<?xml version="1.0" encoding="utf-8"?>
<Aitex>
	<TableRecipeFormat RecipeChamberType="Sic" RecipeVersion="1.0">

		<!--###########################################-->
		<Catalog DisplayName="StepInfo">
			<Group DisplayName="Step Information">
				<Step ModuleName="" DeviceType=""  InputType="ReadOnly"   DisplayName="Step" UnitName="" ControlName="StepNo" />
				<Step ModuleName="" DeviceType=""  InputType="TextInput"  DisplayName="Name" UnitName="" ControlName="Name" />
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="Time" UnitName="s" ControlName="Time" InputMode="" Min="0" Max="10000" Description="" />
        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="Growth Rate" UnitName="μm/h" ControlName="GrowthRate" InputMode="" Min="0" Max="10000" Description="" />
			</Group>
		</Catalog>

		<Catalog DisplayName="StepInfo">
			<Group DisplayName="SH Flow->SH Total Flow">
				<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="1. Ar/H2 Switch" UnitName="" ControlName="SHArH2Switch.SetValve"  Description="">
					<Item DisplayName="Ar" ControlName="Ar" />
					<Item DisplayName="H2"  ControlName="H2" />
				</Step>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="2. SH Total Flow" UnitName="sccm" ControlName="SHTotalFlow" InputMode="" Min="0" Max="1000000" Description=""/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="3. Carry Gas Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
				<Step ModuleName="" DeviceType=""  InputType="Set3RatioInput"    DisplayName="4. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/>
				<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="5. Flow Set Mode" UnitName="" ControlName="FlowSetMode"  Description="">
					<Item DisplayName="Ramp" ControlName="Ramp" />
					<Item DisplayName="Jump"  ControlName="Jump" />
				</Step>
			</Group>

			<Group DisplayName="Pressure -> Rotation">
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="6. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="10000" Description=""/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="7. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed"  InputMode="" Min="0" Max="10000" Description=""/>
			</Group>
		</Catalog>

		<Catalog DisplayName="StepInfo">
			<Group DisplayName="Temperature -> Control Mode">
				<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="8. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode"  Description="">
					<Item DisplayName="Pyro" ControlName="Pyro" />
					<Item DisplayName="TC" ControlName="TC" />
					<Item DisplayName="Power"  ControlName="Power" />
				</Step>
				<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="9. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode"  Description="">
					<Item DisplayName="Ramp" ControlName="Ramp" />
					<Item DisplayName="Jump"  ControlName="Jump" />
				</Step>
				<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="10. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2"  Description="">
					<Item DisplayName="Pyro" ControlName="Pyro" />
					<Item DisplayName="TC" ControlName="TC" />
					<Item DisplayName="Power"  ControlName="Power" />
				</Step>
				<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="11. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode"  Description="">
					<Item DisplayName="Ramp" ControlName="Ramp" />
					<Item DisplayName="Jump"  ControlName="Jump" />
				</Step>
			</Group>

			<Group DisplayName="Temperature -> Temp Setting">
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="12. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="13. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="14. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="15. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
			</Group>

			<Group DisplayName="Temperature -> Heater Output">
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="16. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="17. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="18. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />

				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="19. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="20. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="21. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
			</Group>

		</Catalog>

		<Catalog DisplayName="StepInfo">

			<Group DisplayName="SH Flow->Si Source->Si Source Total Flow">
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="22. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
			</Group>

			<Group DisplayName="SH Flow->Si Source->SiH4 Flow">
				<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="23. SiH4 Flow Mode" UnitName="" ControlName="SiH4.SetValve"  Description="">
					<Item DisplayName="Purge" ControlName="Purge" />
					<Item DisplayName="Vent"  ControlName="Vent" />
					<Item DisplayName="Run"  ControlName="Run" />
				</Step>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="24. SiH4 Flow (M14)" UnitName="sccm" ControlName="Mfc14.Ramp" InputMode="" Min="0" Max="10000" Description="M14.SiH4Flow"/>
			</Group>

			<Group DisplayName="SH Flow->Si Source->TCS Flow">
				<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="25. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve"  Description="">
					<Item DisplayName="Purge" ControlName="Purge" />
					<Item DisplayName="Vent"  ControlName="Vent" />
					<Item DisplayName="Run"  ControlName="Run" />
				</Step>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="26. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="27. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="28. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="29. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
			</Group>

			<Group DisplayName="SH Flow->Si Source->HCl Flow">
				<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="30. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve"  Description="">
					<Item DisplayName="Purge" ControlName="Purge" />
					<Item DisplayName="Vent"  ControlName="Vent" />
					<Item DisplayName="Run"  ControlName="Run" />
				</Step>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="31. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
			</Group>

			<Group DisplayName="SH Flow->Si Source->Si Source Split">
				<Step ModuleName="" DeviceType=""  InputType="Set3RatioInput"    DisplayName="32. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="33. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="34. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="35. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="36. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
			</Group>

			<Group DisplayName="SH Flow->C Source->C Source Total Flow">
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="37. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
			</Group>


			<Group DisplayName="SH Flow->C Source->C2H4 Flow">
				<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="38. C2H4 Flow Mode" UnitName="" ControlName="C2H4.SetValve"  Description="">
					<Item DisplayName="Purge" ControlName="Purge" />
					<Item DisplayName="Vent"  ControlName="Vent" />
					<Item DisplayName="Run"  ControlName="Run" />
				</Step>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="39. C2H4 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C2H4Flow"/>


			</Group>

			<Group DisplayName="SH Flow->C Source->C Source Split">
				<Step ModuleName="" DeviceType=""  InputType="Set3RatioInput"    DisplayName="42. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="43. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="44. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="45. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="46. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
			</Group>

			<Group DisplayName="SH Flow->Dope->Dope Total Flow">
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="47. Dope Total Flow" UnitName="sccm" ControlName="DopeTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
			</Group>
			<Group DisplayName="SH Flow->Dope->N2 Flow">
				<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="48. N2 Flow Mode" UnitName="" ControlName="N2Dilution.SetValve"  Description="">
					<Item DisplayName="Purge" ControlName="Purge" />
					<Item DisplayName="Vent"  ControlName="Vent" />
					<Item DisplayName="Run"  ControlName="Run" />
				</Step>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="49. N2 Actual Flow" UnitName="sccm" ControlName="N2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2 Actual Flow"/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="50. N2 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="51. Dilut Flow For N2 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="52. Diluted N2 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="53. N2 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
				<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="54. N2 High Flow Mode" UnitName="" ControlName="N2HighDoping.SetValve"  Description="N2 HIGH FLOW MODE">
					<Item DisplayName="Purge" ControlName="Purge" />
					<Item DisplayName="Vent"  ControlName="Vent" />
					<Item DisplayName="Run"  ControlName="Run" />
				</Step>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="55. N2 High Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
			</Group>

			<Group DisplayName="SH Flow->Dope->TMA Flow">
				<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="56. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve"  Description="TMA FLOW MODE">
					<Item DisplayName="Purge" ControlName="Purge" />
					<Item DisplayName="Vent"  ControlName="Vent" />
					<Item DisplayName="Run"  ControlName="Run" />
				</Step>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="57. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="58. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="59. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
			</Group>

			<Group DisplayName="SH Flow->Dope->Dope Split">
				<Step ModuleName="" DeviceType=""  InputType="Set3RatioInput"    DisplayName="60. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="64. Dope Push Pressure (PC5)" UnitName="mbar" ControlName="Pressure5.Ramp" InputMode="" Min="0" Max="10000" Description="PC5.DopePushPressure"/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="62. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M20.DopeInnerFlow"/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="63. Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19.DopeMidFlow"/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="61. Dope Outer Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M2.DopeOuterFlow"/>
			</Group>

			<Group DisplayName="SH Flow->SH Push Flow">
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="65. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="66. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="67. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="68. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false"  Description=""/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="69. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="70. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="71. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
			</Group>
		</Catalog>

		<Catalog DisplayName="StepInfo">
			<Group DisplayName="Purge->SH Periphery Purge">
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="72. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="73. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
			</Group>

			<Group DisplayName="Purge->Chamber Periphery Purge">
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="74. GasRing Purge Flow (M32)" UnitName="sccm"  ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="1000000" Description="M32.GasRingPurgeFlow"/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="75. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="76. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="77. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="78. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
			</Group>

			<Group DisplayName="Purge->Vent Flow">
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="79. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="80. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="81. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
			</Group>
		</Catalog>

		<!--*************************************************************-->
		<ProcessConfig DisplayName="ProcessConfig">
			<Configs DisplayName="Process Config">
			</Configs>
		</ProcessConfig>

	</TableRecipeFormat>

	<TableRecipeSchema>
		<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
			<xs:simpleType name="processType">
				<xs:restriction base="xs:string">
					<xs:enumeration value="Process" />
					<xs:enumeration value="Clean" />
				</xs:restriction>
			</xs:simpleType>
			<xs:simpleType name="booleanType">
				<xs:restriction base="xs:string">
					<xs:enumeration value="0" />
					<xs:enumeration value="1" />
					<xs:enumeration value="False" />
					<xs:enumeration value="True" />
					<xs:enumeration value="false" />
					<xs:enumeration value="true" />
				</xs:restriction>
			</xs:simpleType>
			<xs:element name="TableRecipeData">
				<xs:complexType>
					<xs:sequence>
						<xs:element maxOccurs="unbounded" name="Step">
							<xs:complexType>
								<xs:sequence>

									<xs:element name="Mfc">
										<xs:complexType>
											<xs:attribute name="Flow.Gas1" type="xs:double" use="optional" />
											<xs:attribute name="Flow.Gas2" type="xs:double" use="optional" />
											<xs:attribute name="Flow.Gas3" type="xs:double" use="optional" />
											<xs:attribute name="Flow.Gas4" type="xs:double" use="optional" />
										</xs:complexType>
									</xs:element>

								</xs:sequence>
								<xs:attribute name="StepNo" type="xs:string" use="required" />
								<xs:attribute name="Name" type="xs:string" use="required" />
								<xs:attribute name="Loop" type="xs:string" use="required" />
								<xs:attribute name="Type" type="xs:string" use="required" />
								<xs:attribute name="StepTime" type="xs:time" use="optional" />
							</xs:complexType>
						</xs:element>
					</xs:sequence>
					<xs:attribute name="RecipeChamberType" type="xs:string" fixed="Strip" use="required" />
					<xs:attribute name="RecipeProcessType" type="xs:string" use="required" />
					<xs:attribute name="RecipeVersion" type="xs:string" fixed="1.0" use="required" />
					<xs:attribute name="CreatedBy" type="xs:string" use="required" />
					<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
					<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
					<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
					<xs:attribute name="Description" type="xs:string" use="required" />
				</xs:complexType>
			</xs:element>
		</xs:schema>
	</TableRecipeSchema>
</Aitex>