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SIC-12/Modules/SicModules/Config/TM/interlock.xml

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2026-03-24 15:04:02 +08:00
<?xml version="1.0" ?>
<Interlock xmlns:xsi="http://www.w3.org/2001/XMLSchema-instance" xmlns:xsd="http://www.w3.org/2001/XMLSchema">
<Action do="TM.DO_LoadSlowPump" value="true" tip="" tip.zh-CN="" tip.en-US="DO-0">
<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="TM.DI_TMDryPump1Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-43"/>
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
<Limit di="TM.DI_LoadVentFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-101"/>
<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
</Action>
<Action do="TM.DO_LoadFastPump" value="true" tip="" tip.zh-CN="" tip.en-US="DO-1">
<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="TM.DI_TMDryPump1Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-43"/>
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
<Limit di="TM.DI_LoadVentFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-101"/>
<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
</Action>
<Action do="TM.DO_LoadVent" value="true" tip="" tip.zh-CN="" tip.en-US="DO-5">
<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="TM.DI_LoadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-97"/>
<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
</Action>
<Action do="TM.DO_TMSlowPump" value="true" tip="" tip.zh-CN="" tip.en-US="DO-2">
<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
<Limit di="TM.DI_TMDryPump1Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-43"/>
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
<Limit di="TM.DI_LoadSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-96"/>
<Limit di="TM.DI_LoadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-97"/>
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
</Action>
<Action do="TM.DO_TMFastPump" value="true" tip="" tip.zh-CN="" tip.en-US="DO-3">
<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
<Limit di="TM.DI_TMDryPump1Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-43"/>
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
<Limit di="TM.DI_LoadSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-96"/>
<Limit di="TM.DI_LoadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-97"/>
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
</Action>
<Action do="TM.DO_TMVent" value="true" tip="" tip.zh-CN="" tip.en-US="DO-6">
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
</Action>
<Action do="TM.DO_TMCyclePurgeRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-89">
<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
</Action>
<Action do="TM.DO_TMLeakCheckRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-90">
<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
</Action>
<Action do="TM.DO_TMPumpDownRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-91">
<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
</Action>
<Action do="TM.DO_TMServoPressRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-92">
<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
</Action>
<Action do="TM.DO_TMVentUpRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-93">
<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="TM.DI_ReactorADoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
</Action>
<Action do="TM.DO_LoadCyclePurgeRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-94">
<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
</Action>
<Action do="TM.DO_LoadLeakCheckRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-95">
<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
</Action>
<Action do="TM.DO_LoadPumpDownRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-96">
<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
</Action>
<Action do="TM.DO_LoadVentUpRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-97">
<Limit di="TM.DI_LoadDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
</Action>
<Action do="TM.DO_LoadDoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-9">
<Limit do="TM.DO_VacRobotExtenLoadEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-19"/>
<Limit di="TM.DI_RobotOnBackPos" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
</Action>
<Action do="TM.DO_RectorADoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-13">
<Limit do="TM.DO_VacRobotExtendPMAEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-21"/>
<Limit di="TM.DI_RobotOnBackPos" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
</Action>
<Action do="TM.DO_RectorBDoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-15">
<Limit do="TM.DO_VacRobotExtendPMBEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-22"/>
<Limit di="TM.DI_RobotOnBackPos" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
</Action>
<Action do="TM.DO_VacRobotExtenLoadEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-19">
<Limit di="TM.DI_LoadDoorOpened" value="true" tip="" tip.zh-CN="" tip.en-US="DI-1"/>
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
</Action>
<Action do="TM.DO_VacRobotExtendUnloadEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-20">
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
</Action>
<Action do="TM.DO_VacRobotExtendPMAEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-21">
<Limit di="TM.DI_ReactorADoorOpened" value="true" tip="" tip.zh-CN="" tip.en-US="DI-5"/>
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
</Action>
<Action do="TM.DO_VacRobotExtendPMBEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-22">
<Limit di="TM.DI_ReactorBDoorOpened" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
</Action>
<Action do="TM.DO_VacRobotExtendBufferEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-23">
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
</Action>
<Action do="TM.DO_RectorADoorOpen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-14">
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit pollbool="TM.IsPressureAbs_TM_PMA_DValue_In50" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
</Action>
<Action do="TM.DO_RectorBDoorOpen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-16">
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit pollbool="TM.IsPressureAbs_TM_PMB_DValue_In50" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
</Action>
<Action do="TM.DO_LoadDoorOpen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-10">
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
<Limit pollbool="TM.IsPressureAbs_TM_Load_DValue_In50" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
</Action>
<Action do="TM.DO_UnloadStationDoorOpen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-12">
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_UnloadStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-14"/>
<Limit pollbool="TM.IsPressureAbs_TM_Unload_DValue_In50" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
</Action>
<Action do="TM.DO_TMToPMABanlance(V70-1)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-47">
<Limit pollbool="TM.IsPressureAbs_TM_PMA_DValue_In50" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
</Action>
<Action do="TM.DO_TMToPMBBanlance(V70-2)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-48">
<Limit pollbool="TM.IsPressureAbs_TM_PMB_DValue_In50" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
</Action>
<Action do="TM.DO_TMToUnloadBanlance" value="true" tip="" tip.zh-CN="" tip.en-US="DO-17">
<Limit pollbool="TM.IsPressureAbs_TM_Unload_DValue_In50" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
</Action>
<Action do="TM.DO_TMLoadBanlance" value="true" tip="" tip.zh-CN="" tip.en-US="DO-8">
<Limit pollbool="TM.IsPressureAbs_TM_Load_DValue_In50" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
</Action>
</Interlock>
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