288 lines
10 KiB
C#
288 lines
10 KiB
C#
using Aitex.Core.RT.DataCenter;
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using System;
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using System.Collections.Generic;
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using System.Linq;
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namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.Temps
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{
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public enum DataType
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{
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Wafer,
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Tray,
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}
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/// <summary>
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/// 测温点位置
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/// </summary>
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public enum EnumZoneNum
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{
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Center,
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CenterEdge,
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Edge
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}
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public class AKunTriggerChannelWaferTempData
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{
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/// <summary>
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/// 创建通道对应的单个晶圆温度对象
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/// </summary>
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/// <param name="waferNum">晶圆编号</param>
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/// <param name="ch">测温设备通道编号</param>
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/// <param name="name">当前晶圆对象的名称，Wafer or Tray,测温对象也能反馈Tray温度</param>
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public AKunTriggerChannelWaferTempData(int waferNum, int ch = 1, string name = "Wafer")
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{
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Detector = ch;
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WaferNum = waferNum;
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WaferName = $"CH{Detector}.{name}{waferNum}"; //eg: CH1.Wafer1 CH1.Wafer2 CH2.Wafer1 CH2.Wafer2
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}
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/// <summary>
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/// 通道编号，默认为1
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/// </summary>
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public int Detector { get; set; }
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public string WaferName { get; set; }
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public int WaferNum { get; set; }
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public DataType Type { get; set; }
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public double Temp { get; set; }
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public int ZoneNum { get; set; }
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public EnumZoneNum ZoneNumSelect { get; set; }
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/// <summary>
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/// 0表示无效晶圆代表Dummy晶圆或者空位，此位置的温度不能参与STC控温
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/// </summary>
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public int PocketNum { get; set; }
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/// <summary>
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/// The reflection of 404nm
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/// </summary>
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public double Reflect1 { get; set; }
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/// <summary>
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/// The reflection of 633nm.
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/// </summary>
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public double Reflect2 { get; set; }
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/// <summary>
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/// The reflection of 950nm.
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/// </summary>
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public double Reflect3 { get; set; }
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public double Curvature { get; set; }
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/// <summary>
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/// false不参与控温，晶圆温度是否参与区域计算，不放片或者放Dummy时，不参与区域计算
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/// </summary>
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public bool CalZone { get; set; }
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public void UpData(AKunTriggerChannelWaferTempData newData)
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{
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// 确保传入的 newData 对象不为空
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if (newData == null)
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{
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throw new ArgumentNullException(nameof(newData));
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}
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Detector = newData.Detector;
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WaferNum = newData.WaferNum;
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Temp = newData.Temp;
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ZoneNum = newData.ZoneNum;
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ZoneNumSelect = newData.ZoneNumSelect;
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Reflect1 = newData.Reflect1;
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Curvature = newData.Curvature;
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}
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}
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public class AKunTriggerTempDataManager(int waferNum, double minTemp)
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{
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private readonly int _waferNum = waferNum;
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private double _minTemp = minTemp;
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private List<AKunTriggerChannelWaferTempData> _waferTempDataList = new();
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private static readonly object _lock = new object();
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#region 重新整理温度解析
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public bool ProcessReceivedData(string tcpReceive)
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{
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lock (_lock)
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{
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List<AKunTriggerChannelWaferTempData> tempDataList = new List<AKunTriggerChannelWaferTempData>();
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AKunTriggerChannelWaferTempData aKunChWaferTempData;
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string[] keyValuePairs = tcpReceive.Split('\0');
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for (int i = 0; i < keyValuePairs.Length - 1; i++)
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{
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aKunChWaferTempData = new AKunTriggerChannelWaferTempData(-999);
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string[] keyValues = keyValuePairs[i].Split(',');
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foreach (string pair in keyValues)
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{
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string[] keyValue = pair.Split('=');
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switch (keyValue[0])
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{
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case "Detector":
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aKunChWaferTempData.Detector = int.Parse(keyValue[1]);
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break;
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case "PocketNum":
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aKunChWaferTempData.PocketNum = int.Parse(keyValue[1]);
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break;
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case "WaferNum":
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aKunChWaferTempData.WaferNum = int.Parse(keyValue[1]);
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break;
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case "CalZone":
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aKunChWaferTempData.CalZone = int.Parse(keyValue[1]) == 1;
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break;
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case "TTemp":
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aKunChWaferTempData.Temp = double.Parse(keyValue[1]);
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break;
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case "ZoneNum":
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aKunChWaferTempData.ZoneNum = int.Parse(keyValue[1]);
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aKunChWaferTempData.ZoneNumSelect =
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(EnumZoneNum)Enum.Parse(typeof(EnumZoneNum), keyValue[1]);
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break;
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case "Reflec1":
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aKunChWaferTempData.Reflect1 = double.Parse(keyValue[1]);
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break;
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case "Reflec2":
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aKunChWaferTempData.Reflect2 = double.Parse(keyValue[1]);
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break;
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case "Reflec3":
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aKunChWaferTempData.Reflect3 = double.Parse(keyValue[1]);
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break;
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case "Curvature":
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aKunChWaferTempData.Curvature = double.Parse(keyValue[1]);
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break;
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}
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}
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if (aKunChWaferTempData.WaferNum == -999)
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return true;
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tempDataList.Add(aKunChWaferTempData);
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}
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_waferTempDataList = tempDataList;
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return true;
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}
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}
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public bool[] GetCalZone()
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{
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bool[] calZone = new bool[_waferNum];
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if (_waferTempDataList.Count < _waferNum)
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return calZone;
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for (int i = 0; i < _waferNum; i++) //只有前面几个数据，是需要统计是否参与计算
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{
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calZone[i] = _waferTempDataList[i].CalZone;
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}
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return calZone;
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}
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//public double[] GetWaferTemp()
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//{
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// double[] waferTemps = Enumerable.Repeat(_minTemp, _waferNum).ToArray();
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// if (_waferTempDataList.Count < _waferNum)
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// return waferTemps;
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// int count = (_waferTempDataList.Count - 1) / _waferNum ;//分区数计算，最后一个数据是托盘的，所以减一，
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// if ((_waferTempDataList.Count - 1) % _waferNum != 0)//分区数量不是整数，温度不解析防呆，
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// return waferTemps;
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// for (int i = 0; i < _waferNum; i++) //Wafer温度只取每个晶圆的第一个设置的中心温度
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// {
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// var index = i * count;
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// waferTemps[i] = _waferTempDataList[index].Temp;//直接使用第一个中心温度作为中心温度
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// //要求不判断中心点，只用第一个分区温度
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// //for (int j = index; j < index + count ; j++)
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// //{
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// // if(_waferTempDataList[j].ZoneNum==0)
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// // {
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// // waferTemps[i] = _waferTempDataList[j].Temp;//有中心温度设置，获取第一个中心温度作为晶圆温度
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// // break;
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// // }
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// //}
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// }
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// return waferTemps;
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//}
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public double[] GetWaferTemp()
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{
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double[] waferTemps = Enumerable.Repeat(_minTemp, _waferNum).ToArray();
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if (_waferTempDataList.Count < _waferNum)
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return waferTemps;
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//这届
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for (int i = 0; i < _waferNum; i++) //只有前面几个温度数据，才是需要统计的
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{
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waferTemps[i] = _waferTempDataList[i].Temp;
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}
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//_waferTempDataList[i].CalZone
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//for (int i = 0; i < _waferNum; i++)
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//{
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// //根据编号，获取同一分区所有温度数据
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// var tempCaches = _waferTempDataList.Where(item => item.PocketNum == i + 1);
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// if (tempCaches != null && tempCaches.Count() > 0)
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// {
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// //同一分区所有温度数据，查找第一个CalZone为true的温度数据
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// var matchedItem = tempCaches.Where(item => item.CalZone).FirstOrDefault();
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// if (matchedItem != null)
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// waferTemps[i] = matchedItem.Temp;
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// else
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// waferTemps[i] = tempCaches.First().Temp;//未设置CalZone为true，使用当前分区第一个数据作为默认温度值
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// }
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// else
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// waferTemps[i] = -1;//没有分区温度是乱的无法解析，使用-1作为提示
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//}
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return waferTemps;
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}
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public double GetTrayTemp()
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{
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if (_waferTempDataList.Count == 0)
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return _minTemp;
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return _waferTempDataList[_waferTempDataList.Count - 1].Temp; //最后一个数据才是Tray温度
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}
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#endregion 重新整理温度解析
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public List<double[]> GetReflectValue()
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{
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List<double[]> reflectList = Enumerable.Range(0, _waferNum)
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.Select(_ => new double[3]) // 每个数组默认元素为 0
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.ToList();
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if (_waferTempDataList.Count < _waferNum)
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return reflectList;
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for (int i = 0; i < _waferNum; i++) //只有前面几个反射率数据，才是需要统计的
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{
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var data = _waferTempDataList[i];
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reflectList.Add([data.Reflect1, data.Reflect2, data.Reflect3]);
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}
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return reflectList;
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}
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}
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} |