<?xml version="1.0" ?>
<Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
  <Action do="PM2.DO_H2Supply(V31)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-1">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>

  <Action do="PM2.DO_ArSupply(V32)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-2">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>

  <Action do="PM2.DO_SHH2/ArSwitch(V33)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-3">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>

  <Action do="PM2.DO_ChamBodyArPurge(V68)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-39">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>

  <Action do="PM2.DO_H2ArLine1(V35)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-5">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>

  <Action do="PM2.DO_H2ArLine2(V36)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-6">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>

  <Action do="PM2.DO_DilutedN2Run/Vent(V39)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-9">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
    <Limit di="PM2.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
    <Limit di="PM2.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
    <Limit do="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
    <Limit do="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
    <Limit do="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
    <Limit do="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
    <Limit do="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
    <Limit do="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
    <Limit do="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
    <Limit do="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
    <Limit do="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
    <Limit do="PM2.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
    <Limit do="PM2.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
    <Limit do="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
    <Limit do="PM2.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
    <Limit do="PM2.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
  </Action>

  <Action do="PM2.DO_HighN2Run/Vent(V40)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-10">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
    <Limit di="PM2.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
    <Limit di="PM2.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
    <Limit do="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
    <Limit do="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
    <Limit do="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
    <Limit do="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
    <Limit do="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
    <Limit do="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
    <Limit do="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
    <Limit do="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
    <Limit do="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
    <Limit do="PM2.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
    <Limit do="PM2.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
    <Limit do="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
    <Limit do="PM2.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
    <Limit do="PM2.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
  </Action>

  <Action do="PM2.DO_TMARun(V41)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-11">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
    <Limit di="PM2.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
    <Limit di="PM2.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
    <Limit do="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
    <Limit do="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
    <Limit do="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
    <Limit do="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
    <Limit do="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
    <Limit do="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
    <Limit do="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
    <Limit do="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
    <Limit do="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
    <Limit do="PM2.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
    <Limit do="PM2.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
    <Limit do="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
    <Limit do="PM2.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
    <Limit do="PM2.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
  </Action>

  <Action do="PM2.DO_TCSRun/Vent(V53)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-23">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
    <Limit di="PM2.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
    <Limit di="PM2.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
    <Limit do="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
    <Limit do="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
    <Limit do="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
    <Limit do="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
    <Limit do="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
    <Limit do="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
    <Limit do="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
    <Limit do="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
    <Limit do="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
    <Limit do="PM2.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
    <Limit do="PM2.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
    <Limit do="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
    <Limit do="PM2.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
    <Limit do="PM2.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
  </Action>

  <Action do="PM2.DO_HCLRun/Vent(V54)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-24">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
    <Limit di="PM2.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
    <Limit di="PM2.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
    <Limit do="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
    <Limit do="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
    <Limit do="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
    <Limit do="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
    <Limit do="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
    <Limit do="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
    <Limit do="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
    <Limit do="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
    <Limit do="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
    <Limit do="PM2.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
    <Limit do="PM2.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
    <Limit do="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
    <Limit do="PM2.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
    <Limit do="PM2.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
  </Action>

  <Action do="PM2.DO_SiH4Run(V55)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-25">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
    <Limit di="PM2.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
    <Limit di="PM2.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
    <Limit do="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
    <Limit do="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
    <Limit do="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
    <Limit do="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
    <Limit do="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
    <Limit do="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
    <Limit do="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
    <Limit do="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
    <Limit do="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
    <Limit do="PM2.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
    <Limit do="PM2.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
    <Limit do="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
    <Limit do="PM2.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
    <Limit do="PM2.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
  </Action>

  <Action do="PM2.DO_C2H4Run(V59)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-29">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
    <Limit di="PM2.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
    <Limit di="PM2.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
    <Limit do="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
    <Limit do="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
    <Limit do="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
    <Limit do="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
    <Limit do="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
    <Limit do="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
    <Limit do="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
    <Limit do="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
    <Limit do="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
    <Limit do="PM2.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
    <Limit do="PM2.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
    <Limit do="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
    <Limit do="PM2.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
    <Limit do="PM2.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
  </Action>

  <Action do="PM2.DO_TMARelease(V43)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-13">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
    <Limit di="PM2.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
    <Limit di="PM2.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
    <Limit do="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
    <Limit do="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
    <Limit do="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
    <Limit do="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
    <Limit do="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
    <Limit do="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
    <Limit do="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
    <Limit do="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
    <Limit do="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
    <Limit do="PM2.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
    <Limit do="PM2.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
    <Limit do="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
    <Limit do="PM2.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
    <Limit do="PM2.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
  </Action>

  <Action do="PM2.DO_TCSRelease(V48)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-18">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
    <Limit di="PM2.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
    <Limit di="PM2.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
    <Limit do="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
    <Limit do="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
    <Limit do="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
    <Limit do="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
    <Limit do="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
    <Limit do="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
    <Limit do="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
    <Limit do="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
    <Limit do="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
    <Limit do="PM2.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
    <Limit do="PM2.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
    <Limit do="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
    <Limit do="PM2.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
    <Limit do="PM2.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
  </Action>

  <Action do="PM2.DO_TMABypass(V45)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-15">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_TCSBypass(V49)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-19">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_TMAVac(V46)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-16">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_TCSVac(V50)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-20">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_N2Switch(V37)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-7">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
    <Limit di="PM2.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
    <Limit di="PM2.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
    <Limit do="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
    <Limit do="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
    <Limit do="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
    <Limit do="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
    <Limit do="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
    <Limit do="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
    <Limit do="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
    <Limit do="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
    <Limit do="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
    <Limit do="PM2.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
    <Limit do="PM2.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
    <Limit do="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
    <Limit do="PM2.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
    <Limit do="PM2.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
  </Action>
  <Action do="PM2.DO_HCLSwitch(V51)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-21">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
    <Limit di="PM2.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
    <Limit di="PM2.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
    <Limit do="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
    <Limit do="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
    <Limit do="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
    <Limit do="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
    <Limit do="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
    <Limit do="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
    <Limit do="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
    <Limit do="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
    <Limit do="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
    <Limit do="PM2.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
    <Limit do="PM2.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
    <Limit do="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
    <Limit do="PM2.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
    <Limit do="PM2.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
  </Action>
  <Action do="PM2.DO_SiH4Switch(V52)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-22">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
    <Limit di="PM2.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
    <Limit di="PM2.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
    <Limit do="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
    <Limit do="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
    <Limit do="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
    <Limit do="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
    <Limit do="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
    <Limit do="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
    <Limit do="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
    <Limit do="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
    <Limit do="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
    <Limit do="PM2.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
    <Limit do="PM2.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
    <Limit do="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
    <Limit do="PM2.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
    <Limit do="PM2.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
  </Action>
  <Action do="PM2.DO_C2H4Switch(V58)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-28">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
    <Limit di="PM2.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
    <Limit di="PM2.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
    <Limit do="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
    <Limit do="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
    <Limit do="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
    <Limit do="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
    <Limit do="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
    <Limit do="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
    <Limit do="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
    <Limit do="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
    <Limit do="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
    <Limit do="PM2.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
    <Limit do="PM2.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
    <Limit do="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
    <Limit do="PM2.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
    <Limit do="PM2.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
  </Action>
  <Action do="PM2.DO_ReactorLeakCheck(V69)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-42">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_GasBoxVentPump(V72)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-45">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_MOVac(V73)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-46">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_GasboxLeakCheck(V74)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-47">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_DORVac(V75)" value="false" tip="" tip.zh-CN="" tip.en-US="DO-48">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_DORRefill(V76)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-49">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_EPV2" value="true" tip="" tip.zh-CN="" tip.en-US="DO-122">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_HeaterEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-56">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
    <Limit do="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
    <Limit do="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
    <Limit do="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
    <Limit do="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
    <Limit do="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
    <Limit do="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
    <Limit do="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
    <Limit do="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
    <Limit do="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
    <Limit do="PM2.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
    <Limit do="PM2.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
  </Action>

  <Action do="PM2.DO_InnerHeaterEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-57">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
    <Limit di="PM2.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
    <Limit di="PM2.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
    <Limit do="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
    <Limit do="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
    <Limit do="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
    <Limit do="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
    <Limit do="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
    <Limit do="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
    <Limit do="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
    <Limit do="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
    <Limit do="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
    <Limit do="PM2.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
    <Limit do="PM2.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
    <Limit do="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
    <Limit do="PM2.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
    <Limit do="PM2.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
  </Action>
  <Action do="PM2.DO_MiddleHeaterEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-58">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
    <Limit di="PM2.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
    <Limit di="PM2.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
    <Limit do="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
    <Limit do="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
    <Limit do="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
    <Limit do="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
    <Limit do="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
    <Limit do="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
    <Limit do="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
    <Limit do="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
    <Limit do="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
    <Limit do="PM2.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
    <Limit do="PM2.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
    <Limit do="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
    <Limit do="PM2.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
    <Limit do="PM2.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
  </Action>
  <Action do="PM2.DO_OuterHeaterEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-59">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
    <Limit di="PM2.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
    <Limit di="PM2.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
    <Limit do="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
    <Limit do="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
    <Limit do="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
    <Limit do="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
    <Limit do="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
    <Limit do="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
    <Limit do="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
    <Limit do="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
    <Limit do="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
    <Limit do="PM2.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
    <Limit do="PM2.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
    <Limit do="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
    <Limit do="PM2.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
    <Limit do="PM2.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
  </Action>
  <Action do="PM2.DO_ChamMoveBodyUp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-64">
    <Limit di="PM2.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
    <Limit di="PM2.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
    <Limit di="PM2.DI_SusceptorAtSafeSpeed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ChamLidPushButtonLocal" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
    <Limit di="PM2.DI_ChamMoveBodyEndLatchBW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-101"/>
    <Limit di="PM2.DI_SHGasConnectorLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-102"/>
    <Limit di="PM2.DI_SHLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
    <Limit di="PM2.DI_SHLidSwingUnlock" value="true" tip="" tip.zh-CN="" tip.en-US="DI-108"/>
    <Limit di="PM2.DI_MiddleLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-118"/>
    <Limit di="PM2.DI_MiddleLidSwingUnlock" value="true" tip="" tip.zh-CN="" tip.en-US="DI-122"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DO-65">
    <Limit di="PM2.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
    <Limit di="PM2.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
    <Limit di="PM2.DI_SusceptorAtSafeSpeed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ChamLidPushButtonLocal" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
    <Limit di="PM2.DI_ChamMoveBodyEndLatchBW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-101"/>
    <Limit di="PM2.DI_SHGasConnectorLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-102"/>
    <Limit di="PM2.DI_SHLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
    <Limit di="PM2.DI_SHLidSwingUnlock" value="true" tip="" tip.zh-CN="" tip.en-US="DI-108"/>
    <Limit di="PM2.DI_MiddleLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-118"/>
    <Limit di="PM2.DI_MiddleLidSwingUnlock" value="true" tip="" tip.zh-CN="" tip.en-US="DI-122"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_ChamMoveBodyUpAirBrake" value="true" tip="" tip.zh-CN="" tip.en-US="DO-66">
    <Limit di="PM2.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
    <Limit di="PM2.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_ChamMoveBodyForward" value="true" tip="" tip.zh-CN="" tip.en-US="DO-67">
    <Limit di="PM2.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
    <Limit di="PM2.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ChamLidPushButtonLocal" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_ChamMoveBodyUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-96"/>
    <Limit di="PM2.DI_ChamMoveBodyUpLatchFW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-97"/>
    <Limit di="PM2.DI_ChamMoveBodyDown" value="false" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
    <Limit di="PM2.DI_SHGasConnectorLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-102"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_ChamMoveBodyBackward" value="true" tip="" tip.zh-CN="" tip.en-US="DO-68">
    <Limit di="PM2.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
    <Limit di="PM2.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ChamLidPushButtonLocal" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_ChamMoveBodyUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-96"/>
    <Limit di="PM2.DI_ChamMoveBodyUpLatchFW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-97"/>
    <Limit di="PM2.DI_ChamMoveBodyDown" value="false" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
    <Limit di="PM2.DI_SHGasConnectorLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-102"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_SHGasConnectorLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-69">
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
    <Limit di="PM2.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
    <Limit di="PM2.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_SHGasConnectorTighten" value="true" tip="" tip.zh-CN="" tip.en-US="DO-70">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
    <Limit di="PM2.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_SHLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-71">
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
    <Limit di="PM2.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
    <Limit di="PM2.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
    <Limit di="PM2.DI_SHLidSwingLock" value="true" tip="" tip.zh-CN="" tip.en-US="DI-107"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>

    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_SHLidTighten" value="true" tip="" tip.zh-CN="" tip.en-US="DO-72">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
    <Limit di="PM2.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
    <Limit di="PM2.DI_SHLidSwingLock" value="true" tip="" tip.zh-CN="" tip.en-US="DI-107"/>

    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_SHLidSwingLock" value="true" tip="" tip.zh-CN="" tip.en-US="DO-73">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
    <Limit di="PM2.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
    <Limit di="PM2.DI_SHLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-104"/>

    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_SHLidSwingUnlock" value="true" tip="" tip.zh-CN="" tip.en-US="DO-74">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
    <Limit di="PM2.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
    <Limit di="PM2.DI_SHLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-104"/>

    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_ChamMoveBodyBrakerForward" value="true" tip="" tip.zh-CN="" tip.en-US="DO-75">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_ChamMoveBodyUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-96"/>
    <Limit di="PM2.DI_ChamMoveBodyUpLatchFW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-97"/>
    <Limit di="PM2.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
    <Limit di="PM2.DI_SHGasConnectorLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-102"/>

    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_ChamMoveBodyBrakerBackward" value="true" tip="" tip.zh-CN="" tip.en-US="DO-76">

    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_ChamMoveBodyUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-96"/>
    <Limit di="PM2.DI_ChamMoveBodyDown" value="false" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
    <Limit di="PM2.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
    <Limit di="PM2.DI_ChamMoveBodyEndLatchBW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-101"/>
    <Limit di="PM2.DI_SHGasConnectorLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-102"/>

    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_MiddleLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-83">
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
    <Limit di="PM2.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
    <Limit di="PM2.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
    <Limit di="PM2.DI_MiddleLidSwingLock" value="true" tip="" tip.zh-CN="" tip.en-US="DI-121"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>

    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_MiddleLidTighten" value="true" tip="" tip.zh-CN="" tip.en-US="DO-84">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
    <Limit di="PM2.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
    <Limit di="PM2.DI_MiddleLidSwingLock" value="true" tip="" tip.zh-CN="" tip.en-US="DI-121"/>

    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_MiddleLidSwingLock" value="true" tip="" tip.zh-CN="" tip.en-US="DO-85">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
    <Limit di="PM2.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
    <Limit di="PM2.DI_MiddleLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-118"/>

    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_MiddleLidSwingUnlock" value="true" tip="" tip.zh-CN="" tip.en-US="DO-86">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit di="PM2.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
    <Limit di="PM2.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
    <Limit di="PM2.DI_MiddleLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-118"/>

    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_ChamMoveBodyUpDownEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-100">
    <Limit di="PM2.DI_SHGasConnectorLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-102"/>
  </Action>
  <Action do="PM2.DO_SHPurgeFinal(V87)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-40">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_OuterGasFinal(V88)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-41">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_CarryGasFinal(V97)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-54">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_InnerGasFinal(V89)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-112">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_MiddleGasFinal(V90)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-113">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_OpticPurgeFinal(V91)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-114">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_GasRingPurgeFinal(V92)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-115">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_ChamberPurgeFinal(V93)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-116">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_RotationUpPurgeFinal(V94)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-117">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_ConfinementRingFinal(V95)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-118">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_HeaterWFFinal(V96)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-119">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_OpenLidPurge" value="true" tip="" tip.zh-CN="" tip.en-US="DO-111">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_ConfinementRingJogDown" value="true" tip="" tip.zh-CN="" tip.en-US="DO-163">
    <Limit di="PM2.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
  </Action>
  <Action do="PM2.DO_ConfinementRingMoveDown" value="true" tip="" tip.zh-CN="" tip.en-US="DO-169">
    <Limit di="PM2.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
  </Action>
  <Action do="PM2.DO_TVEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-140">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>

    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>

  <Action do="PM2.DO_CyclePurgeRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-176">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>

    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_ExchangeMoRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-177">
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>

    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_CleanRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-178">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>

    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_PurgeRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-179">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>

    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_PumpRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-180">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>

    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_VentRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-181">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>

    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_ProcessIdleRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-185">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_ATMIdleRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-186">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>

    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_VACIdleRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-187">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>

    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_ProcessRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-174">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
    <Limit di="PM2.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
    <Limit di="PM2.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
    <Limit do="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
    <Limit do="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
    <Limit do="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
    <Limit do="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
    <Limit do="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
    <Limit do="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
    <Limit do="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
    <Limit do="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
    <Limit do="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
    <Limit do="PM2.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
    <Limit do="PM2.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
    <Limit do="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
    <Limit do="PM2.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
    <Limit do="PM2.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
  </Action>
  <Action do="PM2.DO_VACTransferAllowed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-182">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>

    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_ATMTransferAllowed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-183">
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>

    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>
  <Action do="PM2.DO_PreprocessRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-175">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
    <Limit di="PM2.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
    <Limit di="PM2.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
    <Limit do="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
    <Limit do="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
    <Limit do="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
    <Limit do="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
    <Limit do="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
    <Limit do="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
    <Limit do="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
    <Limit do="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
    <Limit do="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
    <Limit do="PM2.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
    <Limit do="PM2.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
    <Limit do="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
    <Limit do="PM2.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
    <Limit do="PM2.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
  </Action>
  <Action do="PM2.DO_PostProcessRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-184">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit do="PM2.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>

    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
  </Action>

  <Action do="PM2.DO_SCR1Enable" value="true" tip="DO_SCR1Enable" tip.zh-CN="" tip.en-US="DO-134">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
    <Limit di="PM2.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
    <Limit di="PM2.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
    <Limit do="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
    <Limit do="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
    <Limit do="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
    <Limit do="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
    <Limit do="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
    <Limit do="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
    <Limit do="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
    <Limit do="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
    <Limit do="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
    <Limit do="PM2.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
    <Limit do="PM2.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
    <Limit do="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
    <Limit do="PM2.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
    <Limit do="PM2.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
  </Action>

  <Action do="PM2.DO_SCR2Enable" value="true" tip="DO_SCR2Enable" tip.zh-CN="" tip.en-US="DO-135">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
    <Limit di="PM2.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
    <Limit di="PM2.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
    <Limit do="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
    <Limit do="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
    <Limit do="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
    <Limit do="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
    <Limit do="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
    <Limit do="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
    <Limit do="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
    <Limit do="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
    <Limit do="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
    <Limit do="PM2.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
    <Limit do="PM2.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
    <Limit do="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
    <Limit do="PM2.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
    <Limit do="PM2.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
  </Action>

  <Action do="PM2.DO_SCR3Enable" value="true" tip="DO_SCR3Enable" tip.zh-CN="" tip.en-US="DO-136">
    <Limit di="PM2.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM2.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
    <Limit di="PM2.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
    <Limit di="PM2.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
    <Limit di="PM2.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
    <Limit di="PM2.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
    <Limit di="PM2.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
    <Limit di="PM2.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
    <Limit di="PM2.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
    <Limit di="PM2.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
    <Limit di="PM2.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
    <Limit di="PM2.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
    <Limit di="PM2.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
    <Limit di="PM2.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
    <Limit di="PM2.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
    <Limit di="PM2.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
    <Limit di="PM2.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM2.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM2.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52"/>
    <Limit di="PM2.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM2.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM2.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
    <Limit di="PM2.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM2.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM2.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM2.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM2.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM2.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM2.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
    <Limit di="PM2.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM2.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM2.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM2.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM2.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
    <Limit di="PM2.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM2.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM2.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM2.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
    <Limit di="PM2.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
    <Limit di="PM2.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM2.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <Limit di="PM2.DI_TransformerOTSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
    <Limit do="PM2.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
    <Limit do="PM2.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
    <Limit do="PM2.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
    <Limit do="PM2.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
    <Limit do="PM2.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
    <Limit do="PM2.DO_Foreline1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
    <Limit do="PM2.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
    <Limit do="PM2.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
    <Limit do="PM2.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
    <Limit do="PM2.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
    <Limit do="PM2.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
    <Limit do="PM2.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
    <Limit do="PM2.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
    <Limit do="PM2.DO_TC1AETempRasisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
    <Limit di="PM2.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
    <Limit di="PM2.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
    <Limit di="PM2.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
    <Limit di="PM2.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
    <Limit di="PM2.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
    <Limit di="PM2.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
  </Action>


</Interlock>
