarmText="" />
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<IoSensor id="SensorPMH2SeDetector1SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMH2SeDetector1SW" infoText="" warningText="" alarmText="Alarm5 PM H2Se Leak Detect [DI-14]" />
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<IoSensor id="SensorSHFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SHFlowSW" infoText="" warningText="" alarmText="Alarm6 SH Cooling Water Low Flow -U1 [DI-15]" />
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<IoSensor id="SensorChamTopFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamTopFlowSW" infoText="" warningText="" alarmText="Alarm7 Chamber Top Cooling Water Low Flow -U2 [DI-16]" />
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<IoSensor id="SensorChamMiddleFlow1SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamMiddleFlow1SW" infoText="" warningText="" alarmText="Alarm8 Chamber Middle1 Cooling Water Flow Abnormal -U3 [DI-17]" />
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<IoSensor id="SensorChamBottomFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamBottomFlowSW" infoText="" warningText="" alarmText="Alarm9 Chamber Bottom Cooling Water Flow Abnormal -U5 [DI-18]" />
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<IoSensor id="SensorForeline1FlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_Foreline1FlowSW" infoText="" warningText="" alarmText="Alarm10 Foreline1 Cooling Water Low Flow -U6 [DI-19]" />
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<IoSensor id="SensorPowerRod1FlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PowerRod1FlowSW" infoText="" warningText="" alarmText="Alarm11 Power Rod1 Cooling Water Low Flow -U7 [DI-20]" />
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<IoSensor id="SensorPowerRod2FlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PowerRod2FlowSW" infoText="" warningText="" alarmText="Alarm12 Power Rod2 Cooling Water Low Flow -U8 [DI-21]" />
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<IoSensor id="SensorForeline2FlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_Foreline2FlowSW" infoText="" warningText="" alarmText="Alarm13 Foreline2 Cooling Water Low Flow -U9 [DI-22]" />
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<IoSensor id="SensorElectrodeWFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ElectrodeWFlowSW" infoText="" warningText="" alarmText="Alarm14 Electrode-W Cooling Water Low Flow -U10 [DI-23]" />
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<IoSensor id="SensorTMPump1FlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TMPump1FlowSW" infoText="" warningText="" alarmText="Warning5 TMPump1 Cooling Water Low Flow -U11 [DI-24]" />
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<IoSensor id="SensorTransformerFlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TransformerFlowSW" infoText="" warningText="" alarmText="Alarm15 Transformer Cooling Water Low Flow -U14 [DI-25]" />
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<IoSensor id="SensorSpare1FlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_Spare1FlowSW" infoText="" warningText="" alarmText="Alarm16 Spare1 Flow Low-U12 [DI-26]" />
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<IoSensor id="SensorInletTotalFlowLowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_InletTotalFlowLowSW" infoText="" warningText="" alarmText="Alarm17 Chamber Cooling Water Pressure Low [DI-27]" />
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<IoSensor id="SensorInletTotalFlowHighSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_InletTotalFlowHighSW" infoText="" warningText="" alarmText="Alarm18 Chamber Cooling Water Pressure High [DI-28]" />
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<IoSensor id="SensorPMH2DetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMH2DetectorSW" infoText="" warningText="" alarmText="Alarm19 PM H2 Leak Detect [DI-30]" />
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<IoSensor id="SensorArInletPressSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ArInletPressSW" infoText="" warningText="" alarmText="Alarm20 ArInletPress Abnormal [DI-31]" />
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<IoSensor id="SensorGBSO2DetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBSO2DetectorSW" infoText="" warningText="" alarmText="Alarm21 Gas Box SO2 Leak Detect [DI-32]" />
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<IoSensor id="SensorGBDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBDoorClosed" infoText="" warningText="Warning6 Gas Box Door Not Closed [DI-33]" alarmText="" />
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<IoSensor id="SensorGBExhaustDPLowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBExhaustDPLowSW" infoText="" warningText="" alarmText="Alarm22 GBExhaustDPLow [DI-34]" />
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<IoSensor id="SensorGasPipeTempCtrlAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GasPipeTempCtrlAlarm" infoText="" warningText="Warning7 GasPipeTempCtrl.Alarm [DI-35]" alarmText="" />
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<IoSensor id="SensorDryPumpAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_DryPumpAlarm" infoText="" warningText="" alarmText="Alarm23 PM1DryPump.Alarm [DI-36]" />
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<IoSensor id="SensorPumpExhaustPressSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PumpExhaustPressSW" infoText="" warningText="" alarmText="Alarm24 Pump Exhaust Pressure Abnormal [DI-38]" />
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<IoSensor id="SensorPMAExhaustDPSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMAExhaustDPSW" infoText="" warningText="" alarmText="Alarm25 PM Exhaust DP Error [DI-39]" />
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<IoSensor id="SensorPumpExhaustDPSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PumpExhaustDPSW" infoText="" warningText="" alarmText="Alarm26 Pump Exhaust DP Error [DI-40]" />
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<IoSensor id="SensorScrubberIntlkSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ScrubberIntlkSW" infoText="" warningText="" alarmText="Alarm27 Scrubber System Error [DI-41]" />
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<IoSensor id="SensorFacilityIntlkSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_FacilityIntlkSW" infoText="" warningText="" alarmText="Alarm28 Facility Error [DI-42]" />
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<IoSensor id="SensorPMH2SeDetector2SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMH2SeDetector2SW" infoText="" warningText="" alarmText="Alarm29 PMH2Se Leak Detect2 [DI-43]" />
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<IoSensor id="SensorPMSO2Detector2SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMSO2Detector2SW" infoText="" warningText="" alarmText="Alarm30 PMSO2 Leak Detect2 [DI-44]" />
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<IoSensor id="SensorServoDriverFaultSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ServoDriverFaultSW" infoText="" warningText="" alarmText="Alarm31 Rotation Servo Driver Error [DI-45]" />
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<IoSensor id="SensorChamMiddleFlow2SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamMiddleFlow2SW" infoText="" warningText="" alarmText="Alarm32 Chamber Middle2 Cooling Water Flow Abnormal U4[DI-46]" />
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<IoSensor id="SensorSpare2FlowSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_Spare2FlowSW" infoText="" warningText="Warning8 Spare2 Flow Low -U13 [DI-47]" alarmText="" />
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<IoSensor id="SensorReactorWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ReactorWaterLeakSW" infoText="" warningText="Warning9 ReactorWaterLeak [DI-48]" alarmText="" />
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<IoSensor id="SensorChamLidPushButtonLocal" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamLidPushButtonLocal" infoText="Information7 Chamer Lid Push Button On Local Mode [DI-49]" warningText="" alarmText="" />
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<IoSensor id="SensorConfinementRingDown" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ConfinementRingDown" infoText="Information8 Confinement Ring At Down position [DI-50]" warningText="" alarmText="" />
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<IoSensor id="SensorPMGasDetectorFault2SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMGasDetectorFault2SW" infoText="" warningText="" alarmText="Alarm33 PMGasDetectorFault2 [DI-51]" />
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<IoSensor id="SensorPMSO2Detector1SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMSO2Detector1SW" infoText="" warningText="" alarmText="Alarm34 PMSO2Leak Detect1 [DI-52]" />
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<IoSensor id="SensorGN2InletPressSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GN2InletPressSW" infoText="" warningText="" alarmText="Alarm35 Gasbox N2 Pressure Low [DI-55]" />
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<IoSensor id="SensorGBH2SDetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBH2SDetectorSW" infoText="" warningText="" alarmText="Alarm36 GBH2S Leak Detect1 [DI-56]" />
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<IoSensor id="SensorGBH2SeDetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBH2SeDetectorSW" infoText="" warningText="" alarmText="Alarm37 GBH2Se Leak Detect1 [DI-57]" />
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<IoSensor id="SensorGBSmokeDetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBSmokeDetectorSW" infoText="" warningText="" alarmText="Alarm38 GBSmokeDetector [DI-58]" />
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<IoSensor id="SensorGBH2DetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBH2DetectorSW" infoText="" warningText="" alarmText="Alarm39 Gasbox H2 Leak Detect [DI-59]" />
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<IoSensor id="SensorGBWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBWaterLeakSW" infoText="" warningText="Warning10 Gas Box Water Leak [DI-60]" alarmText="" />
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<IoSensor id="SensorRotateMotorHome" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_RotateMotorHome" infoText="Information9 RotateMotorHome [DI-61]" warningText="" alarmText="" />
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<IoSensor id="SensorH2PressureSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_H2PressureSW" infoText="" warningText="" alarmText="Alarm40 H2 Pressure Abnormal [DI-63]" />
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<IoSensor id="SensorDryPump1Running" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_DryPump1Running" infoText="" warningText="" alarmText="Alarm41 PM1DryPump1 Not Running [DI-65]" />
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<IoSensor id="SensorDryPump1Warning" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_DryPump1Warning" infoText="" warningText="Warning12 PM1DryPump1 Warning [DI-67]" alarmText="" />
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<IoSensor id="SensorPMSmokeDetectorSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMSmokeDetectorSW" infoText="" warningText="" alarmText="Alarm42 PMSmokeDetector [DI-69]" />
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<IoSensor id="SensorEMOStatusSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_EMOStatusSW" infoText="" warningText="" alarmText="Alarm43 EMOStatus [DI-70]" />
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<IoSensor id="SensorPumpCabDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PumpCabDoorClosed" infoText="Information10 PumpCabDoor Not Closed [DI-71]" warningText="" alarmText="" />
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<IoSensor id="SensorFacilityWarningSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_FacilityWarningSW" infoText="" warningText="" alarmText="Alarm44 Facility Equipment Alarm [DI-72]" />
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<IoSensor id="SensorPMH2SDetector2SW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMH2SDetector2SW" infoText="" warningText="" alarmText="Alarm45 PM H2S Leak Detect2 [DI-73]" />
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<IoSensor id="SensorMainCBStatusSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_MainCBStatusSW" infoText="" warningText="" alarmText="Alarm46 Main CB Status Off [DI-76]" />
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<IoSensor id="SensorPowerRackWaterLeakSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PowerRackWaterLeakSW" infoText="" warningText="Warning13 Power Rack Water Leak [DI-77]" alarmText="" />
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<IoSensor id="SensorUPS1Enable" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_UPS1Enable" infoText="" warningText="" alarmText="Alarm47 UPS1.Enable [DI-78]" />
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<IoSensor id="SensorUPS1Bypass" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_UPS1Bypass" infoText="" warningText="" alarmText="Alarm48 UPS2.Enable [DI-79]" />
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<IoSensor id="SensorUPS1Online" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_UPS1Online" infoText="Information11 UPS1.Online [DI-80]" warningText="" alarmText="" />
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<IoSensor id="SensorProcessStopSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ProcessStopSW" infoText="" warningText="" alarmText="Alarm49 Process Stop [DI-81]" />
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<IoSensor id="SensorTransformerOTSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TransformerOTSW" infoText="" warningText="Warning14 TransformerOverTemp [DI-83]" alarmText="" />
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<IoSensor id="SensorUPS1LowBattery" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_UPS1LowBattery" infoText="" warningText="" alarmText="Alarm50 UPS1.LowBattery [DI-84]" />
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<IoSensor id="SensorUPS2LowBattery" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_UPS2LowBattery" infoText="" warningText="" alarmText="Alarm51 UPS2.LowBattery [DI-85]" />
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<IoSensor id="SensorManualLidOPLocal" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ManualLidOPLocal" infoText="Information12 ManualLidOP.Local[DI-88]" warningText="" alarmText="" />
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<IoSensor id="SensorManualLidUpPB" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ManualLidUpPB" infoText="Information13 ManualLidUp.PB[DI-89]" warningText="" alarmText="" />
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<IoSensor id="SensorManualLidDownPB" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ManualLidDownPB" infoText="Information14 ManualLidDown.PB[DI-90]" warningText="" alarmText="" />
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<IoSensor id="SensorManualLidUpLockPB" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ManualLidUpLockPB" infoText="Information15 ManualLidUpLock.PB[DI-91]" warningText="" alarmText="" />
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<IoSensor id="SensorManualLidForwardPB" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ManualLidForwardPB" infoText="Information16 ManualLidForward.PB[DI-92]" warningText="" alarmText="" />
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<IoSensor id="SensorManualLidBackwardPB" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ManualLidBackwardPB" infoText="Information17 ManualLidBackward.PB[DI-93]" warningText="" alarmText="" />
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<IoSensor id="SensorChamMoveBodyUp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamMoveBodyUp" infoText="Information18 ChamMoveBody.Up[DI-96]" warningText="" alarmText="" />
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<IoSensor id="SensorChamMoveBodyUpLatchFW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamMoveBodyUpLatchFW" infoText="Information19 ChamMoveBody.Up.LatchFW[DI-97]" warningText="" alarmText="" />
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<IoSensor id="SensorChamMoveBodyDown" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamMoveBodyDown" infoText="Information20 ChamMoveBody.Down[DI-98]" warningText="" alarmText="" />
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<IoSensor id="SensorChamMoveBodyFront" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamMoveBodyFront" infoText="Information21 ChamMoveBody.Front[DI-99]" warningText="" alarmText="" />
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<IoSensor id="SensorChamMoveBodyEnd" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamMoveBodyEnd" infoText="Information22 ChamMoveBody.End[DI-100]" warningText="" alarmText="" />
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<IoSensor id="SensorChamMoveBodyEndLatchBW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamMoveBodyEndLatchBW" infoText="Information23 ChamMoveBody.End.LatchBW[DI-101]" warningText="" alarmText="" />
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<IoSensor id="SensorSHGasConnectorLoosen" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SHGasConnectorLoosen" infoText="Information24 SH.GasConnector.Loosen[DI-102]" warningText="" alarmText="" />
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<IoSensor id="SensorSHGasConnectorTighten" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SHGasConnectorTighten" infoText="Information25 SH.GasConnector.Tighten[DI-103]" warningText="" alarmText="" />
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<IoSensor id="SensorSHLidLoosen" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SHLidLoosen" infoText="Information26 SH.Lid.Loosen[DI-104]" warningText="" alarmText="" />
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<IoSensor id="SensorSHLidTighten" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SHLidTighten" infoText="Information27 SH.Lid.Tighten[DI-105]" warningText="" alarmText="" />
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<IoSensor id="SensorSHLidClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SHLidClosed" infoText="" warningText="Warning15 SH Lid Opened [DI-106]" alarmText="" />
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<IoSensor id="SensorSHLidSwingLock" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SHLidSwingLock" infoText="Information28 SH.Lid.Swing.Lock[DI-107]" warningText="" alarmText="" />
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<IoSensor id="SensorSHLidSwingUnlock" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SHLidSwingUnlock" infoText="Information29 SH.Lid.Swing.Unlock[DI-108]" warningText="" alarmText="" />
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<IoSensor id="SensorMiddleLidLoosen" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MiddleLidLoosen" infoText="Information30 Middle.Lid.Loosen[DI-118]" warningText="" alarmText="" />
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<IoSensor id="SensorMiddleLidTighten" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MiddleLidTighten" infoText="Information31 Middle.Lid.Tighten[DI-119]" warningText="" alarmText="" />
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<IoSensor id="SensorMiddleLidClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_MiddleLidClosed" infoText="" warningText="Warning16 Middle Lid Opened [DI-120]" alarmText="" />
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<IoSensor id="SensorMiddleLidSwingLock" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MiddleLidSwingLock" infoText="Information32 Middle.Lid.Swing.Lock[DI-121]" warningText="" alarmText="" />
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<IoSensor id="SensorMiddleLidSwingUnlock" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MiddleLidSwingUnlock" infoText="Information33 Middle.Lid.Swing.Unlock[DI-122]" warningText="" alarmText="" />
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<IoSensor id="SensorServoReady" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ServoReady" infoText="Information34 Servo Not Ready [DI-288]" warningText="" alarmText="" />
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<IoSensor id="SensorAbortProcessRunning" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_AbortProcessRunning" infoText="Information35 AbortProcess [DI-289]" warningText="" alarmText="" />
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<IoSensor id="SensorPSU1Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PSU1Status" infoText="Information36 PSU1 Status Is Off[DI-296]" warningText="" alarmText="" />
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<IoSensor id="SensorPSU2Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PSU2Status" infoText="Information37 PSU2 Status Is Off[DI-297]" warningText="" alarmText="" />
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<IoSensor id="SensorPSU3Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PSU3Status" infoText="Information38 PSU3 Status Is Off[DI-298]" warningText="" alarmText="" />
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<IoSensor id="SensorSCR1Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SCR1Status" infoText="Information39 SCR1 Status Is Off[DI-302]" warningText="" alarmText="" />
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<IoSensor id="SensorSCR2Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SCR2Status" infoText="Information40 SCR2 Status Is Off[DI-303]" warningText="" alarmText="" />
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<IoSensor id="SensorSCR3Status" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SCR3Status" infoText="Information41 SCR3 Status Is Off[DI-304]" warningText="" alarmText="" />
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<IoSensor id="SensorTempCtrl1L1TempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TempCtrl1L1TempHAlarm" infoText="" warningText="Warning17 PSU Inner.Temp High [DI-305]" alarmText="" />
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<IoSensor id="SensorTempCtrl1L2TempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TempCtrl1L2TempHAlarm" infoText="" warningText="Warning18 PSU Middle.Temp High [DI-306]" alarmText="" />
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<IoSensor id="SensorTempCtrl1L3TempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TempCtrl1L3TempHAlarm" infoText="" warningText="Warning19 PSU Outer.Temp High [DI-307]" alarmText="" />
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<IoSensor id="SensorTempCtrl1L1TempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TempCtrl1L1TempLAlarm" infoText="Information42 PSU.Inner.Temp Low[DI-308]" warningText="" alarmText="" />
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<IoSensor id="SensorTempCtrl1L2TempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TempCtrl1L2TempLAlarm" infoText="Information43 PSU.Middle.Temp Low[DI-309]" warningText="" alarmText="" />
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<IoSensor id="SensorTempCtrl1L3TempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TempCtrl1L3TempLAlarm" infoText="Information44 PSU.Outer.TempLow[DI-310]" warningText="" alarmText="" />
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<IoSensor id="SensorTempCtrl2L1TempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TempCtrl2L1TempHAlarm" infoText="" warningText="Warning20 SCR Upper TempHigh [DI-311]" alarmText="" />
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<IoSensor id="SensorTempCtrl2L2TempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TempCtrl2L2TempHAlarm" infoText="" warningText="Warning21 SCR Middle TempHigh [DI-312]" alarmText="" />
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<IoSensor id="SensorTempCtrl2L3TempHAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TempCtrl2L3TempHAlarm" infoText="" warningText="Warning22 SCR Lower TempHigh [DI-313]" alarmText="" />
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<IoSensor id="SensorTempCtrl2L1TempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TempCtrl2L1TempLAlarm" infoText="Information45 SCR.Upper.Temp Low[DI-314]" warningText="" alarmText="" />
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<IoSensor id="SensorTempCtrl2L2TempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TempCtrl2L2TempLAlarm" infoText="Information46 SCR.Middle.Temp Low[DI-315]" warningText="" alarmText="" />
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<IoSensor id="SensorTempCtrl2L3TempLAlarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TempCtrl2L3TempLAlarm" infoText="Information47 SCR.Lower.Temp Low[DI-316]" warningText="" alarmText="" />
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<IoSensor id="SensorPSU1Alarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSU1Alarm" infoText="" warningText="" alarmText="Alarm52 PSU1.Alarm [DI-320]" />
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<IoSensor id="SensorPSU2Alarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSU2Alarm" infoText="" warningText="" alarmText="Alarm53 PSU2.Alarm [DI-321]" />
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<IoSensor id="SensorPSU3Alarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSU3Alarm" infoText="" warningText="" alarmText="Alarm54 PSU3.Alarm [DI-322]" />
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<IoSensor id="SensorSCR1Alarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCR1Alarm" infoText="" warningText="" alarmText="Alarm55 SCR1.Alarm [DI-323]" />
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<IoSensor id="SensorSCR2Alarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCR2Alarm" infoText="" warningText="" alarmText="Alarm56 SCR2.Alarm [DI-324]" />
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<IoSensor id="SensorSCR3Alarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCR3Alarm" infoText="" warningText="" alarmText="Alarm57 SCR3.Alarm [DI-325]" />
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<IoSensor id="SensorTempCtrl1dpCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TempCtrl1dpCommunicationError" infoText="" warningText="" alarmText="Alarm59 PSU dp Communication Error [DI-328]" />
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<IoSensor id="SensorTempCtrl2dpCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TempCtrl2dpCommunicationError" infoText="" warningText="" alarmText="Alarm60 SCR dp Communication Error [DI-329]" />
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<IoSensor id="SensorPSU1dpCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSU1dpCommunicationError" infoText="" warningText="" alarmText="Alarm61 PSU-1 dp Communication Error [DI-330]" />
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<IoSensor id="SensorPSU2dpCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSU2dpCommunicationError" infoText="" warningText="" alarmText="Alarm62 PSU-2 dp Communication Error [DI-331]" />
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<IoSensor id="SensorPSU3dpCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PSU3dpCommunicationError" infoText="" warningText="" alarmText="Alarm63 PSU-3 dp Communication Error [DI-332]" />
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<IoSensor id="SensorSCRdpCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_SCRdpCommunicationError" infoText="" warningText="" alarmText="Alarm64 SCR dp Communication Error [DI-333]" />
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<IoSensor id="SensorTVdpCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TVdpCommunicationError" infoText="" warningText="Warning23 TV.dpCommunicationError [DI-334]" alarmText="" />
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<IoSensor id="SensorMFC60Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC60Offline" infoText="" warningText="" alarmText="Alarm65 MFC60 Offline [DI-335]" />
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<IoSensor id="SensorConfinementRingDone" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ConfinementRingDone" infoText="Information48 ConfinementRingDone [DI-336]" warningText="" alarmText="" />
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<IoSensor id="SensorConfinementRingServoOn" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ConfinementRingServoOn" infoText="Information49 ConfinementRingServoON [DI-337]" warningText="" alarmText="" />
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<IoSensor id="SensorConfinementRingHomed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ConfinementRingHomed" infoText="Information50 ConfinementRingHomed [DI-338]" warningText="" alarmText="" />
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<IoSensor id="SensorConfinementRingBusy" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ConfinementRingBusy" infoText="Information51 ConfinementRingBusy [DI-339]" warningText="" alarmText="" />
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<IoSensor id="SensorConfinementRingOnUpPos" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ConfinementRingOnUpPos" infoText="Information52 ConfinementRingOnUpPos [DI-340]" warningText="" alarmText="" />
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<IoSensor id="SensorConfinementRingOnDownPos" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ConfinementRingOnDownPos" infoText="Information53 ConfinementRingOnDownPos [DI-341]" warningText="" alarmText="" />
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<IoSensor id="SensorConfinementRingServoError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ConfinementRingServoError" infoText="" warningText="Warning24 ConfinementRingServoError [DI-342]" alarmText="" />
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<IoSensor id="SensorInletTotalTempHighSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_InletTotalTempHighSW" infoText="" warningText="Warning25 InletTotalTempHigh [DI-344]" alarmText="" />
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<IoSensor id="SensorChamPressAboveATMSW2" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ChamPressAboveATMSW2" infoText="" warningText="" alarmText="Alarm66 Chamber Press Above ATM [DI-345]" />
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<IoSensor id="SensorPMTMS7ComErr" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PMTMS7ComErr" infoText="" warningText="Warning26 PM_TM.S7ComErr [DI-347]" alarmText="" />
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<IoSensor id="SensorPMTMTCPComErr" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PMTMTCPComErr" infoText="" warningText="Warning27 PM_TM.TCPComErr [DI-348]" alarmText="" />
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<IoSensor id="SensorEtherCATcomError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_EtherCATcomError" infoText="" warningText="" alarmText="Alarm67 EtherCATcomError [DI-349]" />
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<IoSensor id="SensorHearbeatTimeout" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_HearbeatTimeout" infoText="" warningText="" alarmText="Alarm100 PM Hearbeat Timeout [DI-350]" />
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<IoSensor id="SensorMFC01Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC01Offline" infoText="" warningText="" alarmText="Alarm101 MFC01 Offline [DI-351]" />
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<IoSensor id="SensorMFC02Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC02Offline" infoText="" warningText="" alarmText="Alarm102 MFC02 Offline [DI-352]" />
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<IoSensor id="SensorMFC03Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC03Offline" infoText="" warningText="" alarmText="Alarm103 MFC03 Offline [DI-353]" />
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<IoSensor id="SensorMFC04Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC04Offline" infoText="" warningText="" alarmText="Alarm104 MFC04 Offline [DI-354]" />
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<IoSensor id="SensorMFC05Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC05Offline" infoText="" warningText="" alarmText="Alarm105 MFC05 Offline [DI-355]" />
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<IoSensor id="SensorMFC06Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC06Offline" infoText="" warningText="" alarmText="Alarm106 MFC06 Offline [DI-356]" />
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<IoSensor id="SensorMFC07Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC07Offline" infoText="" warningText="" alarmText="Alarm107 MFC07 Offline [DI-357]" />
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<IoSensor id="SensorMFC08Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC08Offline" infoText="" warningText="" alarmText="Alarm108 MFC08 Offline [DI-358]" />
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<IoSensor id="SensorMFC09Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC09Offline" infoText="" warningText="" alarmText="Alarm109 MFC09 Offline [DI-359]" />
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<IoSensor id="SensorMFC10Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC10Offline" infoText="" warningText="" alarmText="Alarm110 MFC10 Offline [DI-360]" />
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<IoSensor id="SensorMFC11Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC11Offline" infoText="" warningText="" alarmText="Alarm111 MFC11 Offline [DI-361]" />
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<IoSensor id="SensorMFC12Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC12Offline" infoText="" warningText="" alarmText="Alarm112 MFC12 Offline [DI-362]" />
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<IoSensor id="SensorMFC13Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC13Offline" infoText="" warningText="" alarmText="Alarm113 MFC13 Offline [DI-363]" />
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<IoSensor id="SensorMFC14Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC14Offline" infoText="" warningText="" alarmText="Alarm114 MFC14 Offline [DI-364]" />
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<IoSensor id="SensorMFC15Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC15Offline" infoText="" warningText="" alarmText="Alarm115 MFC15 Offline [DI-365]" />
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<IoSensor id="SensorMFC16Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC16Offline" infoText="" warningText="" alarmText="Alarm116 MFC16 Offline [DI-366]" />
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<IoSensor id="SensorMFC17Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC17Offline" infoText="" warningText="" alarmText="Alarm117 MFC17 Offline [DI-367]" />
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<IoSensor id="SensorMFC18Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC18Offline" infoText="" warningText="" alarmText="Alarm118 MFC18 Offline [DI-368]" />
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<IoSensor id="SensorMFC19Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC19Offline" infoText="" warningText="" alarmText="Alarm119 MFC19 Offline [DI-369]" />
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<IoSensor id="SensorMFC20Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC20Offline" infoText="" warningText="" alarmText="Alarm120 MFC20 Offline [DI-370]" />
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<IoSensor id="SensorMFC21Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC21Offline" infoText="" warningText="" alarmText="Alarm121 MFC21 Offline [DI-371]" />
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<IoSensor id="SensorMFC22Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC22Offline" infoText="" warningText="" alarmText="Alarm122 MFC22 Offline [DI-372]" />
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<IoSensor id="SensorMFC23Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC23Offline" infoText="" warningText="" alarmText="Alarm123 MFC23 Offline [DI-373]" />
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<IoSensor id="SensorMFC24Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC24Offline" infoText="" warningText="" alarmText="Alarm124 MFC24 Offline [DI-374]" />
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<IoSensor id="SensorMFC25Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC25Offline" infoText="" warningText="" alarmText="Alarm125 MFC25 Offline [DI-375]" />
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<IoSensor id="SensorMFC26Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC26Offline" infoText="" warningText="" alarmText="Alarm126 MFC26 Offline [DI-376]" />
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<IoSensor id="SensorMFC27Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC27Offline" infoText="" warningText="" alarmText="Alarm127 MFC27 Offline [DI-377]" />
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<IoSensor id="SensorMFC28Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC28Offline" infoText="" warningText="" alarmText="Alarm128 MFC28 Offline [DI-378]" />
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<IoSensor id="SensorMFC29Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC29Offline" infoText="" warningText="" alarmText="Alarm129 MFC29 Offline [DI-379]" />
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<IoSensor id="SensorMFC30Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC30Offline" infoText="" warningText="" alarmText="Alarm130 MFC30 Offline [DI-380]" />
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<IoSensor id="SensorMFC31Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC31Offline" infoText="" warningText="" alarmText="Alarm131 MFC31 Offline [DI-381]" />
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<IoSensor id="SensorMFC32Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC32Offline" infoText="" warningText="" alarmText="Alarm132 MFC32 Offline [DI-382]" />
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<IoSensor id="SensorMFC33Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC33Offline" infoText="" warningText="" alarmText="Alarm133 MFC33 Offline [DI-383]" />
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<IoSensor id="SensorMFC34Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC34Offline" infoText="" warningText="" alarmText="Alarm134 MFC34 Offline [DI-384]" />
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<IoSensor id="SensorMFC35Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC35Offline" infoText="" warningText="" alarmText="Alarm135 MFC35 Offline [DI-385]" />
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<IoSensor id="SensorMFC36Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC36Offline" infoText="" warningText="" alarmText="Alarm136 MFC36 Offline [DI-386]" />
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<IoSensor id="SensorMFC37Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC37Offline" infoText="" warningText="" alarmText="Alarm137 MFC37 Offline [DI-387]" />
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<IoSensor id="SensorMFC38Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC38Offline" infoText="" warningText="" alarmText="Alarm138 MFC38 Offline [DI-388]" />
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<IoSensor id="SensorMFC39Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC39Offline" infoText="" warningText="" alarmText="Alarm139 MFC39 Offline [DI-389]" />
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<IoSensor id="SensorMFC40Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC40Offline" infoText="" warningText="" alarmText="Alarm140 MFC40 Offline [DI-390]" />
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<IoSensor id="SensorPC01Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC01Offline" infoText="" warningText="" alarmText="Alarm141 PC1 Offline [DI-391]" />
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<IoSensor id="SensorPC02Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC02Offline" infoText="" warningText="" alarmText="Alarm142 PC2 Offline [DI-392]" />
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<IoSensor id="SensorPC03Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC03Offline" infoText="" warningText="" alarmText="Alarm143 PC3 Offline [DI-393]" />
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<IoSensor id="SensorPC04Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC04Offline" infoText="" warningText="" alarmText="Alarm144 PC4 Offline [DI-394]" />
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<IoSensor id="SensorPC05Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC05Offline" infoText="" warningText="" alarmText="Alarm145 PC5 Offline [DI-395]" />
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<IoSensor id="SensorPC06Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC06Offline" infoText="" warningText="" alarmText="Alarm146 PC6 Offline [DI-396]" />
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<IoSensor id="SensorPC07Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC07Offline" infoText="" warningText="" alarmText="Alarm147 PC7 Offline [DI-397]" />
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<IoSensor id="SensorPC08Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC08Offline" infoText="" warningText="" alarmText="Alarm148 PC8 Offline [DI-398]" />
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<IoSensor id="SensorPC09Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC09Offline" infoText="" warningText="" alarmText="Alarm149 PC9 Offline [DI-399]" />
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<IoSensor id="SensorPC10Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC10Offline" infoText="" warningText="" alarmText="Alarm150 PC10 Offline [DI-400]" />
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<IoSensor id="SensorReactorPressRisingRateFast" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ReactorPressRisingRateFast" infoText="" warningText="" alarmText="Alarm68 ReactorPressRisingRateFast [DO192]" />
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<IoSensor id="SensorChamMiddleFlow2Temp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ChamMiddleFlow2Temp" infoText="" warningText="" alarmText="Alarm69 Chamber Middle Flow2 Cooling Water Over Temp -U4 [DO195]" />
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<IoSensor id="SensorSHFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_SHFlowTemp" infoText="" warningText="" alarmText="Alarm70 SH Cooling Water Temp Over Temp -U1 [DO196]" />
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<IoSensor id="SensorChamTopFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ChamTopFlowTemp" infoText="" warningText="" alarmText="Alarm71 Chamber Top Cooling Water Over Temp -U2 [DO197]" />
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<IoSensor id="SensorChamMiddleFlow1Temp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ChamMiddleFlow1Temp" infoText="" warningText="" alarmText="Alarm72 Chamber Middle Flow1 Cooling Water Over Temp -U3 [DO198]" />
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<IoSensor id="SensorChamBottomFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ChamBottomFlowTemp" infoText="" warningText="" alarmText="Alarm73 Chamber Bottom Cooling Water Over Temp -U5 [DO199]" />
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<IoSensor id="SensorForeline1FlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_Foreline1FlowTemp" infoText="" warningText="" alarmText="Alarm74 Spare Cooling Water Over Temp -U6 [DO200]" />
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<IoSensor id="SensorPowerRod1FlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_PowerRod1FlowTemp" infoText="" warningText="" alarmText="Alarm75 Power Rod1 Cooling Water Over Temp -U7 [DO201]" />
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<IoSensor id="SensorPowerRod2FlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_PowerRod2FlowTemp" infoText="" warningText="" alarmText="Alarm76 Power Rod2 Cooling Water Over Temp -U8 [DO202]" />
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|
<IoSensor id="SensorForeline2FlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_Foreline2FlowTemp" infoText="" warningText="" alarmText="Alarm77 Foreline Cooling Water Over Temp -U9 [DO203]" />
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|
<IoSensor id="SensorElectrodeWFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ElectrodeWFlowTemp" infoText="" warningText="" alarmText="Alarm78 Electrode-W Cooling Water Over Temp -U10 [DO204]" />
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|
<IoSensor id="SensorTMPump1FlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_TMPump1FlowTemp" infoText="" warningText="" alarmText="Alarm79 TMPump1 Cooling Water Over Temp -U11 [DO205]" />
|
|
<IoSensor id="SensorTransformerFlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_TransformerFlowTemp" infoText="" warningText="" alarmText="Alarm80 Transformer Cooling Water Over Temp -U14 [DO206]" />
|
|
<IoSensor id="SensorSpare1FlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_Spare1FlowTemp" infoText="" warningText="" alarmText="Alarm81 Spare1 Flow.Temp Over Temp -U12 [DO207]" />
|
|
<IoSensor id="SensorSpare2FlowTemp" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_Spare2FlowTemp" infoText="" warningText="" alarmText="Alarm82 Spare2 Flow.Temp Over Temp -U13 [DO208]" />
|
|
<IoSensor id="SensorAbortProcessReset" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" do="DO_AbortProcessReset" infoText="Information54 AbortProcess.Reset [DI-209]" warningText="" alarmText="" />
|
|
<IoSensor id="SensorPyroCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" do="DO_PyroCommunicationError" infoText="" warningText="" alarmText="Alarm83 Pyro Communication Error [DO220]" />
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</IoSensors>
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<SicServos classType="Aitex.Core.RT.Device.Devices.SicServo" assembly="MECF.Framework.RT.EquipmentLibrary">
|
|
<SicServo id="PMServo" module="" display="PMServo" schematicId="PMServo" unit="" aioType="float"
|
|
aiActualSpeed="AI_ActualSpeed"
|
|
aiActualCurrent="AI_ActualCurrent"
|
|
aiAccSpeed="AI_ActualSpeedACC"
|
|
aiDecSpeed="AI_ActualSpeedDEC"
|
|
aoActualSpeedSetPoint="AO_SpindleSpeed"
|
|
aoAccSpeedSetPoint="AO_SpindleACC"
|
|
aoDecSpeedSetPoint="AO_SpindleDEC"
|
|
diServoReady="DI_ServoReady"
|
|
diServoError="DI_ServoDriverFaultSW"
|
|
doServoEnable="DO_ServoEnable"
|
|
doServoInital="DO_ServoInitial"
|
|
doServoReset="DO_ServoReset" />
|
|
</SicServos>
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|
<IoSignalTowers classType="MECF.Framework.RT.EquipmentLibrary.Devices.IoSignalTower" assembly="MECF.Framework.RT.EquipmentLibrary">
|
|
<IoSignalTower id="SignalTower" module="PM1" display="SignalTower" schematicId="PMSignalTower"
|
|
eventFile="STEvents.xml"
|
|
doGreen="DO_TowerGreen"
|
|
doYellow="DO_TowerYellow"
|
|
doRed="DO_TowerRed"
|
|
doBuzzer="DO_Buzzer" />
|
|
</IoSignalTowers>
|
|
<IoChamberMoveBodys classType="Aitex.Core.RT.Device.Devices.IoChamberMoveBody" assembly="MECF.Framework.RT.EquipmentLibrary">
|
|
<IoChamberMoveBody id="ChamberMoveBody" module="" display="ChamberMoveBody" schematicId="ChamberMoveBody" unit="" aioType="" diUpFaceback="DI_ChamMoveBodyUp" diDownFaceback="DI_ChamMoveBodyDown" diFront=" DI_ChamMoveBodyFront" diEndFaceback="DI_ChamMoveBodyEnd" doUpSetpoint="DO_ChamMoveBodyUp" doDownSetpoint="DO_ChamMoveBodyDown" doUpBrake="DO_ChamMoveBodyUpAirBrake" doForward="DO_ChamMoveBodyForward" doBackward="DO_ChamMoveBodyBackward" doForwardLatch="DO_ChamMoveBodyBrakerForward" doBackwardLatch="DO_ChamMoveBodyBrakerBackward" diForwardLatch="DI_ChamMoveBodyUpLatchFW" diBackwardLatch="DI_ChamMoveBodyEndLatchBW" diRemote="DI_ChamLidPushButtonLocal" diLock="DI_ManualLidUpPB" diUpDownEnable="DI_ChamMoveBodyUpDownEnableFB" doUpDownEnable="DO_ChamMoveBodyUpDownEnable" />
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|
</IoChamberMoveBodys>
|
|
<IoGasConnectors classType="Aitex.Core.RT.Device.Devices.IoGasConnector" assembly="MECF.Framework.RT.EquipmentLibrary">
|
|
<IoGasConnector id="GasConnector" module="" display="GasConnector" schematicId="GasConnector" unit="" aioType="" diGasConnectorLoosen="DI_SHGasConnectorLoosen" diGasConnectorTighten="DI_SHGasConnectorTighten" doGasConnectorLoosen="DO_SHGasConnectorLoosen" doGasConnectorTighten="DO_SHGasConnectorTighten" />
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|
</IoGasConnectors>
|
|
<IoLids classType="Aitex.Core.RT.Device.Devices.IoLid" assembly="MECF.Framework.RT.EquipmentLibrary">
|
|
<IoLid id="SHLid" module="" display="SH Lid" schematicId="SHLid" unit="" aioType="" diLoosenFaceback="DI_SHLidLoosen" diTightenFaceback="DI_SHLidTighten" diClosedFaceback="DI_SHLidClosed" doLoosenSetpoint="DO_SHLidLoosen" doTightenSetpoint="DO_SHLidTighten" />
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|
<IoLid id="MiddleLid" module="" display="Middle Lid" schematicId="MiddleLid" unit="" aioType="" diLoosenFaceback="DI_MiddleLidLoosen" diTightenFaceback="DI_MiddleLidTighten" diClosedFaceback="DI_MiddleLidClosed" doLoosenSetpoint="DO_MiddleLidLoosen" doTightenSetpoint="DO_MiddleLidTighten" />
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|
</IoLids>
|
|
<IoLidSwings classType="Aitex.Core.RT.Device.Devices.IoLidSwing" assembly="MECF.Framework.RT.EquipmentLibrary">
|
|
<IoLidSwing id="SHLidSwing" module="" display="SH Lid Swing" schematicId="SHLidSwing" unit="" aioType="" diLidLockFaceback="DI_SHLidSwingLock" diLidUnlockFaceback="DI_SHLidSwingUnlock" doLidLockSetpoint="DO_SHLidSwingLock" doLidUnlockSetpoint="DO_SHLidSwingUnlock" />
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|
<IoLidSwing id="MiddleLidSwing" module="" display="Middle Lid Swing" schematicId="MiddleLidSwing" unit="" aioType="" diLidLockFaceback="DI_MiddleLidSwingLock" diLidUnlockFaceback="DI_MiddleLidSwingUnlock" doLidLockSetpoint="DO_MiddleLidSwingLock" doLidUnlockSetpoint="DO_MiddleLidSwingUnlock" />
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|
</IoLidSwings>
|
|
<IoConfinementRings classType="Aitex.Core.RT.Device.Devices.IoConfinementRing" assembly="MECF.Framework.RT.EquipmentLibrary">
|
|
<IoConfinementRing id="ConfinementRing" module="" display="ConfinementRing" schematicId="ConfinementRing" unit="" aioType="" diRingDownFaceback="DI_ConfinementRingDown" diRingUpFaceback="DI_ConfinementRingUp" diRingDone="DI_ConfinementRingDone" diRingServoOn="DI_ConfinementRingServoOn" diRingHomed="DI_ConfinementRingHomed" diRingBusy="DI_ConfinementRingBusy" diRingServoError="DI_ConfinementRingServoError" doRingServoOn="DO_ConfinementRingServoOn" doRingJogUp="DO_ConfinementRingJogUp" doRingJogDown="DO_ConfinementRingJogDown" doRingStop="DO_ConfinementRingStop" doRingTeachUp="DO_ConfinementRingUpPosTeach" doRingTeachDown="DO_ConfinementRingDownPosTeach" doRingMoveUp="DO_ConfinementRingMoveUp" doRingMoveDown="DO_ConfinementRingMoveDown" aiRingCurPos="AI_ConfinementRingCurPos" aiRingUpPos="AI_ConfinementRingUpPos" aiRingDownPos="AI_ConfinementRingDownPos" aoRingMode="AO_ConfinementRingMode" aoRingSpeed="AO_ConfinementRingSpeed" aoRingDistance="AO_ConfinementRingDistance" doRingServoReset="DO_ConfinementRingServoReset" aoRingUpPos="AO_ConfinementRingUpPos" aoRingDownPos="AO_ConfinementRingDownPos" />
|
|
</IoConfinementRings>
|
|
<IoHeartBeats classType="Aitex.Core.RT.Device.Devices.IoHeartBeat" assembly="MECF.Framework.RT.EquipmentLibrary">
|
|
<IoHeartBeat id="HeartBeat" display="HeartBeat" schematicId="HeartBeat" aioType="float" ai="AI_HeartBeat" ao="AO_HeartBeat" />
|
|
</IoHeartBeats>
|
|
|
|
<IoInterLocks classType="Aitex.Core.RT.Device.Devices.IoInterLock" assembly="MECF.Framework.RT.EquipmentLibrary">
|
|
<IoInterLock id="PMInterLock" display="" schematicId="" unit="" doLidOpenRoutineSucceed="DO_PurgeRoutineSuscessed"
|
|
doLidCloseRoutineSucceed="DO_CleanRoutineSuscessed" doProcessRunning="DO_ProcessRunning" doPreprocessRunning="DO_PreprocessRunning"
|
|
doCyclePurgeRoutineRunning="DO_CyclePurgeRoutineRunning" doExchangeMoRoutineRunning="DO_ExchangeMoRoutineRunning"
|
|
doLidCloseRoutineRunning="DO_CleanRoutineRunning" doLidOpenRoutineRunning="DO_PurgeRoutineRunning"
|
|
doPumpDownRoutineRunning="DO_PumpRoutineRunning" doVentRoutineRunning="DO_VentRoutineRunning"
|
|
doPostProcessRunning="DO_PostProcessRunning" diServoDriverFaultSW="DI_ServoDriverFaultSW" diH2PressureSW="DI_H2PressureSW"
|
|
doVACTransferAllowed="DO_VACTransferAllowed" doATMTransferAllowed="DO_ATMTransferAllowed" doProcessIdleRunning="DO_ProcessIdleRunning"
|
|
doATMIdleRoutineRunning="DO_ATMIdleRoutineRunning" doVACIdleRoutineRunning="DO_VACIdleRoutineRunning" diPSU1Status="DI_PSU1Status"
|
|
diPSU2Status="DI_PSU2Status" diPSU3Status="DI_PSU3Status" diSCR1Status="DI_SCR1Status" diSCR2Status="DI_SCR2Status" diSCR3Status="DI_SCR3Status"
|
|
doPSU1Enable="DO_PSU1Enable" doPSU2Enable="DO_PSU2Enable" doPSU3Enable="DO_PSU3Enable" doSCR1Enable="DO_SCR1Enable"
|
|
doSCR2Enable="DO_SCR2Enable" doSCR3Enable="DO_SCR3Enable" doTCSSupply="DO_TCSFluidInfusion" doTCSSupplementing="DO_TCSSupplementing" diTCSHighLevel1="DI_TCSHighLevel1" diTCSNormalLevel="DI_TCSNormalLevel"
|
|
aiTempCtrl1="AI_PSUTC" doReactorATMTransferReady="DO_ReactorATMTransferReady" doReactorVACTransferReady="DO_ReactorVACTransferReady" diPMATMSW="DI_PMATMSW"
|
|
aiActualSpeed="AI_ActualSpeed" aiCurPos="AI_ConfinementRingCurPos" aiDownPos="AI_ConfinementRingDownPos" diPSUEnable="DI_PSUEnableFB" diHeaterTempBelow900CSW="DI_HeaterTempLowLimitSW"
|
|
doPMASlitDoorClosed="DO_SlitVlvClosed" diChamLidClosed="DI_ChamLidClosed" diConfinementRingDown="DI_ConfinementRingDown"
|
|
aiChamPress="AI_ActualPressure" doReactorPressRisingRate="DO_ReactorPressRisingRateFast" doUPSLowBattery="DO_UPSLowBattery"
|
|
|
|
|
|
doChamMiddleFlow2Temp="DO_ChamMiddleFlow2Temp"
|
|
doSHFlowTemp="DO_SHFlowTemp"
|
|
doChamTopFlowTemp="DO_ChamTopFlowTemp"
|
|
doChamMiddleFlow1Temp="DO_ChamMiddleFlow1Temp"
|
|
doChamBottomFlowTemp="DO_ChamBottomFlowTemp"
|
|
doSpareFlowTemp="DO_SpareFlowTemp"
|
|
doPowerRod1FlowTemp="DO_PowerRod1FlowTemp"
|
|
doPowerRod2FlowTemp="DO_PowerRod2FlowTemp"
|
|
doForelineFlowTemp ="DO_ForelineFlowTemp"
|
|
doElectrodeWFlowTemp="DO_ElectrodeWFlowTemp"
|
|
doTMPump1FlowTemp="DO_TMPump1FlowTemp"
|
|
doTransformerFlowTemp="DO_TransformerFlowTemp"
|
|
doTMTopLidTemp="DO_Spare1FlowTemp"
|
|
doTMBufferFlowTemp="DO_Spare2FlowTemp"
|
|
|
|
aiChamMiddleFlow2Temp="AI_ChamMiddleFlow2Temp"
|
|
aiSHFlowTemp="AI_SHFlowTemp"
|
|
aiChamTopFlowTemp="AI_ChamTopFlowTemp"
|
|
aiChamMiddleFlowTemp="AI_ChamMiddleFlow1Temp"
|
|
aiChamBottomFlowTemp="AI_ChamBottomFlowTemp"
|
|
aiForeline1FlowTemp="AI_Foreline1FlowTemp"
|
|
aiPowerRod1FlowTemp="AI_PowerRod1FlowTemp"
|
|
aiPowerRod2FlowTemp="AI_PowerRod2FlowTemp"
|
|
aiElectrodeWFlowTemp="AI_ElectrodeWFlowTemp"
|
|
aiTMPump1FlowTemp="AI_TMPump1FlowTemp"
|
|
aiTMPump2FlowTemp="AI_Foreline1FlowTemp"
|
|
aiTransformerFlowTemp="AI_TransformerFlowTemp"
|
|
aiForelineFlowTemp="AI_Foreline2FlowTemp"
|
|
aiTMTopLidTemp="AI_Spare1Temp"
|
|
aiTMBufferFlowTemp="AI_Spare2Temp"/>
|
|
</IoInterLocks>
|
|
|
|
<PryoTempChecks classType="MECF.Framework.RT.EquipmentLibrary.Devices.PryoTempCheck" assembly="MECF.Framework.RT.EquipmentLibrary">
|
|
<PryoTempCheck id="PryoTempCheck" display="" schematicId="" unit="" scBasePath="PM.{module}.Heater"
|
|
aoPSUMiddleLoopMode="AO_PSUMiddleLoopMode" aoPSUMiddleTargetSP="AO_PSUMiddleTargetSP"/>
|
|
</PryoTempChecks>
|
|
|
|
</DeviceModelDefine> |