<?xml version="1.0" ?>
<Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
	<Action do="PM1.DO_H2Supply(V31)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-1">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit di="PM1.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>

	<Action do="PM1.DO_ArSupply(V32)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-2">
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>

	<Action do="PM1.DO_SHH2/ArSwitch(V33)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-3">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>

	<Action do="PM1.DO_ChamBodyArPurge(V68)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-39">
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>

	<Action do="PM1.DO_H2ArLine1(V35)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-5">
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>

	<Action do="PM1.DO_H2ArLine2(V36)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-6">
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>

	<Action do="PM1.DO_DilutedN2Run/Vent(V39)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-9">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
		<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
		<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
		<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
		<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
		<Limit di="PM1.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
		<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
		<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
		<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
		<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
		<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
		<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
		<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
		<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
		<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
		<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
		<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
		<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
		<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
		<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
		<Limit do="PM1.DO_SpareFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
		<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
		<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
		<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
		<Limit do="PM1.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
		<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
		<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
		<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
		<Limit do="PM1.DO_TC1AETempRaisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
		<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
		<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
		<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
		<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
	</Action>

	<Action do="PM1.DO_HighN2Run/Vent(V40)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-10">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
		<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
		<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
		<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
		<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
		<Limit di="PM1.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
		<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
		<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
		<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
		<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
		<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
		<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
		<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
		<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
		<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
		<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
		<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
		<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
		<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
		<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
		<Limit do="PM1.DO_SpareFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
		<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
		<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
		<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
		<Limit do="PM1.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
		<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
		<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
		<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
		<Limit do="PM1.DO_TC1AETempRaisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
		<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
		<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
		<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
		<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
	</Action>

	<Action do="PM1.DO_TMARun(V41)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-11">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
		<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
		<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
		<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
		<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
		<Limit di="PM1.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
		<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
		<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
		<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
		<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
		<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
		<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
		<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
		<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
		<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
		<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
		<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
		<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
		<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
		<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
		<Limit do="PM1.DO_SpareFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
		<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
		<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
		<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
		<Limit do="PM1.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
		<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
		<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
		<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
		<Limit do="PM1.DO_TC1AETempRaisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
		<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
		<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
		<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
		<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
	</Action>

	<Action do="PM1.DO_TCSRun/Vent(V53)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-23">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
		<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
		<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
		<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
		<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
		<Limit di="PM1.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
		<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
		<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
		<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
		<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
		<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
		<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
		<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
		<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
		<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
		<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
		<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
		<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
		<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
		<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
		<Limit do="PM1.DO_SpareFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
		<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
		<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
		<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
		<Limit do="PM1.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
		<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
		<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
		<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
		<Limit do="PM1.DO_TC1AETempRaisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
		<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
		<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
		<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
		<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
	</Action>

	<Action do="PM1.DO_HCLRun/Vent(V54)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-24">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
		<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
		<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
		<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
		<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
		<Limit di="PM1.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
		<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
		<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
		<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
		<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
		<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
		<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
		<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
		<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
		<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
		<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
		<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
		<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
		<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
		<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
		<Limit do="PM1.DO_SpareFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
		<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
		<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
		<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
		<Limit do="PM1.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
		<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
		<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
		<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
		<Limit do="PM1.DO_TC1AETempRaisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
		<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
		<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
		<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
		<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
	</Action>

	<Action do="PM1.DO_SiH4Run(V55)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-25">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
		<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
		<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
		<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
		<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
		<Limit di="PM1.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
		<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
		<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
		<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
		<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
		<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
		<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
		<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
		<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
		<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
		<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
		<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
		<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
		<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
		<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
		<Limit do="PM1.DO_SpareFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
		<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
		<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
		<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
		<Limit do="PM1.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
		<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
		<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
		<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
		<Limit do="PM1.DO_TC1AETempRaisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
		<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
		<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
		<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
		<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
	</Action>

	<Action do="PM1.DO_C2H4Run(V59)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-29">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
		<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
		<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
		<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
		<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
		<Limit di="PM1.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
		<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
		<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
		<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
		<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
		<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
		<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
		<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
		<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
		<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
		<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
		<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
		<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
		<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
		<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
		<Limit do="PM1.DO_SpareFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
		<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
		<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
		<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
		<Limit do="PM1.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
		<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
		<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
		<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
		<Limit do="PM1.DO_TC1AETempRaisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
		<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
		<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
		<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
		<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
	</Action>

	<Action do="PM1.DO_TMARelease(V43)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-13">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
		<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
		<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
		<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
		<Limit di="PM1.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
		<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
		<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
		<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
		<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
		<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
		<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
		<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
		<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
		<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
		<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
		<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
		<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
		<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
		<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
		<Limit do="PM1.DO_SpareFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
		<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
		<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
		<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
		<Limit do="PM1.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
		<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
		<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
		<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
		<Limit do="PM1.DO_TC1AETempRaisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
		<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
		<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
		<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
		<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
	</Action>

	<Action do="PM1.DO_TCSRelease(V48)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-18">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
		<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
		<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
		<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
		<Limit di="PM1.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
		<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
		<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
		<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
		<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
		<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
		<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
		<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
		<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
		<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
		<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
		<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
		<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
		<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
		<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
		<Limit do="PM1.DO_SpareFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
		<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
		<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
		<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
		<Limit do="PM1.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
		<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
		<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
		<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
		<Limit do="PM1.DO_TC1AETempRaisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
		<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
		<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
		<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
		<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
	</Action>

	<Action do="PM1.DO_TMABypass(V45)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-15">
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_TCSBypass(V49)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-19">
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_TMAVac(V46)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-16">
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <!-- Is Service Mode -->
    <Limit pollbool="PM1.IsService" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
    <Limit pollbool="PM1.DI206EqualsTrue_OR_DO177EqualsTrue" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
    <Limit di="PM1.DI_TMAReleaseFB(V43)" value="false" tip="" tip.zh-CN="" tip.en-US="DI-173" ignoreReverse="true"/>
    
	</Action>
	<Action do="PM1.DO_TCSVac(V50)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-20">
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <!-- Is Service Mode -->
    <Limit pollbool="PM1.IsService" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
    <Limit pollbool="PM1.DI206EqualsTrue_OR_DO177EqualsTrue" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
    <Limit di="PM1.DI_TCSReleaseFB(V48)" value="false" tip="" tip.zh-CN="" tip.en-US="DI-178" ignoreReverse="true"/>
	</Action>
	<Action do="PM1.DO_N2Switch(V37)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-7">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
		<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
		<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
		<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
		<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
		<Limit di="PM1.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
		<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
		<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
		<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
		<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
		<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
		<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
		<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
		<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
		<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
		<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
		<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
		<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
		<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
		<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
		<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
		<Limit do="PM1.DO_SpareFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
		<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
		<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
		<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
		<Limit do="PM1.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
		<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
		<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
		<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
		<Limit do="PM1.DO_TC1AETempRaisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
		<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
		<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
		<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
		<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
    <Limit do="PM1.DO_CleanRoutineSucceed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-173" ignoreReverse="true"/>
	</Action>
	<Action do="PM1.DO_HCLSwitch(V51)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-21">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
		<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
		<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
		<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
		<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
		<Limit di="PM1.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
		<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
		<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
		<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
		<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
		<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
		<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
		<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
		<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
		<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
		<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
		<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
		<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
		<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
		<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
		<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
		<Limit do="PM1.DO_SpareFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
		<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
		<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
		<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
		<Limit do="PM1.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
		<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
		<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
		<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
		<Limit do="PM1.DO_TC1AETempRaisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
		<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
		<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
		<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
		<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
    <Limit do="PM1.DO_CleanRoutineSucceed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-173" ignoreReverse="true"/>
	</Action>
	<Action do="PM1.DO_SiH4Switch(V52)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-22">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
		<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
		<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
		<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
		<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
		<Limit di="PM1.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
		<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
		<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
		<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
		<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
		<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
		<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
		<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
		<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
		<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
		<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
		<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
		<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
		<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
		<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
		<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
		<Limit do="PM1.DO_SpareFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
		<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
		<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
		<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
		<Limit do="PM1.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
		<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
		<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
		<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
		<Limit do="PM1.DO_TC1AETempRaisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
		<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
		<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
		<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
		<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
    <Limit do="PM1.DO_CleanRoutineSucceed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-173" ignoreReverse="true"/>
	</Action>
	<Action do="PM1.DO_C2H4Switch(V58)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-28">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
		<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
		<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
		<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
		<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
		<Limit di="PM1.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
		<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
		<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
		<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
		<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
		<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
		<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
		<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
		<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
		<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
		<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
		<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
		<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
		<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
		<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
		<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
		<Limit do="PM1.DO_SpareFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
		<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
		<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
		<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
		<Limit do="PM1.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
		<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
		<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
		<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
		<Limit do="PM1.DO_TC1AETempRaisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
		<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
		<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
		<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
		<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
    <Limit do="PM1.DO_CleanRoutineSucceed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-173" ignoreReverse="true"/>
	</Action>
	<Action do="PM1.DO_ReactorLeakCheck(V69)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-42">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_GasBoxVentPump(V72)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-45">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <Limit di="PM1.DI_EPV2-1FB" value="true" tip="" tip.zh-CN="" tip.en-US="DI-282" ignoreReverse="true"/>
    <Limit do="PM1.DO_TVEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-140" ignoreReverse="true"/>
	</Action>
	<Action do="PM1.DO_MOVac(V73)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-46">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <!-- Is Service Mode -->
    <Limit pollbool="PM1.IsService" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
    <Limit di="PM1.DI_TMAReleaseFB(V43)" value="false" tip="" tip.zh-CN="" tip.en-US="DI-173" ignoreReverse="true"/>
    <Limit di="PM1.DI_TCSReleaseFB(V48)" value="false" tip="" tip.zh-CN="" tip.en-US="DI-178" ignoreReverse="true"/>
	</Action>
	<Action do="PM1.DO_GasboxLeakCheck(V74)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-47">
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_DORVac(V75)" value="false" tip="" tip.zh-CN="" tip.en-US="DO-48">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <Limit di="PM1.DI_DORRefillFB(V76)" value="false" tip="" tip.zh-CN="" tip.en-US="DI-209" ignoreReverse="true"/>
  </Action>
	<Action do="PM1.DO_DORRefill(V76)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-49">
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <Limit do="PM1.DO_PurgeRoutineSucceed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-172" ignoreReverse="true"/>
    <Limit di="PM1.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9" ignoreReverse="true"/>
    <Limit di="PM1.DI_DORVacFB(V75)" value="true" tip="" tip.zh-CN="" tip.en-US="DI-208" ignoreReverse="true"/>
	</Action>
	<Action do="PM1.DO_EPV2" value="true" tip="" tip.zh-CN="" tip.en-US="DO-122">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_HeaterEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-56">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
		<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
		<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
		<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
		<Limit di="PM1.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
		<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
		<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
		<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
		<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
		<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
		<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
		<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
		<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
		<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
		<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
		<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
		<Limit do="PM1.DO_SpareFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
		<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
		<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
		<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
		<Limit do="PM1.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
		<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
	</Action>

	<Action do="PM1.DO_InnerHeaterEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-57">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
		<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
		<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
		<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
		<Limit di="PM1.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
		<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
		<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
		<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
		<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
		<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
		<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
		<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
		<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
		<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
		<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
		<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
		<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
		<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
		<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
		<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
		<Limit do="PM1.DO_SpareFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
		<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
		<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
		<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
		<Limit do="PM1.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
		<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
		<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
		<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
		<Limit do="PM1.DO_TC1AETempRaisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
		<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
		<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
		<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
		<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
	</Action>
	<Action do="PM1.DO_MiddleHeaterEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-58">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
		<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
		<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
		<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
		<Limit di="PM1.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
		<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
		<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
		<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
		<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
		<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
		<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
		<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
		<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
		<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
		<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
		<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
		<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
		<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
		<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
		<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
		<Limit do="PM1.DO_SpareFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
		<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
		<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
		<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
		<Limit do="PM1.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
		<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
		<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
		<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
		<Limit do="PM1.DO_TC1AETempRaisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
		<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
		<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
		<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
		<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
	</Action>
	<Action do="PM1.DO_OuterHeaterEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-59">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
		<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
		<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
		<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
		<Limit di="PM1.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
		<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
		<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
		<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
		<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
		<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
		<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
		<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
		<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
		<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
		<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
		<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
		<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
		<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
		<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
		<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
		<Limit do="PM1.DO_SpareFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
		<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
		<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
		<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
		<Limit do="PM1.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
		<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
		<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
		<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
		<Limit do="PM1.DO_TC1AETempRaisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
		<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
		<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
		<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
		<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
	</Action>
	<Action do="PM1.DO_ChamMoveBodyUp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-64">
		<Limit di="PM1.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
		<Limit di="PM1.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
		<Limit di="PM1.DI_SusceptorAtSafeSpeed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ChamLidPushButtonLocal" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
		<Limit di="PM1.DI_ChamMoveBodyEndLatchBW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-101"/>
		<Limit di="PM1.DI_SHGasConnectorLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-102"/>
		<Limit di="PM1.DI_SHLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
		<Limit di="PM1.DI_SHLidSwingUnlock" value="true" tip="" tip.zh-CN="" tip.en-US="DI-108"/>
		<Limit di="PM1.DI_MiddleLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-118"/>
		<Limit di="PM1.DI_MiddleLidSwingUnlock" value="true" tip="" tip.zh-CN="" tip.en-US="DI-122"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DO-65">
		<Limit di="PM1.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
		<Limit di="PM1.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
		<Limit di="PM1.DI_SusceptorAtSafeSpeed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ChamLidPushButtonLocal" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
		<Limit di="PM1.DI_ChamMoveBodyEndLatchBW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-101"/>
		<Limit di="PM1.DI_SHGasConnectorLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-102"/>
		<Limit di="PM1.DI_SHLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
		<Limit di="PM1.DI_SHLidSwingUnlock" value="true" tip="" tip.zh-CN="" tip.en-US="DI-108"/>
		<Limit di="PM1.DI_MiddleLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-118"/>
		<Limit di="PM1.DI_MiddleLidSwingUnlock" value="true" tip="" tip.zh-CN="" tip.en-US="DI-122"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_ChamMoveBodyUpAirBrake" value="true" tip="" tip.zh-CN="" tip.en-US="DO-66">
		<Limit di="PM1.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
		<Limit di="PM1.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_ChamMoveBodyForward" value="true" tip="" tip.zh-CN="" tip.en-US="DO-67">
		<Limit di="PM1.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
		<Limit di="PM1.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ChamLidPushButtonLocal" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_ChamMoveBodyUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-96"/>
		<Limit di="PM1.DI_ChamMoveBodyUpLatchFW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-97"/>
		<Limit di="PM1.DI_ChamMoveBodyDown" value="false" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
		<Limit di="PM1.DI_SHGasConnectorLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-102"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_ChamMoveBodyBackward" value="true" tip="" tip.zh-CN="" tip.en-US="DO-68">
		<Limit di="PM1.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
		<Limit di="PM1.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ChamLidPushButtonLocal" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_ChamMoveBodyUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-96"/>
		<Limit di="PM1.DI_ChamMoveBodyUpLatchFW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-97"/>
		<Limit di="PM1.DI_ChamMoveBodyDown" value="false" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
		<Limit di="PM1.DI_SHGasConnectorLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-102"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_SHGasConnectorLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-69">
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
		<Limit di="PM1.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
		<Limit di="PM1.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_SHGasConnectorTighten" value="true" tip="" tip.zh-CN="" tip.en-US="DO-70">
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
		<Limit di="PM1.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_SHLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-71">
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
		<Limit di="PM1.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
		<Limit di="PM1.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
		<Limit di="PM1.DI_SHLidSwingLock" value="true" tip="" tip.zh-CN="" tip.en-US="DI-107"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>

		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_SHLidTighten" value="true" tip="" tip.zh-CN="" tip.en-US="DO-72">
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
		<Limit di="PM1.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
		<Limit di="PM1.DI_SHLidSwingLock" value="true" tip="" tip.zh-CN="" tip.en-US="DI-107"/>

		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_SHLidSwingLock" value="true" tip="" tip.zh-CN="" tip.en-US="DO-73">
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
		<Limit di="PM1.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
		<Limit di="PM1.DI_SHLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-104"/>

		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_SHLidSwingUnlock" value="true" tip="" tip.zh-CN="" tip.en-US="DO-74">
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
		<Limit di="PM1.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
		<Limit di="PM1.DI_SHLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-104"/>

		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_ChamMoveBodyBrakerForward" value="true" tip="" tip.zh-CN="" tip.en-US="DO-75">
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_ChamMoveBodyUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-96"/>
		<Limit di="PM1.DI_ChamMoveBodyUpLatchFW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-97"/>
		<Limit di="PM1.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
		<Limit di="PM1.DI_SHGasConnectorLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-102"/>

		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_ChamMoveBodyBrakerBackward" value="true" tip="" tip.zh-CN="" tip.en-US="DO-76">

		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_ChamMoveBodyUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-96"/>
		<Limit di="PM1.DI_ChamMoveBodyDown" value="false" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
		<Limit di="PM1.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
		<Limit di="PM1.DI_ChamMoveBodyEndLatchBW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-101"/>
		<Limit di="PM1.DI_SHGasConnectorLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-102"/>

		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_MiddleLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-83">
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
		<Limit di="PM1.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
		<Limit di="PM1.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
		<Limit di="PM1.DI_MiddleLidSwingLock" value="true" tip="" tip.zh-CN="" tip.en-US="DI-121"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>

		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_MiddleLidTighten" value="true" tip="" tip.zh-CN="" tip.en-US="DO-84">
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
		<Limit di="PM1.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
		<Limit di="PM1.DI_MiddleLidSwingLock" value="true" tip="" tip.zh-CN="" tip.en-US="DI-121"/>

		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_MiddleLidSwingLock" value="true" tip="" tip.zh-CN="" tip.en-US="DO-85">
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
		<Limit di="PM1.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
		<Limit di="PM1.DI_MiddleLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-118"/>

		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_MiddleLidSwingUnlock" value="true" tip="" tip.zh-CN="" tip.en-US="DO-86">
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit di="PM1.DI_ChamMoveBodyDown" value="true" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
		<Limit di="PM1.DI_ChamMoveBodyFront" value="true" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
		<Limit di="PM1.DI_MiddleLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-118"/>

		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_ChamMoveBodyUpDownEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-100" ignoreReverse="true">
		<!-- Is Service Mode -->
		<Limit pollbool="PM1.IsService" value="true" tip="" tip.zh-CN="" tip.en-US=""/>

		<Limit di="PM1.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
		<Limit di="PM1.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
		<Limit di="PM1.DI_SusceptorAtSafeSpeed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
		<Limit do="PM1.DO_HeaterEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-56"/>
		<Limit do="PM1.DO_PurgeRoutineSucceed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-172"/>
		<Limit ai="PM1.AI_ActualSpeed" value="-0.001:0.001" tip="" tip.zh-CN="" tip.en-US="AI-118"/>
		<!-- Run/Vent Valve-->
		<Limit di="PM1.DI_DilutedN2Run/VentFB(V39)" value="false" tip="" tip.zh-CN="" tip.en-US="DI-169"/>
		<Limit di="PM1.DI_HighN2Run/VentFB(V40)" value="false" tip="" tip.zh-CN="" tip.en-US="DI-170"/>
		<Limit di="PM1.DI_TMARunFB(V41)" value="false" tip="" tip.zh-CN="" tip.en-US="DI-171"/>
		<Limit di="PM1.DI_TCSRun/VentFB(V53)" value="false" tip="" tip.zh-CN="" tip.en-US="DI-183"/>
		<Limit di="PM1.DI_HCLRun/VentFB(V54)" value="false" tip="" tip.zh-CN="" tip.en-US="DI-184"/>
		<Limit di="PM1.DI_SiH4RunFB(V55)" value="false" tip="" tip.zh-CN="" tip.en-US="DI-185"/>
		<Limit di="PM1.DI_C2H4RunFB(V59)" value="false" tip="" tip.zh-CN="" tip.en-US="DI-189"/>
		<!-- H2 -->
		<Limit di="PM1.DI_SHH2/ArSwitchFB(V33)" value="false" tip="" tip.zh-CN="" tip.en-US="DI-163"/>
		<Limit di="PM1.DI_N2SwitchFB(V37)" value="false" tip="" tip.zh-CN="" tip.en-US="DI-167"/>
		<Limit di="PM1.DI_HCLSwitchFB(V51)" value="false" tip="" tip.zh-CN="" tip.en-US="DI-181"/>
		<Limit di="PM1.DI_SiH4SwitchFB(V52)" value="false" tip="" tip.zh-CN="" tip.en-US="DI-182"/>
		<Limit di="PM1.DI_C2H4SwitchFB(V58)" value="false" tip="" tip.zh-CN="" tip.en-US="DI-188"/>

		<Limit di="PM1.DI_SHGasConnectorLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-102"/>
	</Action>
	<Action do="PM1.DO_SHPurgeFinal(V87)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-40">
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_OuterGasFinal(V88)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-41">
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_CarryGasFinal(V97)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-54">
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_InnerGasFinal(V89)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-112">
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_MiddleGasFinal(V90)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-113">
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_OpticPurgeFinal(V91)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-114">
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_GasRingPurgeFinal(V92)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-115">
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_ChamberPurgeFinal(V93)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-116">
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_RotationUpPurgeFinal(V94)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-117">
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_ConfinementRingFinal(V95)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-118">
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_HeaterWFFinal(V96)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-119">
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_OpenLidPurge" value="true" tip="" tip.zh-CN="" tip.en-US="DO-111">
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
  
  <Action do="PM1.DO_ServoEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-128">
    <Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
    <Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
    <Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
    <Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
    <Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
    <Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
    <Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
    <Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
    <Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
    <Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
    <Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
    <Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
    <Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
    <Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
    <Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
    <Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
    <Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
    <Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
    <Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
    <Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
    <Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
    <Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
    <Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
    <Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
    <Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <Limit do="PM1.DO_TC1AETempRaisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
    <Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
  </Action>
  
	<Action do="PM1.DO_ConfinementRingJogDown" value="true" tip="" tip.zh-CN="" tip.en-US="DO-163">
		<Limit di="PM1.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
	</Action>
	<Action do="PM1.DO_ConfinementRingMoveDown" value="true" tip="" tip.zh-CN="" tip.en-US="DO-169">
		<Limit di="PM1.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
	</Action>
	<Action do="PM1.DO_TVEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-140">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>

		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
    <Limit di="PM1.DI_EPV2-1FB" value="true" tip="" tip.zh-CN="" tip.en-US="DI-282" ignoreReverse="true"/>
	</Action>

	<Action do="PM1.DO_CyclePurgeRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-176">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>

		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_ExchangeMoRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-177">
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>

		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_CleanRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-178">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>

		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_PurgeRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-179">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>

		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_PumpRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-180">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>

		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_VentRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-181">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>

		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_ProcessIdleRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-185">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_ATMIdleRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-186">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>

		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_VACIdleRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-187">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>

		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_ProcessRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-174">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
		<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
		<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
		<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
		<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
		<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
		<Limit di="PM1.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
		<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
		<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
		<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
		<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
		<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
		<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
		<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
		<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
		<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
		<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
		<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
		<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
		<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
		<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
		<Limit do="PM1.DO_SpareFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
		<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
		<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
		<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
		<Limit do="PM1.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
		<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
		<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
		<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
		<Limit do="PM1.DO_TC1AETempRaisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
		<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
		<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
		<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
		<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
    <!-- Is Service Mode -->
    <Limit pollbool="PM1.IsService" value="false" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
    <Limit do="PM1.DO_CleanRoutineSucceed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-173" ignoreReverse="true"/>
	</Action>
	<Action do="PM1.DO_VACTransferAllowed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-182">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>

		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_ATMTransferAllowed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-183">
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>

		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>
	<Action do="PM1.DO_PreprocessRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-175">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
		<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
		<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
		<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
		<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
		<Limit di="PM1.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
		<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
		<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
		<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
		<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
		<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
		<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
		<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
		<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
		<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
		<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
		<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
		<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
		<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
		<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
		<Limit do="PM1.DO_SpareFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
		<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
		<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
		<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
		<Limit do="PM1.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
		<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
		<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
		<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
		<Limit do="PM1.DO_TC1AETempRaisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
		<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
		<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
		<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
		<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
    <Limit do="PM1.DO_CleanRoutineSucceed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-173" ignoreReverse="true"/>
	</Action>
	<Action do="PM1.DO_PostProcessRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-184">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>

		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
	</Action>

	<Action do="PM1.DO_SCR1Enable" value="true" tip="DO_SCR1Enable" tip.zh-CN="" tip.en-US="DO-134">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
		<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
		<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
		<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
		<Limit di="PM1.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
		<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
		<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
		<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
		<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
		<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
		<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
		<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
		<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
		<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
		<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
		<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
		<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
		<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
		<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
		<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
		<Limit do="PM1.DO_SpareFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
		<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
		<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
		<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
		<Limit do="PM1.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
		<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
		<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
		<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
		<Limit do="PM1.DO_TC1AETempRaisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
		<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
		<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
		<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
		<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
	</Action>

	<Action do="PM1.DO_SCR2Enable" value="true" tip="DO_SCR2Enable" tip.zh-CN="" tip.en-US="DO-135">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
		<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
		<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
		<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
		<Limit di="PM1.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
		<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
		<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
		<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
		<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
		<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
		<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
		<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
		<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
		<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
		<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
		<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
		<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
		<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
		<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
		<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
		<Limit do="PM1.DO_SpareFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
		<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
		<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
		<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
		<Limit do="PM1.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
		<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
		<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
		<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
		<Limit do="PM1.DO_TC1AETempRaisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
		<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
		<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
		<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
		<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
	</Action>

	<Action do="PM1.DO_SCR3Enable" value="true" tip="DO_SCR3Enable" tip.zh-CN="" tip.en-US="DO-136">
		<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
		<Limit di="PM1.DI_ChamPressAboveATMSW2" value="false" tip="" tip.zh-CN="" tip.en-US="DI-345"/>
		<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
		<Limit di="PM1.DI_SHFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
		<Limit di="PM1.DI_ChamTopFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-16"/>
		<Limit di="PM1.DI_ChamMiddleFlow1SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-17"/>
		<Limit di="PM1.DI_ChamBottomFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-18"/>
		<Limit di="PM1.DI_Foreline1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-19"/>
		<Limit di="PM1.DI_PowerRod1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-20"/>
		<Limit di="PM1.DI_PowerRod2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-21"/>
		<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22" />
		<Limit di="PM1.DI_ElectrodeWFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-23"/>
		<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
		<Limit di="PM1.DI_TransformerFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-25"/>
		<Limit di="PM1.DI_InletTotalFlowLowSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-27"/>
		<Limit di="PM1.DI_InletTotalFlowHighSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-28"/>
		<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
		<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
		<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
		<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
		<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
		<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
		<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
		<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
		<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
		<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
		<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
		<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
		<Limit di="PM1.DI_ServoDriverFaultSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-45"/>
		<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
		<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
		<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
		<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
		<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
		<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
		<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
		<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
		<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
		<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
		<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
		<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
		<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
		<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
		<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
		<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
		<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
		<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
		<Limit do="PM1.DO_SpareFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
		<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
		<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
		<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
		<Limit do="PM1.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
		<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
		<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
		<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
		<Limit do="PM1.DO_TC1AETempRaisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
		<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
		<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
		<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
		<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
	</Action>
  <!--<Action do="PM1.DO_TMAVent(V42)" value="false" tip="" tip.zh-CN="" tip.en-US="DO-12" ignoreReverse="true">
    <Limit di="PM1.DI_TMARunFB(V41)" value="false" tip="" tip.zh-CN="" tip.en-US="DI-171"/>
  </Action>
  <Action do="PM1.DO_SiH4Vent(V56)" value="false" tip="" tip.zh-CN="" tip.en-US="DO-26" ignoreReverse="true">
    <Limit di="PM1.DI_SiH4RunFB(V55)" value="false" tip="" tip.zh-CN="" tip.en-US="DI-185"/>
  </Action>
  <Action do="PM1.DO_C2H4Vent(V60)" value="false" tip="" tip.zh-CN="" tip.en-US="DO-30" ignoreReverse="true">
    <Limit di="PM1.DI_C2H4RunFB(V59)" value="false" tip="" tip.zh-CN="" tip.en-US="DI-189"/>
  </Action>-->
</Interlock>
