<?xml version="1.0" encoding="utf-8"?>
<Aitex>
	<TableSequenceFormat RecipeVersion="Sic">
		<Catalog Type="Position">
			<Item Name="Position" DisplayName="Position" InputType="ReadOnlySelection"   >
				<Selection Name="PM1" DisplayName="PM1" Parameter="ProcessRecipe" />
				<Selection Name="PM2" DisplayName="PM2" Parameter="ProcessRecipe" />
				<Selection Name="Buffer" DisplayName="Buffer" Parameter="Type,SetValue" />
				<Selection Name="Load" DisplayName="Load" Parameter="Type,SetValue,PurgeCount,PumpDelayTime" />
			</Item>
		</Catalog>

		<Catalog Type="Parameter">
			<Item Name="PMSelection" DisplayName="Reactor Selection" InputType="MultiSelection" >
				<Selection Name="PM1" DisplayName="PM1"/>
				<Selection Name="PM2" DisplayName="PM2"/>
			</Item>
			<Item Name="ProcessRecipe" DisplayName="Process Recipe" InputType="RecipeSelection" Parameter="Process"   Min="0" Max="999999"  />
			<Item Name="SlotSelection" DisplayName="SlotSelection" InputType="MultiSelection" >
				<Selection Name="1" DisplayName="1"/>
        <Selection Name="2" DisplayName="2"/>
        <Selection Name="3" DisplayName="3"/>
			</Item>
			<Item Name="Type" DisplayName="Type" InputType="ReadOnlySelection" >
        <Selection Name="CoolingByTime" DisplayName="CoolingByTime"/>
			</Item>
			<Item Name="SetValue" DisplayName="SetValue" InputType="NumInput"   Min="0" Max="10000"  />
			<Item Name="PurgeCount" DisplayName="PurgeCount" InputType="NumInput"   Min="0" Max="1000"  />
			<Item Name="PumpDelayTime" DisplayName="PumpDelayTime" InputType="NumInput"   Min="0" Max="1000"  />
		</Catalog>
	</TableSequenceFormat>
	<TableSequenceData RecipeVersion="Sic" CreatedBy="System" Barcode="" CreationTime="2016-05-13T13:56:44" LastRevisedBy="admin" LastRevisionTime="2015-10-13T13:56:44" Description="（Empty）">
		<Step></Step>
	</TableSequenceData>
	<TableRecipeSchema>
		<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
			<xs:simpleType name="booleanType">
				<xs:restriction base="xs:string">
					<xs:enumeration value="0" />
					<xs:enumeration value="1" />
					<xs:enumeration value="False" />
					<xs:enumeration value="True" />
					<xs:enumeration value="false" />
					<xs:enumeration value="true" />
				</xs:restriction>
			</xs:simpleType>
			<xs:element name="TableSequenceData">
				<xs:complexType>
					<xs:sequence>
						<xs:element maxOccurs="unbounded" name="Step">

						</xs:element>
					</xs:sequence>
					<xs:attribute name="RecipeVersion" type="xs:string" fixed="Sic" use="required" />
					<xs:attribute name="CreatedBy" type="xs:string" use="required" />
					<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
					<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
					<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
					<xs:attribute name="Barcode" type="xs:string" use="required" />
					<xs:attribute name="Description" type="xs:string" use="required" />
				</xs:complexType>
			</xs:element>
		</xs:schema>
	</TableRecipeSchema>
	<Signature>axPPcBt+girefGdBoafkJf+pBhY=</Signature>
</Aitex>