using System;
using System.Runtime.Serialization;
using Aitex.Core.Common.DeviceData.IoDevice.Base;

namespace Aitex.Core.Common.DeviceData.IoDevice
{
    public class AITProcessRunData : XDataBase
    {
        [DataMember]
        public Guid Uid { get; set; }

        [DataMember]
        public int Index { get; set; }

        [DataMember]
        public string Module { get; set; }

        [DataMember]
        public string WaferId { get; set; }

        [DataMember]
        public string RecipeName { get; set; }

        [DataMember]
        public DateTime? ProcessBegin { get; set; }

        [DataMember]
        public DateTime? ProcessEnd { get; set; }

        [DataMember]
        public double H2 { get; set; }

        [DataMember]
        public double Ar { get; set; }

        [DataMember]
        public double PN2 { get; set; }

        [DataMember]
        public double HCL { get; set; }

        [DataMember]
        public double SiH4 { get; set; }

        [DataMember]
        public double C2H4 { get; set; }

        [DataMember]
        public double TCS { get; set; }

        [DataMember]
        public double TMA { get; set; }

        [DataMember]
        public double HeaterPowerConsumption { get; set; }




    }
}
