270 lines
22 KiB
XML
270 lines
22 KiB
XML
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<?xml version="1.0" encoding="utf-8"?>
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<Aitex>
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<TableRecipeFormat RecipeChamberType="Sic" RecipeVersion="1.0">
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<!--###########################################-->
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<Catalog DisplayName="StepInfo">
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<Group DisplayName="Step Information">
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<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Uid" UnitName="" ControlName="StepUid" />
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<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Step" UnitName="" ControlName="StepNo" />
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<Step ModuleName="" DeviceType="" InputType="TextInput" DisplayName="Name" UnitName="" ControlName="Name" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Time" UnitName="s" ControlName="Time" InputMode="" Min="0" Max="10000" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Growth Rate" UnitName="μm/h" ControlName="GrowthRate" InputMode="" Min="0" Max="10000" Description="" />
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</Group>
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</Catalog>
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<Catalog DisplayName="StepInfo">
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<Group DisplayName="SH Flow->SH Total Flow">
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="1. Ar/H2 Switch" UnitName="" ControlName="SHArH2Switch.SetValve" Description="">
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<Item DisplayName="Ar" ControlName="Ar" />
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<Item DisplayName="H2" ControlName="H2" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="2. SH Total Flow" UnitName="sccm" ControlName="SHTotalFlow" InputMode="" Min="0" Max="1000000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="3. Carry Gas Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="4. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="5. Flow Set Mode" UnitName="" ControlName="FlowSetMode" Description="">
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<Item DisplayName="Ramp" ControlName="Ramp" />
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<Item DisplayName="Jump" ControlName="Jump" />
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</Step>
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</Group>
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<Group DisplayName="Pressure -> Rotation">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="6. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="10000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="7. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed" InputMode="" Min="0" Max="10000" Description=""/>
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</Group>
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</Catalog>
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<Catalog DisplayName="StepInfo">
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<Group DisplayName="Temperature -> Control Mode">
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="8. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode" Description="">
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<Item DisplayName="Power" ControlName="Power" />
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<Item DisplayName="Follow" ControlName="PyroFollow" />
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<Item DisplayName="Auto" ControlName="PyroAuto" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="9. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode" Description="">
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<Item DisplayName="Ramp" ControlName="Ramp" />
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<Item DisplayName="Jump" ControlName="Jump" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="10. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2" Description="">
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<Item DisplayName="Power" ControlName="Power" />
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<Item DisplayName="Follow" ControlName="PyroFollow" />
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<Item DisplayName="Auto" ControlName="PyroAuto" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="11. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode" Description="">
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<Item DisplayName="Ramp" ControlName="Ramp" />
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<Item DisplayName="Jump" ControlName="Jump" />
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</Step>
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</Group>
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<Group DisplayName="Temperature -> Temp Setting">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="12. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="13. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="14. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="15. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="16. Middle Temp Ratio" UnitName="%" ControlName="TC1.MiddleTempRatio" InputMode="" Min="0" Max="100" Description="" />
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</Group>
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<Group DisplayName="Temperature -> Heater Output">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="17. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="19. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="20. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="21. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="22. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
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</Group>
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</Catalog>
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<Catalog DisplayName="StepInfo">
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<Group DisplayName="SH Flow->Si Source->Si Source Total Flow">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="23. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
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</Group>
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<Group DisplayName="SH Flow->Si Source->TCS Flow">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="24. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve" Description="">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="25. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="26. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="27. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="28. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
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</Group>
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<Group DisplayName="SH Flow->Si Source->HCl Flow">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="29. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve" Description="">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="30. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
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</Group>
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<Group DisplayName="SH Flow->Si Source->Si Source Split">
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<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="31. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="32. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="33. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="34. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
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</Group>
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<Group DisplayName="SH Flow->C Source->C Source Total Flow">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
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</Group>
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<Group DisplayName="SH Flow->C Source->C3H8_C2H4 Flow">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="37. C3H8_C2H4 Flow Mode" UnitName="" ControlName="C2H4.SetValve" Description="">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. C3H8_C2H4 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
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</Group>
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<Group DisplayName="SH Flow->C Source->C Source Split">
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<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="39. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="40. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="41. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="42. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="43. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
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</Group>
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<!--<Group DisplayName="SH Flow->Dope->Dope Total Flow">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="44. Dope Total Flow" UnitName="sccm" ControlName="DopeTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
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</Group>-->
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<Group DisplayName="SH Flow->Dope->N2 Flow">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="44. NH3 Flow Mode" UnitName="" ControlName="NH3_2Dilution.SetValve" Description="">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="45. NH3 Actual Flow" UnitName="sccm" ControlName="NH3_2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="46. NH3 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="47. Dilut Flow For NH3 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="48. Diluted NH3 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="49. NH3 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="50. N2 Flow Mode" UnitName="" ControlName="N2NH3_2Doping.SetValve" Description="N2 HIGH FLOW MODE">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="51. N2 Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
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</Group>
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<Group DisplayName="SH Flow->Dope->TMA Flow">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="52. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve" Description="TMA FLOW MODE">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="53. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="54. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="55. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
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</Group>
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<!--<Group DisplayName="SH Flow->Dope->Dope Split">
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<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="57. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
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</Group>-->
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<Group DisplayName="SH Flow->SH Push Flow">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="56. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="57. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="58. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="59. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="60. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="61. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="62. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
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</Group>
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</Catalog>
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<Catalog DisplayName="StepInfo">
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<Group DisplayName="Purge->SH Periphery Purge">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="63. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
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</Group>
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<Group DisplayName="Purge->Chamber Periphery Purge">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="65. GasRing Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="1000000" Description="M32.GasRingPurgeFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="67. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
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</Group>
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|
<Group DisplayName="Purge->Vent Flow">
|
|||
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
|||
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
|
|||
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
|
|||
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
|
|||
|
|
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
|
|||
|
|
</Group>
|
|||
|
|
</Catalog>
|
|||
|
|
|
|||
|
|
<!--*************************************************************-->
|
|||
|
|
<ProcessConfig DisplayName="ProcessConfig">
|
|||
|
|
<Configs DisplayName="Process Config">
|
|||
|
|
</Configs>
|
|||
|
|
</ProcessConfig>
|
|||
|
|
|
|||
|
|
</TableRecipeFormat>
|
|||
|
|
|
|||
|
|
<TableRecipeSchema>
|
|||
|
|
<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
|
|||
|
|
<xs:simpleType name="processType">
|
|||
|
|
<xs:restriction base="xs:string">
|
|||
|
|
<xs:enumeration value="Process" />
|
|||
|
|
<xs:enumeration value="Clean" />
|
|||
|
|
</xs:restriction>
|
|||
|
|
</xs:simpleType>
|
|||
|
|
<xs:simpleType name="booleanType">
|
|||
|
|
<xs:restriction base="xs:string">
|
|||
|
|
<xs:enumeration value="0" />
|
|||
|
|
<xs:enumeration value="1" />
|
|||
|
|
<xs:enumeration value="False" />
|
|||
|
|
<xs:enumeration value="True" />
|
|||
|
|
<xs:enumeration value="false" />
|
|||
|
|
<xs:enumeration value="true" />
|
|||
|
|
</xs:restriction>
|
|||
|
|
</xs:simpleType>
|
|||
|
|
<xs:element name="TableRecipeData">
|
|||
|
|
<xs:complexType>
|
|||
|
|
<xs:sequence>
|
|||
|
|
<xs:element maxOccurs="unbounded" name="Step">
|
|||
|
|
<xs:complexType>
|
|||
|
|
<xs:sequence>
|
|||
|
|
|
|||
|
|
<xs:element name="Mfc">
|
|||
|
|
<xs:complexType>
|
|||
|
|
<xs:attribute name="Flow.Gas1" type="xs:double" use="optional" />
|
|||
|
|
<xs:attribute name="Flow.Gas2" type="xs:double" use="optional" />
|
|||
|
|
<xs:attribute name="Flow.Gas3" type="xs:double" use="optional" />
|
|||
|
|
<xs:attribute name="Flow.Gas4" type="xs:double" use="optional" />
|
|||
|
|
</xs:complexType>
|
|||
|
|
</xs:element>
|
|||
|
|
|
|||
|
|
</xs:sequence>
|
|||
|
|
<xs:attribute name="StepNo" type="xs:string" use="required" />
|
|||
|
|
<xs:attribute name="Name" type="xs:string" use="required" />
|
|||
|
|
<xs:attribute name="Loop" type="xs:string" use="required" />
|
|||
|
|
<xs:attribute name="Type" type="xs:string" use="required" />
|
|||
|
|
<xs:attribute name="StepTime" type="xs:time" use="optional" />
|
|||
|
|
</xs:complexType>
|
|||
|
|
</xs:element>
|
|||
|
|
</xs:sequence>
|
|||
|
|
<xs:attribute name="RecipeChamberType" type="xs:string" fixed="Strip" use="required" />
|
|||
|
|
<xs:attribute name="RecipeProcessType" type="xs:string" use="required" />
|
|||
|
|
<xs:attribute name="RecipeVersion" type="xs:string" fixed="1.0" use="required" />
|
|||
|
|
<xs:attribute name="CreatedBy" type="xs:string" use="required" />
|
|||
|
|
<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
|
|||
|
|
<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
|
|||
|
|
<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
|
|||
|
|
<xs:attribute name="Description" type="xs:string" use="required" />
|
|||
|
|
</xs:complexType>
|
|||
|
|
</xs:element>
|
|||
|
|
</xs:schema>
|
|||
|
|
</TableRecipeSchema>
|
|||
|
|
</Aitex>
|