<?xml version="1.0" encoding="utf-8"?>
<Aitex>
  <TableRecipeFormat RecipeChamberType="Sic" RecipeVersion="1.0">

    <!--###########################################-->
    <Catalog DisplayName="StepInfo">
      <Group DisplayName="Step Information">
        <Step ModuleName="" DeviceType=""  InputType="ReadOnly"   DisplayName="Step" UnitName="" ControlName="StepNo" />
        <Step ModuleName="" DeviceType=""  InputType="TextInput"  DisplayName="Name" UnitName="" ControlName="Name" />
        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="Time" UnitName="s" ControlName="Time" InputMode="" Min="0" Max="10000" Description="" />
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="EndBy" UnitName="" ControlName="EndBy"  Description="">
          <Item DisplayName="ByTime" ControlName="ByTime" />
          <Item DisplayName="ByPressure"  ControlName="ByPressure" />
        </Step>
      </Group>
    </Catalog>

    <Catalog DisplayName="LoopInfo">
      <Group DisplayName="Loop Setting">
        <Step ModuleName="" DeviceType="" DisplayName="LoopStart" ControlName="LoopStart" InputType="ReadOnlySelection" UnitName=""  Description="Loop Start">
          <Item DisplayName="False" ControlName="False" />
          <Item DisplayName="True" ControlName="True" />
        </Step>
      
        <Step ModuleName="" DeviceType="" DisplayName="LoopEnd" ControlName="LoopEnd" InputType="ReadOnlySelection" UnitName="" Description="Loop End">
          <Item DisplayName="False" ControlName="False" />
          <Item DisplayName="True" ControlName="True" />
        </Step>
        
      <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="LoopTimes" UnitName="" ControlName="LoopTimes" InputMode="" Min="0" Max="10000" Description="" />
      
      </Group>
    </Catalog>

    <Catalog DisplayName="Temperature -> Pressure -> Rotation">
      <Group DisplayName="Pressure -> Rotation">
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="1. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="1200" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="2. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed"  InputMode="" Min="0" Max="10000" Description=""/>
      </Group>

      <Group DisplayName="Temperature -> Control Mode">
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="3. TV Enable" UnitName="" ControlName="TV.SetTVEnableRoutine"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Enable" ControlName="Enable" />
          <Item DisplayName="Disable"  ControlName="Disable" />
        </Step>
        
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="4. TV Mode" UnitName="" ControlName="TV.SetMode"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Position" ControlName="Position" />
          <Item DisplayName="Pressure"  ControlName="Pressure" />
          <Item DisplayName="Close"  ControlName="Close" />
        </Step>
        
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="5. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Pyro" ControlName="Pyro" />
          <Item DisplayName="TC" ControlName="TC" />
          <Item DisplayName="Power"  ControlName="Power" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="6. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Ramp" ControlName="Ramp" />
          <Item DisplayName="Jump"  ControlName="Jump" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="7. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Pyro" ControlName="Pyro" />
          <Item DisplayName="TC" ControlName="TC" />
          <Item DisplayName="Power"  ControlName="Power" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="8. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Ramp" ControlName="Ramp" />
          <Item DisplayName="Jump"  ControlName="Jump" />
        </Step>
      </Group>

      <Group DisplayName="Temperature -> Temp Setting">
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="9. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="10. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="11. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="12. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
      </Group>

      <Group DisplayName="Temperature -> Heater Output">
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="13. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="14. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="15. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="16. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="17. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="18. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
      </Group>

    </Catalog>

    <Catalog DisplayName="Air Operated Valve">
      <Group DisplayName="Gas Supply">
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="19. H2.Supply(V31)" UnitName="" ControlName="V31.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="20. Ar.Supply(V32)" UnitName="" ControlName="V32.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="21. H2Ar.Line1(V35)" UnitName="" ControlName="V35.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="22. H2Ar.Line2(V36)" UnitName="" ControlName="V36.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
      </Group>

      <Group DisplayName="A (Ar/H2 Switch)">
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="23. Carrier Gas Ar(V65)" UnitName="" ControlName="V65.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Ar"  ControlName="Ar" />
        </Step>
        
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="23. ChamBody.Ar.Purge(V68)" UnitName="" ControlName="V68.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Ar"  ControlName="Ar" />
        </Step>
      </Group>

      <Group DisplayName="B (H2 Supply)">
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="24. SH.H2/Ar Switch(V33)" UnitName="" ControlName="V33.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Ar" ControlName="Ar" />
          <Item DisplayName="H2"  ControlName="H2" />
        </Step>

        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="27. Carrier Gas H2(V64)" UnitName="" ControlName="V64.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="H2"  ControlName="H2" />
        </Step>
      </Group>

      <Group DisplayName="C (MO Bypass)">
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="25. TMA Release(V43)" UnitName="" ControlName="V43.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="26. TCS Release(V48)" UnitName="" ControlName="V48.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
      </Group>

      <Group DisplayName="D (MO Bypass)">
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="27. TMA.Bypass(V45)" UnitName="" ControlName="V45.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="28. TCS Bypass(V49)" UnitName="" ControlName="V49.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
      </Group>

      <Group DisplayName="E (MO VAC)">
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="29. TMA VAC(V46)" UnitName="" ControlName="V46.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="30. TCS VAC(V50)" UnitName="" ControlName="V50.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
      </Group>

      <Group DisplayName="F (RUN/VENT)">
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="31. Diluted N2 Run(V39)" UnitName="" ControlName="V39.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="32. High N2 Run(V40)" UnitName="" ControlName="V40.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="33. TMA Run(V41)" UnitName="" ControlName="V41.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="34. TCS Run(V53)" UnitName="" ControlName="V53.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="35. HCL Run(V54)" UnitName="" ControlName="V54.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="36. SiH4.Run(V55)" UnitName="" ControlName="V55.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="37. C2H4.Run(V59)" UnitName="" ControlName="V59.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
      </Group>

      <Group DisplayName="G (VENT)">
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="38. TMA Vent(V42)" UnitName="" ControlName="V42.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="39. SiH4.Vent(V56)" UnitName="" ControlName="V56.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="40. C2H4.Vent(V60)" UnitName="" ControlName="V60.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
      </Group>

      <Group DisplayName="H (H2/ProcessGas Switch)">
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="41. HCL.Switch(V51)" UnitName="" ControlName="V51.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="42. SiH4.Switch(V52)" UnitName="" ControlName="V52.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="43. C2H4.Switch(V58)" UnitName="" ControlName="V58.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="44. N2.Switch(V37s)" UnitName="" ControlName="V37s.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
      </Group>

      <Group DisplayName="I (Final Valve)">
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="45. SH/OpticPurge.Final(V87)" UnitName="" ControlName="V87.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="46. OuterGas.Final(V88)" UnitName="" ControlName="V88.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="47. InnerGas.Final(V89)" UnitName="" ControlName="V89.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="48. MiddleGas.Final(V90)" UnitName="" ControlName="V90.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="49. GasRingPurge.Final(V91)" UnitName="" ControlName="V91.GVTurnValve"  Description="">
         <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="50. HeaterUpPurge.Final(V92)" UnitName="" ControlName="V92.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="51. ChamberPurge.Final(V93)" UnitName="" ControlName="V93.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="52. RotationUpPurge.Final(V94)" UnitName="" ControlName="V94.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="53. ConfinementRing.Final(V95)" UnitName="" ControlName="V95.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="54. HeaterWF.Final(V96)" UnitName="" ControlName="V96.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="55. Carry Gas.Final(V97)" UnitName="" ControlName="V97.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        
      </Group>

      <Group DisplayName="J (Run Final)">
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="56. Dopping.Final(V61)" UnitName="" ControlName="V61.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="57. Silane.Final(V62)" UnitName="" ControlName="V62.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="58. Propane.Final(V63)" UnitName="" ControlName="V63.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
      </Group>

      <Group DisplayName="K (Leak Check)">
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="59. Gasbox Leak Check(V74)" UnitName="" ControlName="V74.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="60. Reactor Leak Check(V69)" UnitName="" ControlName="V69.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="61. MO Vac(V73)" UnitName="" ControlName="V73.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
      </Group>

      <Group DisplayName="GasBox.Vent.Pump">
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="62. GasBox.Vent.Pump(V72)" UnitName="" ControlName="V72.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
      </Group>

      <Group DisplayName="GasBox.Vent.Bypass">
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="63. GasBox.Vent.ByPass(V25)" UnitName="" ControlName="V25.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
      </Group>

      <Group DisplayName="DOR Valve">
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="64. DOR.Vac(V75)" UnitName="" ControlName="V75.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="65. DOR.Refill(V76)" UnitName="" ControlName="V76.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
      </Group>

      <Group DisplayName="EPV">
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="66. EPV1" UnitName="" ControlName="EPV1.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="67. EPV2" UnitName="" ControlName="EPV2.GVTurnValve"  Description="">
          <Item DisplayName="Hold"  ControlName="Hold" />
          <Item DisplayName="Close" ControlName="Close" />
          <Item DisplayName="Open"  ControlName="Open" />
        </Step>
      </Group>

    </Catalog>
      
    <Catalog DisplayName="StepInfo">
      <Group DisplayName="MFC">
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="68. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="69.Dilut Flow For N2 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="30000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="70.N2 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="5000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="71.N2 High Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="20000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="72. Diluted N2 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="500" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="73.TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="500" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="74.TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="1000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="75.TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="5000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="76.TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="1000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="77.TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="1000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="78.HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="5000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="79.SiH4 Flow (M14)" UnitName="sccm" ControlName="Mfc14.Ramp" InputMode="" Min="0" Max="500" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="80.C2H4 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="500" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="81.Dope Push Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="82. Si Source Push Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="83.C Source Push Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="84.Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="20000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="85. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="86.Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="20000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="87.Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="88.C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="20000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="89.C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" Description=""/>                                                                               
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="90. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="1000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="91. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="50000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="92. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="93.Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="20000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="94. Surrounding Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="100000" Description=""/>                                                                          
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="95. GR Purge Main Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="30000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="96. Heater-Up Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="30000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="97. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="30000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="98. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="30000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="99. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="20000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="100. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="20000" Description=""/>
       
      </Group>                                                                       
                                                                                              
      <Group DisplayName="PC">                                        
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="101.N2 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="3000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="102. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="3000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="103.TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="3000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="104. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="3000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="105. Dope Pre-Split Pressure (PC5)" UnitName="mbar" ControlName="Pressure5.Ramp" InputMode="" Min="0" Max="3000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="106.Si Source Pre-Split Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="3000" Description=""/>
        <Step ModuleName="" DeviceType=""  InputType="DoubleTextInput"  DisplayName="107.C Source Pre-Split Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="3000" Description=""/>
      </Group>
    </Catalog>

    <!--*************************************************************-->
    <ProcessConfig DisplayName="ProcessConfig">
      <Configs DisplayName="Process Config">
      </Configs>
    </ProcessConfig>

  </TableRecipeFormat>

  <TableRecipeSchema>
    <xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
      <xs:simpleType name="processType">
        <xs:restriction base="xs:string">
          <xs:enumeration value="Process" />
          <xs:enumeration value="Clean" />
        </xs:restriction>
      </xs:simpleType>
      <xs:simpleType name="booleanType">
        <xs:restriction base="xs:string">
          <xs:enumeration value="0" />
          <xs:enumeration value="1" />
          <xs:enumeration value="False" />
          <xs:enumeration value="True" />
          <xs:enumeration value="false" />
          <xs:enumeration value="true" />
        </xs:restriction>
      </xs:simpleType>
      <xs:element name="TableRecipeData">
        <xs:complexType>
          <xs:sequence>
            <xs:element maxOccurs="unbounded" name="Step">
              <xs:complexType>
                <xs:sequence>

                  <xs:element name="Mfc">
                    <xs:complexType>
                      <xs:attribute name="Flow.Gas1" type="xs:double" use="optional" />
                      <xs:attribute name="Flow.Gas2" type="xs:double" use="optional" />
                      <xs:attribute name="Flow.Gas3" type="xs:double" use="optional" />
                      <xs:attribute name="Flow.Gas4" type="xs:double" use="optional" />
                    </xs:complexType>
                  </xs:element>

                </xs:sequence>
                <xs:attribute name="StepNo" type="xs:string" use="required" />
                <xs:attribute name="Name" type="xs:string" use="required" />
                <xs:attribute name="Loop" type="xs:string" use="required" />
                <xs:attribute name="Type" type="xs:string" use="required" />
                <xs:attribute name="StepTime" type="xs:time" use="optional" />
              </xs:complexType>
            </xs:element>
          </xs:sequence>
          <xs:attribute name="RecipeChamberType" type="xs:string" fixed="Strip" use="required" />
          <xs:attribute name="RecipeProcessType" type="xs:string" use="required" />
          <xs:attribute name="RecipeVersion" type="xs:string" fixed="1.0" use="required" />
          <xs:attribute name="CreatedBy" type="xs:string" use="required" />
          <xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
          <xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
          <xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
          <xs:attribute name="Description" type="xs:string" use="required" />
        </xs:complexType>
      </xs:element>
    </xs:schema>
  </TableRecipeSchema>
</Aitex>