456 lines
19 KiB
C#
456 lines
19 KiB
C#
using System.Collections.Generic;
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using System.Diagnostics;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Devices;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Log;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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using SicModules.PMs.Routines.Base;
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namespace SicModules.PMs.Routines
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{
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public class PMToProcessIdleRoutine : PMBaseRoutine
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{
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private enum RoutineStep
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{
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ConfinementServoOn,
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RotationServoOn,
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RotationEnable,
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HeatEnable,
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VentPumpClose,
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ArSupply,
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OpenH2Valve,
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SetGroupA,
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SetGroupB,
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SetGroupC,
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SetGroupE,
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SetGroupF,
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SetGroupH,
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SetGroupD,
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SetGroupG,
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SetGroupK,
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SetMFCMode,
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SetPCMode,
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SetM1to16,
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SetM17M18,
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SetPC,
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SetGroupJ,
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SetM18toM40,
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SetPC567Close,
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SetPC567Default,
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SetPC567Mode,
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SetGasOut,
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SetTv,
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SetM291519to38,
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SetGasIn1, //V68
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OpenFinal1, //V91-96
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SetMfcFinal1, //M32-38
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SetM18toM26,
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SetTVCloseMode,
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SetTvPositionToZero,
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CheckPM1000,
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SetGasIn2,
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SetGroupJOpen,
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CloseFinal2,
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OpenFinal2,
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SetMfcFinal2,
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WaitPmPressureUp,
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WaitPmPressureUp1020,
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SetTvOpen,
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SetTVEnable,
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SetTVPressMode,
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SetTV,
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SetTvMode,
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SetTVto1050,
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SetTVto300,
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WaitTvTo300,
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CheckPmVac,
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CheckPmAtm,
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CheckV72Open,
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SetV72,
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SetV25,
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SetV76,
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SetV75,
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SetV31,
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SetV32,
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SetV35V36,
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SetV65,
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SetV103,
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SetV105,
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SetEPV1,
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SetEPV2,
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SetEPV11,
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SetEPV22,
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SetTvModeToPress,
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SetMfc28to40Special,
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SetMfc28to40Default,
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SetPressUpOrDown1,
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SetPressureDown,
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EnableRotation,
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EnableHeater,
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SetRotation1,
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WaitRotation1,
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SetTC1Mode,
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SetTC1Ratio,
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SetTC1RatioTo0,
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SetTC1Ref,
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SetTC2Mode,
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SetTC2Ratio,
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SetTC2RatioTo0,
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SetTC2Ref,
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EnableTC1,
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EnableTC2,
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CloseTC1,
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CloseTC2,
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SetFinal1ToDefault,
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SetFinal1To0,
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SetFinal2ToDefault,
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SetFinal2To0,
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CheckFinal1Open,
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CheckFinal2Open,
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CheckTvOpen,
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SetRotation2,
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SetGroupV25,
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SetScrReset,
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CheckEpv2Open,
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CheckEpv1Open,
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SetV92V93V95,
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SetV94,
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SetV96,
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SetV68,
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SetM32M35M37,
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SetM36,
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SetM38,
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WaitPmPressureUp1,
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DelayV25,
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TimeDelay0,
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TimeDelay1,
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TimeDelay2,
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TimeDelay3,
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TimeDelay4,
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TimeDelay5,
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TimeDelay6,
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TimeDelay7,
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TimeDelay8,
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TimeDelay9,
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TimeDelay10,
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TimeDelay11,
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TimeDelay12,
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TimeDelay13,
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TimeDelay14,
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TimeDelay15,
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TimeDelay16,
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TimeDelay20,
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TimeDelay21,
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TimeDelay22,
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Notify1,
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Notify2
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}
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private IoThrottleValve2 _IoThrottle;
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private int _rotationCheckSpeed = 0; //设置旋转速度为0后检查是否转速低于此数值
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private int _rotationCloseTimeout; //旋转停止超时
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private int _IoValueOpenCloseTimeout = 10; //开关超时时间
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private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间
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private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了)
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private int _throttleTimeout; //蝶阀调整到指定压力的超时时间
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private double _throttleFinalPressure = 300;//蝶阀最终调整对的压力
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private bool _psuHeatEnable = false; //是否启用PSU 加热
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private int _psuHeatMode = 0;
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//private float _psuPowerRef = 0;
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private float _psuL1Ratio = 0;
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private float _psuL2Ratio = 0;
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private float _psuL3Ratio = 0;
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private bool _scrHeatEnable = false; //是否启用SCR 加热
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private int _scrHeatMode = 0;
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//private float _scrPowerRef = 0;
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private float _scrL1Ratio = 0;
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private float _scrL2Ratio = 0;
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private float _scrL3Ratio = 0;
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private int _rotationSpeed = 60;
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private int _routineTimeOut;
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private Stopwatch _swTimer = new Stopwatch();
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private IoInterLock _pmInterLock;
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public PMToProcessIdleRoutine(ModuleName module, PMModule pm) : base(module, pm)
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{
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Module = module.ToString();
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Name = "ProcessIdle";
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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_IoThrottle = DEVICE.GetDevice<IoThrottleValve2>($"{Module}.TV");
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_pmInterLock = DEVICE.GetDevice<IoInterLock>($"{Module}.PMInterLock");
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//if (!_pmInterLock.SetPMProcessIdleRunning(true, out string reason))
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//{
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// EV.PostAlarmLog(Module, $"can not run ProcessIdle, {reason}");
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// return Result.FAIL;
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//}
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/*
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* 2025-07-16
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* 执行ProcessIdle Routine需禁用MFC报警；报警只在保持ProcessIdle状态时生效。
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* 这个DO原本用来指示正在执行Routine，现在改为指示PM维持在ProcessIdle状态。
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* 只有维持在ProcessIdle状态时，才会启用MFC报警监测。
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*
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* PM状态机ProcessIdle状态进入和退出时分别设置DOProcessIdleRunning为true和false，因此进入当前Routine时，
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* DOProcessIdleRunning有可能为1，需要强制设置为0；当前Routine执行完毕后再将这个DO设置为1，表示已进入ProcessIdle状态。
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*/
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if (!_pmInterLock.SetPMProcessIdleRunning(false, out var reason))
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{
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LOG.Error($"Failed to set DOProcessIdle to false due to {reason}");
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}
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if (!PmDevice.CheckHeadHeaterEnable(true))
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{
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EV.PostAlarmLog(Module, $"Should set HeatEnable on first!");
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return Result.FAIL;
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}
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//检查隔热罩状态
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if (PmDevice.ConfinementRing.RingServoError || PmDevice.ConfinementRing.RingIsBusy ||
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!PmDevice.ConfinementRing.RingServoOn)
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{
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EV.PostAlarmLog(Module, $"ConfinementRing State abnormal,please check");
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return Result.FAIL;
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}
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////检查磁流体状态
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//if(!PmDevice._sicServo.ServoReady)
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//{
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// EV.PostAlarmLog(Module, $"NAIS Servo State abnormal,please check");
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// return Result.FAIL;
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//}
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_v72IsOpen = false;
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_checkPMPressureOver1000 = false;
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_rotationCloseTimeout = SC.GetValue<int>($"PM.{Module}.RotationCloseTimeout");
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_pmPressureMaxDiff = SC.GetValue<double>($"PM.{Module}.ThrottlePressureMaxDiff");
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_throttleTimeout = SC.GetValue<int>($"PM.{Module}.ThrottlePressureTimeout");
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_rotationSpeed = SC.GetValue<int>($"PM.{Module}.ProcessIdle.RotationSpeed");
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_throttleFinalPressure = SC.GetValue<double>($"PM.{Module}.ProcessIdle.FinalPressure");
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_psuHeatEnable = SC.GetValue<bool>($"PM.{Module}.ProcessIdle.PSUHeaterEnable");
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_psuHeatMode = SC.GetValue<int>($"PM.{Module}.ProcessIdle.PSUHeaterMode");
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_psuL1Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.PSUInnerRatio");
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_psuL2Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.PSUMiddleRatio");
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_psuL3Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.PSUOuterRatio");
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_scrHeatEnable = SC.GetValue<bool>($"PM.{Module}.ProcessIdle.SCRHeaterEnable");
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_scrHeatMode = SC.GetValue<int>($"PM.{Module}.ProcessIdle.SCRHeaterMode");
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_scrL1Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.SCRUpperRatio");
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_scrL2Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.SCRMiddleRatio");
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_scrL3Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.SCRLowerRatio");
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_routineTimeOut = SC.GetValue<int>($"PM.{Module}.ProcessIdle.RoutineTimeOut");
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_finalOpen = false;
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_isTvOpen = false;
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currentPressureUpOrDown = PressureUpOrDown.None;
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_swTimer.Restart();
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Notify("Start");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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CheckRoutineTimeOut();
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//关闭V76,打开V75
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SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout);
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//2、 旋转停止，加热停止（根据配置，配置加热就不需要停止加热，没有配置加热时停止加热） 。
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//SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut);
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SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout);
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//3、 打开 V31（H2.Supply）、 V32(Ar.Supply） 。
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SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout);
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//4、 打开 V35(H2N2.Line1)、 V36(H2N2.Line2)，关闭 B/C/E/F/H/KValves,打开 D/G Valves。
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SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
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//5、 M1-M17 设定为 default 值，所有 PC 设定为 default 值(PC1-PC9)。
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SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.M1to17);
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SetPcToDefault((int)RoutineStep.SetPC, _lstPcList);
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//M1-M16设定为default值(M2、M9、M15除外)
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SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16, 0);
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SetMfcToDefaultByGroup((int)RoutineStep.SetM17M18, MfcGroupName.M17M18, 0);
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//6、 M18-M40（除 M30\M34\M39） MFC 5s ramp 到 0。
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SetMfcByGroup((int)RoutineStep.SetM18toM40, MfcGroupName.M18to40No303439, 0, 5);
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//7、 打开 EPV2。
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SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
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TimeDelay((int)RoutineStep.TimeDelay1, 3);
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//8 、打 开 V87（ SHPurge.Final ）、 V88（ OuterGas.Final）、 V89（ InnerGas.Final ）、 V90（MiddleGas.Final）、 V91（OpticPurge.Final）、 V97（CarryGas.Final）；
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SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout);
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//9、 M27、 M28、 M29、 M31、 M33、 M40 依次设定 3S ramp 到 default 值 ；
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SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal2, MfcGroupName.Final2, 3);
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//10、打开 V92（GasRingPurge.Final）、 V93（ChamberPurge.Final）、 V95（ConfinementRing.Final）；等待 3S
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SetIoValueByGroup((int)RoutineStep.SetV92V93V95, IoGroupName.V92V93V95, true, _IoValueOpenCloseTimeout);
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TimeDelay((int)RoutineStep.TimeDelay2, 3);
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//11、 M32、 M35、 M37 依次设定 3S ramp 到 default 值 ； 等待 3S，打开 V68（ChamBody.N2.Purge）
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SetMfcToDefaultByGroup((int)RoutineStep.SetM32M35M37, MfcGroupName.M32M35M37, 3);
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SetIoValueByGroup((int)RoutineStep.SetV68, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout);
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//12、打开 V94（RotationUpPurge.Final）、 M36 设定 5S ramp 到 default 值；等待 3S，打开V96（HeaterWF.Final）； M38 依次设定 5S ramp 到 default 值 ；
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SetIoValueByGroup((int)RoutineStep.SetV94, IoGroupName.V94, true, _IoValueOpenCloseTimeout);
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SetMfcToDefaultByGroup((int)RoutineStep.SetM36, MfcGroupName.M36, 5);
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TimeDelay((int)RoutineStep.TimeDelay3, 3);
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SetIoValueByGroup((int)RoutineStep.SetV96, IoGroupName.V96, true, _IoValueOpenCloseTimeout);
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SetMfcToDefaultByGroup((int)RoutineStep.SetM38, MfcGroupName.M38, 5);
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TimeDelay((int)RoutineStep.TimeDelay4, 3);
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//13、打开 J Valves ； 设置 M18-M26 3s ramp 到 default 值。
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SetIoValueByGroup((int)RoutineStep.SetGroupJOpen, IoGroupName.J, true, _IoValueOpenCloseTimeout);
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SetMfcToDefaultByGroup((int)RoutineStep.SetM18toM26, MfcGroupName.M18toM26, 3);
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//14、 打开 TV enable, 压力模式，伺服压力默认设定为 1050mbar；
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SetThrottleEnableAndWait((int)RoutineStep.SetTVEnable, _IoThrottle, 5);
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SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode, _IoThrottle, 5);
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SetThrottleToTargetAndNoWait((int)RoutineStep.SetTV, _IoThrottle, 1050);
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//15、打开 V72(GasBox.Vent.Pump） 关闭 V25(GasBox.Vent.Bypass)， 反应腔压力伺服到300mbar（可配置）
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SetIoValueByGroup((int)RoutineStep.SetV72, IoGroupName.VentPump, true, _IoValueOpenCloseTimeout);
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TimeDelay((int)RoutineStep.TimeDelay5, 1);
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SetIoValueByGroup((int)RoutineStep.SetV25, IoGroupName.V25, false, _IoValueOpenCloseTimeout);
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SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown1, PressureUpOrDown.Dowing);
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SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureDown, _IoThrottle, _throttleFinalPressure);
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WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.SetTVto300, _IoThrottle, _throttleFinalPressure, _pmPressureMaxDiff, _throttleTimeout);
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//16、设定转速（可配置）
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EnableRotation((int)RoutineStep.EnableRotation, 5);
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SetRotationValveAndNoWait((int)RoutineStep.SetRotation1, _rotationSpeed);
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//17、加热使能（PSU 和 SCR）（可配置）
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if (_psuHeatEnable)
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{
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//打开PSU加热
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SetPSUEnable((int)RoutineStep.EnableTC1, true, 5);
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SetPSUHeatMode((int)RoutineStep.SetTC1Mode, _psuHeatMode);
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TimeDelay((int)RoutineStep.TimeDelay6, 1);
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SetPSUHeatRatio((int)RoutineStep.SetTC1Ratio, _psuL1Ratio, _psuL2Ratio, _psuL3Ratio);
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}
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else
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{
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//关闭PSU加热
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SetPSUHeatRatio((int)RoutineStep.SetTC1RatioTo0, 0, 0, 0);
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SetPSUEnable((int)RoutineStep.CloseTC1, false, 5);
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}
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if (_scrHeatEnable)
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{
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//打开SCR加热
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SetSCRReset((int)RoutineStep.SetScrReset);
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TimeDelay((int)RoutineStep.TimeDelay7, 1);
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SetSCREnable((int)RoutineStep.EnableTC2, true, 5);
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SetSCRHeatMode((int)RoutineStep.SetTC2Mode, _scrHeatMode);
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TimeDelay((int)RoutineStep.TimeDelay8, 1);
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SetSCRHeatRatio((int)RoutineStep.SetTC2Ratio, _scrL1Ratio, _scrL2Ratio, _scrL3Ratio);
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}
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else
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{
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//关闭SCR加热
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SetSCRHeatRatio((int)RoutineStep.SetTC2RatioTo0, 0, 0, 0);
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SetSCREnable((int)RoutineStep.CloseTC2, false, 5);
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}
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WaitRotationValve((int)RoutineStep.WaitRotation1, _rotationSpeed, true, _rotationSpeed / 2);
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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return Result.FAIL;
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}
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// _pmInterLock.SetPMProcessIdleRunning(false, out string reason);
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if (!_pmInterLock.SetPMProcessIdleRunning(true, out string reason))
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{
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LOG.Error($"Failed to set DOProcessIdle to true due to {reason}");
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}
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Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
|
||
_swTimer.Stop();
|
||
|
||
return Result.DONE;
|
||
}
|
||
|
||
|
||
private void CheckRoutineTimeOut()
|
||
{
|
||
if (_routineTimeOut > 10)
|
||
{
|
||
if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
|
||
{
|
||
Notify($"Routine TimeOut! over {_routineTimeOut} s");
|
||
throw (new RoutineFaildException());
|
||
}
|
||
}
|
||
}
|
||
|
||
public override void Abort()
|
||
{
|
||
_pmInterLock.SetPMProcessIdleRunning(false, out string reason);
|
||
PmDevice._ioThrottleValve.StopRamp();
|
||
PmDevice.SetMfcStopRamp(PmDevice.GetMfcListByGroupName(MfcGroupName.All));
|
||
PmDevice.SetHeaterStopRamp();
|
||
PmDevice.SetRotationStopRamp();
|
||
PmDevice.SetRotationServo(0, 0);
|
||
|
||
base.Abort();
|
||
}
|
||
}
|
||
} |