<?xml version="1.0" encoding="utf-8"?>
<DeviceModelDefine type="Sic" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
  <IoTCs classType="Aitex.Core.RT.Device.Devices.IoTC" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoTC id="TC1" display="TC1" schematicId="TC1" isDBSaveTemp="true" aioType="float" aiL1WorkingOPFeedBack="AI_PSUInnerWorkingOP" aiL2WorkingOPFeedBack="AI_PSUMiddleWorkingOP" aiL3WorkingOPFeedBack="AI_PSUOuterWorkingOP" aiL1PVFeedBack="AI_PSUInnerPV" aiL2PVFeedBack="AI_PSUMiddlePV" aiL3PVFeedBack="AI_PSUOuterPV" diL1TempHighAlarmFeedBack="DI_PSUInnerTempHAlarm" diL2TempHighAlarmFeedBack="DI_PSUMiddleTempHAlarm" diL3TempHighAlarmFeedBack="DI_PSUOuterTempHAlarm" diL1TempLowAlarmFeedBack="DI_PSUInnerTempLAlarm" diL2TempLowAlarmFeedBack="DI_PSUMiddleTempLAlarm" diL3TempLowAlarmFeedBack="DI_PSUOuterTempLAlarm" aoHeaterModeSetPoint="AO_PSUHeaterMode" aoPowerRefSetPoint="AO_PSUPowerRef" aoL1RatioSetPoint="AO_PSUInnerRatio" aoL2RatioSetPoint="AO_PSUMiddleRatio" aoL3RatioSetPoint="AO_PSUOuterRatio" aoL1RatedSetPoint="AO_PSUInnerRatedValue" aoL2RatedSetPoint="AO_PSUMiddleRatedValue" aoL3RatedSetPoint="AO_PSUOuterRatedValue" aoL1LoopModeSetPoint="AO_PSUInnerLoopMode" aoL2LoopModeSetPoint="AO_PSUMiddleLoopMode" aoL3LoopModeSetPoint="AO_PSUOuterLoopMode" aoL1TargetSPSetPoint="AO_PSUInnerTargetSP" aoL2TargetSPSetPoint="AO_PSUMiddleTargetSP" aoL3TargetSPSetPoint="AO_PSUOuterTargetSP" aoL1TargetOPSetPoint="AO_PSUInnerTargetOP" aoL2TargetOPSetPoint="AO_PSUMiddleTargetOP" aoL3TargetOPSetPoint="AO_PSUOuterTargetOP" aoPIDLimitLower="AO_PIDLimitLower" aoPIDLimitUpper="AO_PIDLimitUpper" aoPIDRateLimit="AO_PIDRateLimit" aoL1InputTempSetPoint="AO_PSUInnerPyroTemp" aoL2InputTempSetPoint="AO_PSUMiddlePyroTemp" aoL3InputTempSetPoint="AO_PSUOuterPyroTemp" aoTCPyroModeSetPoint="AO_PSUTCPyroMode" aoL1VoltageLimited="AO_PSUInnerVoltageLimited" aoL2VoltageLimited="AO_PSUMiddleVoltageLimited" aoL3VoltageLimited="AO_PSUOuterVoltageLimited" aoL1TempHighLimitSetPoint="AO_PSUInnerTempHighLimit" aoL2TempHighLimitSetPoint="AO_PSUMiddleTempHighLimit" aoL3TempHighLimitSetPoint="AO_PSUOuterTempHighLimit" aoL1TempLowLimitSetPoint="AO_PSUInnerTempLowLimit" aoL2TempLowLimitSetPoint="AO_PSUMiddleTempLowLimit" aoL3TempLowLimitSetPoint="AO_PSUOuterTempLowLimit" aiTtempCtrlTCIN="AI_PSUTC" aoPSU1Y="AO_PSU1Y" aoPSU2Y="AO_PSU2Y" aoPSU3Y="AO_PSU3Y"
      diPSUInnerHeaterEnable="DI_InnerHeaterEnableFB"
      diPSUMiddleHeaterEnable="DI_MiddleHeaterEnableFB"
      diPSUOuterHeaterEnable="DI_OuterHeaterEnableFB"
      diSCRUpHeaterEnable="DI_SCR1Status"
      diSCRMiddleHeaterEnable="DI_SCR2Status"
      diSCRDownHeaterEnable="DI_SCR3Status"
      aoPLCTargetOPLowLimit="AO_PLCTargetOPLowLimit"   aoPLCTargetOPUpLimit="AO_PLCTargetOPUpLimit" 
		  doPLCTempFilterEN="DO_PLCTempFilterEN" doPLCTargetOPCtrlEN="DO_PLCTargetOPCtrlEN" />

    <IoTC id="TC2" display="TC2" schematicId="TC2" isDBSaveTemp="false" aioType="float" aiL1WorkingOPFeedBack="AI_SCRUpperWorkingOP" aiL2WorkingOPFeedBack="AI_SCRMiddleWorkingOP" aiL3WorkingOPFeedBack="AI_SCRLowerWorkingOP" aiL1PVFeedBack="AI_SCRUpperPV" aiL2PVFeedBack="AI_SCRMiddlePV" aiL3PVFeedBack="AI_SCRLowerPV" diL1TempHighAlarmFeedBack="DI_SCRUpperTempHAlarm" diL2TempHighAlarmFeedBack="DI_SCRMiddleTempHAlarm" diL3TempHighAlarmFeedBack="DI_SCRLowerTempHAlarm" diL1TempLowAlarmFeedBack="DI_SCRUpperTempLAlarm" diL2TempLowAlarmFeedBack="DI_SCRMiddleTempLAlarm" diL3TempLowAlarmFeedBack="DI_SCRLowerTempLAlarm" aoHeaterModeSetPoint="AO_SCRHeaterMode" aoPowerRefSetPoint="AO_SCRPowerRef" aoL1RatioSetPoint="AO_SCRUpperRatio" aoL2RatioSetPoint="AO_SCRMiddleRatio" aoL3RatioSetPoint="AO_SCRLowerRatio" aoL1RatedSetPoint="AO_SCRUpperRatedValue" aoL2RatedSetPoint="AO_SCRMiddleRatedValue" aoL3RatedSetPoint="AO_SCRLowerRatedValue" aoL1LoopModeSetPoint="AO_SCRUpperLoopMode" aoL2LoopModeSetPoint="AO_SCRMiddleLoopMode" aoL3LoopModeSetPoint="AO_SCRLowerLoopMode" aoL1TargetSPSetPoint="AO_SCRUpperTargetSP" aoL2TargetSPSetPoint="AO_SCRMiddleTargetSP" aoL3TargetSPSetPoint="AO_SCRLowerTargetSP" aoL1TargetOPSetPoint="AO_SCRUpperTargetOP" aoL2TargetOPSetPoint="AO_SCRMiddleTargetOP" aoL3TargetOPSetPoint="AO_SCRLowerTargetOP" aoPIDLimitLower="AO_SCRUpperRecipeValue" aoPIDLimitUpper="AO_SCRMiddleRecipeValue" aoPIDRateLimit="AO_SCRLowerRecipeValue" aoL1InputTempSetPoint="AO_SCRUpperPyroTemp" aoL2InputTempSetPoint="AO_SCRMiddlePyroTemp" aoL3InputTempSetPoint="AO_SCRLowerPyroTemp" aoTCPyroModeSetPoint="AO_SCRTCPyroMode" aoL1VoltageLimited="AO_SCRUpperVoltageLimited" aoL2VoltageLimited="AO_SCRMiddleVoltageLimited2" aoL3VoltageLimited="AO_SCRLowerVoltageLimited" aoL1TempHighLimitSetPoint="AO_SCRUpperTempHighLimit" aoL2TempHighLimitSetPoint="AO_SCRMiddleTempHighLimit" aoL3TempHighLimitSetPoint="AO_SCRLowerTempHighLimit" aoL1TempLowLimitSetPoint="AO_SCRUpperTempLowLimit" aoL2TempLowLimitSetPoint="AO_SCRMiddleTempLowLimit" aoL3TempLowLimitSetPoint="AO_SCRLowerTempLowLimit" aiTtempCtrlTCIN="AI_SCRTC"
      diPSUInnerHeaterEnable="DI_InnerHeaterEnableFB"
      diPSUMiddleHeaterEnable="DI_MiddleHeaterEnableFB"
      diPSUOuterHeaterEnable="DI_OuterHeaterEnableFB"
      diSCRUpHeaterEnable="DI_SCR1Status"
      diSCRMiddleHeaterEnable="DI_SCR2Status"
      diSCRDownHeaterEnable="DI_SCR3Status"/>
  </IoTCs>
  
  <IoOmronTemps classType="Aitex.Core.RT.Device.Devices.IoOmronTemp" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoTC id="OmronTemp" display="OmronTemp" schematicId="OmronTemp" aioType="float" aoCH1="" aoCH2="" aoCH3="" aoCH4="" aoCH5="" aoCH6="" aoCH7="" aoCH8="" aoCH9="" aoCH10="" aoCH11="" aoCH12="" doLineHeaterEnable="DO_LineHeaterEnable" />
  </IoOmronTemps>
  <IoPSUs classType="Aitex.Core.RT.Device.Devices.IoPSU" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoPSU id="PSU1" display="PSU1" schematicId="PSU1" aioType="float"
           scBasePath="PM.{module}.Heater" scResLimitMax="PSU1ResistanceMax"
           diPSUCommunicationError="DI_PSUdpCommunicationError" diSCRCommunicationError="DI_SCRTCDPCommunicationError"
           aiOutputVoltage="AI_PSU1OutputVoltage" aiOutputArms="AI_PSU1OutputArms" aiOutputPower="AI_PSU1OutputPower" aiSimVoltage="AI_PSU1SimVoltage" aiSimArms="AI_PSU1SimArms" doStatus="DO_PSU1Enable" doReset="DO_PSU1Reset" aoConstant="AO_PSU1Constant" diStatus="DI_InnerHeaterEnableFB" diAlarm="DI_PSU1Alarm" AlarmText="Alarm66  PSU1 Alarm[DI-320]" diCommunicationError="DI_PSU1dpCommunicationError" commAlarmText="" doHeatEnable="DO_HeaterEnable" diHeatEnable="DI_PSUEnableFB" doRelatedEnable="DO_InnerHeaterEnable" />
    <IoPSU id="PSU2" display="PSU2" schematicId="PSU2" aioType="float"
           scBasePath="PM.{module}.Heater" scResLimitMax="PSU2ResistanceMax"
           aoOutputLimitHigh="AO_PSU2OutputLimitHigh"
           aoOutputLimitLow="AO_PSU2OutputLimitLow"
           diPSUCommunicationError="DI_PSUdpCommunicationError" diSCRCommunicationError="DI_SCRTCDPCommunicationError"
           aiOutputVoltage="AI_PSU2OutputVoltage" aiOutputArms="AI_PSU2OutputArms" aiOutputPower="AI_PSU2OutputPower" aiSimVoltage="AI_PSU2SimVoltage" aiSimArms="AI_PSU2SimArms" doStatus="DO_PSU2Enable" doReset="DO_PSU2Reset" aoConstant="AO_PSU2Constant" diStatus="DI_MiddleHeaterEnableFB" diAlarm="DI_PSU2Alarm" AlarmText="Alarm67  PSU2 Alarm[DI-321]" diCommunicationError="DI_PSU2dpCommunicationError" commAlarmText="" doHeatEnable="DO_HeaterEnable" diHeatEnable="DI_PSUEnableFB" doRelatedEnable="DO_MiddleHeaterEnable" />
    <IoPSU id="PSU3" display="PSU3" schematicId="PSU3" aioType="float"
           scBasePath="PM.{module}.Heater" scResLimitMax="PSU3ResistanceMax"
           diPSUCommunicationError="DI_PSUdpCommunicationError" diSCRCommunicationError="DI_SCRTCDPCommunicationError"
           aiOutputVoltage="AI_PSU3OutputVoltage" aiOutputArms="AI_PSU3OutputArms" aiOutputPower="AI_PSU3OutputPower" iSimVoltage="AI_PSU3SimVoltage" aiSimArms="AI_PSU3SimArms" doStatus="DO_PSU3Enable" doReset="DO_PSU3Reset" aoConstant="AO_PSU3Constant" diStatus="DI_OuterHeaterEnableFB" diAlarm="DI_PSU3Alarm" AlarmText="Alarm68  PSU3 Alarm[DI-322]" diCommunicationError="DI_PSU3dpCommunicationError" commAlarmText="" doHeatEnable="DO_HeaterEnable" diHeatEnable="DI_PSUEnableFB" doRelatedEnable="DO_OuterHeaterEnable" />
  </IoPSUs>
  <IoSCRs classType="Aitex.Core.RT.Device.Devices.IoSCR" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoSCR id="SCR1" display="SCR1" schematicId="SCR1" aioType="float" 
           scBasePath="PM.{module}.Heater" scResLimitMax="SCR1ResistanceMax"
           diPSUCommunicationError="DI_PSUdpCommunicationError" diSCRCommunicationError="DI_SCRTCDPCommunicationError"
           aiVoltage="AI_SCR1Voltage" aiArms="AI_SCR1Arms" aiPower="AI_SCR1Power" diStatus="DI_SCR1Status" doReset="DO_SCR1Reset" doStatus="DO_SCR1Enable" diAlarm="DI_SCR1Alarm" AlarmText="" />
    <IoSCR id="SCR2" display="SCR2" schematicId="SCR2" aioType="float" 
           scBasePath="PM.{module}.Heater" scResLimitMax="SCR2ResistanceMax"
           diPSUCommunicationError="DI_PSUdpCommunicationError" diSCRCommunicationError="DI_SCRTCDPCommunicationError"
           aiVoltage="AI_SCR2Voltage" aiArms="AI_SCR2Arms" aiPower="AI_SCR2Power" diStatus="DI_SCR2Status" doReset="DO_SCR2Reset" doStatus="DO_SCR2Enable" diAlarm="DI_SCR2Alarm" AlarmText="" />
    <IoSCR id="SCR3" display="SCR3" schematicId="SCR3" aioType="float" 
           scBasePath="PM.{module}.Heater" scResLimitMax="SCR3ResistanceMax"
           diPSUCommunicationError="DI_PSUdpCommunicationError" diSCRCommunicationError="DI_SCRTCDPCommunicationError"
           aiVoltage="AI_SCR3Voltage" aiArms="AI_SCR3Arms" aiPower="AI_SCR3Power" diStatus="DI_SCR3Status" doReset="DO_SCR3Reset" doStatus="DO_SCR3Enable" diAlarm="DI_SCR3Alarm" AlarmText="" />
  </IoSCRs>

  <IoPSUPowers classType="Aitex.Core.RT.Device.Devices.PSUPowerDetection" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoPSUPower id="PSU1Power" display="PSU1Power" schematicId="PSU1Power" aioType="float" aiPower="AI_PSU1OutputPower" scBasePath="PM.{module}.PowerDetection"/>
    <IoPSUPower id="PSU2Power" display="PSU2Power" schematicId="PSU2Power" aioType="float" aiPower="AI_PSU2OutputPower" scBasePath="PM.{module}.PowerDetection"/>
    <IoPSUPower id="PSU3Power" display="PSU3Power" schematicId="PSU3Power" aioType="float" aiPower="AI_PSU3OutputPower" scBasePath="PM.{module}.PowerDetection"/>
    <IoPSUPower id="SCR1Power" display="SCR1Power" schematicId="SCR1Power" aioType="float" aiPower="AI_SCR1Power" scBasePath="PM.{module}.PowerDetection"/>
    <IoPSUPower id="SCR2Power" display="SCR2Power" schematicId="SCR2Power" aioType="float" aiPower="AI_SCR2Power" scBasePath="PM.{module}.PowerDetection"/>
    <IoPSUPower id="SCR3Power" display="SCR3Power" schematicId="SCR3Power" aioType="float" aiPower="AI_SCR3Power" scBasePath="PM.{module}.PowerDetection"/>
  </IoPSUPowers>

  <IoPlcProcessAborts classType="Aitex.Core.RT.Device.Devices.IoPlcProcessAbort" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoPlcProcessAbort module="" id="IoPlcProcessAbort" display="IoPlcProcessAbort" schematicId="IoPlcProcessAbort" diAbortProcessRun="DI_AbortProcessRunning" doAbortProcessInterrupt="DO_AbortProcessInterrupt" doAbortProcessBuzzerOFF="DO_AbortProcessBuzzerOFF"/>
  </IoPlcProcessAborts>
  
  <IoHeats classType="Aitex.Core.RT.Device.Devices.IoHeat" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoHeat module="" id="PMHeatEnable" display="HeatEnable" schematicId="HeatEnable" diEnable="DI_PSUEnableFB" doEnable="DO_HeaterEnable" />
  </IoHeats>
  <IoValves classType="Aitex.Core.RT.Device.Devices.IoValve" assembly="MECF.Framework.RT.EquipmentLibrary">

    <IoValve id="V19" display="ArSafetyBypass" schematicId="V19" unit=""   isNc="false" isDefaultOpen="false" diOpen="DI_ArSafetyBypassFB(V19)" doOpen="DO_ArSafetyBypass(V19)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V19s" display="ArSafetyBypass" schematicId="V19s" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_ArSafetyBypassFB(V19)" doOpen="DO_ArSafetyBypass(V19)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V27" display="PumpBypass" schematicId="V27" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PumpBypassFB(V27)" doOpen="DO_PumpBypass(V27)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V30" display="H2Supply2" schematicId="V30" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SupplyFB(V30)" doOpen="DO_H2Supply(V30)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V31" display="H2Supply" schematicId="V31" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SupplyFB(V31)" doOpen="DO_H2Supply(V31)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V32" display="ArSupply" schematicId="V32" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_ArSupplyFB(V32)" doOpen="DO_ArSupply(V32)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V33" display="H2ArSwitch" schematicId="V33" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SHH2/ArSwitchFB(V33)" doOpen="DO_SHH2/ArSwitch(V33)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V33s" display="H2ArSwitch" schematicId="V33s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SHH2/ArSwitchFB(V33)" doOpen="DO_SHH2/ArSwitch(V33)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V35" display="H2ArLine1" schematicId="V35" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2ArLine1FB(V35)" doOpen="DO_H2ArLine1(V35)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V36" display="H2ArLine2" schematicId="V36" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2ArLine2FB(V36)" doOpen="DO_H2ArLine2(V36)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V37" display="N2.Switch" schematicId="V37" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_N2SwitchFB(V37)" doOpen="DO_N2Switch(V37)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V37s" display="N2.Switch" schematicId="V37s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_N2SwitchFB(V37)" doOpen="DO_N2Switch(V37)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V38" display="N2Source" schematicId="V38" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_N2SourceFB(V38)" doOpen="DO_N2Source(V38)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V39" display="Diluted N2 Run" schematicId="V39" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_DilutedN2Run/VentFB(V39)" doOpen="DO_DilutedN2Run/Vent(V39)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V39s" display="Diluted N2 Vent" schematicId="V39s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_DilutedN2Run/VentFB(V39)" doOpen="DO_DilutedN2Run/Vent(V39)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V40" display="High N2 Run" schematicId="V40" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_HighN2Run/VentFB(V40)" doOpen="DO_HighN2Run/Vent(V40)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V40s" display="High N2 Vent" schematicId="V40s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_HighN2Run/VentFB(V40)" doOpen="DO_HighN2Run/Vent(V40)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V41" display="TMA Run" schematicId="V41" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMARunFB(V41)" doOpen="DO_TMARun(V41)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V42" display="TMA Vent" schematicId="V42" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_TMAVentFB(V42)" doOpen="DO_TMAVent(V42)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V43" display="TMARelease" schematicId="V43" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMAReleaseFB(V43)" doOpen="DO_TMARelease(V43)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V43s" display="TMARelease" schematicId="V43s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMAReleaseFB(V43)" doOpen="DO_TMARelease(V43)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V45" display="TMABypass" schematicId="V45" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_TMABypassFB(V45)" doOpen="DO_TMABypass(V45)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V46" display="TMAVac" schematicId="V46" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMAVacFB(V46)" doOpen="DO_TMAVac(V46)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V46s" display="TMAVac" schematicId="V46s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMAVacFB(V46)" doOpen="DO_TMAVac(V46)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V47" display="HCLRun" schematicId="V47" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PN2Run/VentFB(V47)" doOpen="DO_PN2Run/Vent(V47)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V47s" display="HCLVent" schematicId="V47s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_PN2Run/VentFB(V47)" doOpen="DO_PN2Run/Vent(V47)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V48" display="TCSRelease" schematicId="V48" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TCSReleaseFB(V48)" doOpen="DO_TCSRelease(V48)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V48s" display="TCSRelease" schematicId="V48s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TCSReleaseFB(V48)" doOpen="DO_TCSRelease(V48)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V49" display="TCSBypass" schematicId="V49" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_TCSBypassFB(V49)" doOpen="DO_TCSBypass(V49)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V50" display="TCSVac" schematicId="V50" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TCSVacFB(V50)" doOpen="DO_TCSVac(V50)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V50s" display="TCSVac" schematicId="V50s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TCSVacFB(V50)" doOpen="DO_TCSVac(V50)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V51" display="HCLSwitch" schematicId="V51" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_HCLSwitchFB(V51)" doOpen="DO_HCLSwitch(V51)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V51s" display="HCLSwitch" schematicId="V51s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_HCLSwitchFB(V51)" doOpen="DO_HCLSwitch(V51)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V52" display="SiH4Switch" schematicId="V52" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SiH4SwitchFB(V52)" doOpen="DO_SiH4Switch(V52)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V52s" display="SiH4Switch" schematicId="V52s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SiH4SwitchFB(V52)" doOpen="DO_SiH4Switch(V52)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V53" display="TCSRun" schematicId="V53" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TCSRunVentFB" doOpen="DO_TCSRun/Vent(V53)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V53s" display="TCSVent" schematicId="V53s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_TCSRunVentFB" doOpen="DO_TCSRun/Vent(V53)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V54" display="HCLRun" schematicId="V54" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_HCLRun/VentFB(V54)" doOpen="DO_HCLRun/Vent(V54)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V54s" display="HCLVent" schematicId="V54s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_HCLRun/VentFB(V54)" doOpen="DO_HCLRun/Vent(V54)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V55" display="SiH4Run" schematicId="V55" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SiH4RunFB(V55)" doOpen="DO_SiH4Run(V55)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V56" display="SiH4Vent" schematicId="V56" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SiH4VentFB(V56)" doOpen="DO_SiH4Vent(V56)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V57" display="DoppingN2Final" schematicId="V57" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_DoppingN2Final(V57)" doOpen="DO_DoppingN2Final(V57)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V58" display="C2H4Switch" schematicId="V58" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_C2H4SwitchFB(V58)" doOpen="DO_C2H4Switch(V58)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V58s" display="C2H4Switch" schematicId="V58s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_C2H4SwitchFB(V58)" doOpen="DO_C2H4Switch(V58)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V59" display="C2H4Run" schematicId="V59" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_C2H4RunFB(V59)" doOpen="DO_C2H4Run(V59)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V60" display="C2H4Vent" schematicId="V60" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_C2H4VentFB(V60)" doOpen="DO_C2H4Vent(V60)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V61" display="DoppingFinal" schematicId="V61" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_DoppingFinalFB(V61)" doOpen="DO_DoppingFinal(V61)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V62" display="SilaneFinal" schematicId="V62" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SilaneFinalFB(V62)" doOpen="DO_SilaneFinal(V62)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V63" display="PropaneFinal" schematicId="V63" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_PropaneFinalFB(V63)" doOpen="DO_PropaneFinal(V63)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V64" display="CarrierGasH2" schematicId="V64" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CarrierGasH2FB(V64)" doOpen="DO_CarrierGasH2(V64)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V65" display="CarrierGasAr" schematicId="V65" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_CarrierGasArFB(V65)" doOpen="DO_CarrierGasAr(V65)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V68" display="ChamBodyArPurge" schematicId="V68" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_ChamBodyArPurgeFB(V68)" doOpen="DO_ChamBodyArPurge(V68)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V69" display="ReactorLeakCheck" schematicId="V69" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_ReactorLeakCheckFB(V69)" doOpen="DO_ReactorLeakCheck(V69)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V70" display="TMPressBalance" schematicId="V70" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMPressBalanceFB(V70)" doOpen="DO_TMPressBalance(V70)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V72" display="GasBoxVentPump" schematicId="V72" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_GasBoxVentPumpFB(V72)" doOpen="DO_GasBoxVentPump(V72)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V73" display="MOVac" schematicId="V73" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MOVacFB(V73)" doOpen="DO_MOVac(V73)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V74" display="GasboxLeakCheck" schematicId="V74" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_GasboxLeakCheckFB(V74)" doOpen="DO_GasboxLeakCheck(V74)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V75" display="DORVac" schematicId="V75" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_DORVacFB(V75)" doOpen="DO_DORVac(V75)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V76" display="DORRefill" schematicId="V76" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_DORRefillFB(V76)" doOpen="DO_DORRefill(V76)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V87" display="SHPurgeFinal" schematicId="V87" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SHPurgeFinalFB(V87)" doOpen="DO_SHPurgeFinal(V87)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V88" display="OuterGasFinal" schematicId="V88" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_OuterGasFinalFB(V88)" doOpen="DO_OuterGasFinal(V88)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V89" display="InnerGasFinal" schematicId="V89" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_InnerGasFinalFB(V89)" doOpen="DO_InnerGasFinal(V89)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V90" display="MiddleGasFinal" schematicId="V90" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_MiddleGasFinalFB(V90)" doOpen="DO_MiddleGasFinal(V90)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V91" display="OpticPurgeFinal" schematicId="V91" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_OpticPurgeFinalFB(V91)" doOpen="DO_OpticPurgeFinal(V91)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V92" display="GasRingPurgeFinal" schematicId="V92" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_GasRingPurgeFinalFB(V92)" doOpen="DO_GasRingPurgeFinal(V92)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V93" display="ChamberPurgeFinal" schematicId="V93" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_ChamberPurgeFinalFB(V93)" doOpen="DO_ChamberPurgeFinal(V93)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V94" display="RotationUpPurgeFinal" schematicId="V94" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_RotationUpPurgeFinalFB(V94)" doOpen="DO_RotationUpPurgeFinal(V94)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V95" display="ConfinementRingFinal" schematicId="V95" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_ConfinementRingFinalFB(V95)" doOpen="DO_ConfinementRingFinal(V95)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V96" display="HeaterWFFinal" schematicId="V96" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_HeaterWFFinalFB(V96)" doOpen="DO_HeaterWFFinal(V96)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V97" display="CarryGasFinal" schematicId="V97" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CarryGasFinalFB(V97)" doOpen="DO_CarryGasFinal(V97)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V111" display="OpenLidPurge" schematicId="V111" unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_OpenLidPurge" diCloseSensor="" diOpenSensor="" />
    <IoValve id="EPV2" display="EPV2" schematicId="EPV2" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_EPV2-1FB" doOpen="DO_EPV2" diCloseSensor="" diOpenSensor="" />
    <IoValve id="HeatEnable" display="HeatEnable" schematicId="HeatEnable" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PSUEnableFB" doOpen="DO_HeaterEnable" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V99" display="C2H4SwitchHTPurge" schematicId="V99" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_C2H4SwitchHTPurge" doOpen="DO_C2H4SwitchHTPurge" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V99s" display="C2H4SwitchHTPurge" schematicId="V99s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_C2H4SwitchHTPurge" doOpen="DO_C2H4SwitchHTPurge" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V25" display="GasBoxVentBypass" schematicId="V99" unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_GasBoxVentBypass(V25)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V100" display="TMASource" schematicId="V100" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMASourceFB(V100)" doOpen="DO_TMASource(V100)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V103" display="NdopeDiluteVent" schematicId="V100" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_NdopeDiluteVentFB(V103)" doOpen="DO_NdopeDiluteVent(V103)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V103s" display="NdopeDiluteVent" schematicId="V100" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_NdopeDiluteVentFB(V103)" doOpen="DO_NdopeDiluteVent(V103)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V105" display="PdopeDiluteVent" schematicId="V100" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PdopeDiluteVentFB(V105)" doOpen="DO_PdopeDiluteVent(V105)" diCloseSensor="" diOpenSensor="" />
    <IoValve id="V105s" display="PdopeDiluteVent" schematicId="V100" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PdopeDiluteVentFB(V105)" doOpen="DO_PdopeDiluteVent(V105)" diCloseSensor="" diOpenSensor="" />
  </IoValves>
  <IoThrottleValves classType="Aitex.Core.RT.Device.Devices.IoThrottleValve2" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoThrottleValve id="TV" display="TV" schematicId="TV" unit="mbar" scBasePath="PM.{module}" modeValuePressure="5" modeValuePosition="2" modeValueClose="3" modeValueOpen="4" aioType="float" aiStatus="AI_TVmode" aiPositionFeedback="AI_ActualPositon" aiPressureFeedback="AI_ActualPressure" aoPressureMode="AO_ValveModeSetpoint" aoPositionSetPoint="AO_SetpointPositon" aoPressureSetPoint="AO_SetpointPressure" doTVValveEnable="DO_TVEnable" doTVReset="DO_TVReset" diTVValveEnable="" />
  </IoThrottleValves>
  <IoMfcs classType="Aitex.Core.RT.Device.Devices.IoMFC" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoMfc id="Mfc1" display="Mfc1" schematicId="Mfc1" unit="sccm" aiActMode="AI_M1ActMode" aoSetMode="AO_M1CtrlMode" aiFlow="AI_M1" aoFlow="AO_M1" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC01Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm101  MFC01 Offline[DI-351]" />
    <IoMfc id="Mfc2" display="Mfc2" schematicId="Mfc2" unit="sccm" aiActMode="AI_M2ActMode" aoSetMode="AO_M2CtrlMode" aiFlow="AI_M2" aoFlow="AO_M2" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC02Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm102  MFC02 Offline[DI-352]" />
	  <IoMfc id="Mfc3" display="Mfc3" schematicId="Mfc3" unit="sccm" aiActMode="AI_M3ActMode" aoSetMode="AO_M3CtrlMode" aiFlow="AI_M3" aoFlow="AO_M3" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC03Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm103  MFC03 Offline[DI-353]" />
	  <IoMfc id="Mfc4" display="Mfc4" schematicId="Mfc4" unit="sccm" aiActMode="AI_M4ActMode" aoSetMode="AO_M4CtrlMode" aiFlow="AI_M4" aoFlow="AO_M4" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC04Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm104  MFC04 Offline[DI-354]" />
	  <IoMfc id="Mfc5" display="Mfc5" schematicId="Mfc5" unit="sccm" aiActMode="AI_M5ActMode" aoSetMode="AO_M5CtrlMode" aiFlow="AI_M5" aoFlow="AO_M5" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC05Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm105  MFC05 Offline[DI-355]" />
	  <IoMfc id="Mfc6" display="Mfc6" schematicId="Mfc6" unit="sccm" aiActMode="AI_M6ActMode" aoSetMode="AO_M6CtrlMode" aiFlow="AI_M6" aoFlow="AO_M6" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC06Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm106  MFC06 Offline[DI-356]" />
	  <IoMfc id="Mfc7" display="Mfc7" schematicId="Mfc7" unit="sccm" aiActMode="AI_M7ActMode" aoSetMode="AO_M7CtrlMode" aiFlow="AI_M7" aoFlow="AO_M7" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC07Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm107  MFC07 Offline[DI-357]" />
	  <IoMfc id="Mfc8" display="Mfc8" schematicId="Mfc8" unit="sccm" aiActMode="AI_M8ActMode" aoSetMode="AO_M8CtrlMode" aiFlow="AI_M8" aoFlow="AO_M8" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC08Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm108  MFC08 Offline[DI-358]" />
	  <IoMfc id="Mfc9" display="Mfc9" schematicId="Mfc9" unit="sccm" aiActMode="AI_M9ActMode" aoSetMode="AO_M9CtrlMode" aiFlow="AI_M9" aoFlow="AO_M9" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC09Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm109  MFC09 Offline[DI-359]" />
    <IoMfc id="Mfc10" display="Mfc10" schematicId="Mfc10" unit="sccm" aiActMode="AI_M10ActMode" aoSetMode="AO_M10CtrlMode" aiFlow="AI_M10" aoFlow="AO_M10" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC10Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm110  MFC10 Offline[DI-360]" />
	  <IoMfc id="Mfc11" display="Mfc11" schematicId="Mfc11" unit="sccm" aiActMode="AI_M11ActMode" aoSetMode="AO_M11CtrlMode" aiFlow="AI_M11" aoFlow="AO_M11" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC11Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm111  MFC11 Offline[DI-361]" />
	  <IoMfc id="Mfc12" display="Mfc12" schematicId="Mfc12" unit="sccm" aiActMode="AI_M12ActMode" aoSetMode="AO_M12CtrlMode" aiFlow="AI_M12" aoFlow="AO_M12" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC12Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm112  MFC12 Offline[DI-362]" />
	  <IoMfc id="Mfc13" display="Mfc13" schematicId="Mfc13" unit="sccm" aiActMode="AI_M13ActMode" aoSetMode="AO_M13CtrlMode" aiFlow="AI_M13" aoFlow="AO_M13" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC13Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm113  MFC13 Offline[DI-363]" />
	  <IoMfc id="Mfc14" display="Mfc14" schematicId="Mfc14" unit="sccm" aiActMode="AI_M14ActMode" aoSetMode="AO_M14CtrlMode" aiFlow="AI_M14" aoFlow="AO_M14" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC14Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm114  MFC14 Offline[DI-364]" />
	  <IoMfc id="Mfc15" display="Mfc15" schematicId="Mfc15" unit="sccm" aiActMode="AI_M15ActMode" aoSetMode="AO_M15CtrlMode" aiFlow="AI_M15" aoFlow="AO_M15" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC15Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm115  MFC15 Offline[DI-365]" />
	  <IoMfc id="Mfc16" display="Mfc16" schematicId="Mfc16" unit="sccm" aiActMode="AI_M16ActMode" aoSetMode="AO_M16CtrlMode" aiFlow="AI_M16" aoFlow="AO_M16" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC16Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm116  MFC16 Offline[DI-366]" />
    <IoMfc id="Mfc17" display="Mfc17" schematicId="Mfc17" unit="sccm" aiActMode="AI_M17ActMode" aoSetMode="AO_M17CtrlMode" aiFlow="AI_M17" aoFlow="AO_M17" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC17Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm117  MFC17 Offline[DI-367]" />
    <IoMfc id="Mfc18" display="Mfc18" schematicId="Mfc18" unit="sccm" aiActMode="AI_M18ActMode" aoSetMode="AO_M18CtrlMode" aiFlow="AI_M18" aoFlow="AO_M18" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC18Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm118  MFC18 Offline[DI-368]" />
    <IoMfc id="Mfc19" display="Mfc19" schematicId="Mfc19" unit="sccm" aiActMode="AI_M19ActMode" aoSetMode="AO_M19CtrlMode" aiFlow="AI_M19" aoFlow="AO_M19" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC19Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm119  MFC19 Offline[DI-369]" />
	  <IoMfc id="Mfc20" display="Mfc20" schematicId="Mfc20" unit="sccm" aiActMode="AI_M20ActMode" aoSetMode="AO_M20CtrlMode" aiFlow="AI_M20" aoFlow="AO_M20" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC20Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm120  MFC20 Offline[DI-370]" />
    <IoMfc id="Mfc21" display="Mfc21" schematicId="Mfc21" unit="sccm" aiActMode="AI_M21ActMode" aoSetMode="AO_M21CtrlMode" aiFlow="AI_M21" aoFlow="AO_M21" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC21Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm121  MFC21 Offline[DI-371]" />
	  <IoMfc id="Mfc22" display="Mfc22" schematicId="Mfc22" unit="sccm" aiActMode="AI_M22ActMode" aoSetMode="AO_M22CtrlMode" aiFlow="AI_M22" aoFlow="AO_M22" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC22Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm122  MFC22 Offline[DI-372]" />
	  <IoMfc id="Mfc23" display="Mfc23" schematicId="Mfc23" unit="sccm" aiActMode="AI_M23ActMode" aoSetMode="AO_M23CtrlMode" aiFlow="AI_M23" aoFlow="AO_M23" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC23Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm123  MFC23 Offline[DI-373]" />
	  <IoMfc id="Mfc25" display="Mfc25" schematicId="Mfc25" unit="sccm" aiActMode="AI_M25ActMode" aoSetMode="AO_M25CtrlMode" aiFlow="AI_M25" aoFlow="AO_M25" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC25Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm125  MFC25 Offline[DI-375]" />
	  <IoMfc id="Mfc26" display="Mfc26" schematicId="Mfc26" unit="sccm" aiActMode="AI_M26ActMode" aoSetMode="AO_M26CtrlMode" aiFlow="AI_M26" aoFlow="AO_M26" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC26Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm126  MFC26 Offline[DI-376]" />
	  <IoMfc id="Mfc27" display="Mfc27" schematicId="Mfc27" unit="sccm" aiActMode="AI_M27ActMode" aoSetMode="AO_M27CtrlMode" aiFlow="AI_M27" aoFlow="AO_M27" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC27Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm127  MFC27 Offline[DI-377]" />
	  <IoMfc id="Mfc28" display="Mfc28" schematicId="Mfc28" unit="sccm" aiActMode="AI_M28ActMode" aoSetMode="AO_M28CtrlMode" aiFlow="AI_M28" aoFlow="AO_M28" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC28Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm128  MFC28 Offline[DI-378]" />
	  <IoMfc id="Mfc29" display="Mfc29" schematicId="Mfc29" unit="sccm" aiActMode="AI_M29ActMode" aoSetMode="AO_M29CtrlMode" aiFlow="AI_M29" aoFlow="AO_M29" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC29Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm129  MFC29 Offline[DI-379]" />
    <IoMfc id="Mfc30" display="Mfc30" schematicId="Mfc30" unit="sccm" aiActMode="AI_M30ActMode" aoSetMode="AO_M30CtrlMode" aiFlow="AI_M30" aoFlow="AO_M30" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC30Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm130  MFC30 Offline[DI-380]" />
    <IoMfc id="Mfc31" display="Mfc31" schematicId="Mfc31" unit="sccm" aiActMode="AI_M31ActMode" aoSetMode="AO_M31CtrlMode" aiFlow="AI_M31" aoFlow="AO_M31" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC31Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm131  MFC31 Offline[DI-381]" />
	  <IoMfc id="Mfc32" display="Mfc32" schematicId="Mfc32" unit="sccm" aiActMode="AI_M32ActMode" aoSetMode="AO_M32CtrlMode" aiFlow="AI_M32" aoFlow="AO_M32" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC32Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm132  MFC32 Offline[DI-382]" />
	  <IoMfc id="Mfc33" display="Mfc33" schematicId="Mfc33" unit="sccm" aiActMode="AI_M33ActMode" aoSetMode="AO_M33CtrlMode" aiFlow="AI_M33" aoFlow="AO_M33" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC33Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm133  MFC33 Offline[DI-383]" />
	  <IoMfc id="Mfc35" display="Mfc35" schematicId="Mfc35" unit="sccm" aiActMode="AI_M35ActMode" aoSetMode="AO_M35CtrlMode" aiFlow="AI_M35" aoFlow="AO_M35" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC35Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm135  MFC35 Offline[DI-385]" />
	  <IoMfc id="Mfc36" display="Mfc36" schematicId="Mfc36" unit="sccm" aiActMode="AI_M36ActMode" aoSetMode="AO_M36CtrlMode" aiFlow="AI_M36" aoFlow="AO_M36" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC36Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm136  MFC36 Offline[DI-386]" />
	  <IoMfc id="Mfc37" display="Mfc37" schematicId="Mfc37" unit="sccm" aiActMode="AI_M37ActMode" aoSetMode="AO_M37CtrlMode" aiFlow="AI_M37" aoFlow="AO_M37" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC37Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm137  MFC37 Offline[DI-387]" />
	  <IoMfc id="Mfc38" display="Mfc38" schematicId="Mfc38" unit="sccm" aiActMode="AI_M38ActMode" aoSetMode="AO_M38CtrlMode" aiFlow="AI_M38" aoFlow="AO_M38" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC38Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm138  MFC38 Offline[DI-388]" />
    <IoMfc id="Mfc40" display="Mfc40" schematicId="Mfc40" unit="sccm" aiActMode="AI_M40ActMode" aoSetMode="AO_M40CtrlMode" aiFlow="AI_M40" aoFlow="AO_M40" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC40Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="" />
    <IoMfc id="Mfc41" display="Mfc41" schematicId="Mfc41" unit="sccm" aiActMode="AI_M41ActMode" aoSetMode="AO_M41CtrlMode" aiFlow="AI_M41" aoFlow="AO_M41" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC41Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm141  MFC41 Offline[DI-391]" />
    <IoMfc id="Mfc42" display="Mfc42" schematicId="Mfc42" unit="sccm" aiActMode="AI_M42ActMode" aoSetMode="AO_M42CtrlMode" aiFlow="AI_M42" aoFlow="AO_M42" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC42Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm142  MFC42 Offline[DI-392]" />
    <IoMfc id="Mfc43" display="Mfc43" schematicId="Mfc43" unit="sccm" aiActMode="AI_M43ActMode" aoSetMode="AO_M43CtrlMode" aiFlow="AI_M43" aoFlow="AO_M43" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC43Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm143  MFC43 Offline[DI-393]" />
    <IoMfc id="Mfc44" display="Mfc44" schematicId="Mfc44" unit="sccm" aiActMode="AI_M44ActMode" aoSetMode="AO_M44CtrlMode" aiFlow="AI_M44" aoFlow="AO_M44" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC44Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm144  MFC44 Offline[DI-394]" />
    <IoMfc id="Mfc45" display="Mfc45" schematicId="Mfc45" unit="sccm" aiActMode="AI_M45ActMode" aoSetMode="AO_M45CtrlMode" aiFlow="AI_M45" aoFlow="AO_M45" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC45Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm145  MFC45 Offline[DI-395]" />
  </IoMfcs>
  <IoPressureMeters classType="Aitex.Core.RT.Device.Devices.IoPressure" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoPressureMeter id="Pressure1" display="PC1" schematicId="Pressure1" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC1Valve" aiActMode="AI_PC1ActMode" aoSetMode="AO_PC1CtrlMode" aiValue="AI_PressCtrl1" aoValue="AO_PressCtrl1" formatString="0.0" diAlarm="DI_PC01Offline" AlarmText="Alarm141 PC1 Offline[DI-391]" />
    <IoPressureMeter id="Pressure2" display="PC2" schematicId="Pressure2" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC2Valve" aiActMode="AI_PC2ActMode" aoSetMode="AO_PC2CtrlMode" aiValue="AI_PressCtrl2" aoValue="AO_PressCtrl2" formatString="0.0" diAlarm="DI_PC02Offline" AlarmText="Alarm142 PC2 Offline[DI-392]" />
    <IoPressureMeter id="Pressure3" display="PC3" schematicId="Pressure3" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC3Valve" aiActMode="AI_PC3ActMode" aoSetMode="AO_PC3CtrlMode" aiValue="AI_PressCtrl3" aoValue="AO_PressCtrl3" formatString="0.0" diAlarm="DI_PC03Offline" AlarmText="Alarm143 PC3 Offline[DI-393]" />
    <IoPressureMeter id="Pressure4" display="PC4" schematicId="Pressure4" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC4Valve" aiActMode="AI_PC4ActMode" aoSetMode="AO_PC4CtrlMode" aiValue="AI_PressCtrl4" aoValue="AO_PressCtrl4" formatString="0.0" diAlarm="DI_PC04Offline" AlarmText="Alarm144 PC4 Offline[DI-394]" />
    <IoPressureMeter id="Pressure5" display="PC5" schematicId="Pressure5" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC5Valve" aiActMode="AI_PC5ActMode" aoSetMode="AO_PC5CtrlMode" aiValue="AI_PressCtrl5" aoValue="AO_PressCtrl5" formatString="0.0" diAlarm="DI_PC05Offline" AlarmText="Alarm145 PC5 Offline[DI-395]" />
    <IoPressureMeter id="Pressure6" display="PC6" schematicId="Pressure6" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC6Valve" aiActMode="AI_PC6ActMode" aoSetMode="AO_PC6CtrlMode" aiValue="AI_PressCtrl6" aoValue="AO_PressCtrl6" formatString="0.0" diAlarm="DI_PC06Offline" AlarmText="Alarm146 PC6 Offline[DI-396]" />
    <IoPressureMeter id="Pressure7" display="PC7" schematicId="Pressure7" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC7Valve" aiActMode="AI_PC7ActMode" aoSetMode="AO_PC7CtrlMode" aiValue="AI_PressCtrl7" aoValue="AO_PressCtrl7" formatString="0.0" diAlarm="DI_PC07Offline" AlarmText="Alarm147 PC7 Offline[DI-397]" />
    <IoPressureMeter id="Pressure8" display="PC8" schematicId="Pressure8" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC8Valve" aiActMode="AI_PC8ActMode" aoSetMode="AO_PC8CtrlMode" aiValue="AI_PressCtrl8" aoValue="AO_PressCtrl8" formatString="0.0" diAlarm="DI_PC08Offline" AlarmText="Alarm148 PC8 Offline[DI-398]" />
    <IoPressureMeter id="Pressure9" display="PC9" schematicId="Pressure9" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC9Valve" aiActMode="AI_PC9ActMode" aoSetMode="AO_PC9CtrlMode" aiValue="AI_PressCtrl9" aoValue="AO_PressCtrl9" formatString="0.0" diAlarm="DI_PC09Offline" AlarmText="Alarm149 PC9 Offline[DI-399]" />
    <IoPressureMeter id="PT1" display="PT1" schematicId="PT1" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="" aiActMode="" aoSetMode="" aiValue="AI_ActualPressure" aoValue="" formatString="0.0" />
    <IoPressureMeter id="PT2" display="PT2" schematicId="PT2" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="" aiActMode="" aoSetMode="" aiValue="AI_ForelinePress" aoValue="" formatString="0.0" />
  </IoPressureMeters>
  <IoSensorWaterFlowTemp classType="Aitex.Core.RT.Device.Devices.IoSensorWaterFlowTemp" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoSensorWaterFlowTemp id="FlowTemp1" module="" display="SHFlow(U1)" schematicId="SHFlowTemp"
                           unit="℃"
                           ai="AI_SHFlowTemp"
                           ao=""
                           diFlowSW="DI_SHFlowSW"
                           doWarningLow=""
                           doWarningHigh=""
                           doAlarmLow=""
                           doAlarmHigh="DO_SHFlowTemp"
                           doActiveLevel="false"
                           scBasePath="PM.{module}.CoolingWater"
                           scWarningLow=""
                           scWarningHigh=""
                           scAlarmLow=""
                           scAlarmHigh="SHFlowTemp"
                           scWarningOffset="WarningOffset"
                           scFilterDuration="FilterDuration"/>

    <IoSensorWaterFlowTemp id="FlowTemp2" module="" display="TopFlow(U2)" schematicId="ChamTopFlowTemp" unit="℃"
                           ai="AI_ChamTopFlowTemp"
                           diFlowSW="DI_ChamTopFlowSW"
                           doAlarmHigh="DO_ChamTopFlowTemp"
                           doActiveLevel="false"
                           scBasePath="PM.{module}.CoolingWater"
                           scAlarmHigh="ChamTopFlowTemp"
                           scWarningOffset="WarningOffset"
                           scFilterDuration="FilterDuration" />

    <IoSensorWaterFlowTemp id="FlowTemp3" module="" display="MiddleFlow1(U3)" schematicId="ChamMiddleFlow1Temp" unit="℃"
                           ai="AI_ChamMiddleFlow1Temp"
                           diFlowSW="DI_ChamMiddleFlow1SW"
                           doAlarmHigh="DO_ChamMiddleFlow1Temp"
                           doActiveLevel="false"
                           scBasePath="PM.{module}.CoolingWater"
                           scAlarmHigh="ChamMiddleFlow1Temp"
                           scWarningOffset="WarningOffset"
                           scFilterDuration="FilterDuration"/>

    <IoSensorWaterFlowTemp id="FlowTemp4" module="" display="MiddleFlow2(U4)" schematicId="ChamMiddleFlow2Temp" unit="℃"
                           ai="AI_ChamMiddleFlow2Temp"
                           diFlowSW="DI_ChamMiddleFlow2SW"
                           doAlarmHigh="DO_ChamMiddleFlow2Temp"
                           doActiveLevel="false"
                           scBasePath="PM.{module}.CoolingWater"
                           scAlarmHigh="ChamMiddleFlow2Temp"
                           scWarningOffset="WarningOffset"
                           scFilterDuration="FilterDuration" />

    <IoSensorWaterFlowTemp id="FlowTemp5" module="" display="BottomFlow(U5)" schematicId="ChamBottomFlowTemp" unit="℃"
                           ai="AI_ChamBottomFlowTemp"
                           diFlowSW="DI_ChamBottomFlowSW"
                           doAlarmHigh="DO_ChamBottomFlowTemp"
                           doActiveLevel="false"
                           scBasePath="PM.{module}.CoolingWater"
                           scAlarmHigh="ChamBottomFlowTemp"
                           scWarningOffset="WarningOffset"
                           scFilterDuration="FilterDuration" />

    <IoSensorWaterFlowTemp id="FlowTemp6" module="" display="Foreline1Flow(U6)" schematicId="Foreline1FlowTemp" unit="℃"
                           ai="AI_Foreline1FlowTemp"
                           diFlowSW="DI_Foreline1FlowSW"
                           doAlarmHigh="DO_SpareFlowTemp"
                           doActiveLevel="false"
                           scBasePath="PM.{module}.CoolingWater"
                           scAlarmHigh="SpareFlowTemp"
                           scWarningOffset="WarningOffset"
                           scFilterDuration="FilterDuration" />
    
    <IoSensorWaterFlowTemp id="FlowTemp7" module="" display="PowerRod1Flow(U7)" schematicId="PowerRod1FlowTemp" unit="℃"
                           ai="AI_PowerRod1FlowTemp"
                           diFlowSW="DI_PowerRod1FlowSW"
                           doAlarmHigh="DO_PowerRod1FlowTemp"
                           doActiveLevel="false"
                           scBasePath="PM.{module}.CoolingWater"
                           scAlarmHigh="PowerRod1FlowTemp"
                           scWarningOffset="WarningOffset"
                           scFilterDuration="FilterDuration" />

    <IoSensorWaterFlowTemp id="FlowTemp8" module="" display="PowerRod2Flow(U8)" schematicId="PowerRod2FlowTemp" unit="℃"
                           ai="AI_PowerRod2FlowTemp"
                           diFlowSW="DI_PowerRod2FlowSW"
                           doAlarmHigh="DO_PowerRod2FlowTemp"
                           doActiveLevel="false"
                           scBasePath="PM.{module}.CoolingWater"
                           scAlarmHigh="PowerRod2FlowTemp"
                           scWarningOffset="WarningOffset"
                           scFilterDuration="FilterDuration"/>

    <IoSensorWaterFlowTemp id="FlowTemp9" module="" display="Foreline2Flow(U9)" schematicId="Foreline2FlowTemp" unit="℃"
                           ai="AI_Foreline2FlowTemp"
                           diFlowSW="DI_Foreline2FlowSW"
                           doAlarmHigh="DO_ForelineFlowTemp"
                           doActiveLevel="false"
                           scBasePath="PM.{module}.CoolingWater"
                           scAlarmHigh="ForelineFlowTemp"
                           scWarningOffset="WarningOffset"
                           scFilterDuration="FilterDuration" />

    <IoSensorWaterFlowTemp id="FlowTemp10" module="" display="ElectrodeWFlow(U10)" schematicId="ElectrodeWFlowTemp" unit="℃"
                           ai="AI_ElectrodeWFlowTemp"
                           diFlowSW="DI_ElectrodeWFlowSW"
                           doAlarmHigh="DO_ElectrodeWFlowTemp"
                           doActiveLevel="false"
                           scBasePath="PM.{module}.CoolingWater"
                           scAlarmHigh="ElectrodeWFlowTemp"
                           scWarningOffset="WarningOffset"
                           scFilterDuration="FilterDuration" />

    <IoSensorWaterFlowTemp id="FlowTemp11" module="" display="TMPump1Flow(U11)" schematicId="TMPump1FlowTemp" unit="℃"
                           ai="AI_TMPumpFlowTemp"
                           diFlowSW="DI_TMPumpFlowSW"
                           doAlarmHigh="DO_TMPump1FlowTemp"
                           doActiveLevel="false"
                           scBasePath="PM.{module}.CoolingWater"
                           scAlarmHigh="TMPump1FlowTemp"
                           scWarningOffset="WarningOffset"
                           scFilterDuration="FilterDuration" />

    <IoSensorWaterFlowTemp id="FlowTemp12" module="" display="Spare1(U12)" schematicId="Spare1Temp" unit="℃"
                           ai="AI_Spare1Temp"
                           diFlowSW="DI_Spare1FlowSW"
                           doAlarmHigh="DO_Spare1FlowTemp"
                           doActiveLevel="false"
                           scBasePath="PM.{module}.CoolingWater"
                           scAlarmHigh="Spare1FlowTemp"
                           scWarningOffset="WarningOffset"
                           scFilterDuration="FilterDuration" />

    <IoSensorWaterFlowTemp id="FlowTemp13" module="" display="Spare2(U13)" schematicId="Spare2Temp" unit="℃"
                           ai="AI_Spare2Temp"
                           diFlowSW="DI_Spare2FlowSW"
                           doAlarmHigh="DO_Spare2FlowTemp"
                           doActiveLevel="false"
                           scBasePath="PM.{module}.CoolingWater"
                           scAlarmHigh="Spare2FlowTemp"
                           scWarningOffset="WarningOffset"
                           scFilterDuration="FilterDuration" />

    <IoSensorWaterFlowTemp id="FlowTemp14" module="" display="TransformerFlow(U14)" schematicId="TransformerFlowTemp" unit="℃"
                           ai="AI_TransformerFlowTemp"
                           diFlowSW="DI_TransformerFlowSW"
                           doAlarmHigh="DO_TransformerFlowTemp"
                           doActiveLevel="false"
                           scBasePath="PM.{module}.CoolingWater"
                           scAlarmHigh="TransformerFlowTemp"
                           scWarningOffset="WarningOffset"
                           scFilterDuration="FilterDuration" />
  </IoSensorWaterFlowTemp>

  <IoGasBoxTemps classType="Aitex.Core.RT.Device.Devices.IoLineHeater" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoGasBoxTemp id="HeatTMAPanelTemp"     display="TMAPanelTemp(ATC-1)"     aiHeatTMA="AI_HeatTMAPanel"     scBasePath="PM.{module}.LineHeaterTemp"  scAlarmHigh="加热带温区1" scWarningLog="" doLineHeaterEnable="DO_LineHeaterEnable"/>
    <IoGasBoxTemp id="HeatTCSPanelTemp"     display="TCSPanelTemp(ATC-2)"     aiHeatTMA="AI_HeatTCSPanel"     scBasePath="PM.{module}.LineHeaterTemp"  scAlarmHigh="加热带温区2" scWarningLog="" doLineHeaterEnable="DO_LineHeaterEnable"/>
    <IoGasBoxTemp id="HeatinsidePanelTemp"  display="insidePanelTemp(ATC-3)"  aiHeatTMA="AI_HeatinsidePanel"  scBasePath="PM.{module}.LineHeaterTemp"  scAlarmHigh="加热带温区3" scWarningLog="" doLineHeaterEnable="DO_LineHeaterEnable"/>
    <IoGasBoxTemp id="HeatoutsidePanelTemp" display="outsidePanelTemp(ATC-4)" aiHeatTMA="AI_HeatoutsidePanel" scBasePath="PM.{module}.LineHeaterTemp"  scAlarmHigh="加热带温区4" scWarningLog="" doLineHeaterEnable="DO_LineHeaterEnable"/>
    <IoGasBoxTemp id="HeatoutsideSHTemp"    display="outsideSHTemp(ATC-5)"    aiHeatTMA="AI_HeatoutsideSH"    scBasePath="PM.{module}.LineHeaterTemp"  scAlarmHigh="加热带温区5" scWarningLog="" doLineHeaterEnable="DO_LineHeaterEnable"/>
    <IoGasBoxTemp id="HeatLeakBypassTemp"   display="LeakBypassTemp(ATC-6)"   aiHeatTMA="AI_HeatLeakBypass"   scBasePath="PM.{module}.LineHeaterTemp"  scAlarmHigh="加热带温区6" scWarningLog="" doLineHeaterEnable="DO_LineHeaterEnable"/>

    <IoGasBoxTemp id="HeatTailFilter" display="HeatTailFilter" aiHeatTMA="AI_HeatTailFilter" scBasePath="PM.{module}.LineHeaterTemp"  scAlarmHigh="PumpLineTempLimt" scWarningLog="PumpLineTempAlarm" doLineHeaterEnable="" />
    <IoGasBoxTemp id="HeatTailPipe"   display="HeatTailPipe"   aiHeatTMA="AI_HeatTailPipe"   scBasePath="PM.{module}.LineHeaterTemp"  scAlarmHigh="PumpLineTempLimt" scWarningLog="PumpLineTempAlarm" doLineHeaterEnable=""/>
  </IoGasBoxTemps>
  <IoPumps classType="Aitex.Core.RT.Device.Devices.IoPump" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoPump id="Pump" module="" display="Pump" schematicId="Pump" unit="" aioType="" diDryPumpAlarm="DI_DryPumpAlarm" diPumpExhaustPress="DI_PumpExhaustPressSW" diDryPump1Running="DI_DryPump1Running" diDryPump1Warning="DI_DryPump1Warning" />
    <IoPump id="Pump2" module="" display="Pump2" schematicId="Pump2" unit="" aioType="" diDryPump1Running="DI_DryPump2Running" diDryPumpAlarm="DI_DryPump2Alarm" diDryPump1Warning="DI_DryPump2Warning" diPumpExhaustPress="DI_PumpExhaustDPSW" />
  </IoPumps>
  <IoPTOffsetAndKs classType="Aitex.Core.RT.Device.Devices.IoPTOffsetAndK" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoPTOffsetAndK id="PT1_Offset"  module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT1_Offset"   />
    <IoPTOffsetAndK id="PT1_K"       module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT1_K"   />
    <IoPTOffsetAndK id="PT2_Offset"  module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT2_Offset"   />
    <IoPTOffsetAndK id="PT2_K"       module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT2_K"   />
    <IoPTOffsetAndK id="PT3_Offset"  module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT3_Offset"   />
    <IoPTOffsetAndK id="PT3_K"       module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT3_K"   />
    <IoPTOffsetAndK id="PT4_Offset"  module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT4_Offset"   />
    <IoPTOffsetAndK id="PT4_K"       module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT4_K"   />
    <IoPTOffsetAndK id="PT9_Offset"  module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT9_Offset"   />
    <IoPTOffsetAndK id="PT9_K"       module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT9_K"   />
    <IoPTOffsetAndK id="PT10_Offset" module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT10_Offset"   />
    <IoPTOffsetAndK id="PT10_K"      module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT10_K"   />
    <IoPTOffsetAndK id="U1_Water"    module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI3_Offset"   />
    <IoPTOffsetAndK id="U2_Water"    module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI4_Offset"   />
    <IoPTOffsetAndK id="U3_Water"    module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI5_Offset"   />
    <IoPTOffsetAndK id="U4_Water"    module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI2_Offset"   />
    <IoPTOffsetAndK id="U5_Water"    module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI6_Offset"   />
    <IoPTOffsetAndK id="U6_Water"    module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI7_Offset"   />
    <IoPTOffsetAndK id="U7_Water"    module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI8_Offset"   />
    <IoPTOffsetAndK id="U8_Water"    module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI9_Offset"   />
    <IoPTOffsetAndK id="U9_Water"    module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI10_Offset" />
    <IoPTOffsetAndK id="U10_Water"   module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI11_Offset" />
    <IoPTOffsetAndK id="U11_Water"   module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI12_Offset" />
    <IoPTOffsetAndK id="U12_Water"   module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI14_Offset" />
    <IoPTOffsetAndK id="U13_Water"   module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI15_Offset" />
    <IoPTOffsetAndK id="U14_Water"   module="" display="WaterTemp" schematicId="" unit="" aioType="float" aoOffset="AO_AI13_Offset" />
  </IoPTOffsetAndKs>
  <DoSensors classType="Aitex.Core.RT.Device.Devices.DoSensor" assembly="MECF.Framework.RT.EquipmentLibrary">
    <DoSensor id="CleanRoutineSucceed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_CleanRoutineSucceed" infoText="" warningText="" alarmText="" />
  </DoSensors>
  <IoSensors classType="Aitex.Core.RT.Device.Devices.IoSensor" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoSensor id="SensorChamCabDoorClosed"     module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamCabDoorClosed"         infoText="" warningText="Warning1 Chamber Cab Door Not Closed [DI-3]" alarmText="" />
    <IoSensor id="SensorDORPressVacSW"            module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_DORPressVacSW"            infoText="Information2 DOR Press Vac [DI-6]" warningText="" alarmText="" />
    <IoSensor id="SensorDORPressATMSW"         module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_DORPressATMSW"             infoText="" warningText="Warning2 DOR Press ATM [DI-7]" alarmText="" />
    <IoSensor id="SensorGBDoorClosed"          module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBDoorClosed"              infoText="" warningText="Warning3 Gas Box Door Not Closed [DI-33]" alarmText="" />
    <IoSensor id="SensorGasPipeTempCtrlAlarm"  module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GasPipeTempCtrlAlarm"      infoText="" warningText="Warning4 GasPipeTempCtrl.Alarm [DI-35]" alarmText="" />
    <IoSensor id="SensorSpare2FlowSW"           module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_Spare2FlowSW"              infoText="" warningText="Warning5  Spare2 Flow Low  -U13 [DI-47]" alarmText="" />
    <IoSensor id="SensorReactorWaterLeakSW"    module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ReactorWaterLeakSW"        infoText="" warningText="Warning6 ReactorWaterLeak [DI-48]" alarmText="" />
    <IoSensor id="SensorGBWaterLeakSW"         module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBWaterLeakSW"             infoText="" warningText="Warning7 Gas Box Water Leak [DI-60]" alarmText="" />
    <IoSensor id="SensorShutterUpLimitSW"      module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_ShutterUpLimitSW"          infoText="" warningText="" alarmText="" />
    <IoSensor id="SensorShutterDownLimitSW"    module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_ShutterDownLimitSW"        infoText="" warningText="" alarmText="" />
    <IoSensor id="SensorDryPump1Warning"       module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_DryPump1Warning"           infoText="" warningText="Warning10 DryPump1 Warning  [DI-67]" alarmText="" />
    <IoSensor id="SensorPRWaterLeakSW"         module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PowerRackWaterLeakSW"      infoText="" warningText="Warning11 Power Rack Water Leak [DI-77]" alarmText="" />
    <IoSensor id="SensorTransformerOTSW"       module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_TransformerOTSW"           infoText="" warningText="Warning12 TransformerOverTemp  [DI-83]" alarmText="" />
    <IoSensor id="SensorSHLidClosed"           module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SHLidClosed"               infoText="" warningText="Warning13 SH Lid Opened  [DI-106]" alarmText="" />
    <IoSensor id="SensorMiddleLidClosed"       module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_MiddleLidClosed"           infoText="" warningText="Warning14 Middle Lid Opened  [DI-120]" alarmText="" />
    <IoSensor id="SensorTMPumpFlowSW"              module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TMPumpFlowSW"          infoText="" warningText="Warning15  TMPump1 Cooling Water Low Flow -U11  [DI-24]" alarmText="" />
    <IoSensor id="SensorPSUInnerTempHAlarm"    module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_PSUInnerTempHAlarm"        infoText="" warningText="" alarmText="" />
    <IoSensor id="SensorPSUMiddleTempHAlarm"   module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_PSUMiddleTempHAlarm"       infoText="" warningText="" alarmText="" />
    <IoSensor id="SensorPSUOuterTempHAlarm"    module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_PSUOuterTempHAlarm"        infoText="" warningText="" alarmText="" />
    <IoSensor id="SensorSCRUpperTempHAlarm"    module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_SCRUpperTempHAlarm"        infoText="" warningText="" alarmText="" />
    <IoSensor id="SensorSCRMiddleTempHAlarm"   module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_SCRMiddleTempHAlarm"       infoText="" warningText="" alarmText="" />
    <IoSensor id="SensorSCRLowerTempHAlarm"    module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_SCRLowerTempHAlarm"        infoText="" warningText="" alarmText="" />
    <IoSensor id="SensorConfinementRingServoError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_ConfinementRingServoError" infoText="" warningText="Warning28 ConfinementRingServoError [DI-342]" alarmText="" />

    <IoSensor id="SensorChamLidClosed"             module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamLidClosed"        infoText="" warningText="" alarmText="Alarm1  Chamber Lid Opened  [DI-0]" />
    <IoSensor id="SensorChamPressAboveATMSW"       module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamPressAboveATMSW"  infoText="" warningText="" alarmText="Alarm2  Chamber Press Above ATM  [DI-4]" />
    <IoSensor id="SensorHeaterTempUp1680CSW"       module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_HeaterTempUpLimitSW"  infoText="" warningText="" alarmText="Alarm3  Heater Controller1 Present Temp High  [DI-10]" />
    <IoSensor id="SensorSHFlowSW"                  module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_SHFlowSW"             infoText="" warningText="" alarmText="Alarm4  SH Cooling Water Low Flow -U1  [DI-15]" />
    <IoSensor id="SensorChamTopFlowSW"             module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamTopFlowSW"        infoText="" warningText="" alarmText="Alarm5  Chamber Top Cooling Water Low Flow -U2  [DI-16]" />
    <IoSensor id="SensorChamMiddleFlow1SW"         module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamMiddleFlow1SW"    infoText="" warningText="" alarmText="Alarm6  Chamber Middle1 Cooling Water Flow Abnormal -U3  [DI-17]" />
    <IoSensor id="SensorChamBottomFlowSW"          module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamBottomFlowSW"     infoText="" warningText="" alarmText="Alarm7  Chamber Bottom Cooling Water  Flow  Abnormal -U5  [DI-18]" />
    <IoSensor id="SensorForeline1FlowSW"           module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_Foreline1FlowSW"      infoText="" warningText="" alarmText="Alarm8  Foreline1 Cooling Water Low Flow -U6  [DI-19]" />
    <IoSensor id="SensorPowerRod1FlowSW"           module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PowerRod1FlowSW"      infoText="" warningText="" alarmText="Alarm9  Power Rod1 Cooling Water Low Flow -U7  [DI-20]" />
    <IoSensor id="SensorPowerRod2FlowSW"           module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PowerRod2FlowSW"      infoText="" warningText="" alarmText="Alarm10  Power Rod2 Cooling Water Low Flow -U8  [DI-21]" />
    <IoSensor id="SensorForeline2FlowSW"           module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_Foreline2FlowSW"      infoText="" warningText="" alarmText="Alarm11  Foreline2 Cooling Water Low Flow -U9  [DI-22]" />
    <IoSensor id="SensorElectrodeWFlowSW"          module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ElectrodeWFlowSW"     infoText="" warningText="" alarmText="Alarm12  Electrode-W Cooling Water Low Flow -U10  [DI-23]" />

    <IoSensor id="SensorTransformerFlowSW"         module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TransformerFlowSW"    infoText="" warningText="" alarmText="Alarm14  Transformer Cooling Water Low Flow -U14  [DI-25]" />
    <IoSensor id="SensorSpare1FlowSW"              module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_Spare1FlowSW"         infoText="" warningText="" alarmText="Alarm15  Spare1 Flow Low-U12 [DI-26]" />
    <IoSensor id="SensorInletTotalFlowLowSW"       module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_InletTotalFlowLowSW"  infoText="" warningText="" alarmText="Alarm16  Chamber Cooling Water Pressure Low  [DI-27]" />
    <IoSensor id="SensorInletTotalFlowHighSW"      module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_InletTotalFlowHighSW" infoText="" warningText="" alarmText="Alarm17  Chamber Cooling Water Pressure High  [DI-28]" />
    <IoSensor id="SensorPMH2DetectorSW"            module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMH2DetectorSW"       infoText="" warningText="" alarmText="Alarm19  PM H2 Leak Detect  [DI-30]" />
    <IoSensor id="SensorGBHCLDetectorSW"           module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBHCLDetectorSW"      infoText="" warningText="" alarmText="Alarm20  Gasbox HCL Leak Detect  [DI-31]" />
    <IoSensor id="SensorGBExhaustDPSW"             module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBExhaustDPSW"        infoText="" warningText="Alarm21  Gasbox Exhaust DP Error  [DI-32]" alarmText="" />
    <IoSensor id="SensorDryPumpAlarm"              module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_DryPumpAlarm"         infoText="" warningText="" alarmText="Alarm22  DryPump.Alarm  [DI-36]" />
    <IoSensor id="SensorPumpExhaustPressSW"        module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PumpExhaustPressSW"   infoText="" warningText="" alarmText="Alarm23  Pump Exhaust Pressure Abnormal   [DI-38]" />
    <IoSensor id="SensorPMAExhaustDPSW"            module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMAExhaustDPSW"       infoText="" warningText="Alarm24  PM Exhaust DP Error  [DI-39]" alarmText="" />
    <IoSensor id="SensorPumpExhaustDPSW"           module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PumpExhaustDPSW"      infoText="" warningText="Alarm25  Pump Exhaust DP Error  [DI-40]" alarmText="" />
    <IoSensor id="SensorScrubberIntlkSW"           module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ScrubberIntlkSW"      infoText="" warningText="" alarmText="Alarm26  Scrubber System Error  [DI-41]" />
    <IoSensor id="SensorFacilityIntlkSW"           module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_FacilityIntlkSW"      infoText="" warningText="" alarmText="Alarm27  Facility Error  [DI-42]" />
    <IoSensor id="SensorTCSAlarm"                  module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TCSAlarm"             infoText="" warningText="" alarmText="Alarm28  TCS.Alarm  [DI-43]" />
    <IoSensor id="SensorServoDriverFaultSW"        module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ServoDriverFaultSW"   infoText="" warningText="" alarmText="Alarm29  Rotation Servo Driver Error  [DI-45]" />
    <IoSensor id="SensorChamMiddleFlow2SW"         module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamMiddleFlow2SW"    infoText="" warningText="" alarmText="Alarm30  Chamber Middle2 Cooling Water Flow Abnormal U4[DI-46]" />
    <IoSensor id="SensorReactorHCLDetectorSW"      module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ReactorHCLDetectorSW" infoText="" warningText="" alarmText="Alarm31  ReactorHCLDetector  [DI-52]" />
    <IoSensor id="SensorGN2InletPressSW"           module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GN2InletPressSW"      infoText="" warningText="" alarmText="Alarm32  Gasbox N2 Pressure Low  [DI-55]" />
    <IoSensor id="SensorArInletPressSW"            module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ArInletPressSW"       infoText="" warningText="" alarmText="Alarm33  Gasbox Ar Pressure Low  [DI-56]" />
    <IoSensor id="SensorH2PressureSW"              module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_H2PressureSW"         infoText="" warningText="" alarmText="Alarm34  Gasbox H2 Pressure Low  [DI-57]" />
    <IoSensor id="SensorGBH2DetectorSW"            module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBH2DetectorSW"       infoText="" warningText="" alarmText="Alarm35  Gasbox H2 Leak Detect  [DI-59]" />
    <IoSensor id="SensorDryPump1Running"           module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_DryPump1Running"      infoText="" warningText="" alarmText="Alarm36  DryPump1 Not Running  [DI-65]" />
    <IoSensor id="SensorEMOStatusSW"               module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_EMOStatusSW"          infoText="" warningText="" alarmText="Alarm37  EMOStatus [DI-70]" />
    <IoSensor id="SensorFacilityWarningSW"         module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_FacilityWarningSW"    infoText="" warningText="" alarmText="Alarm38  Facility Equipment Alarm [DI-72]" />
    <IoSensor id="SensorMainCBStatusSW"            module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_MainCBStatusSW"       infoText="" warningText="" alarmText="Alarm39  Main CB Status Off  [DI-76]" />
    <IoSensor id="SensorUPS1Enable"                module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_UPS1Enable"           infoText="" warningText="" alarmText="Alarm40  UPS1.Enable [DI-78]" />
    <IoSensor id="SensorUPS2Enable"                module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_UPS2Enable"           infoText="" warningText="" alarmText="Alarm41  UPS2.Enable [DI-79]" />
    <IoSensor id="SensorUPS1LowBattery"            module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_UPS1LowBattery"       infoText="" warningText="" alarmText="Alarm43  UPS1.LowBattery [DI-84]" />
    <IoSensor id="SensorUPS2LowBattery"            module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_UPS2LowBattery"       infoText="" warningText="" alarmText="Alarm44  UPS2.LowBattery [DI-85]" />
    <IoSensor id="SensorProcessStopSW"             module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_ProcessStopSW"        infoText="" warningText="" alarmText="Alarm42  Process Stop  [DI-81]" />
    <IoSensor id="SensorSHFlowTemp"                module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_SHFlowTemp"           infoText="" warningText="" alarmText="Alarm45  SH Cooling Water Temp Over Temp -U1  [DO196]" />
    <IoSensor id="SensorChamTopFlowTemp"           module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ChamTopFlowTemp"      infoText="" warningText="" alarmText="Alarm46  Chamber Top Cooling Water Over Temp -U2  [DO197]" />
    <IoSensor id="SensorChamMiddleFlow1Temp"       module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ChamMiddleFlow1Temp"  infoText="" warningText="" alarmText="Alarm47  Chamber Middle Flow1 Cooling Water Over Temp -U3 [DO198]" />
    <IoSensor id="SensorChamMiddleFlow2Temp"       module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ChamMiddleFlow2Temp"  infoText="" warningText="" alarmText="Alarm48  Chamber Middle Flow2 Cooling Water Over Temp -U4  [DO195]" />
    <IoSensor id="SensorChamBottomFlowTemp"        module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ChamBottomFlowTemp"   infoText="" warningText="" alarmText="Alarm49  Chamber Bottom Cooling Water Over Temp -U5 [DO199]" />
    <IoSensor id="SensorSpareFlowTemp"             module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_SpareFlowTemp"        infoText="" warningText="" alarmText="Alarm50  Spare Cooling Water Over Temp -U6  [DO200]" />
    <IoSensor id="SensorPowerRod1FlowTemp"         module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_PowerRod1FlowTemp"    infoText="" warningText="" alarmText="Alarm51  Power Rod1 Cooling Water Over Temp -U7  [DO201]" />
    <IoSensor id="SensorPowerRod2FlowTemp"         module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_PowerRod2FlowTemp"    infoText="" warningText="" alarmText="Alarm52  Power Rod2 Cooling Water Over Temp -U8  [DO202]" />
    <IoSensor id="SensorForelineFlowTemp"          module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ForelineFlowTemp"     infoText="" warningText="" alarmText="Alarm53  Foreline Cooling Water Over Temp -U9  [DO203]" />
    <IoSensor id="SensorElectrodeWFlowTemp"        module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_ElectrodeWFlowTemp"   infoText="" warningText="" alarmText="Alarm54  Electrode-W Cooling Water Over Temp -U10  [DO204]" />
    <IoSensor id="SensorTMPump1FlowTemp"           module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_TMPump1FlowTemp"      infoText="" warningText="" alarmText="Alarm55  TMPump1 Cooling Water Over Temp -U11  [DO205]" />
    <IoSensor id="SensorSpare1FlowTemp"            module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_Spare1FlowTemp"       infoText="" warningText="" alarmText="Alarm56  Spare1 Flow.Temp Over Temp -U12 [DO207]" />
    <IoSensor id="SensorSpare2FlowTemp"            module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_Spare2FlowTemp"       infoText="" warningText="" alarmText="Alarm57  Spare2 Flow.Temp Over Temp -U13 [DO208]" />
    <IoSensor id="SensorTransformerFlowTemp"       module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" do="DO_TransformerFlowTemp"  infoText="" warningText="" alarmText="Alarm58  Transformer Cooling Water Over Temp -U14  [DO206]" />
    <IoSensor id="SensorPyroCommunicationError"    module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  do="DO_PyroCommunicationError"    infoText="" warningText="" alarmText="Alarm59  Pyro Communication Error [DO220]" />
    <IoSensor id="SensorTC1PyroWarmMaxDiff"        module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  do="DO_TC1PyroWarmMaxDiff"        infoText="" warningText="" alarmText="Alarm60  Pyro Warm Max Diff [DO230]" />
    <IoSensor id="SensorTC1AETempRasisingFast"     module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  do="DO_TC1AETempRaisingFast"      infoText="" warningText="" alarmText="Alarm61  PyroTemp Rasising Fast [DO231]" />
    <IoSensor id="SensorTCSHighLevel1"             module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_TCSHighLevel1"             infoText="" warningText="" alarmText="Alarm63  TCS Level High [DI-29]" />
    <IoSensor id="SensorPSU1Alarm"                 module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_PSU1Alarm"                 infoText="" warningText="" alarmText="Alarm66  PSU1.Alarm  [DI-320]" />
    <IoSensor id="SensorPSU2Alarm"                 module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_PSU2Alarm"                 infoText="" warningText="" alarmText="Alarm67  PSU2.Alarm  [DI-321]" />
    <IoSensor id="SensorPSU3Alarm"                 module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_PSU3Alarm"                 infoText="" warningText="" alarmText="Alarm68  PSU3.Alarm  [DI-322]" />
    <IoSensor id="SensorSCR1Alarm"                 module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_SCR1Alarm"                 infoText="" warningText="" alarmText="Alarm69  SCR1.Alarm  [DI-323]" />
    <IoSensor id="SensorSCR2Alarm"                 module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_SCR2Alarm"                 infoText="" warningText="" alarmText="Alarm70  SCR2.Alarm  [DI-324]" />
    <IoSensor id="SensorSCR3Alarm"                 module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_SCR3Alarm"                 infoText="" warningText="" alarmText="Alarm71  SCR3.Alarm  [DI-325]" />
    <IoSensor id="SensorPSUTCDPCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_PSUdpCommunicationError"   infoText="" warningText="" alarmText="Alarm72  PSU dp Communication Error  [DI-328]" />
    <IoSensor id="SensorSCRTCDPCommunicationError" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_SCRTCDPCommunicationError" infoText="" warningText="" alarmText="Alarm73  SCR dp Communication Error  [DI-329]" />
    <IoSensor id="SensorPSU1dpCommunicationError"  module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_PSU1dpCommunicationError"  infoText="" warningText="" alarmText="Alarm74  PSU-1 dp Communication Error  [DI-330]" />
    <IoSensor id="SensorPSU2dpCommunicationError"  module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_PSU2dpCommunicationError"  infoText="" warningText="" alarmText="Alarm75  PSU-2 dp Communication Error  [DI-331]" />
    <IoSensor id="SensorPSU3dpCommunicationError"  module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_PSU3dpCommunicationError"  infoText="" warningText="" alarmText="Alarm76  PSU-3 dp Communication Error  [DI-332]" />
    <IoSensor id="SensorSCRdpCommunicationError"   module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_SCRdpCommunicationError"   infoText="" warningText="" alarmText="Alarm77  SCR dp Communication Error  [DI-333]" />
    <IoSensor id="SensorGBNH3DetectorSW"           module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_GBNH3DetectorSW"           infoText="" warningText="" alarmText="Alarm79  Gasbox NH3 Leak Detect  [DI-34]" />
    <IoSensor id="SensorPMNH3DetectorSW"            module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMNH3DetectorSW"          infoText="" warningText="" alarmText="Alarm80  PM NH3 Leak Detect  [DI-58]" />
    <IoSensor id="SensorChamPressAboveATMSW2"      module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_ChamPressAboveATMSW2"      infoText="" warningText="" alarmText="Alarm98 Chamber Press Above ATM  [DI-345]" />
    <IoSensor id="SensorApcButterflyError"         module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_ApcButterflyError"         infoText="" warningText="" alarmText="Alarm99 Apc Butterfly Error  [DI-346]" />
    <IoSensor id="SensorHearbeatTimeout"           module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_HearbeatTimeout"           infoText="" warningText="" alarmText="Alarm100  PM Hearbeat Timeout  [DI-350]" />
    <IoSensor id="SensorMFC01Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC01Offline" infoText="" warningText="" alarmText="Alarm101  MFC01 Offline  [DI-351]" />
    <IoSensor id="SensorMFC02Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC02Offline" infoText="" warningText="" alarmText="Alarm102  MFC02 Offline  [DI-352]" />
    <IoSensor id="SensorMFC03Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC03Offline" infoText="" warningText="" alarmText="Alarm103  MFC03 Offline  [DI-353]" />
    <IoSensor id="SensorMFC04Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC04Offline" infoText="" warningText="" alarmText="Alarm104  MFC04 Offline  [DI-354]" />
    <IoSensor id="SensorMFC05Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC05Offline" infoText="" warningText="" alarmText="Alarm105  MFC05 Offline  [DI-355]" />
    <IoSensor id="SensorMFC06Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC06Offline" infoText="" warningText="" alarmText="Alarm106  MFC06 Offline  [DI-356]" />
    <IoSensor id="SensorMFC07Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC07Offline" infoText="" warningText="" alarmText="Alarm107  MFC07 Offline  [DI-357]" />
    <IoSensor id="SensorMFC08Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC08Offline" infoText="" warningText="" alarmText="Alarm108  MFC08 Offline  [DI-358]" />
    <IoSensor id="SensorMFC09Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC09Offline" infoText="" warningText="" alarmText="Alarm109  MFC09 Offline  [DI-359]" />
    <IoSensor id="SensorMFC10Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC10Offline" infoText="" warningText="" alarmText="Alarm110  MFC10 Offline  [DI-360]" />
    <IoSensor id="SensorMFC11Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC11Offline" infoText="" warningText="" alarmText="Alarm111  MFC11 Offline  [DI-361]" />
    <IoSensor id="SensorMFC12Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC12Offline" infoText="" warningText="" alarmText="Alarm112  MFC12 Offline  [DI-362]" />
    <IoSensor id="SensorMFC13Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC13Offline" infoText="" warningText="" alarmText="Alarm113  MFC13 Offline  [DI-363]" />
    <IoSensor id="SensorMFC14Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC14Offline" infoText="" warningText="" alarmText="Alarm114  MFC14 Offline  [DI-364]" />
    <IoSensor id="SensorMFC15Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC15Offline" infoText="" warningText="" alarmText="Alarm115  MFC15 Offline  [DI-365]" />
    <IoSensor id="SensorMFC16Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC16Offline" infoText="" warningText="" alarmText="Alarm116  MFC16 Offline  [DI-366]" />
    <IoSensor id="SensorMFC17Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC17Offline" infoText="" warningText="" alarmText="Alarm117  MFC17 Offline  [DI-367]" />
    <IoSensor id="SensorMFC18Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC18Offline" infoText="" warningText="" alarmText="Alarm118  MFC18 Offline  [DI-368]" />
    <IoSensor id="SensorMFC19Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC19Offline" infoText="" warningText="" alarmText="Alarm119  MFC19 Offline  [DI-369]" />
    <IoSensor id="SensorMFC20Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC20Offline" infoText="" warningText="" alarmText="Alarm120  MFC20 Offline  [DI-370]" />
    <IoSensor id="SensorMFC22Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC22Offline" infoText="" warningText="" alarmText="Alarm122  MFC22 Offline  [DI-372]" />
    <IoSensor id="SensorMFC23Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC23Offline" infoText="" warningText="" alarmText="Alarm123  MFC23 Offline  [DI-373]" />
    <IoSensor id="SensorMFC25Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC25Offline" infoText="" warningText="" alarmText="Alarm125  MFC25 Offline  [DI-375]" />
    <IoSensor id="SensorMFC26Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC26Offline" infoText="" warningText="" alarmText="Alarm126  MFC26 Offline  [DI-376]" />
    <IoSensor id="SensorMFC27Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC27Offline" infoText="" warningText="" alarmText="Alarm127  MFC27 Offline  [DI-377]" />
    <IoSensor id="SensorMFC28Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC28Offline" infoText="" warningText="" alarmText="Alarm128  MFC28 Offline  [DI-378]" />
    <IoSensor id="SensorMFC29Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC29Offline" infoText="" warningText="" alarmText="Alarm129  MFC29 Offline  [DI-379]" />
    <IoSensor id="SensorMFC31Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC31Offline" infoText="" warningText="" alarmText="Alarm131  MFC31 Offline  [DI-381]" />
    <IoSensor id="SensorMFC32Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC32Offline" infoText="" warningText="" alarmText="Alarm132  MFC32 Offline  [DI-382]" />
    <IoSensor id="SensorMFC33Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC33Offline" infoText="" warningText="" alarmText="Alarm133  MFC33 Offline  [DI-383]" />
    <IoSensor id="SensorMFC34Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC34Offline" infoText="" warningText="" alarmText="Alarm134  MFC34 Offline  [DI-384]" />
    <IoSensor id="SensorMFC35Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC35Offline" infoText="" warningText="" alarmText="Alarm135  MFC35 Offline  [DI-385]" />
    <IoSensor id="SensorMFC36Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC36Offline" infoText="" warningText="" alarmText="Alarm136  MFC36 Offline  [DI-386]" />
    <IoSensor id="SensorMFC37Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC37Offline" infoText="" warningText="" alarmText="Alarm137  MFC37 Offline  [DI-387]" />
    <IoSensor id="SensorMFC38Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC38Offline" infoText="" warningText="" alarmText="Alarm138  MFC38 Offline  [DI-388]" />
    <IoSensor id="SensorMFC40Offline" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_MFC40Offline" infoText="" warningText="" alarmText="Alarm140  MFC40 Offline  [DI-390]" />
    <IoSensor id="SensorPC01Offline"  module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC01Offline"  infoText="" warningText="" alarmText="Alarm141  PC1 Offline  [DI-391]" />
    <IoSensor id="SensorPC02Offline"  module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC02Offline"  infoText="" warningText="" alarmText="Alarm142  PC2 Offline  [DI-392]" />
    <IoSensor id="SensorPC03Offline"  module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC03Offline"  infoText="" warningText="" alarmText="Alarm143  PC3 Offline  [DI-393]" />
    <IoSensor id="SensorPC04Offline"  module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC04Offline"  infoText="" warningText="" alarmText="Alarm144  PC4 Offline  [DI-394]" />
    <IoSensor id="SensorPC05Offline"  module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC05Offline"  infoText="" warningText="" alarmText="Alarm145  PC5 Offline  [DI-395]" />
    <IoSensor id="SensorPC06Offline"  module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC06Offline"  infoText="" warningText="" alarmText="Alarm146  PC6 Offline  [DI-396]" />
    <IoSensor id="SensorPC07Offline"  module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_PC07Offline"  infoText="" warningText="" alarmText="Alarm147  PC7 Offline  [DI-397]" />

    <IoSensor id="SensorChamAtSafeProcessPressSW" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_ChamAtSafeProcessPressSW" infoText="Information1 Chamber At Safe Process Press [DI-5]" warningText="" alarmText="" />
    <IoSensor id="SensorPMATMSW"                  module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PMATMSW"                  infoText="Information3 PM At  ATM [DI-9]" warningText="" alarmText="" />
    <IoSensor id="SensorHeaterTempBelow900CSW"    module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_HeaterTempLowLimitSW"     infoText="Information4 Heater Temp Below 900C [DI-11]" warningText="" alarmText="" />
    <IoSensor id="SensorConfinementRingUp"        module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_ConfinementRingUp"        infoText="Information5 Confinement Ring At Up Position [DI-12]" warningText="" alarmText="" />
    <IoSensor id="SensorSusceptorAtSafeSpeed"     module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_SusceptorAtSafeSpeed"     infoText="Information6 Susceptor At Safe Speed [DI-13]" warningText="" alarmText="" />
    <IoSensor id="SensorChamLidPushButtonLocal"   module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_ChamLidPushButtonLocal"   infoText="Information7 Chamer Lid Push Button On Local Mode [DI-49]" warningText="" alarmText="" />
    <IoSensor id="SensorConfinementRingDown"      module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_ConfinementRingDown"      infoText="Information8 Confinement Ring At Down position [DI-50]" warningText="" alarmText="" />
    <IoSensor id="SensorReactorSuspectorCheck"    module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_ReactorSuspectorCheck"    infoText="Information9 ReactorSuspectorCheck [DI-51]" warningText="" alarmText="" />
    <IoSensor id="SensorManualLidOPLocal"         module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_ManualLidOPLocal"         infoText="Information10 ManualLidOP.Local[DI-88]" warningText="" alarmText="" />
    <IoSensor id="SensorManualLidUpPB"            module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_ManualLidUpPB"            infoText="Information11 ManualLidUp.PB[DI-89]" warningText="" alarmText="" />
    <IoSensor id="SensorManualLidDownPB"          module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_ManualLidDownPB"          infoText="Information12 ManualLidDown.PB[DI-90]" warningText="" alarmText="" />
    <IoSensor id="SensorManualLidUpLockPB"        module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_ManualLidUpLockPB"        infoText="Information13 ManualLidUpLock.PB[DI-91]" warningText="" alarmText="" />
    <IoSensor id="SensorManualLidForwardPB"       module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_ManualLidForwardPB"       infoText="Information14 ManualLidForward.PB[DI-92]" warningText="" alarmText="" />
    <IoSensor id="SensorManualLidBackwardPB"      module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_ManualLidBackwardPB"      infoText="Information15 ManualLidBackward.PB[DI-93]" warningText="" alarmText="" />
    <IoSensor id="SensorChamMoveBodyUp"           module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_ChamMoveBodyUp"           infoText="Information16 ChamMoveBody.Up[DI-96]" warningText="" alarmText="" />
    <IoSensor id="SensorChamMoveBodyUpLatchFW"    module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_ChamMoveBodyUpLatchFW"    infoText="Information17 ChamMoveBody.Up.LatchFW[DI-97]" warningText="" alarmText="" />
    <IoSensor id="SensorChamMoveBodyDown"         module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_ChamMoveBodyDown"         infoText="Information18 ChamMoveBody.Down[DI-98]" warningText="" alarmText="" />
    <IoSensor id="SensorChamMoveBodyFront"        module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_ChamMoveBodyFront"        infoText="Information19 ChamMoveBody.Front[DI-99]" warningText="" alarmText="" />
    <IoSensor id="SensorChamMoveBodyEnd"          module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_ChamMoveBodyEnd"          infoText="Information20 ChamMoveBody.End[DI-100]" warningText="" alarmText="" />
    <IoSensor id="SensorChamMoveBodyEndLatchBW"   module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_ChamMoveBodyEndLatchBW"   infoText="Information21 ChamMoveBody.End.LatchBW[DI-101]" warningText="" alarmText="" />
    <IoSensor id="SensorSHGasConnectorLoosen"     module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_SHGasConnectorLoosen"     infoText="Information22 SH.GasConnector.Loosen[DI-102]" warningText="" alarmText="" />
    <IoSensor id="SensorSHGasConnectorTighten"    module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_SHGasConnectorTighten"    infoText="Information23 SH.GasConnector.Tighten[DI-103]" warningText="" alarmText="" />
    <IoSensor id="SensorSHLidLoosen"              module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_SHLidLoosen"              infoText="Information24 SH.Lid.Loosen[DI-104]" warningText="" alarmText="" />
    <IoSensor id="SensorSHLidTighten"             module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_SHLidTighten"             infoText="Information25 SH.Lid.Tighten[DI-105]" warningText="" alarmText="" />
    <IoSensor id="SensorSHLidSwingLock"           module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_SHLidSwingLock"           infoText="Information26 SH.Lid.Swing.Lock[DI-107]" warningText="" alarmText="" />
    <IoSensor id="SensorSHLidSwingUnlock"         module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_SHLidSwingUnlock"         infoText="Information27 SH.Lid.Swing.Unlock[DI-108]" warningText="" alarmText="" />
    <IoSensor id="SensorMiddleLidLoosen"          module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_MiddleLidLoosen"          infoText="Information28 Middle.Lid.Loosen[DI-118]" warningText="" alarmText="" />
    <IoSensor id="SensorMiddleLidTighten"         module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_MiddleLidTighten"         infoText="Information29 Middle.Lid.Tighten[DI-119]" warningText="" alarmText="" />
    <IoSensor id="SensorMiddleLidSwingLock"       module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_MiddleLidSwingLock"       infoText="Information30 Middle.Lid.Swing.Lock[DI-121]" warningText="" alarmText="" />
    <IoSensor id="SensorMiddleLidSwingUnlock"     module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_MiddleLidSwingUnlock"     infoText="Information31 Middle.Lid.Swing.Unlock[DI-122]" warningText="" alarmText="" />
    <!--<IoSensor id="SensorPSUInnerTempLAlarm"       module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_PSUInnerTempLAlarm"       infoText="Information32 PSU.Inner.Temp Low[DI-308]" warningText="" alarmText="" />
    <IoSensor id="SensorPSUMiddleTempLAlarm"      module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_PSUMiddleTempLAlarm"      infoText="Information33 PSU.Middle.Temp Low[DI-309]" warningText="" alarmText="" />
    <IoSensor id="SensorPSUOuterTempLAlarm"       module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_PSUOuterTempLAlarm"       infoText="Information34 PSU.Outer.TempLow[DI-310]" warningText="" alarmText="" />
    <IoSensor id="SensorSCRUpperTempLAlarm"       module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_SCRUpperTempLAlarm"       infoText="Information35 SCR.Upper.Temp Low[DI-314]" warningText="" alarmText="" />
    <IoSensor id="SensorSCRMiddleTempLAlarm"      module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_SCRMiddleTempLAlarm"      infoText="Information36 SCR.Middle.Temp Low[DI-315]" warningText="" alarmText="" />
    <IoSensor id="SensorSCRLowerTempLAlarm"       module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_SCRLowerTempLAlarm"       infoText="Information37 SCR.Lower.Temp Low[DI-316]" warningText="" alarmText="" />-->
    <IoSensor id="SensorConfinementRingServoON"   module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_ConfinementRingServoON"   infoText="Information38 ConfinementRingServoON [DI-337]" warningText="" alarmText="" />
    <IoSensor id="SensorServoReady"               module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true"  di="DI_ServoReady"               infoText="Information39 Servo Not Ready [DI-288]" warningText="" alarmText="" />
    <IoSensor id="SensorPSU1Status"               module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false"  di="DI_PSU1Status"               infoText="Information40 PSU1 Status Is Off[DI-296]" warningText="" alarmText="" />
    <IoSensor id="SensorPSU2Status"               module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false"  di="DI_PSU2Status"               infoText="Information41 PSU2 Status Is Off[DI-297]" warningText="" alarmText="" />
    <IoSensor id="SensorPSU3Status"               module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false"  di="DI_PSU3Status"               infoText="Information42 PSU3 Status Is Off[DI-298]" warningText="" alarmText="" />
    <IoSensor id="SensorSCR1Status"               module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false"  di="DI_SCR1Status"               infoText="Information43 SCR1 Status Is Off[DI-302]" warningText="" alarmText="" />
    <IoSensor id="SensorSCR2Status"               module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false"  di="DI_SCR2Status"               infoText="Information44 SCR2 Status Is Off[DI-303]" warningText="" alarmText="" />
    <IoSensor id="SensorSCR3Status"               module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false"  di="DI_SCR3Status"               infoText="Information45 SCR3 Status Is Off[DI-304]" warningText="" alarmText="" />
    <IoSensor id="SensorPumpCabDoorClosed"        module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_PumpCabDoorClosed"        infoText="Information46 PumpCabDoor Not Closed  [DI-71]" warningText="" alarmText="" />
  </IoSensors>
  <SicServos classType="Aitex.Core.RT.Device.Devices.SicServo" assembly="MECF.Framework.RT.EquipmentLibrary">
    <SicServo id="PMServo" module="" display="PMServo" schematicId="PMServo" unit="" aioType="float" aiActualSpeed="AI_ActualSpeed" aiActualCurrent="AI_ActualCurrent" aiAccSpeed="AI_ActualspeedACC" aiDecSpeed="AI_ActualspeedDEC" aoActualSpeedSetPoint="AO_SpindleSpeed" aoAccSpeedSetPoint="AO_SpindleACC" aoDecSpeedSetPoint="AO_SpindleDEC" diServoReady="DI_ServoReady" diServoError="DI_ServoDriverFaultSW" doServoEnable="DO_ServoEnable" doServoInital="DO_ServoInitial" doServoReset="DO_ServoReset" />
  </SicServos>
  <IoSignalTowers classType="MECF.Framework.RT.EquipmentLibrary.Devices.IoSignalTower" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoSignalTower id="SignalTower" module="PM1" display="SignalTower" schematicId="PMSignalTower"
                   eventFile="STEvents.xml"
                   doGreen="DO_TowerGreen" 
                   doYellow="DO_TowerYellow" 
                   doRed="DO_TowerRed" 
                   doBuzzer="DO_Buzzer" />
  </IoSignalTowers>
  <IoChamberMoveBodys classType="Aitex.Core.RT.Device.Devices.IoChamberMoveBody" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoChamberMoveBody id="ChamberMoveBody" module="" display="ChamberMoveBody" schematicId="ChamberMoveBody" unit="" aioType="" diUpFaceback="DI_ChamMoveBodyUp" diDownFaceback="DI_ChamMoveBodyDown" diFront=" DI_ChamMoveBodyFront" diEndFaceback="DI_ChamMoveBodyEnd" doUpSetpoint="DO_ChamMoveBodyUp" doDownSetpoint="DO_ChamMoveBodyDown" doUpBrake="DO_ChamMoveBodyUpAirBrake" doForward="DO_ChamMoveBodyForward" doBackward="DO_ChamMoveBodyBackward" doForwardLatch="DO_ChamMoveBodyBrakerForward" doBackwardLatch="DO_ChamMoveBodyBrakerBackward" diForwardLatch="DI_ChamMoveBodyUpLatchFW" diBackwardLatch="DI_ChamMoveBodyEndLatchBW" diRemote="DI_ChamLidPushButtonLocal" diLock="DI_ManualLidUpPB" diUpDownEnable="DI_ChamMoveBodyUpDownEnableFB" doUpDownEnable="DO_ChamMoveBodyUpDownEnable" />
  </IoChamberMoveBodys>
  <IoGasConnectors classType="Aitex.Core.RT.Device.Devices.IoGasConnector" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoGasConnector id="GasConnector" module="" display="GasConnector" schematicId="GasConnector" unit="" aioType="" diGasConnectorLoosen="DI_SHGasConnectorLoosen" diGasConnectorTighten="DI_SHGasConnectorTighten" doGasConnectorLoosen="DO_SHGasConnectorLoosen" doGasConnectorTighten="DO_SHGasConnectorTighten" />
  </IoGasConnectors>
  <IoLids classType="Aitex.Core.RT.Device.Devices.IoLid" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoLid id="SHLid" module="" display="SH Lid" schematicId="SHLid" unit="" aioType="" diLoosenFaceback="DI_SHLidLoosen" diTightenFaceback="DI_SHLidTighten" diClosedFaceback="DI_SHLidClosed" doLoosenSetpoint="DO_SHLidLoosen" doTightenSetpoint="DO_SHLidTighten" />
    <IoLid id="MiddleLid" module="" display="Middle Lid" schematicId="MiddleLid" unit="" aioType="" diLoosenFaceback="DI_MiddleLidLoosen" diTightenFaceback="DI_MiddleLidTighten" diClosedFaceback="DI_MiddleLidClosed" doLoosenSetpoint="DO_MiddleLidLoosen" doTightenSetpoint="DO_MiddleLidTighten" />
  </IoLids>
  <IoLidSwings classType="Aitex.Core.RT.Device.Devices.IoLidSwing" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoLidSwing id="SHLidSwing" module="" display="SH Lid Swing" schematicId="SHLidSwing" unit="" aioType="" diLidLockFaceback="DI_SHLidSwingLock" diLidUnlockFaceback="DI_SHLidSwingUnlock" doLidLockSetpoint="DO_SHLidSwingLock" doLidUnlockSetpoint="DO_SHLidSwingUnlock" />
    <IoLidSwing id="MiddleLidSwing" module="" display="Middle Lid Swing" schematicId="MiddleLidSwing" unit="" aioType="" diLidLockFaceback="DI_MiddleLidSwingLock" diLidUnlockFaceback="DI_MiddleLidSwingUnlock" doLidLockSetpoint="DO_MiddleLidSwingLock" doLidUnlockSetpoint="DO_MiddleLidSwingUnlock" />
  </IoLidSwings>
  <IoConfinementRings classType="Aitex.Core.RT.Device.Devices.IoConfinementRing" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoConfinementRing id="ConfinementRing" module="" display="ConfinementRing" schematicId="ConfinementRing" unit="" aioType="" diRingDownFaceback="DI_ConfinementRingDown" diRingUpFaceback="DI_ConfinementRingUp" diRingDone="DI_ConfinementRingDone" diRingServoOn="DI_ConfinementRingServoOn" diRingHomed="DI_ConfinementRingHomed" diRingBusy="DI_ConfinementRingBusy" diRingServoError="DI_ConfinementRingServoError" doRingServoOn="DO_ConfinementRingServoOn" doRingJogUp="DO_ConfinementRingJogUp" doRingJogDown="DO_ConfinementRingJogDown" doRingStop="DO_ConfinementRingStop" doRingTeachUp="DO_ConfinementRingUpPosTeach" doRingTeachDown="DO_ConfinementRingDownPosTeach" doRingMoveUp="DO_ConfinementRingMoveUp" doRingMoveDown="DO_ConfinementRingMoveDown" aiRingCurPos="AI_ConfinementRingCurPos" aiRingUpPos="AI_ConfinementRingUpPos" aiRingDownPos="AI_ConfinementRingDownPos" aoRingMode="AO_ConfinementRingMode" aoRingSpeed="AO_ConfinementRingSpeed" aoRingDistance="AO_ConfinementRingDistance" doRingServoReset="DO_ConfinementRingServoReset" aoRingUpPos="AO_ConfinementRingUpPos" aoRingDownPos="AO_ConfinementRingDownPos" />
  </IoConfinementRings>
  <IoHeartBeats classType="Aitex.Core.RT.Device.Devices.IoHeartBeat" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoHeartBeat id="HeartBeat" display="HeartBeat" schematicId="HeartBeat" aioType="float" ai="AI_HeartBeat" ao="AO_HeartBeat" />
  </IoHeartBeats>
  <IoC2H4s classType="Aitex.Core.RT.Device.PmDevices.IoC2H4" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoC2H4 id="C2H4" display="" schematicId="" unit="" valve1="V58" valve2="V58s" valve3="V59" valve4="V60" valve5="V63" />
  </IoC2H4s>
  <IoHCls classType="Aitex.Core.RT.Device.PmDevices.IoHCl" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoHCl id="HCl" display="" schematicId="" unit="" valve1="V51" valve2="V51s" valve3="V54" valve4="V54s" />
  </IoHCls>
  <IoN2Dilutions classType="Aitex.Core.RT.Device.PmDevices.IoN2Dilution" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoN2Dilution id="N2Dilution" display="" schematicId="" unit="" valve1="V37" valve2="V37s" valve3="V39" valve4="V39s" valve5="V61" />
    <IoN2Dilution id="NH3_2Dilution" display="" schematicId="" unit="" valve1="V37" valve2="V37s" valve3="V39" valve4="V39s" valve5="V61" />
  </IoN2Dilutions>
  <IoN2HighDopings classType="Aitex.Core.RT.Device.PmDevices.IoN2HighDoping" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoN2HighDoping id="N2HighDoping" display="" schematicId="" unit=""   valve1="" valve2="V40" valve3="V40s" scBasePath="PM.{module}.MFC.Mfc5.IsInstalled"/>
  </IoN2HighDopings>
  <IoSiH4s classType="Aitex.Core.RT.Device.PmDevices.IoSiH4" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoSiH4 id="SiH4" display="" schematicId="" unit="" valve1="V52" valve2="V52s" valve3="V55" valve4="V56" valve5="V62" />
  </IoSiH4s>
  <IoTCSs classType="Aitex.Core.RT.Device.PmDevices.IoTCS" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoTCS id="TCS" display="" schematicId="" unit="" valve1="V48" valve2="V48s" valve3="V49" valve4="V53" valve5="V53s" />
  </IoTCSs>
  <!--<IoTMAs classType="Aitex.Core.RT.Device.PmDevices.IoTMA" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoTMA id="TMA" display="" schematicId="" unit="" valve1="V41" valve2="V42" valve3="V43" valve4="V43s" valve5="V45" />
  </IoTMAs>-->
  <IoPurgeArH2Switchs classType="Aitex.Core.RT.Device.PmDevices.IoPurgeArH2Switch" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoPurgeArH2Switch id="PurgeArH2Switch" display="" schematicId="" unit="" valve1="V68" />
  </IoPurgeArH2Switchs>
  <IoV99s classType="Aitex.Core.RT.Device.PmDevices.IoV99" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoV99 id="Valve99" display="" schematicId="" unit="" valve1="V99" valve2="V99s" />
  </IoV99s>

  <RecipeValveActions classType="Aitex.Core.RT.Device.PmDevices.RecipeValveAction" assembly="MECF.Framework.RT.EquipmentLibrary">
    <RecipeValveAction id="SHArH2Switch" display="" schematicId="" unit="">
      <Valve Name="V33" Ar="false" H2="true"/>
      <Valve Name="V64" Ar="false" H2="true" />
      <Valve Name="V65" Ar="true"  H2="false" />
      <Valve Name="V68" Ar="true"  H2="" />
    </RecipeValveAction>
    <RecipeValveAction id="TMA" display="" schematicId="" unit="">
      <Valve Name="V41"  Purge="false" Vent="false" Run="true"  LowDoping="false"/>
      <Valve Name="V42"  Purge="true"  Vent="true"  Run="false" LowDoping="false" />
      <Valve Name="V43"  Purge="false" Vent="true"  Run="true"  LowDoping="true" />
      <Valve Name="V43s" Purge="false" Vent="true"  Run="true"  LowDoping="true" />
      <Valve Name="V45"  Purge="true"  Vent="false" Run="false" LowDoping="false"/>
    </RecipeValveAction>
    <RecipeValveAction id="N2NH3_2Doping" display="" schematicId="" unit="">
      <Valve Name="V52" Purge="false" Vent="true"  Run="true" />
      <Valve Name="V40" Purge="false" Vent="false" Run="true" />
    </RecipeValveAction>
    <RecipeValveAction id="N2NH3_13Doping" display="" schematicId="" unit="">
      <Valve Name="V37"  Purge="true"  Vent="false" Run="false" />
      <Valve Name="V39"  Purge="false" Vent="false" Run="true" />
      <Valve Name="V103" Purge=""      Vent="true"  Run="true" />
      <Valve Name="V105" Purge=""      Vent="false" Run="false" />
    </RecipeValveAction>
    <RecipeValveAction id="TMANH3_13" display="" schematicId="" unit="">
      <Valve Name="V45"  Purge="true"  Vent="false" Run="false" LowDopingVent="false" LowDopingRun="false"/>
      <Valve Name="V43"  Purge="false" Vent="true"  Run="true"  LowDopingVent="true"  LowDopingRun="true"/>
      <Valve Name="V43s" Purge="false" Vent="true"  Run="true"  LowDopingVent="true"  LowDopingRun="true"/>
      <Valve Name="V41"  Purge="false" Vent="false" Run="true"  LowDopingVent="false" LowDopingRun="true"/>
      <Valve Name="V42"  Purge="true"  Vent="true"  Run="false" LowDopingVent="true"  LowDopingRun="false"/>
      <Valve Name="V103" Purge=""      Vent=""      Run=""      LowDopingVent="false" LowDopingRun="false"/>
      <Valve Name="V105" Purge=""      Vent="false" Run="false" LowDopingVent="true"  LowDopingRun="true"/>
    </RecipeValveAction>
    <RecipeValveAction id="N2NH3_8LowFlowMode" display="" schematicId="" unit="">
      <Valve Name="V52" Purge="false" Vent="true"  Run="true" />
      <Valve Name="V40" Purge="false" Vent="false" Run="true" />
    </RecipeValveAction>
    <RecipeValveAction id="N2NH3_8HighFlowMode" display="" schematicId="" unit="">
      <Valve Name="V52" Purge="false"  Vent="true"  Run="true" />
      <Valve Name="V47" Purge="false" Vent="false" Run="true" />
    </RecipeValveAction>
    <RecipeValveAction id="N2NH3_11LowFlowMode" display="" schematicId="" unit="">
      <Valve Name="V40" Vent="false" Run="true" />
    </RecipeValveAction>
    <RecipeValveAction id="N2NH3_11HighFlowMode" display="" schematicId="" unit="">
      <Valve Name="V47"  Vent="false" Run="true" />
    </RecipeValveAction>
    <RecipeValveAction id="N2NH3_16LowFlowMode" display="" schematicId="" unit="">
      <Valve Name="V40" Vent="false" Run="true" />
    </RecipeValveAction>
    <RecipeValveAction id="N2NH3_16HighFlowMode" display="" schematicId="" unit="">
      <Valve Name="V47"  Vent="false" Run="true" />
    </RecipeValveAction>
    <RecipeValveAction id="V38Value" display="" schematicId="" unit="">
      <Valve Name="V38" Open="true" Close="false" />
    </RecipeValveAction>
    <RecipeValveAction id="V42Value" display="" schematicId="" unit="">
      <Valve Name="V42" Open="true" Close="false" />
    </RecipeValveAction>
    <RecipeValveAction id="V47Value" display="" schematicId="" unit="">
      <Valve Name="V47" Open="true" Close="false" />
    </RecipeValveAction>
    <RecipeValveAction id="V57Value" display="" schematicId="" unit="">
      <Valve Name="V57" Open="true" Close="false" />
    </RecipeValveAction>
    <RecipeValveAction id="V100Value" display="" schematicId="" unit="">
      <Valve Name="V100" Open="true" Close="false" />
    </RecipeValveAction>
    <RecipeValveAction id="NH3SiH4" display="" schematicId="" unit="">

    </RecipeValveAction>
  </RecipeValveActions>

  <IoInterLocks classType="Aitex.Core.RT.Device.Devices.IoInterLock" assembly="MECF.Framework.RT.EquipmentLibrary">
		<IoInterLock id="PMInterLock" display="" schematicId="" unit="" doLidOpenRoutineSucceed="DO_PurgeRoutineSucceed"
					 doLidCloseRoutineSucceed="DO_CleanRoutineSucceed" doProcessRunning="DO_ProcessRunning" doPreprocessRunning="DO_PreprocessRunning"
					 doCyclePurgeRoutineRunning="DO_CyclePurgeRoutineRunning" doExchangeMoRoutineRunning="DO_ExchangeMoRoutineRunning"
					 doLidCloseRoutineRunning="DO_CleanRoutineRunning" doLidOpenRoutineRunning="DO_PurgeRoutineRunning"
					 doPumpDownRoutineRunning="DO_PumpRoutineRunning" doVentRoutineRunning="DO_VentRoutineRunning"
					 doPostProcessRunning="DO_PostProcessRunning" diServoDriverFaultSW="DI_ServoDriverFaultSW" diH2PressureSW="DI_H2PressureSW"
					 doVACTransferAllowed="DO_VACTransferAllowed" doATMTransferAllowed="DO_ATMTransferAllowed" doProcessIdleRunning="DO_ProcessIdleRunning"
					 doATMIdleRoutineRunning="DO_ATMIdleRoutineRunning" doVACIdleRoutineRunning="DO_VACIdleRoutineRunning" diPSU1Status="DI_PSU1Status"
					 diPSU2Status="DI_PSU2Status" diPSU3Status="DI_PSU3Status" diSCR1Status="DI_SCR1Status" diSCR2Status="DI_SCR2Status" diSCR3Status="DI_SCR3Status"
					 doPSU1Enable="DO_PSU1Enable" doPSU2Enable="DO_PSU2Enable" doPSU3Enable="DO_PSU3Enable" doSCR1Enable="DO_SCR1Enable"
					 doSCR2Enable="DO_SCR2Enable" doSCR3Enable="DO_SCR3Enable" doTCSSupply="DO_TCSFluidInfusion" doTCSSupplementing="DO_TCSSupplementing" diTCSHighLevel1="DI_TCSHighLevel1" diTCSNormalLevel="DI_TCSNormalLevel" 
         aiTempCtrl1="AI_PSUTC" doReactorATMTransferReady="DO_ReactorATMTransferReady" doReactorVACTransferReady="DO_ReactorVACTransferReady" diPMATMSW="DI_PMATMSW"
					 aiActualSpeed="AI_ActualSpeed"   aiCurPos="AI_ConfinementRingCurPos" aiDownPos="AI_ConfinementRingDownPos" diPSUEnable="DI_PSUEnableFB" diHeaterTempBelow900CSW="DI_HeaterTempLowLimitSW"
					 doPMASlitDoorClosed="DO_SlitVlvClosed" diChamLidClosed="DI_ChamLidClosed" diConfinementRingDown="DI_ConfinementRingDown"
					 aiChamPress="AI_ActualPressure" doReactorPressRisingRate="DO_ReactorPressRisingRateFast" doUPSLowBattery="DO_UPSLowBattery"
                 
                 
					 doChamMiddleFlow2Temp="DO_ChamMiddleFlow2Temp"
					 doSHFlowTemp="DO_SHFlowTemp"
					 doChamTopFlowTemp="DO_ChamTopFlowTemp"
					 doChamMiddleFlow1Temp="DO_ChamMiddleFlow1Temp"
					 doChamBottomFlowTemp="DO_ChamBottomFlowTemp"
					 doSpareFlowTemp="DO_SpareFlowTemp"
					 doPowerRod1FlowTemp="DO_PowerRod1FlowTemp"
					 doPowerRod2FlowTemp="DO_PowerRod2FlowTemp"
					 doForelineFlowTemp ="DO_ForelineFlowTemp"
					 doElectrodeWFlowTemp="DO_ElectrodeWFlowTemp"
					 doTMPump1FlowTemp="DO_TMPump1FlowTemp"
					 doTransformerFlowTemp="DO_TransformerFlowTemp"
					 doTMTopLidTemp="DO_Spare1FlowTemp"
					 doTMBufferFlowTemp="DO_Spare2FlowTemp"
                 
					 aiChamMiddleFlow2Temp="AI_ChamMiddleFlow2Temp"
					 aiSHFlowTemp="AI_SHFlowTemp"
					 aiChamTopFlowTemp="AI_ChamTopFlowTemp"
					 aiChamMiddleFlowTemp="AI_ChamMiddleFlow1Temp"
					 aiChamBottomFlowTemp="AI_ChamBottomFlowTemp"
					 aiForeline1FlowTemp="AI_Foreline1FlowTemp"
					 aiPowerRod1FlowTemp="AI_PowerRod1FlowTemp"
					 aiPowerRod2FlowTemp="AI_PowerRod2FlowTemp"
					 aiElectrodeWFlowTemp="AI_ElectrodeWFlowTemp"
					 aiTMPump1FlowTemp="AI_TMPumpFlowTemp"
					 aiTMPump2FlowTemp="AI_Foreline1FlowTemp"
					 aiTransformerFlowTemp="AI_TransformerFlowTemp"
					 aiForelineFlowTemp="AI_Foreline2FlowTemp"
					 aiTMTopLidTemp="AI_Spare1Temp"
					 aiTMBufferFlowTemp="AI_Spare2Temp"/>
	</IoInterLocks>

  <PryoTempChecks classType="MECF.Framework.RT.EquipmentLibrary.Devices.PryoTempCheck" assembly="MECF.Framework.RT.EquipmentLibrary">
    <PryoTempCheck id="PryoTempCheck"  display="" schematicId="" unit="" scBasePath="PM.{module}.Heater"
                   aoPSUMiddleLoopMode="AO_PSUMiddleLoopMode" aoPSUMiddleTargetSP="AO_PSUMiddleTargetSP"/>
  </PryoTempChecks>
  
</DeviceModelDefine>