<?xml version="1.0" ?>
<Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
  <Action do="TM.DO_LoadSlowPump" value="true" tip="" tip.zh-CN="" tip.en-US="DO-0">
    <Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="TM.DI_TMDryPump1Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-43"/>
    <Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
    <Limit di="TM.DI_LoadVentFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-101"/>
    <Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
  </Action>
  
  <Action do="TM.DO_LoadFastPump" value="true" tip="" tip.zh-CN="" tip.en-US="DO-1">
    <Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="TM.DI_TMDryPump1Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-43"/>
    <Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
    <Limit di="TM.DI_LoadVentFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-101"/>
    <Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
  </Action>
  
  <Action do="TM.DO_LoadVent" value="true" tip="" tip.zh-CN="" tip.en-US="DO-5">
    <Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="TM.DI_LoadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-97"/>
    <Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
    <Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
  </Action>
  
  <Action do="TM.DO_TMSlowPump" value="true" tip="" tip.zh-CN="" tip.en-US="DO-2">
    <Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
    <Limit di="TM.DI_TMDryPump1Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-43"/>
    <Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
    <Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
    <Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>

  </Action>
  
  <Action do="TM.DO_TMFastPump" value="true" tip="" tip.zh-CN="" tip.en-US="DO-3">
    <Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
    <Limit di="TM.DI_TMDryPump1Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-43"/>
    <Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
    <Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
    <Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
  </Action>
  
  <Action do="TM.DO_TMVent" value="true" tip="" tip.zh-CN="" tip.en-US="DO-6">
    <Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
    <Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
  </Action>

  <Action do="TM.DO_TMCyclePurgeRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-89">
    <Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
    <Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
    <Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
    <Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
    <Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
  </Action>
  
  <Action do="TM.DO_TMLeakCheckRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-90">
    <Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
    <Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
    <Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
    <Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
    <Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
  </Action>
  
  <Action do="TM.DO_TMPumpDownRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-91">
    <Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
    <Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
    <Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
    <Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
    <Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
  </Action>
  
  <Action do="TM.DO_TMServoPressRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-92">
    <Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
    <Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
    <Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
    <Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
    <Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
  </Action>
  
  <Action do="TM.DO_TMVentUpRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-93">
    <Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
    <Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
    <Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
    <Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
    <Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
  </Action>
  
  <Action do="TM.DO_LoadCyclePurgeRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-94">
    <Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
    <Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
    <Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
  </Action>
  
  <Action do="TM.DO_LoadLeakCheckRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-95">
    <Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
    <Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
    <Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
  </Action>
  
  <Action do="TM.DO_LoadPumpDownRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-96">
    <Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
    <Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
    <Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
  </Action>
  
  <Action do="TM.DO_LoadVentUpRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-97">
    <Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
    <Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
    <Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
  </Action>
  
  <Action do="TM.DO_LoadDoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-9">
    <Limit do="TM.DO_VacRobotExtenLoadEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-19"/>
    <Limit di="TM.DI_RobotOnBackPos" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
  </Action>

  
  <Action do="TM.DO_RectorADoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-13">
    <Limit do="TM.DO_VacRobotExtendPMAEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-21"/>
    <Limit di="TM.DI_RobotOnBackPos" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
  </Action>
  
  <Action do="TM.DO_RectorBDoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-15">
    <Limit do="TM.DO_VacRobotExtendPMBEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-22"/>
    <Limit di="TM.DI_RobotOnBackPos" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
  </Action>



  <Action do="TM.DO_VacRobotExtenLoadEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-19">
    <Limit di="TM.DI_LoadDoorOpened" value="true" tip="" tip.zh-CN="" tip.en-US="DI-1"/>
    <Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
  </Action>
  <Action do="TM.DO_VacRobotExtendUnloadEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-20">
    <Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
  </Action>

  <Action do="TM.DO_VacRobotExtendPMAEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-21">
    <Limit di="TM.DI_ReactorADoorOpened" value="true" tip="" tip.zh-CN="" tip.en-US="DI-5"/>
    <Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
  </Action>
  
  <Action do="TM.DO_VacRobotExtendPMBEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-22">
    <Limit di="TM.DI_ReactorBDoorOpened" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
    <Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
  </Action>
  
  <Action do="TM.DO_VacRobotExtendBufferEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-23">
    <Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
  </Action>

  <Action do="TM.DO_RectorADoorOpen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-14">
    <Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
    <Limit pollbool="TM.IsPressureAbs_TM_PMA_DValue_In50" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>  
  </Action>
  
  <Action do="TM.DO_RectorBDoorOpen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-16">
    <Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
    <Limit pollbool="TM.IsPressureAbs_TM_PMB_DValue_In50" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
  </Action>

  <Action do="TM.DO_LoadDoorOpen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-10">
    <Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
    <Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
    <Limit pollbool="TM.IsPressureAbs_TM_Load_DValue_In50" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
  </Action>

  <Action do="TM.DO_UnloadStationDoorOpen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-12">
    <Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
    <Limit di="TM.DI_UnloadStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-14"/>
    <Limit pollbool="TM.IsPressureAbs_TM_Unload_DValue_In50" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
  </Action>

  <Action do="TM.DO_TMToPMABanlance(V70-1)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-47">
    <Limit pollbool="TM.IsPressureAbs_TM_PMA_DValue_In50" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
  </Action>
  <Action do="TM.DO_TMToPMBBanlance(V70-2)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-48">
    <Limit pollbool="TM.IsPressureAbs_TM_PMB_DValue_In50" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
  </Action>
  <Action do="TM.DO_TMToUnloadBanlance" value="true" tip="" tip.zh-CN="" tip.en-US="DO-17">
    <Limit pollbool="TM.IsPressureAbs_TM_Unload_DValue_In50" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
  </Action>
  <Action do="TM.DO_TMLoadBanlance" value="true" tip="" tip.zh-CN="" tip.en-US="DO-8">
    <Limit pollbool="TM.IsPressureAbs_TM_Load_DValue_In50" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
  </Action>
</Interlock>
