<?xml version="1.0" encoding="utf-8"?>
<DeviceModelDefine type="Sic" xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance">
  <IoInterLocks assembly="SicModules" classType="SicModules.Devices.IoInterLockEx">
    <IoInterLock id="IoInterLock" module="TM" display="IoInterLock" schematicId="IoInterLock" unit="" doTmAtProcessPress="DO_TMAtProcessPress" doLLAtProcessPress="DO_LoadAtProcessPress" diTmAtATM="DI_TMPressure1ATM" diLoadLockAtATm="DI_LoadPressureATM" aiTmPressure="AI_TMPressure1" aiLLPressure="AI_LoadPressure" diTmUnderVac="DI_TMPressure1VAC" doTmCyclePurgeRoutineSuccessed="DO_TMCyclePurgeRoutineSuccessed" doTmCyclePurgeRoutineRunning="DO_TMCyclePurgeRoutineRunning" doTmLeakCheckRoutineRunning="DO_TMLeakCheckRoutineRunning" doTmPumpDownRoutineRunning="DO_TMPumpDownRoutineRunning" doTmServoPressRoutineRunning="DO_TMServoPressRoutineRunning" doTmVentUpRoutineRunning="DO_TMVentUpRoutineRunning" doLLCyclePurgeRoutineRunning="DO_LoadCyclePurgeRoutineRunning" doLLLeakCheckRoutineRunning="DO_LoadLeakCheckRoutineRunning" doLLPumpDownRoutineRunning="DO_LoadPumpDownRoutineRunning" doLLVentUpRoutineRunning="DO_LoadVentUpRoutineRunning" diVacRobotExtenLLEnableFB="DI_VacRobotExtenLoadEnableFB" diVacRobotExtendBufferEnableFB="DI_VacRobotExtendBufferEnableFB" diVacRobotExtendPMAEnableFB="DI_VacRobotExtendPMAEnableFB" diATMRobotExtendUnloadEnableFB="DI_ATMRobotExtendUnloadEnableFB" diATMRobotExtendLoadLSideEnableFB="DI_ATMRobotExtendLoadLSideEnableFB" diATMRobotExtendLoadRSideEnableFB="DI_ATMRobotExtendLoadRSideEnableFB" diVacRobotExtendUnloadEnableFB="DI_VacRobotExtendUnloadEnableFB" diVacRobotExtendPMBEnableFB="DI_VacRobotExtendPMBEnableFB" doVacRobotExtenLLEnable="DO_VacRobotExtenLoadEnable" doVacRobotExtendBufferEnable="DO_VacRobotExtendBufferEnable" doVacRobotExtendPMAEnable="DO_VacRobotExtendPMAEnable" doVacRobotExtendUnloadEnable="DO_VacRobotExtendUnloadEnable" doVacRobotExtendPMBEnable="DO_VacRobotExtendPMBEnable" doATMRobotExtendUnloadEnable="DO_ATMRobotExtendUnloadEnable" doATMRobotExtendLoaLSideEnable="DO_ATMRobotExtendLoaLSideEnable" doATMRobotExtendLoaRSideEnable="DO_ATMRobotExtendLoaRSideEnable" doRectorAATMTransferReady="DO_ReactorAATMTransferReady" doRectorAProcessTransferReady="DO_ReactorAProcessTransferReady" doPm1LidClosed="DO_PM1LidClosed" doRectorBATMTransferReady="DO_ReactorBATMTransferReady" doRectorBProcessTransferReady="DO_ReactorBProcessTransferReady" doPm2LidClosed="DO_PM2LidClosed" doUnLoadPurgeRoutineRunning="DO_UnLoadCyclePurgeRoutineRunning" doUnLoadLeakCheckRoutineRunning="DO_UnLoadLeakCheckRoutineRunning" doUnLoadPumpDownRoutineRunning="DO_UnLoadPumpDownRoutineRunning" doUnLoadVentUpRoutineRunning="DO_UnLoadVentUpRoutineRunning"  diTMLidClosed="DI_TMLidClosed" diBufferLidClosed="DI_BufferStationLidClosed" diPM1DoorClosed="DI_ReactorADoorClosed" diPM2DoorClosed="DI_ReactorBDoorClosed"/>
  </IoInterLocks>
  <IoMfcs classType="Aitex.Core.RT.Device.Devices.IoMFC" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoMfc3 id="Mfc60"  module="TM" display="Mfc60" schematicId="Mfc60" unit="sccm"
       aiFlow="AI_M60FlowRead" aoFlow="AO_M60FlowSetpoint"
       scBasePath="TM.MFC"
       Valve="TMVent"
       DisableFbSpErrMonWhenValveClosed="true"
       aioType="float" />

   
  </IoMfcs>
  <TcAdses classType="Aitex.Core.RT.Device.Devices.SicAds" assembly="MECF.Framework.RT.EquipmentLibrary">
    <TcAds id="MainPLC" module="PM1" display="" schematicId="" unit="" option="true" doShutDown="DO_AbortProcessShutdownFlag"/>
    <TcAds id="MainPLC" module="PM2" display="" schematicId="" unit="" option="true" doShutDown="DO_AbortProcessShutdownFlag"/>
  </TcAdses>
  <WcfPlcs assembly="MECF.Framework.Common" classType="MECF.Framework.Common.PLC.WcfPlc">
    <WcfPlc id="MainPLC" module="PM1" display="" schematicId="" unit="" option="true" />
    <WcfPlc id="MainPLC" module="PM2" display="" schematicId="" unit="" option="true" />
  </WcfPlcs>
  <TcAdses assembly="SicModules" classType="SicModules.Devices.SicAds">
    <TcAds id="MainPLC" module="TM" display="" schematicId="" unit="" option="true" />
  </TcAdses>
  <WcfPlcs assembly="MECF.Framework.Common" classType="MECF.Framework.Common.PLC.WcfPlc">
    <WcfPlc id="MainPLC" module="TM" display="" schematicId="" unit="" option="true" />
  </WcfPlcs>

	<IoSignalTowers classType="MECF.Framework.RT.EquipmentLibrary.Devices.IoSignalTower" assembly="MECF.Framework.RT.EquipmentLibrary">
		<IoSignalTower id="SignalTower" module="TM" display="SignalTower" schematicId="TMSignalTower"
		               eventFile="STEvents.xml"
		               doGreen="DO_TowerGreen"
		               doYellow="DO_TowerYellow"
		               doRed="DO_TowerRed"
		               doBuzzer="DO_Buzzer" />
	</IoSignalTowers>

  <IoSensors classType="Aitex.Core.RT.Device.Devices.IoSensor" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoSensor id="TMLidClosed" module="TM" display="" schematicId="" unit="" di="DI_TMLidClosed" textOutTrigValue="false" warningText="" alarmText="Alarm200 TM Lid Opened [TDI-12]" />
    <IoSensor id="LLLidClosed" module="LoadLock" display="" schematicId="" unit="" di="DI_LoadLidClosed" textOutTrigValue="false" infoText="Information23 LoadLid Opened [TDI-13]" warningText="" alarmText="" />
    <IoSensor id="UnloadLidClosed" module="UnLoad" display="" schematicId="" unit="" di="DI_UnloadStationLidClosed" textOutTrigValue="false" warningText="" alarmText="" />
    <IoSensor id="BufferLidClosed" module="Buffer" display="" schematicId="" unit="" di="DI_BufferStationLidClosed" textOutTrigValue="false" warningText="" alarmText="Alarm202 BufferStation Lid Opened [TDI-15]" />
    
    
    <IoSensor id="LoadLockGateClosed" module="TM" display="" schematicId="" unit="" di="DI_LoadLockGateClosed" textOutTrigValue="true" infoText="Information11 LoadLockGate.Closed [TDI-22]" warningText="" alarmText="" />
    
    
    <IoSensor id="BufferWaferHigh" module="TM" display="" schematicId="" unit="" di="DI_BufferStationOptSensorHigh" textOutTrigValue="true" warningText="" alarmText="" />
    <IoSensor id="BufferWaferMiddle" module="TM" display="" schematicId="" unit="" di="DI_BufferStationOptSensorMid" textOutTrigValue="true" warningText="" alarmText="" />
    <IoSensor id="BufferWaferLow" module="TM" display="" schematicId="" unit="" di="DI_BufferStationOptSensorLow" textOutTrigValue="true" warningText="" alarmText="" />
    <IoSensor id="LLTrayPresence" module="TM" display="" schematicId="" unit="" di="DI_LoadTrayPresence" textOutTrigValue="true" warningText="" alarmText="" />
    <IoSensor id="LLWaferPlaced" module="TM" display="" schematicId="" unit="" di="DI_LoadWaferPlaced" textOutTrigValue="true" warningText="" alarmText="" />
    <IoSensor id="UnLoadTrayPlaced" module="TM" display="" schematicId="" unit="" di="DI_UnloadStationWaferPresence" textOutTrigValue="true" warningText="" alarmText="" />
    <IoSensor id="UnLoadWaferPlaced" module="TM" display="" schematicId="" unit="" di="DI_UnloadStationWaferPresence" textOutTrigValue="true" warningText="" alarmText="" />
    <IoSensor id="ForelineBasePressureReady" module="TM" display="" schematicId="" unit="" di="DI_ForelineBasePressureReady" textOutTrigValue="true" warningText="" alarmText="" />
    <IoSensor id="LoadTrayHomeSensor" module="TM" display="" schematicId="" unit="" di="DI_LoadHomeTraySensor" textOutTrigValue="true" warningText="" alarmText="" />
    <IoSensor id="CassALWaferConvexSensor" module="TM" display="" schematicId="" unit="" di="DI_WaferCassetLeftConvexSensor" textOutTrigValue="true" warningText="" alarmText="" />
    <IoSensor id="CassARWaferConvexSensor" module="TM" display="" schematicId="" unit="" di="DI_WaferCassetRightConvexSensor" textOutTrigValue="true" warningText="" alarmText="" />
    <IoSensor id="CassALInch6Sensor" module="TM" display="" schematicId="" unit="" di="DI_WaferCassetLeftInch6" textOutTrigValue="true" warningText="" alarmText="" />
    <IoSensor id="CassARInch6Sensor" module="TM" display="" schematicId="" unit="" di="DI_WaferCassetRightInch6" textOutTrigValue="true" warningText="" alarmText="" />
    <IoSensor id="CassBLInch6Sensor" module="TM" display="" schematicId="" unit="" di="DI_TrayCassetInch6" textOutTrigValue="true" warningText="" alarmText="" />
    <IoSensor id="CassBLWaferConvexSensor" module="TM" display="" schematicId="" unit="" di="DI_TrayCassetConvexSensor" textOutTrigValue="true" warningText="" alarmText="" />

	<IoSensor id="SensorLoadDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_LoadDoorClosed" infoText="Information1 LoadDoor.Closed [TDI-0]" warningText="" alarmText="" />
<IoSensor id="SensorLoadDoorOpened" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_LoadDoorOpened" infoText="Information2 LoadDoor.Opened [TDI-1]" warningText="" alarmText="" />
<IoSensor id="SensorUnloadStationDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_UnloadStationDoorClosed" infoText="Information3 UnloadStationDoor.Closed [TDI-2]" warningText="" alarmText="" />
<IoSensor id="SensorUnloadStationDoorOpened" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_UnloadStationDoorOpened" infoText="Information4 UnloadStationDoor.Opened [TDI-3]" warningText="" alarmText="" />
<IoSensor id="SensorReactorADoorClosed" module="TM" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ReactorADoorClosed" infoText="Information5 ReactorA.Door.Closed [TDI-4]" warningText="" alarmText="" />
<IoSensor id="SensorReactorADoorOpened" module="TM" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ReactorADoorOpened" infoText="Information6 ReactorA.Door.Opened [TDI-5]" warningText="" alarmText="" />
<IoSensor id="SensorReactorBDoorClosed" module="TM" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ReactorBDoorClosed" infoText="Information7 ReactorB.Door.Closed [TDI-6]" warningText="" alarmText="" />
<IoSensor id="SensorReactorBDoorOpened" module="TM" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ReactorBDoorOpened" infoText="Information8 ReactorB.Door.Opened [TDI-7]" warningText="" alarmText="" />
<IoSensor id="SensorBufferStationDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_BufferStationDoorClosed" infoText="Information9 BufferStationDoor.Closed [TDI-10]" warningText="" alarmText="" />
<IoSensor id="SensorBufferStationDoorOpened" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_BufferStationDoorOpened" infoText="Information10 BufferStationDoor.Closed [TDI-11]" warningText="" alarmText="" />
<IoSensor id="SensorRobotOnBackPos" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_RobotOnBackPos" infoText="Information12 RobotOnBackPos [TDI-31]" warningText="" alarmText="" />
<IoSensor id="SensorLoadWaferPresence" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_LoadWaferPresence" infoText="Information13 Load position with Tray [TDI-32]" warningText="" alarmText="" />
<IoSensor id="SensorBufferStationOptSensorHigh" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_BufferStationOptSensorHigh" infoText="Information14 Buffer High Position with Tray  [TDI-37]" warningText="" alarmText="" />
<IoSensor id="SensorBufferStationOptSensorMid" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_BufferStationOptSensorMid" infoText="Information15 Buffer Middle Position with Tray [TDI-38]" warningText="" alarmText="" />
<IoSensor id="SensorBufferStationOptSensorLow" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_BufferStationOptSensorLow" infoText="Information16 Buffer Low Position with Tray [TDI-39]" warningText="" alarmText="" />
<IoSensor id="SensorTMDryPump1Alarm" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TMDryPump1Alarm" infoText="" warningText="" alarmText="Alarm203 TMDryPump1 Alarm [TDI-43]" />
<IoSensor id="SensorTMDryPump1Warning" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TMDryPump1Warning" infoText="" warningText="" alarmText="Alarm204 TMDryPump1 Warning [TDI-44]" />
<IoSensor id="SensorTMDryPump1Running" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="false" di="DI_TMDryPump1Running" infoText="" warningText="" alarmText="Alarm205 TMDryPump1 Not Runing  [TDI-49]" />
<IoSensor id="SensorLoadLidLocked" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_LoadLidLocked" infoText="Information17 LoadLockLid.Locked [TDI-64]" warningText="" alarmText="" />
<IoSensor id="SensorLoadLidUnlocked" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_LoadLidUnlocked" infoText="Information18 LoadLockLid.Unlocked [TDI-65]" warningText="" alarmText="" />
<IoSensor id="SensorTMPressure1ATM" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TMPressure1ATM" infoText="Information19 TM at ATM [TDI-88]" warningText="" alarmText="" />
<IoSensor id="SensorTMPressure1VAC" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_TMPressure1VAC" infoText="Information20 TM at VAC [TDI-89]" warningText="" alarmText="" />
<IoSensor id="SensorLoadPressureATM" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_LoadPressureATM" infoText="Information21 Load at ATM [TDI-90]" warningText="" alarmText="" />
<IoSensor id="SensorLoadPressureVAC" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_LoadPressureVAC" infoText="Information22 Load at VAC [TDI-91]" warningText="" alarmText="" />

  </IoSensors>
  <IoPumps classType="SicModules.Devices.IoPump" assembly="SicModules">
    <IoPump id="TMPump1" module="TM" display="Pump1" schematicId="TMPump1" unit="" diRunning="DI_TMDryPump1Running" diAlarm="DI_TMDryPump1Alarm" diWarning="DI_TMDryPump1Warning" />
    <IoPump id="TMPump2" module="TM" display="Pump2" schematicId="TMPump2" unit="" diRunning="DI_TMDryPump2Running" diAlarm="DI_TMDryPump2Alarm" diWarning="DI_TMDryPump2Warning"/>
  </IoPumps>
  <IoValves classType="Aitex.Core.RT.Device.Devices.IoValve" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoValve id="LoadSlowPump" module="TM" display="V84" schematicId="LoadSlowPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadSlowPumpFB" doOpen="DO_LoadSlowPump" />
    <IoValve id="LoadFastPump" module="TM" display="V83" schematicId="LoadFastPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadFastPumpFB" doOpen="DO_LoadFastPump" />
    <IoValve id="TMSlowPump" module="TM" display="V82" schematicId="TMSlowPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMSlowPumpFB" doOpen="DO_TMSlowPump" />
    <IoValve id="TMFastPump" module="TM" display="V81" schematicId="TMFastPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMFastPumpFB" doOpen="DO_TMFastPump" />
    <IoValve id="UnLoadSlowPump" module="TM" display="V123" schematicId="UnLoadSlowPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_UnloadSlowPumpFB" doOpen="DO_UnloadSlowPump" />
    <IoValve id="UnLoadFastPump" module="TM" display="V122" schematicId="UnLoadFastPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_UnloadFastPumpFB" doOpen="DO_UnloadFastPump" />
    <IoValve id="BufferVent" module="TM" display="V80" schematicId="BufferVent" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_BufferVentFB" doOpen="DO_BufferVent" />
    <IoValve id="LoadVent" module="TM" display="V79" schematicId="LoadVent" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadVentFB" doOpen="DO_LoadVent" />
    <IoValve id="TMVent" module="TM" display="V77" schematicId="TMVent" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMVentFB" doOpen="DO_TMVent" />
    <IoValve id="UnLoadVent" module="TM" display="V78" schematicId="UnLoadVent" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_UnloadVentFB" doOpen="DO_UnloadVent" />
    <IoValve id="TMLoadBanlance" module="TM" display="V85" schematicId="TMLoadBanlance" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMLoadBanlanceFB" doOpen="DO_TMLoadBanlance" />
    <IoValve id="TMUnLoadBanlance" module="TM" display="V124" schematicId="TMToUnloadBanlance" unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_TMToUnloadBanlance" />
  </IoValves>
  <IoSlitValves classType="Aitex.Core.RT.Device.Unit.IoSlitValve" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoSlitValve id="LoadLockDoor" module="TM" display="LLDoor" Type="" unit="" schematicId="LLDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_LoadDoorOpened" diClose="DI_LoadDoorClosed" doOpen="DO_LoadDoorOpen" doClose="DO_LoadDoorClose" />
    <IoSlitValve id="PM1Door" module="TM" display="PM1Door" Type="" unit="" schematicId="PM1Door" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_ReactorADoorOpened" diClose="DI_ReactorADoorClosed" doOpen="DO_RectorADoorOpen" doClose="DO_RectorADoorClose" />
    <IoSlitValve id="PM2Door" module="TM" display="PM2Door" Type="" unit="" schematicId="PM2Door" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_ReactorBDoorOpened" diClose="DI_ReactorBDoorClosed" doOpen="DO_RectorBDoorOpen" doClose="DO_RectorBDoorClose" />
    <IoSlitValve id="UnLoadDoor" module="TM" display="UnLoadDoor" Type="" unit="" schematicId="UnLoadDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_UnloadStationDoorOpened" diClose="DI_UnloadStationDoorClosed" doOpen="DO_UnloadStationDoorOpen" doClose="DO_UnloadStationDoorClose" />
    <IoSlitValve id="BufferDoor" module="TM" display="BufferDoor" Type="" unit="" schematicId="BufferDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_BufferStationDoorOpened" diClose="DI_BufferStationDoorClosed" doOpen="DO_BufferStationDoorOpen" doClose="DO_BufferStationDoorClose" />
    <IoSlitValve id="UnLoadSubDoor" module="EFEM" display="UnLoadSubDoor" Type="" unit="" schematicId="UnLoadSubDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_UnloadSubStationDoorOpened" diClose="DI_UnloadSubStationDoorClosed" doOpen="DO_UnloadSubStationDoorOpen" doClose="DO_UnloadSubStationDoorClose" />
    <IoSlitValve id="LoadLockLSideDoor" module="EFEM" display="LLLSideDoor" Type="" unit="" schematicId="LLLSideDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_LoadLSideDoorOpened" diClose="DI_LoadLSideDoorClosed" doOpen="DO_LoadLSideDoorOpen" doClose="DO_LoadLSideDoorClose" />
    <IoSlitValve id="LoadLockRSideDoor" module="EFEM" display="LLRSideDoor" Type="" unit="" schematicId="LLRSideDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_LoadRSideDoorOpened" diClose="DI_LoadRSideDoorClosed" doOpen="DO_LoadRSideDoorOpen" doClose="DO_LoadRSideDoorClose" />
  </IoSlitValves>
  <IoPressureMeter3s classType="Aitex.Core.RT.Device.Unit.IoPressureMeter3" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoPressureMeter3 id="LLPressure" module="TM" display="LLPressure" schematicId="LLPressure" unit="mbar" aioType="float" aiValue="AI_LoadPressure" formatString="F1" MaxValue="1500" />
    <IoPressureMeter3 id="UnLoadPressure" module="TM" display="UnLoadPressure" schematicId="UnLoadPressure" unit="mbar" aioType="float" aiValue="AI_UnloadPressure" formatString="F1" MaxValue="1500" />
    <IoPressureMeter3 id="TMPressure" module="TM" display="TMPressure" schematicId="TMPressure" unit="mbar" aioType="float" aiValue="AI_TMPressure1" formatString="F1" MaxValue="1500" />
    <IoPressureMeter3 id="PM1Pressure2" module="TM" display="PM1Pressure2" schematicId="PM1Pressure2" unit="mbar" aioType="float" aiValue="AI_PM1Pressure2" formatString="F1" MaxValue="1500" />
    <IoPressureMeter3 id="PM2Pressure2" module="TM" display="PM2Pressure2" schematicId="PM2Pressure2" unit="mbar" aioType="float" aiValue="AI_PM2Pressure2" formatString="F1" MaxValue="1500" />
  </IoPressureMeter3s>
  <IoTempMeters classType="Aitex.Core.RT.Device.Devices.IoTempMeter" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoTempMeter module="UnLoad" id="UnLoadTemp" display="" schematicId="" aioType="float" aiFeedback="AI_UnloadTemp" />
    <IoTempMeter module="Buffer" id="BufferTemp" display="" schematicId="" aioType="float" aiFeedback="AI_BufferTemp" />
  </IoTempMeters>
  <IoLift4s classType="Aitex.Core.RT.Device.Unit.IoLift4" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoLift4 id="LoadLidLock" module="LoadLock" display="LoadLidLock" schematicId="LoadLidLock" unit="" aioType="" diUp="DI_LoadLidLocked" diDown="DI_LoadLidUnlocked" doUp="DO_LoadLidLock" doDown="DO_LoadLidUnlock" scTimeout="10" />
    <IoLift4 id="UnLoadLift" module="UnLoad" display="UnLoadLift" schematicId="UnLoadLift" unit="" aioType="" diUp="DI_UnloadStationLifterCYUp" diDown="DI_UnloadStationLifterCYDown" doUp="DO_UnloadStationLifterCYUp" doDown="DO_UnloadStationLifterCYDown" scTimeout="10" />
  </IoLift4s>
  <IoClaws classType="Aitex.Core.RT.Device.Unit.IoClaw" assembly="MECF.Framework.RT.EquipmentLibrary">
    <IoClaw id="LLWaferClaw" module="LoadLock" display="LLWaferClaw" schematicId="LLWaferClaw" unit="" aioType="" diUp="DI_LoadWaferCYClamped" diDown="DI_LoadWafeCYOpened" doUp="DO_LoadWaferCYClamp" doDown="DO_LoadWaferCYOpen" scTimeout="10" />
    <IoClaw id="LLTrayClaw" module="LoadLock" display="LLTrayClaw" schematicId="LLTrayClaw" unit="" aioType="" diUp="DI_LoadTrayCYClamped" diDown="DI_LoadTrayCYOpend" doUp="DO_LoadTrayCYClamp" doDown="DO_LoadTrayCYOpen" scTimeout="10" />
    <IoClaw id="UnLoadWaferClaw" module="UnLoad" display="UnLoadWaferClaw" schematicId="UnLoadWaferClaw" unit="" aioType="" diUp="DI_UnloadStationWaferCYClamped" diDown="DI_UnloadStationWaferCYOpened" doUp="DO_UnloadStationWaferCYClamp" doDown="DO_UnloadStationWaferCYOpen" scTimeout="10" />
  </IoClaws>
  <TMRobots assembly="SicModules" classType="SicModules.TMs.SicTMRobot">
    <TMRobot id="TMRobot" module="TMRobot" display="" schematicId="" unit="" />
  </TMRobots>


  <TMs assembly="SicModules" classType="SicModules.TMs.SicTM">
    <TM id="TM" module="System" display="" schematicId="" unit="" DiTMLidClosedAlarm="DI_TMLidClosed" DiLLLidClosedAlarm="DI_LLLidClosed" DiBufferLidClosedAlarm="DI_BufferLidClosed" aiLLTemp="AI_LoadTemp" aiBufferTemp="AI_BufferTemp" />
  </TMs>

  <LLs assembly="SicModules" classType="SicModules.LLs.SicLoadLock">
    <TM id="LoadLock" module="LoadLock" display="" schematicId="" unit="" />
  </LLs>
  <Unloads assembly="SicModules" classType="SicModules.UnLoads.SicUnLoad">
    <Unload id="UnLoad" module="UnLoad" display="" schematicId="" unit="" />
  </Unloads>
  <Buffers assembly="SicModules" classType="SicModules.Buffers.SicBuffer">
    <Buffer id="Buffer" module="Buffer" display="" schematicId="" unit="" />
  </Buffers>
</DeviceModelDefine>