<?xml version="1.0" encoding="utf-8" ?>
<Equipment>
  <Connections>
    <Connection Name="A" ConnectionType="HSMS" ConnectionMode="Passive" OperationMode="Control" EntityType="Equipment" DeviceId="0" IP="0.0.0.0" Port="5000"/>
  </Connections>

  <Variables>
    <!-- Connection: (*) shared variable/event for all connection, (#)  individual variable/event for each connection, ([others]) connection name  -->
    <!-- VarType: SV,DV,EC  -->
    <!-- VarFormat: L,B,BOOLEAN,A,I1,I2,I4,I8,U1,U2,U4,U8,F4,F8  -->

    <!-- System-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1010001" Name="Rt.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="System Status"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1010002" Name="System.IsOnline" Unit="" Default="" Min="" Max="" HostVisible="true" Description="System IsOnline" />

    <!-- Coating-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010201" Name="A1Coating" Unit="" Default="" Min="" Max="" HostVisible="true" Description="A1 Coating"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010202" Name="A2Coating" Unit="" Default="" Min="" Max="" HostVisible="true" Description="A2 Coating"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010203" Name="A3Coating" Unit="" Default="" Min="" Max="" HostVisible="true" Description="A3 Coating"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010204" Name="A4Coating" Unit="" Default="" Min="" Max="" HostVisible="true" Description="A4 Coating"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010205" Name="A5Coating" Unit="" Default="" Min="" Max="" HostVisible="true" Description="A5 Coating"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010206" Name="A6Coating" Unit="" Default="" Min="" Max="" HostVisible="true" Description="A6 Coating"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010207" Name="A7Coating" Unit="" Default="" Min="" Max="" HostVisible="true" Description="A7 Coating"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010208" Name="A8Coating" Unit="" Default="" Min="" Max="" HostVisible="true" Description="A8 Coating"/>

    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010211" Name="A1CoatingMax" Unit="" Default="" Min="" Max="" HostVisible="true" Description="A1 Coating Max"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010212" Name="A2CoatingMax" Unit="" Default="" Min="" Max="" HostVisible="true" Description="A2 Coating Max"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010213" Name="A3CoatingMax" Unit="" Default="" Min="" Max="" HostVisible="true" Description="A3 Coating Max"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010214" Name="A4CoatingMax" Unit="" Default="" Min="" Max="" HostVisible="true" Description="A4 Coating Max"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010215" Name="A5CoatingMax" Unit="" Default="" Min="" Max="" HostVisible="true" Description="A5 Coating Max"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010216" Name="A6CoatingMax" Unit="" Default="" Min="" Max="" HostVisible="true" Description="A6 Coating Max"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010217" Name="A7CoatingMax" Unit="" Default="" Min="" Max="" HostVisible="true" Description="A7 Coating Max"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010218" Name="A8CoatingMax" Unit="" Default="" Min="" Max="" HostVisible="true" Description="A8 Coating Max"/>

    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010221" Name="B1Coating" Unit="" Default="" Min="" Max="" HostVisible="true" Description="B1 Coating"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010222" Name="B2Coating" Unit="" Default="" Min="" Max="" HostVisible="true" Description="B2 Coating"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010223" Name="B3Coating" Unit="" Default="" Min="" Max="" HostVisible="true" Description="B3 Coating"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010224" Name="B4Coating" Unit="" Default="" Min="" Max="" HostVisible="true" Description="B4 Coating"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010225" Name="B5Coating" Unit="" Default="" Min="" Max="" HostVisible="true" Description="B5 Coating"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010226" Name="B6Coating" Unit="" Default="" Min="" Max="" HostVisible="true" Description="B6 Coating"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010227" Name="B7Coating" Unit="" Default="" Min="" Max="" HostVisible="true" Description="B7 Coating"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010228" Name="B8Coating" Unit="" Default="" Min="" Max="" HostVisible="true" Description="B8 Coating"/>

    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010231" Name="B1CoatingMax" Unit="" Default="" Min="" Max="" HostVisible="true" Description="B1 Coating Max"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010232" Name="B2CoatingMax" Unit="" Default="" Min="" Max="" HostVisible="true" Description="B2 Coating Max"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010233" Name="B3CoatingMax" Unit="" Default="" Min="" Max="" HostVisible="true" Description="B3 Coating Max"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010234" Name="B4CoatingMax" Unit="" Default="" Min="" Max="" HostVisible="true" Description="B4 Coating Max"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010235" Name="B5CoatingMax" Unit="" Default="" Min="" Max="" HostVisible="true" Description="B5 Coating Max"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010236" Name="B6CoatingMax" Unit="" Default="" Min="" Max="" HostVisible="true" Description="B6 Coating Max"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010237" Name="B7CoatingMax" Unit="" Default="" Min="" Max="" HostVisible="true" Description="B7 Coating Max"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1010238" Name="B8CoatingMax" Unit="" Default="" Min="" Max="" HostVisible="true" Description="B8 Coating Max"/>


    <!-- Load-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1020001" Name="LoadLock.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Load Status"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1020002" Name="LoadLock.IsOnline" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Load Online"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1020003" Name="LoadLock.ChamberPressure" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Load Chamber Pressure"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1020004" Name="LoadLock.LLLidClosed.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Load Lid Closed"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1020005" Name="System.SensorLoadDoorClosed.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Load SlitValve Closed"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1020006" Name="System.SensorLoadDoorOpened.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Load SlitValve Opened"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1020007" Name="TM.LLTrayPresence.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Load Tray Presence"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1020008" Name="Scheduler.TimeLoad" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Load Cooling Remain Time" />


    <!-- Load阀门-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1020101" Name="TM.LoadFastPump.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Load Fast Pump Valve Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1020102" Name="TM.LoadSlowPump.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Load Slow Pump Valve Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1020103" Name="TM.LoadVent.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Load Vent Valve Status" />

    <!-- Load Tray信息-->
    <!-- 编号预留100个-->

    <!-- TM-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1030001" Name="TM.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="TM Status"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1030002" Name="TM.IsOnline" Unit="" Default="" Min="" Max="" HostVisible="true" Description="TM Online"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1030003" Name="TM.TMPressure.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="TM Chamber Pressure"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1030004" Name="TM.TMLidClosed.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="TM Lid Closed"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1030005" Name="TMRobot.State" Unit="" Default="" Min="" Max="" HostVisible="true" Description="TMRobot Status"/>


    <!-- TM阀MFC-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1030101" Name="TM.Mfc60.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="TM Mfc60 Flow" />

    <!-- TM阀门-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1030201" Name="TM.TMSlowPump.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="TM Slow Pump Valve Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1030202" Name="TM.TMFastPump.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="TM Fast Pump Valve Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1030203" Name="TM.TMVent.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="TM Vent Valve Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1030204" Name="TM.TMLoadBanlance.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="TM Load Banlance Valve Status" />

    <!-- TM干泵-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1030301" Name="System.SensorTMDryPump1Running.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="TM DryPump Running" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1030302" Name="System.SensorTMDryPump1Warning.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="TM DryPump Warning" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1030303" Name="System.SensorTMDryPump1Alarm.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="TM DryPump Alarm" />

    <!-- Buffer-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1040001" Name="Buffer.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Buffer Status"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1040002" Name="Buffer.IsOnline" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Buffer Online"/>
    <!-- <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1040003" Name="Buffer.ChamberPressure" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Buffer Chamber Pressure"/>-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1040004" Name="Buffer.BufferLidClosed.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Buffer Lid Closed" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1040005" Name="System.SensorBufferStationDoorClosed.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Buffer SlitValve Closed"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1040006" Name="System.SensorBufferStationDoorOpened.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Buffer SlitValve Opened"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1040007" Name="Scheduler.TimeBuffer1" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Buffer Bottom Cooling Remain Time" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1040008" Name="Scheduler.TimeBuffer2" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Buffer Middle Cooling Remain Time" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1040009" Name="Scheduler.TimeBuffer3" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Buffer Top Cooling Remain Time" />


    <!-- PM1-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1050001" Name="PM1.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Status"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050002" Name="PM1.IsOnline" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 IsOnline" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050003" Name="PM1.PT1.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 PT1 FeedBack" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050005" Name="PM1.PT2.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 PT2 FeedBack" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050006" Name="System.SensorReactorADoorClosed.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 SlitValve Closed"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050007" Name="System.SensorReactorADoorOpened.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 SlitValve Opened"/>


    <!--PM1 MFC FeedBack-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050101" Name="PM1.Mfc1.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc1 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050102" Name="PM1.Mfc2.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc2 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050103" Name="PM1.Mfc3.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc3 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050104" Name="PM1.Mfc4.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc4 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050105" Name="PM1.Mfc5.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc5 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050106" Name="PM1.Mfc6.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc6 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050107" Name="PM1.Mfc7.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc7 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050108" Name="PM1.Mfc8.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc8 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050109" Name="PM1.Mfc9.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc9 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050110" Name="PM1.Mfc10.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc10 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050111" Name="PM1.Mfc11.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc11 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050112" Name="PM1.Mfc12.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc11 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050113" Name="PM1.Mfc13.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc13 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050114" Name="PM1.Mfc14.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc14 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050115" Name="PM1.Mfc15.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc15 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050116" Name="PM1.Mfc16.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc16 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050117" Name="PM1.Mfc17.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc17 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050118" Name="PM1.Mfc18.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc18 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050119" Name="PM1.Mfc19.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc19 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050120" Name="PM1.Mfc20.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc20 Flow" />
    <!--<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050121" Name="PM1.Mfc21.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc21 Flow" />-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050122" Name="PM1.Mfc22.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc21 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050123" Name="PM1.Mfc23.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc23 Flow" />
    <!--<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050124" Name="PM1.Mfc24.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc24 Flow" />-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050125" Name="PM1.Mfc25.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc25 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050126" Name="PM1.Mfc26.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc26 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050127" Name="PM1.Mfc27.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc27 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050128" Name="PM1.Mfc28.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc28 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050129" Name="PM1.Mfc29.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc29 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050130" Name="PM1.Mfc30.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc30 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050131" Name="PM1.Mfc31.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc31 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050132" Name="PM1.Mfc32.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc31 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050133" Name="PM1.Mfc33.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc33 Flow" />
    <!--<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050134" Name="PM1.Mfc34.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc34 Flow" />-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050135" Name="PM1.Mfc35.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc35 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050136" Name="PM1.Mfc36.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc36 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050137" Name="PM1.Mfc37.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc37 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050138" Name="PM1.Mfc38.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc38 Flow" />
    <!--<Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050139" Name="PM1.Mfc39.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc39 Flow" />-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050140" Name="PM1.Mfc40.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc40 Flow" />

    <!--PM1 MFC SetPoint-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050201" Name="PM1.Mfc1.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc1 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050202" Name="PM1.Mfc2.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc2 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050203" Name="PM1.Mfc3.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc3 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050204" Name="PM1.Mfc4.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc4 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050205" Name="PM1.Mfc5.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc5 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050206" Name="PM1.Mfc6.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc6 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050207" Name="PM1.Mfc7.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc7 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050208" Name="PM1.Mfc8.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc8 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050209" Name="PM1.Mfc9.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc9 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050210" Name="PM1.Mfc10.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc10 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050211" Name="PM1.Mfc11.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc11 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050212" Name="PM1.Mfc12.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc11 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050213" Name="PM1.Mfc13.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc13 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050214" Name="PM1.Mfc14.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc14 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050215" Name="PM1.Mfc15.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc15 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050216" Name="PM1.Mfc16.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc16 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050217" Name="PM1.Mfc17.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc17 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050218" Name="PM1.Mfc18.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc18 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050219" Name="PM1.Mfc19.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc19 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050220" Name="PM1.Mfc20.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc20 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050222" Name="PM1.Mfc22.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc21 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050223" Name="PM1.Mfc23.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc23 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050225" Name="PM1.Mfc25.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc25 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050226" Name="PM1.Mfc26.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc26 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050227" Name="PM1.Mfc27.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc27 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050228" Name="PM1.Mfc28.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc28 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050229" Name="PM1.Mfc29.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc29 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050230" Name="PM1.Mfc30.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc30 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050231" Name="PM1.Mfc31.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc31 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050232" Name="PM1.Mfc32.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc31 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050233" Name="PM1.Mfc33.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc33 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050235" Name="PM1.Mfc35.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc35 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050236" Name="PM1.Mfc36.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc36 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050237" Name="PM1.Mfc37.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc37 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050238" Name="PM1.Mfc38.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc38 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050240" Name="PM1.Mfc40.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Mfc40 SetPoint" />

    <!-- PM1用气量-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050301" Name="PM1.GasRealTimeFlow.Ar_Run.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Ar Run Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050302" Name="PM1.GasRealTimeFlow.Ar_Vent.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Ar Vent Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050303" Name="PM1.GasRealTimeFlow.C2H4_Run.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 C2H4 Run Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050304" Name="PM1.GasRealTimeFlow.C2H4_Vent.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 C2H4 Vent Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050305" Name="PM1.GasRealTimeFlow.H2_Run.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 H2 Run Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050306" Name="PM1.GasRealTimeFlow.H2_Vent.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 H2 Vent Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050307" Name="PM1.GasRealTimeFlow.HCL_Run.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 HCL Run Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050308" Name="PM1.GasRealTimeFlow.HCL_Vent.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 HCL Vent Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050309" Name="PM1.GasRealTimeFlow.PN2_Run.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 PN2 Run Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050310" Name="PM1.GasRealTimeFlow.PN2_Vent.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 PN2 Vent Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050311" Name="PM1.GasRealTimeFlow.SiH4_Run.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 SiH4 Run Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050312" Name="PM1.GasRealTimeFlow.SiH4_Vent.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 SiH4 Vent Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050313" Name="PM1.GasRealTimeFlow.TCS_Run.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 TCS Run Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050314" Name="PM1.GasRealTimeFlow.TCS_Vent.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 TCS Vent Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050315" Name="PM1.GasRealTimeFlow.TMA_Run.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 TMA Run Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050316" Name="PM1.GasRealTimeFlow.TMA_Vent.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 TMA Vent Flow" />

    <!-- PM1压力计-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050401" Name="PM1.Pressure1.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Pressure1 Value" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050402" Name="PM1.Pressure2.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Pressure2 Value" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050403" Name="PM1.Pressure3.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Pressure3 Value" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050404" Name="PM1.Pressure4.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Pressure4 Value" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050405" Name="PM1.Pressure5.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Pressure5 Value" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050406" Name="PM1.Pressure6.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Pressure6 Value" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050407" Name="PM1.Pressure7.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Pressure7 Value" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050408" Name="PM1.Pressure8.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Pressure8 Value" />

    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050501" Name="PM1.Pressure1.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Pressure1 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050502" Name="PM1.Pressure2.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Pressure2 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050503" Name="PM1.Pressure3.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Pressure3 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050504" Name="PM1.Pressure4.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Pressure4 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050505" Name="PM1.Pressure5.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Pressure5 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050506" Name="PM1.Pressure6.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Pressure6 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050507" Name="PM1.Pressure7.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Pressure7 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050508" Name="PM1.Pressure8.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Pressure8 SetPoint" />

    <!-- PM1阀门-->
    <!-- 编号预留300个-->
    <!-- <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050501" Name="PM1.V1.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V1 Status" />-->
    <!-- <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050502" Name="PM1.V1s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V1s Status" />-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050549" Name="PM1.V25.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V25 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050553" Name="PM1.V27.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V27 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050561" Name="PM1.V31.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V31 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050563" Name="PM1.V32.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V32 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050565" Name="PM1.V33.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V33 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050566" Name="PM1.V33s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V33s Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050569" Name="PM1.V35.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V35 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050571" Name="PM1.V36.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V36 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050573" Name="PM1.V37.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V37 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050574" Name="PM1.V37s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V37s Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050577" Name="PM1.V39.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V39 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050578" Name="PM1.V39s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V39s Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050579" Name="PM1.V40.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V40 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050580" Name="PM1.V40s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V40s Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050581" Name="PM1.V41.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V41 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050583" Name="PM1.V42.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V42 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050585" Name="PM1.V43.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V43 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050586" Name="PM1.V43s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V43s Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050589" Name="PM1.V45.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V45 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050591" Name="PM1.V46.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V46 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050592" Name="PM1.V46s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V46s Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050595" Name="PM1.V48.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V48 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050596" Name="PM1.V48s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V48s Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050597" Name="PM1.V49.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V49 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050599" Name="PM1.V50.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V50 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050600" Name="PM1.V50s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V50s Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050601" Name="PM1.V51.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V51 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050602" Name="PM1.V51s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V51s Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050603" Name="PM1.V52.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V52 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050604" Name="PM1.V52s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V52s Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050605" Name="PM1.V53.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V53 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050606" Name="PM1.V53s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V53s Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050607" Name="PM1.V54.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V54 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050608" Name="PM1.V54s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V54s Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050609" Name="PM1.V55.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V55 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050611" Name="PM1.V56.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V56 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050615" Name="PM1.V58.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V58 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050616" Name="PM1.V58s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V58s Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050617" Name="PM1.V59.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V59 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050619" Name="PM1.V60.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V60 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050621" Name="PM1.V61.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V61 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050623" Name="PM1.V62.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V62 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050625" Name="PM1.V63.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V63 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050635" Name="PM1.V68.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V68 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050637" Name="PM1.V69.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V69 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050639" Name="PM1.V70.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V70 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050643" Name="PM1.V72.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V72 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050645" Name="PM1.V73.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V73 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050647" Name="PM1.V74.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V74 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050649" Name="PM1.V75.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V75 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050651" Name="PM1.V76.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V76 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050673" Name="PM1.V87.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V87 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050675" Name="PM1.V88.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V88 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050677" Name="PM1.V89.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V89 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050679" Name="PM1.V90.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V90 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050681" Name="PM1.V91.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V91 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050683" Name="PM1.V92.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V92 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050685" Name="PM1.V93.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V93 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050687" Name="PM1.V94.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V94 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050689" Name="PM1.V95.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V95 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050691" Name="PM1.V96.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V96 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050693" Name="PM1.V97.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V97 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050697" Name="PM1.V99.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V99 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050698" Name="PM1.V99s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V99s Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050721" Name="PM1.V111.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 V111 Status" />

    <!-- PM1 EPV2-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050801" Name="PM1.EPV2.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 EPV2 Status" />

    <!-- PM1 蝶阀-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1050901" Name="PM1.TV.TVValveEnable" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 TV Enable" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050902" Name="PM1.TV.PositionFeedback" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 TV Position" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1050903" Name="PM1.TV.PressureFeedback" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 TV Pressure" />

    <!-- PM1 加热带-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051001" Name="PM1.LineHeater.HeatTailFilter" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 LineHeater HeatTailFilter" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051002" Name="PM1.LineHeater.HeatTailPipe" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 LineHeater HeatTailPipe" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051003" Name="PM1.LineHeater.TMAPanelTemp(ATC-1)" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 LineHeater TMAPanelTemp_ATC_1" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051004" Name="PM1.LineHeater.TCSPanelTemp(ATC-2)" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 LineHeater TCSPanelTemp_ATC_2" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051005" Name="PM1.LineHeater.insidePanelTemp(ATC-3)" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 LineHeater insidePanelTemp_ATC_3" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051006" Name="PM1.LineHeater.outsidePanelTemp(ATC-4)" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 LineHeater outsidePanelTemp_ATC_4" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051007" Name="PM1.LineHeater.outsideSHTemp(ATC-5)" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 LineHeater outsideSHTemp_ATC_5" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051008" Name="PM1.LineHeater.LeakBypassTemp(ATC-6)" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 LineHeater LeakBypassTemp_ATC_6" />

    <!-- PM1 冷却水-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051101" Name="PM1.CoolingWater.SHFlow(U1).Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater SHFlowTemp_U1 Temperature" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051102" Name="PM1.CoolingWater.TopFlow(U2).Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater TopFlow_U2 Temperature" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051103" Name="PM1.CoolingWater.MiddleFlow1(U3).Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater MiddleFlow1_U3 Temperature" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051104" Name="PM1.CoolingWater.MiddleFlow2(U4).Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater MiddleFlow2_U4 Temperature" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051105" Name="PM1.CoolingWater.BottomFlow(U5).Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater BottomFlow_U5 Temperature" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051106" Name="PM1.CoolingWater.Foreline1Flow(U6).Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater Foreline1Flow_U6 Temperature" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051107" Name="PM1.CoolingWater.PowerRod1Flow(U7).Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater PowerRod1Flow_U7 Temperature" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051108" Name="PM1.CoolingWater.PowerRod2Flow(U8).Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater PowerRod2Flow_U8 Temperature" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051109" Name="PM1.CoolingWater.Foreline2Flow(U9).Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater Foreline2Flow_U9 Temperature" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051110" Name="PM1.CoolingWater.ElectrodeWFlow(U10).Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater ElectrodeWFlow_U10 Temperature" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051111" Name="PM1.CoolingWater.TMPump1Flow(U11).Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater TMPump1Flow_U11 Temperature" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051112" Name="PM1.CoolingWater.Spare1(U12).Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater Spare1_U12 Temperature" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051113" Name="PM1.CoolingWater.Spare2(U13).Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater Spare2_U13 Temperature" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051114" Name="PM1.CoolingWater.TransformerFlow(U14).Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater TransformerFlow_U14 Temperature" />

    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051115" Name="PM1.SensorSHFlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater SHFlowTemp_U1 Sensor" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051116" Name="PM1.SensorChamTopFlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater TopFlow_U2 Sensor" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051117" Name="PM1.SensorChamMiddleFlow1SW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater MiddleFlow1_U3 Sensor" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051118" Name="PM1.SensorChamMiddleFlow2SW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater MiddleFlow2_U4 Sensor" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051119" Name="PM1.SensorChamBottomFlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater BottomFlow_U5 Sensor" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051120" Name="PM1.SensorForeline1FlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater Foreline1Flow_U6 Sensor" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051121" Name="PM1.SensorPowerRod1FlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater PowerRod1Flow_U7 Sensor" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051122" Name="PM1.SensorPowerRod2FlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater PowerRod2Flow_U8 Sensor" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051123" Name="PM1.SensorForeline2FlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater Foreline2Flow_U9 Sensor" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051124" Name="PM1.SensorElectrodeWFlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater ElectrodeWFlow_U10 Sensor" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051125" Name="PM1.SensorTMPump1FlowTemp.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater TMPump1Flow_U11 Sensor" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051126" Name="PM1.SensorSpare1FlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater Spare1_U12 Sensor" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051127" Name="PM1.SensorSpare2FlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater Spare2_U13 Sensor" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051128" Name="PM1.SensorTransformerFlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 CoolingWater TransformerFlow_U14 Sensor" />

    <!--PM1  测温-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051201" Name="PM1.Temp.Inner" Unit="℃" Default="" Min="" Max="" HostVisible="true" Description="PM1 Inner Temperature"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051202" Name="PM1.Temp.Middle" Unit="℃" Default="" Min="" Max="" HostVisible="true" Description="PM1 Middle Temperature"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051203" Name="PM1.Temp.Outer" Unit="℃" Default="" Min="" Max="" HostVisible="true" Description="PM1 Outer Temperature"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051204" Name="PM1.TC1.L1InputTempSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 PSU Inner Temperature Set Point" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051205" Name="PM1.TC1.L2InputTempSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 PSU Middle Temperature Set Point" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051206" Name="PM1.TC1.L3InputTempSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 PSU Outer Temperature Set Point" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051207" Name="PM1.TC2.L1InputTempSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 SCR Up Temperature Set Point" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051208" Name="PM1.TC2.L2InputTempSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 SCR Middle Temperature Set Point" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051209" Name="PM1.TC2.L3InputTempSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 SCR Down Temperature Set Point" />

    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051211" Name="PM1.TC1.L1TargetSPSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 PSU Inner Temperature Target Set Point" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051212" Name="PM1.TC1.L2TargetSPSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 PSU Middle Temperature Target Set Point" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051213" Name="PM1.TC1.L3TargetSPSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 PSU Outer Temperature Target Set Point" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051214" Name="PM1.TC2.L1TargetSPSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 SCR Up Temperature Target Set Point" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051215" Name="PM1.TC2.L2TargetSPSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 SCR Middle Temperature Target Set Point" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051216" Name="PM1.TC2.L3TargetSPSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 SCR Down Temperature Target Set Point" />

    <!-- PM1 PSU-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051301" Name="PM1.PSU1.Resistance" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 PSU1 Resistance" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051302" Name="PM1.PSU1.OutputArmsFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 PSU1 Arms" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051303" Name="PM1.PSU1.OutputVoltageFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 PSU1 Voltage" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051304" Name="PM1.PSU1.OutputPowerFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 PSU1 Power" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051305" Name="PM1.PSU2.Resistance" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 PSU2 Resistance" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051306" Name="PM1.PSU2.OutputArmsFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 PSU2 Arms" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051307" Name="PM1.PSU2.OutputVoltageFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 PSU2 Voltage" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051308" Name="PM1.PSU2.OutputPowerFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 PSU2 Power" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051309" Name="PM1.PSU3.Resistance" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 PSU3 Resistance" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051310" Name="PM1.PSU3.OutputArmsFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 PSU3 Arms" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051311" Name="PM1.PSU3.OutputVoltageFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 PSU3 Voltage" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051312" Name="PM1.PSU3.OutputPowerFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 PSU3 Power" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051313" Name="PM1.TC1.L1RatioSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 PSU Inner Power Ratio Set Point" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051314" Name="PM1.TC1.L2RatioSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 PSU Middle Power Ratio Set Point" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051315" Name="PM1.TC1.L3RatioSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 PSU Outer Power Ratio Set Point" />


    <!-- PM1 SCR-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051401" Name="PM1.SCR1.Resistance" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 SCR1 Resistance" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051402" Name="PM1.SCR1.ArmsFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 SCR1 Arms" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051403" Name="PM1.SCR1.VoltageFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 SCR1 Voltage" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051404" Name="PM1.SCR1.PowerFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 SCR1 Power" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051405" Name="PM1.SCR2.Resistance" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 SCR2 Resistance" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051406" Name="PM1.SCR2.ArmsFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 SCR2 Arms" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051407" Name="PM1.SCR2.VoltageFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 SCR2 Voltage" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051408" Name="PM1.SCR2.PowerFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 SCR2 Power" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051409" Name="PM1.SCR3.Resistance" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 SCR3 Resistance" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051410" Name="PM1.SCR3.ArmsFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 SCR3 Arms" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051411" Name="PM1.SCR3.VoltageFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 SCR3 Voltage" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051412" Name="PM1.SCR3.PowerFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 SCR3 Power" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051413" Name="PM1.TC2.L1RatioSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 SCR Inner Power Ratio Set Point" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051414" Name="PM1.TC2.L2RatioSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 SCR Middle Power Ratio Set Point" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051415" Name="PM1.TC2.L3RatioSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 SCR Outer Power Ratio Set Point" />

    <!-- PM1 隔热罩-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051501" Name="PM1.ConfinementRing.RingCurPos" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 ConfinementRing Current Position"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051502" Name="PM1.ConfinementRing.RingDownPos" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 ConfinementRing Set Down Position"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051503" Name="PM1.ConfinementRing.RingUpPos" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 ConfinementRing Set Up Position"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051504" Name="PM1.ConfinementRing.RingIsServoOn" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 ConfinementRing ServoOn"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051505" Name="PM1.ConfinementRing.RingServoError" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 ConfinementRing Error"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051506" Name="PM1.ConfinementRing.RingDownSensor" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 ConfinementRing Down Sensor"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051507" Name="PM1.ConfinementRing.RingUpSensor" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 ConfinementRing Up Sensor"/>

    <!-- PM1 磁流体-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1051601" Name="PM1.ServoStatus" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Servo Status"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051602" Name="PM1.PMServo.ServoEnable" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Servo Enable" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051603" Name="PM1.PMServo.ServoError" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Servo Error" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051604" Name="PM1.PMServo.ActualSpeedFeedback" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Servo Speed" />

    <!-- PM1 干泵-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051701" Name="PM1.Pump.DryPump1Running" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 DryPump Running" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051702" Name="PM1.Pump.DryPump1Warning" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 DryPump Warning" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1051703" Name="PM1.Pump.DryPumpAlarm" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 DryPump Alarm" />

    <!-- PM1 工艺-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1051801" Name="PM1.SelectedRecipeName" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Recipe Name"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051802" Name="PM1.RecipeTotalTime" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Recipe Total Time"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051803" Name="PM1.RecipeTotalElapseTime" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Recipe Total Elapse Time"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1051804" Name="PM1.RecipeStepName" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Recipe Step Name"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="I8" Id="1051805" Name="PM1.RecipeStepNumber" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Recipe Step Number" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1051806" Name="PM1.RecipeStepTime" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Recipe Step Time" />

    <!-- PM2-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1060001" Name="PM2.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Status"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060002" Name="PM2.IsOnline" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 IsOnline" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060003" Name="PM2.PT1.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PT1 FeedBack" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060005" Name="PM2.PT2.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PT2 FeedBack" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060006" Name="System.SensorReactorBDoorClosed.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SlitValve Closed"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060007" Name="System.SensorReactorBDoorOpened.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SlitValve Opened"/>


    <!--PM2 MFC FeedBack-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060101" Name="PM2.Mfc1.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc1 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060102" Name="PM2.Mfc2.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc2 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060103" Name="PM2.Mfc3.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc3 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060104" Name="PM2.Mfc4.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc4 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060105" Name="PM2.Mfc5.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc5 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060106" Name="PM2.Mfc6.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc6 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060107" Name="PM2.Mfc7.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc7 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060108" Name="PM2.Mfc8.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc8 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060109" Name="PM2.Mfc9.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc9 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060110" Name="PM2.Mfc10.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc10 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060111" Name="PM2.Mfc11.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc11 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060112" Name="PM2.Mfc12.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc11 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060113" Name="PM2.Mfc13.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc13 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060114" Name="PM2.Mfc14.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc14 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060115" Name="PM2.Mfc15.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc15 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060116" Name="PM2.Mfc16.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc16 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060117" Name="PM2.Mfc17.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc17 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060118" Name="PM2.Mfc18.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc18 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060119" Name="PM2.Mfc19.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc19 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060120" Name="PM2.Mfc20.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc20 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060122" Name="PM2.Mfc22.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc21 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060123" Name="PM2.Mfc23.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc23 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060125" Name="PM2.Mfc25.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc25 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060126" Name="PM2.Mfc26.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc26 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060127" Name="PM2.Mfc27.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc27 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060128" Name="PM2.Mfc28.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc28 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060129" Name="PM2.Mfc29.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc29 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060130" Name="PM2.Mfc30.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc30 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060131" Name="PM2.Mfc31.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc31 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060132" Name="PM2.Mfc32.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc31 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060133" Name="PM2.Mfc33.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc33 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060135" Name="PM2.Mfc35.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc35 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060136" Name="PM2.Mfc36.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc36 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060137" Name="PM2.Mfc37.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc37 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060138" Name="PM2.Mfc38.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc38 Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060140" Name="PM2.Mfc40.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc40 Flow" />

    <!--PM2 MFC SetPoint-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060201" Name="PM2.Mfc1.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc1 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060202" Name="PM2.Mfc2.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc2 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060203" Name="PM2.Mfc3.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc3 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060204" Name="PM2.Mfc4.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc4 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060205" Name="PM2.Mfc5.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc5 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060206" Name="PM2.Mfc6.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc6 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060207" Name="PM2.Mfc7.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc7 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060208" Name="PM2.Mfc8.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc8 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060209" Name="PM2.Mfc9.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc9 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060210" Name="PM2.Mfc10.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc10 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060211" Name="PM2.Mfc11.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc11 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060212" Name="PM2.Mfc12.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc11 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060213" Name="PM2.Mfc13.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc13 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060214" Name="PM2.Mfc14.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc14 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060215" Name="PM2.Mfc15.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc15 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060216" Name="PM2.Mfc16.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc16 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060217" Name="PM2.Mfc17.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc17 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060218" Name="PM2.Mfc18.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc18 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060219" Name="PM2.Mfc19.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc19 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060220" Name="PM2.Mfc20.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc20 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060222" Name="PM2.Mfc22.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc21 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060223" Name="PM2.Mfc23.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc23 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060225" Name="PM2.Mfc25.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc25 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060226" Name="PM2.Mfc26.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc26 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060227" Name="PM2.Mfc27.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc27 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060228" Name="PM2.Mfc28.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc28 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060229" Name="PM2.Mfc29.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc29 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060230" Name="PM2.Mfc30.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc30 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060231" Name="PM2.Mfc31.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc31 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060232" Name="PM2.Mfc32.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc31 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060233" Name="PM2.Mfc33.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc33 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060235" Name="PM2.Mfc35.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc35 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060236" Name="PM2.Mfc36.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc36 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060237" Name="PM2.Mfc37.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc37 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060238" Name="PM2.Mfc38.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc38 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060240" Name="PM2.Mfc40.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Mfc40 SetPoint" />

    <!-- PM2用气量-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060301" Name="PM2.GasRealTimeFlow.Ar_Run.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Ar Run Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060302" Name="PM2.GasRealTimeFlow.Ar_Vent.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Ar Vent Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060303" Name="PM2.GasRealTimeFlow.C2H4_Run.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 C2H4 Run Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060304" Name="PM2.GasRealTimeFlow.C2H4_Vent.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 C2H4 Vent Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060305" Name="PM2.GasRealTimeFlow.H2_Run.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 H2 Run Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060306" Name="PM2.GasRealTimeFlow.H2_Vent.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 H2 Vent Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060307" Name="PM2.GasRealTimeFlow.HCL_Run.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 HCL Run Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060308" Name="PM2.GasRealTimeFlow.HCL_Vent.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 HCL Vent Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060309" Name="PM2.GasRealTimeFlow.PN2_Run.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PN2 Run Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060310" Name="PM2.GasRealTimeFlow.PN2_Vent.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PN2 Vent Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060311" Name="PM2.GasRealTimeFlow.SiH4_Run.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SiH4 Run Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060312" Name="PM2.GasRealTimeFlow.SiH4_Vent.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SiH4 Vent Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060313" Name="PM2.GasRealTimeFlow.TCS_Run.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 TCS Run Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060314" Name="PM2.GasRealTimeFlow.TCS_Vent.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 TCS Vent Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060315" Name="PM2.GasRealTimeFlow.TMA_Run.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 TMA Run Flow" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060316" Name="PM2.GasRealTimeFlow.TMA_Vent.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 TMA Vent Flow" />

    <!-- PM2压力计-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060401" Name="PM2.Pressure1.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Pressure1 Value" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060402" Name="PM2.Pressure2.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Pressure2 Value" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060403" Name="PM2.Pressure3.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Pressure3 Value" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060404" Name="PM2.Pressure4.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Pressure4 Value" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060405" Name="PM2.Pressure5.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Pressure5 Value" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060406" Name="PM2.Pressure6.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Pressure6 Value" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060407" Name="PM2.Pressure7.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Pressure7 Value" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060408" Name="PM2.Pressure8.FeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Pressure8 Value" />

    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060501" Name="PM2.Pressure1.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Pressure1 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060502" Name="PM2.Pressure2.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Pressure2 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060503" Name="PM2.Pressure3.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Pressure3 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060504" Name="PM2.Pressure4.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Pressure4 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060505" Name="PM2.Pressure5.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Pressure5 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060506" Name="PM2.Pressure6.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Pressure6 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060507" Name="PM2.Pressure7.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Pressure7 SetPoint" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060508" Name="PM2.Pressure8.SetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Pressure8 SetPoint" />

    <!-- PM2阀门-->
    <!-- 编号预留300个-->
    <!-- <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060501" Name="PM2.V1.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V1 Status" />-->
    <!-- <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060502" Name="PM2.V1s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V1s Status" />-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060549" Name="PM2.V25.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V25 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060553" Name="PM2.V27.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V27 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060561" Name="PM2.V31.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V31 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060563" Name="PM2.V32.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V32 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060565" Name="PM2.V33.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V33 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060566" Name="PM2.V33s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V33s Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060569" Name="PM2.V35.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V35 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060571" Name="PM2.V36.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V36 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060573" Name="PM2.V37.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V37 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060574" Name="PM2.V37s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V37s Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060577" Name="PM2.V39.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V39 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060578" Name="PM2.V39s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V39s Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060579" Name="PM2.V40.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V40 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060580" Name="PM2.V40s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V40s Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060581" Name="PM2.V41.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V41 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060583" Name="PM2.V42.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V42 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060585" Name="PM2.V43.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V43 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060586" Name="PM2.V43s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V43s Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060589" Name="PM2.V45.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V45 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060591" Name="PM2.V46.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V46 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060592" Name="PM2.V46s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V46s Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060595" Name="PM2.V48.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V48 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060596" Name="PM2.V48s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V48s Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060597" Name="PM2.V49.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V49 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060599" Name="PM2.V50.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V50 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060600" Name="PM2.V50s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V50s Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060601" Name="PM2.V51.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V51 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060602" Name="PM2.V51s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V51s Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060603" Name="PM2.V52.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V52 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060604" Name="PM2.V52s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V52s Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060605" Name="PM2.V53.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V53 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060606" Name="PM2.V53s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V53s Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060607" Name="PM2.V54.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V54 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060608" Name="PM2.V54s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V54s Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060609" Name="PM2.V55.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V55 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060611" Name="PM2.V56.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V56 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060615" Name="PM2.V58.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V58 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060616" Name="PM2.V58s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V58s Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060617" Name="PM2.V59.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V59 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060619" Name="PM2.V60.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V60 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060621" Name="PM2.V61.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V61 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060623" Name="PM2.V62.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V62 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060625" Name="PM2.V63.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V63 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060635" Name="PM2.V68.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V68 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060637" Name="PM2.V69.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V69 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060639" Name="PM2.V70.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V70 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060643" Name="PM2.V72.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V72 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060645" Name="PM2.V73.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V73 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060647" Name="PM2.V74.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V74 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060649" Name="PM2.V75.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V75 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060651" Name="PM2.V76.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V76 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060673" Name="PM2.V87.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V87 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060675" Name="PM2.V88.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V88 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060677" Name="PM2.V89.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V89 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060679" Name="PM2.V90.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V90 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060681" Name="PM2.V91.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V91 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060683" Name="PM2.V92.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V92 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060685" Name="PM2.V93.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V93 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060687" Name="PM2.V94.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V94 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060689" Name="PM2.V95.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V95 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060691" Name="PM2.V96.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V96 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060693" Name="PM2.V97.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V97 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060697" Name="PM2.V99.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V99 Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060698" Name="PM2.V99s.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V99s Status" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060721" Name="PM2.V111.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 V111 Status" />

    <!-- PM2 EPV2-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060801" Name="PM2.EPV2.Status" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 EPV2 Status" />

    <!-- PM2 蝶阀-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1060901" Name="PM2.TV.TVValveEnable" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 TV Enable" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060902" Name="PM2.TV.PositionFeedback" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 TV Position" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1060903" Name="PM2.TV.PressureFeedback" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 TV Pressure" />

    <!-- PM2 加热带-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061001" Name="PM2.LineHeater.HeatTailFilter" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 LineHeater HeatTailFilter" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061002" Name="PM2.LineHeater.HeatTailPipe" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 LineHeater HeatTailPipe" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061003" Name="PM2.LineHeater.TMAPanelTemp(ATC-1)" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 LineHeater TMAPanelTemp_ATC_1" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061004" Name="PM2.LineHeater.TCSPanelTemp(ATC-2)" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 LineHeater TCSPanelTemp_ATC_2" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061005" Name="PM2.LineHeater.insidePanelTemp(ATC-3)" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 LineHeater insidePanelTemp_ATC_3" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061006" Name="PM2.LineHeater.outsidePanelTemp(ATC-4)" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 LineHeater outsidePanelTemp_ATC_4" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061007" Name="PM2.LineHeater.outsideSHTemp(ATC-5)" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 LineHeater outsideSHTemp_ATC_5" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061008" Name="PM2.LineHeater.LeakBypassTemp(ATC-6)" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 LineHeater LeakBypassTemp_ATC_6" />

    <!-- PM2 冷却水-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061101" Name="PM2.CoolingWater.SHFlow(U1).Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater SHFlowTemp_U1 Temperature" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061102" Name="PM2.CoolingWater.TopFlow(U2).Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater TopFlow_U2 Temperature" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061103" Name="PM2.CoolingWater.MiddleFlow1(U3).Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater MiddleFlow1_U3 Temperature" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061104" Name="PM2.CoolingWater.MiddleFlow2(U4).Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater MiddleFlow2_U4 Temperature" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061105" Name="PM2.CoolingWater.BottomFlow(U5).Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater BottomFlow_U5 Temperature" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061106" Name="PM2.CoolingWater.Foreline1Flow(U6).Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater Foreline1Flow_U6 Temperature" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061107" Name="PM2.CoolingWater.PowerRod1Flow(U7).Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater PowerRod1Flow_U7 Temperature" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061108" Name="PM2.CoolingWater.PowerRod2Flow(U8).Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater PowerRod2Flow_U8 Temperature" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061109" Name="PM2.CoolingWater.Foreline2Flow(U9).Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater Foreline2Flow_U9 Temperature" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061110" Name="PM2.CoolingWater.ElectrodeWFlow(U10).Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater ElectrodeWFlow_U10 Temperature" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061111" Name="PM2.CoolingWater.Spare1(U11).Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater TMPump1Flow_U11 Temperature" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061112" Name="PM2.CoolingWater.Spare2(U12).Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater Spare1_U12 Temperature" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061113" Name="PM2.CoolingWater.Spare3(U13).Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater Spare2_U13 Temperature" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061114" Name="PM2.CoolingWater.TransformerFlow(U14).Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater TransformerFlow_U14 Temperature" />

    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061115" Name="PM2.SensorSHFlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater SHFlowTemp_U1 Sensor" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061116" Name="PM2.SensorChamTopFlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater TopFlow_U2 Sensor" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061117" Name="PM2.SensorChamMiddleFlow1SW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater MiddleFlow1_U3 Sensor" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061118" Name="PM2.SensorChamMiddleFlow2SW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater MiddleFlow2_U4 Sensor" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061119" Name="PM2.SensorChamBottomFlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater BottomFlow_U5 Sensor" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061120" Name="PM2.SensorForeline1FlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater Foreline1Flow_U6 Sensor" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061121" Name="PM2.SensorPowerRod1FlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater PowerRod1Flow_U7 Sensor" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061122" Name="PM2.SensorPowerRod2FlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater PowerRod2Flow_U8 Sensor" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061123" Name="PM2.SensorForeline2FlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater Foreline2Flow_U9 Sensor" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061124" Name="PM2.SensorElectrodeWFlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater ElectrodeWFlow_U10 Sensor" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061125" Name="PM2.SensorTMPump1FlowTemp.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater TMPump1Flow_U11 Sensor" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061126" Name="PM2.SensorSpare1FlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater Spare1_U12 Sensor" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061127" Name="PM2.SensorSpare2FlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater Spare2_U13 Sensor" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061128" Name="PM2.SensorTransformerFlowSW.Value" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 CoolingWater TransformerFlow_U14 Sensor" />

    <!--PM2  测温-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061201" Name="PM2.Temp.Inner" Unit="℃" Default="" Min="" Max="" HostVisible="true" Description="PM2 Inner Temperature"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061202" Name="PM2.Temp.Middle" Unit="℃" Default="" Min="" Max="" HostVisible="true" Description="PM2 Middle Temperature"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061203" Name="PM2.Temp.Outer" Unit="℃" Default="" Min="" Max="" HostVisible="true" Description="PM2 Outer Temperature"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061204" Name="PM2.TC1.L1InputTempSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU Inner Temperature Set Point" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061205" Name="PM2.TC1.L2InputTempSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU Middle Temperature Set Point" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061206" Name="PM2.TC1.L3InputTempSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU Outer Temperature Set Point" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061207" Name="PM2.TC2.L1InputTempSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR Up Temperature Set Point" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061208" Name="PM2.TC2.L2InputTempSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR Middle Temperature Set Point" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061209" Name="PM2.TC2.L3InputTempSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR Down Temperature Set Point" />

    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061211" Name="PM2.TC1.L1TargetSPSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU Inner Temperature Target Set Point" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061212" Name="PM2.TC1.L2TargetSPSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU Middle Temperature Target Set Point" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061213" Name="PM2.TC1.L3TargetSPSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU Outer Temperature Target Set Point" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061214" Name="PM2.TC2.L1TargetSPSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR Up Temperature Target Set Point" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061215" Name="PM2.TC2.L2TargetSPSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR Middle Temperature Target Set Point" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061216" Name="PM2.TC2.L3TargetSPSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR Down Temperature Target Set Point" />

    <!-- PM2 PSU-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061301" Name="PM2.PSU1.Resistance" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU1 Resistance" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061302" Name="PM2.PSU1.OutputArmsFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU1 Arms" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061303" Name="PM2.PSU1.OutputVoltageFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU1 Voltage" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061304" Name="PM2.PSU1.OutputPowerFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU1 Power" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061305" Name="PM2.PSU2.Resistance" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU2 Resistance" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061306" Name="PM2.PSU2.OutputArmsFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU2 Arms" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061307" Name="PM2.PSU2.OutputVoltageFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU2 Voltage" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061308" Name="PM2.PSU2.OutputPowerFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU2 Power" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061309" Name="PM2.PSU3.Resistance" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU3 Resistance" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061310" Name="PM2.PSU3.OutputArmsFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU3 Arms" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061311" Name="PM2.PSU3.OutputVoltageFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU3 Voltage" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061312" Name="PM2.PSU3.OutputPowerFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU3 Power" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061313" Name="PM2.TC1.L1RatioSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU Inner Power Ratio Set Point" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061314" Name="PM2.TC1.L2RatioSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU Middle Power Ratio Set Point" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061315" Name="PM2.TC1.L3RatioSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 PSU Outer Power Ratio Set Point" />


    <!-- PM2 SCR-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061401" Name="PM2.SCR1.Resistance" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR1 Resistance" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061402" Name="PM2.SCR1.ArmsFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR1 Arms" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061403" Name="PM2.SCR1.VoltageFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR1 Voltage" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061404" Name="PM2.SCR1.PowerFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR1 Power" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061405" Name="PM2.SCR2.Resistance" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR2 Resistance" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061406" Name="PM2.SCR2.ArmsFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR2 Arms" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061407" Name="PM2.SCR2.VoltageFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR2 Voltage" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061408" Name="PM2.SCR2.PowerFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR2 Power" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061409" Name="PM2.SCR3.Resistance" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR3 Resistance" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061410" Name="PM2.SCR3.ArmsFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR3 Arms" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061411" Name="PM2.SCR3.VoltageFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR3 Voltage" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061412" Name="PM2.SCR3.PowerFeedBack" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR3 Power" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061413" Name="PM2.TC2.L1RatioSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR Inner Power Ratio Set Point" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061414" Name="PM2.TC2.L2RatioSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR Middle Power Ratio Set Point" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061415" Name="PM2.TC2.L3RatioSetPoint" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 SCR Outer Power Ratio Set Point" />

    <!-- PM2 隔热罩-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061501" Name="PM2.ConfinementRing.RingCurPos" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 ConfinementRing Current Position"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061502" Name="PM2.ConfinementRing.RingDownPos" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 ConfinementRing Set Down Position"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061503" Name="PM2.ConfinementRing.RingUpPos" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 ConfinementRing Set Up Position"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061504" Name="PM2.ConfinementRing.RingIsServoOn" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 ConfinementRing ServoOn"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061505" Name="PM2.ConfinementRing.RingServoError" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 ConfinementRing Error"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061506" Name="PM2.ConfinementRing.RingDownSensor" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 ConfinementRing Down Sensor"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061507" Name="PM2.ConfinementRing.RingUpSensor" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 ConfinementRing Up Sensor"/>

    <!-- PM2 磁流体-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1061601" Name="PM2.ServoStatus" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Servo Status"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061602" Name="PM2.PMServo.ServoEnable" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Servo Enable" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061603" Name="PM2.PMServo.ServoError" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Servo Error" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061604" Name="PM2.PMServo.ActualSpeedFeedback" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Servo Speed" />

    <!-- PM2 干泵-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061701" Name="PM2.Pump.DryPump1Running" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 DryPump Running" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061702" Name="PM2.Pump.DryPump1Warning" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 DryPump Warning" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="BOOLEAN" Id="1061703" Name="PM2.Pump.DryPumpAlarm" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 DryPump Alarm" />

    <!-- PM2 工艺-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1061801" Name="PM2.SelectedRecipeName" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Recipe Name"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061802" Name="PM2.RecipeTotalTime" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Recipe Total Time"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061803" Name="PM2.RecipeTotalElapseTime" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Recipe Total Elapse Time"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="A" Id="1061804" Name="PM2.RecipeStepName" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Recipe Step Name"/>
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="I8" Id="1061805" Name="PM2.RecipeStepNumber" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Recipe Step Number" />
    <Variable Connection="*" VarType="SV" Persistent="False" VarFormat="F4" Id="1061806" Name="PM2.RecipeStepTime" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Recipe Step Time" />

    <!-- DV-->
    <!-- AlarmInfo-->
    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="DV" Persistent="False" VarFormat="A" Id="2010001" Name="System.AlarmInfo" Unit="" Default="" Min="" Max="" HostVisible="true" Description="System Alarm Info"/>
    <Variable Connection="*" VarType="DV" Persistent="False" VarFormat="A" Id="2010002" Name="Load.AlarmInfo" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Load Alarm Info"/>
    <Variable Connection="*" VarType="DV" Persistent="False" VarFormat="A" Id="2010003" Name="LoadLock.AlarmInfo" Unit="" Default="" Min="" Max="" HostVisible="true" Description="LoadLock Alarm Info"/>
    <Variable Connection="*" VarType="DV" Persistent="False" VarFormat="A" Id="2010004" Name="TM.AlarmInfo" Unit="" Default="" Min="" Max="" HostVisible="true" Description="TM Alarm Info"/>
    <Variable Connection="*" VarType="DV" Persistent="False" VarFormat="A" Id="2010005" Name="Buffer.AlarmInfo" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Buffer Alarm Info"/>
    <Variable Connection="*" VarType="DV" Persistent="False" VarFormat="A" Id="2010006" Name="PM1.AlarmInfo" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM1 Alarm Info"/>
    <Variable Connection="*" VarType="DV" Persistent="False" VarFormat="A" Id="2010007" Name="PM2.AlarmInfo" Unit="" Default="" Min="" Max="" HostVisible="true" Description="PM2 Alarm Info"/>

    <!-- 编号预留100个-->
    <Variable Connection="*" VarType="DV" Persistent="False" VarFormat="A" Id="2010101" Name="EventTime" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Event Time"/>
    <Variable Connection="*" VarType="DV" Persistent="False" VarFormat="A" Id="2010102" Name="LotID" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Lot ID"/>
    <Variable Connection="*" VarType="DV" Persistent="False" VarFormat="A" Id="2010103" Name="ChamberID" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Chamber ID"/>
    <Variable Connection="*" VarType="DV" Persistent="False" VarFormat="A" Id="2010104" Name="SequenceID" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Sequence ID"/>
    <Variable Connection="*" VarType="DV" Persistent="False" VarFormat="A" Id="2010106" Name="CarrierID" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Carrier ID"/>
    <Variable Connection="*" VarType="DV" Persistent="False" VarFormat="I8" Id="2010107" Name="SlotID" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Slot ID"/>
    <Variable Connection="*" VarType="DV" Persistent="False" VarFormat="A" Id="2010108" Name="MappingResult" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Mapping Result"/>
    <Variable Connection="*" VarType="DV" Persistent="False" VarFormat="I8" Id="2010109" Name="PortID" Unit="" Default="" Min="" Max="" HostVisible="true" Description="Port ID"/>


  </Variables>

  <Events>
    <!-- Alarm-->
    <!-- 编号预留100个-->
    <Event Connection="*"  Name="SystemAlarm_SET" Id="3010001" Description="SystemAlarm set event" Variables="System.AlarmInfo" />
    <Event Connection="*"  Name="SystemAlarm_CLEAR" Id="3010002" Description="SystemAlarm clear event" Variables="System.AlarmInfo"/>

    <Event Connection="*"  Name="LoadAlarm_SET" Id="3010003" Description="LoadAlarm set event" Variables="Load.AlarmInfo" />
    <Event Connection="*"  Name="LoadAlarm_CLEAR" Id="3010004" Description="LoadAlarm clear event" Variables="Load.AlarmInfo"/>

    <Event Connection="*"  Name="LoadLockAlarm_SET" Id="3010005" Description="LoadLockAlarm set event" Variables="LoadLock.AlarmInfo" />
    <Event Connection="*"  Name="LoadLockAlarm_CLEAR" Id="3010006" Description="LoadLockAlarm clear event" Variables="LoadLock.AlarmInfo"/>

    <Event Connection="*"  Name="BufferAlarm_SET" Id="3010007" Description="BufferAlarm set event" Variables="Buffer.AlarmInfo" />
    <Event Connection="*"  Name="BufferAlarm_CLEAR" Id="3010008" Description="BufferAlarm clear event" Variables="Buffer.AlarmInfo"/>

    <Event Connection="*"  Name="TMAlarm_SET" Id="3010009" Description="TMAlarm set event" Variables="TM.AlarmInfo" />
    <Event Connection="*"  Name="TMAlarm_CLEAR" Id="3010010" Description="TMAlarm clear event" Variables="TM.AlarmInfo"/>

    <Event Connection="*"  Name="PM1Alarm_SET" Id="3010011" Description="PM1Alarm set event" Variables="PM1.AlarmInfo" />
    <Event Connection="*"  Name="PM1Alarm_CLEAR" Id="3010012" Description="PM1Alarm clear event" Variables="PM1.AlarmInfo"/>

    <Event Connection="*"  Name="PM2Alarm_SET" Id="3010013" Description="PM2Alarm set event" Variables="PM2.AlarmInfo" />
    <Event Connection="*"  Name="PM2Alarm_CLEAR" Id="3010014" Description="PM2Alarm clear event" Variables="PM2.AlarmInfo"/>

    <!-- Job-->
    <!-- 编号预留100个-->
    <Event Connection="*"  Name="JobStart" Id="3010101" Description="Job Start,assoicated LotID,SequenceID Variable" Variables="LotID,SequenceID" />
    <Event Connection="*"  Name="JobComplete" Id="3010102" Description="Job Complete,assoicated LotID,SequenceID Variable" Variables="LotID,SequenceID" />
    <Event Connection="*"  Name="JobAbort" Id="3010103" Description="Job Abort,assoicated LotID,SequenceID Variable" Variables="LotID,SequenceID" />

    <!-- PMRecipe-->
    <!-- 编号预留100个-->
    <Event Connection="*"  Name="PMRecipeStart" Id="3010201" Description="PM Recipe Start,assoicated ChamberID,RecipeID,LotID,SequenceID Variables" Variables="ChamberID,RecipeID,LotID,SequenceID" />
    <Event Connection="*"  Name="PMRecipeComplete" Id="3010202" Description="PM Recipe Complete,assoicated ChamberID,RecipeID,LotID,SequenceID Variables" Variables="ChamberID,RecipeID,LotID,SequenceID" />
    <Event Connection="*"  Name="PMRecipeAbort" Id="3010203" Description="PM Recipe Abort,assoicated ChamberID,RecipeID,LotID,SequenceID Variables" Variables="ChamberID,RecipeID,LotID,SequenceID" />

    <!-- Wafer-->
    <!-- 编号预留100个-->
    <Event Connection="*"  Name="WaferStart" Id="3010301" Description="Wafer Start,assoicated LotID,SlotID Variable" Variables="LotID,SlotID" />
    <Event Connection="*"  Name="WaferEnd" Id="3010302" Description="Wafer End,assoicated LotID,SlotID Variable" Variables="LotID,SlotID" />
    <Event Connection="*"  Name="WaferAbort" Id="3010303" Description="Wafer Abort,assoicated LotID,SlotID Variable" Variables="LotID,SlotID" />

    <!-- Cassette-->
    <!-- 编号预留100个-->
    <Event Connection="*"  Name="CarrierArrive" Id="3010401" Description="Carrier Arrive,assoicated CarrierID" Variables="CarrierID" />
    <Event Connection="*"  Name="CarrierLeave" Id="3010402" Description="Carrier Leave,assoicated  CarrierID" Variables="CarrierID" />

    <!-- Mapping-->
    <!-- 编号预留100个-->
    <Event Connection="*"  Name="Mapping" Id="3010501" Description="Mapping,assoicated CarrierID,MappingResult(0:No Wafer; 1:Normal Wafer; >=2:Error Wafer)" Variables="CarrierID,MappingResult" />

  </Events>

  <Alarms>
    <!-- 编号预留100个-->
    <!-- ALCD: 0 = Not used, 1 = Personal safety, 2 = Equipment safety, 3 = Parameter control warning, 	4 = Parameter control error, 5 = Irrecoverable error, 6 = Equipment status warning, 7 = Attention flags, 8 = Data integrity, >8 = Other categories -->
    <Alarm Name="System.Alarm" ALTX="System Alarm" ALCD="2" ALID="4010001" SetEvent="SystemAlarm_SET" ClearEvent="SystemAlarm_CLEAR" Description="System alarm occurred,assoicated System.AlarmInfo Variable" />
    <Alarm Name="Load.Alarm" ALTX="Load Alarm" ALCD="2" ALID="4010002" SetEvent="LoadAlarm_SET" ClearEvent="LoadAlarm_CLEAR" Description="Load alarm occurred,assoicated Load.AlarmInfo Variable" />
    <Alarm Name="LoadLock.Alarm" ALTX="LoadLock Alarm" ALCD="2" ALID="4010003" SetEvent="LoadLockAlarm_SET" ClearEvent="LoadLockAlarm_CLEAR" Description="LoadLock alarm occurred,assoicated LoadLock.AlarmInfo Variable" />
    <Alarm Name="Buffer.Alarm" ALTX="Buffer Alarm" ALCD="2" ALID="4010004" SetEvent="BufferAlarm_SET" ClearEvent="BufferAlarm_CLEAR" Description="Buffer alarm occurred,assoicated Buffer.AlarmInfo Variable" />
    <Alarm Name="TM.Alarm" ALTX="TM Alarm" ALCD="2" ALID="4010005" SetEvent="TMAlarm_SET" ClearEvent="TMAlarm_CLEAR" Description="TM alarm occurred,assoicated TM.AlarmInfo Variable" />
    <Alarm Name="PM1.Alarm" ALTX="PM1 Alarm" ALCD="2" ALID="4010006" SetEvent="PM1Alarm_SET" ClearEvent="PM1Alarm_CLEAR" Description="PM1 alarm occurred,assoicated PM1.AlarmInfo Variable" />
    <Alarm Name="PM2.Alarm" ALTX="PM2 Alarm" ALCD="2" ALID="4010007" SetEvent="PM2Alarm_SET" ClearEvent="PM2Alarm_CLEAR" Description="PM2 alarm occurred,assoicated PM2.AlarmInfo Variable" />

  </Alarms>

</Equipment>

