278 lines
11 KiB
C#
278 lines
11 KiB
C#
using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Devices;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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using MECF.Framework.RT.EquipmentLibrary.HardwareUnits.MFCs;
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using SicModules.PMs.Routines.Base;
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using System.Collections.Generic;
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using System.Diagnostics;
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namespace SicModules.PMs.Routines
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{
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public class PMVentRoutine : PMBaseRoutine
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{
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private enum RoutineStep
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{
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RotationEnable,
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HeatEnable,
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VentPumpClose,
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ArSupply,
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SetGroupA,
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SetGroupB,
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SetGroupC,
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SetGroupE,
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SetGroupF,
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SetGroupH,
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SetGroupD,
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SetGroupG,
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SetGroupK,
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SetMFCMode,
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SetPCMode,
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SetM1to16,
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SetM17M18,
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SetM18toM40,
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SetPC,
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SetM291519to38,
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SetGroupJ,
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SetM19to38,
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SetGasOut,
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SetTv,
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SetGasIn1, //V68
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OpenFinal1, //V91-96
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SetMfcFinal1, //M32-38
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SetMfc19to26,
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SetTVCloseMode,
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SetTvPositionToZero,
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CheckPM1000,
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SetGasIn2,
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SetGroupJOpen,
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SetM291519to26,
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OpenFinal2,
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SetMfcFinal2,
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WaitPmPressureUp,
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WaitPmPressureUp1,
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SetEPV1,
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SetEPV2,
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SetTvMode,
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SetEPVV1,
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SetMfc28to40Special,
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SetMfc28to40Default,
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SetPC567Close,
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SetPC567Mode,
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SetPC567Default,
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CheckFinal1Open,
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SetV76,
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SetV75,
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SetV31,
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SetV32,
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SetV35V36,
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SetV103,
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SetV105,
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SetGroupV25,
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SetV92V93V95,
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SetV94,
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SetV96,
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SetV68,
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SetM32M35M37,
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SetM36,
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SetM38,
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TimeDelay1,
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TimeDelay2,
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TimeDelay3,
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TimeDelay4,
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TimeDelay5,
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TimeDelay6,
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TimeDelay7,
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TimeDelay8,
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TimeDelay9,
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TimeDelay10,
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TimeDelay11,
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TimeDelay18,
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TimeDelay20,
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TimeDelay21,
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TimeDelay22,
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Notify1, SetM1toM17
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}
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private IoThrottleValve2 _IoThrottle;
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private IoInterLock _pmIoInterLock;
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private int _rotationCheckSpeed = 0; //设置旋转速度为0后检查是否转速低于此数值
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private int _rotationCloseTimeout; //旋转停止超时
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private int _IoValueOpenCloseTimeout = 10; //开关超时时间
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private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间
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private int _waitPMPressureUpTimeout = 300; //等待反应腔压力到达1000的超时时间
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private int _routineTimeOut;
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private double _ventBasePressure;
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private Stopwatch _swTimer = new Stopwatch();
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public PMVentRoutine(ModuleName module, PMModule pm) : base(module, pm)
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{
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Module = module.ToString();
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Name = "Vent";
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_IoThrottle = DEVICE.GetDevice<IoThrottleValve2>($"{Module}.TV");
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_pmIoInterLock = DEVICE.GetDevice<IoInterLock>($"{Module}.PMInterLock");
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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_rotationCloseTimeout = SC.GetValue<int>($"PM.{Module}.RotationCloseTimeout");
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_routineTimeOut = SC.GetValue<int>($"PM.{Module}.Vent.RoutineTimeOut");
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_ventBasePressure = SC.GetValue<double>($"PM.{Module}.Vent.VentBasePressure");
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_waitPMPressureUpTimeout = SC.GetValue<int>($"PM.{Module}.Vent.VentTimeout");
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currentPressureUpOrDown = PressureUpOrDown.None;
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_swTimer.Restart();
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_finalOpen = false;
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if (!_pmIoInterLock.SetPMVentRoutineRunning(true, out string reason))
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{
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EV.PostAlarmLog(Module, $"can not Vent,{reason}");
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return Result.FAIL;
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}
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Notify("Start");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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CheckRoutineTimeOut();
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//DOR Pump 抽真空。关闭V76,打开V75
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SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout);
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//旋转停止,加热停止
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SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut);
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SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout);
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//关闭V72,打开V25
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SetIoValueByGroup((int)RoutineStep.VentPumpClose, IoGroupName.VentPump, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout);
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//打开V31,打开V32
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SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout);
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//5、 打开 V35(H2N2.Line1)、 V36（H2N2.Line2） , 关闭 B/ C / E / F / H / K Valves,打开 D/ G Valves 。
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SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupA, IoGroupName.A, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
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//6、 M1-M17 设定为 default 值， 所有 PC 设定为 default 值（PC1-PC9） ，M18 - M40（除 M30\M34\M39） MFC 5s ramp 到 0。
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SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All);
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SetMfcToDefaultByGroup((int)RoutineStep.SetM1toM17, MfcGroupName.M1toM17, 5);
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SetPcToDefault((int)RoutineStep.SetPC, _lstPcList);
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SetMfcToDefaultByGroup((int)RoutineStep.SetM18toM40, MfcGroupName.M18toM40No303439, 5);
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//7、 关闭蝶阀， 再关闭 EPV2
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SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode, _IoThrottle, 8);
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SetThrottleDisable((int)RoutineStep.SetTvPositionToZero, _IoThrottle, 8);
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TimeDelay((int)RoutineStep.TimeDelay1, 1);
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SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout);
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//8、 打开 A Valves（V33S(SH.H2/N2 Switch); V67、 V68(N2.Supply） ).
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SetIoValueByGroup((int)RoutineStep.SetGroupA, IoGroupName.A, true, _IoValueOpenCloseTimeout);
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//9 、 打 开 V87 （ SHPurge.Final ）、 V88 （ OuterGas.Final ）、 V89 （ InnerGas.Final ）、 V90（MiddleGas.Final） 、 V91（OpticPurge.Final）、 V97（CarryGas.Final） ；
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//M27、 M28、 M29、 M31、 M33、 M40 依次设定 3S ramp 到 default 值 ；
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SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout);
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SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal2, MfcGroupName.Final2, 3);
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//10、 打开 V92（GasRingPurge.Final）、 V93（ChamberPurge.Final）、 V95（ConfinementRing.Final）；等待 3S
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SetIoValueByGroup((int)RoutineStep.SetV92V93V95, IoGroupName.V92V93V95, true, _IoValueOpenCloseTimeout);
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TimeDelay((int)RoutineStep.TimeDelay2, 3);
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//11、 M32、 M35、 M37 依次设定 3S ramp 到 default 值 ； 等待 3S，
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SetMfcToDefaultByGroup((int)RoutineStep.SetM32M35M37, MfcGroupName.M32M35M37, 3);
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//12、 打开 J Valves ；设置 M18-M26 3s ramp 到 default 值。
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//等到腔体压力达到 900 mbar打开 V94（RotationUpPurge.Final）、 M36 设定 5S ramp 到 default 值；
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//等待 3S，打开 V96（HeaterWF.Final）； M38 设定 5S ramp 到 default 值；
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SetIoValueByGroup((int)RoutineStep.SetGroupJOpen, IoGroupName.J, true, _IoValueOpenCloseTimeout);
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WaitPMPressureAndSetMfcSpecial((int)RoutineStep.WaitPmPressureUp1, 900, _waitPMPressureUpTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV94, IoGroupName.V94, true, _IoValueOpenCloseTimeout);
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SetMfcToDefaultByGroup((int)RoutineStep.SetM36, MfcGroupName.M36, 5);
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TimeDelay((int)RoutineStep.TimeDelay3, 3);
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SetIoValueByGroup((int)RoutineStep.SetV96, IoGroupName.V96, true, _IoValueOpenCloseTimeout);
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SetMfcToDefaultByGroup((int)RoutineStep.SetM38, MfcGroupName.M38, 5);
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//13、 压力达到 1020，结束
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NotifyInfo((int)RoutineStep.Notify1, $"Wait pm pressure to {_ventBasePressure} mbar!");
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WaitPMPressureAndSetMfcSpecial((int)RoutineStep.WaitPmPressureUp, _ventBasePressure, _waitPMPressureUpTimeout); //等待反应腔压力大于1000
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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return Result.FAIL;
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}
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_pmIoInterLock.SetPMVentRoutineRunning(false, out _);
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Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
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_swTimer.Stop();
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return Result.DONE;
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}
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public override void Abort()
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{
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_pmIoInterLock.SetPMVentRoutineRunning(false, out _);
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PmDevice._ioThrottleValve.StopRamp();
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PmDevice.SetMfcStopRamp(PmDevice.GetMfcListByGroupName(MfcGroupName.All));
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PmDevice.SetRotationServo(0, 0);
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base.Abort();
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}
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private void CheckRoutineTimeOut()
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{
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if (_routineTimeOut > 10)
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{
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if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
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{
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EV.PostAlarmLog(Module, $"Routine TimeOut! over {_routineTimeOut} s");
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throw (new RoutineFaildException());
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}
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}
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}
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}
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} |