31 lines
792 B
C#
31 lines
792 B
C#
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namespace MECF.Framework.RT.EquipmentLibrary.HardwareUnits.UnLoad
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{
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public interface IUnLoad
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{
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bool CheckAtm();
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bool CheckVacuum();
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bool SetFastVentValve(bool isOpen, out string reason);
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bool SetSlowVentValve(bool isOpen, out string reason);
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bool SetFastPumpValve(bool isOpen, out string reason);
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bool SetSlowPumpValve(bool isOpen, out string reason);
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bool CheckLidOpen();
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bool CheckLidClose();
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bool SetLift(bool isUp, out string reason);
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bool CheckLiftUp();
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bool CheckLiftDown();
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bool CheckWaferClamped();
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bool CheckWaferUnClamped();
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bool SetWaferClamped(bool clamp, out string reason);
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bool CheckWaferPlaced();
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bool CheckTrayPlaced();
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}
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}
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