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<?xml version="1.0" encoding="utf-8"?>
<DeviceModelDefine type= "Sic" xmlns:xsi= "http://www.w3.org/2001/XMLSchema-instance" >
<IoInterLocks assembly= "SicModules" classType= "SicModules.Devices.IoInterLockEx" >
<IoInterLock id= "IoInterLock" module= "TM" display= "IoInterLock" schematicId= "IoInterLock" unit= "" doTmAtProcessPress= "DO_TMAtProcessPress" doLLAtProcessPress= "DO_LoadAtProcessPress" diTmAtATM= "DI_TMPressure1ATM" diLoadLockAtATm= "DI_LoadPressureATM" aiTmPressure= "AI_TMPressure1" aiLLPressure= "AI_LoadPressure" diTmUnderVac= "DI_TMPressure1VAC" doTmCyclePurgeRoutineSuccessed= "DO_TMCyclePurgeRoutineSuccessed" doTmCyclePurgeRoutineRunning= "DO_TMCyclePurgeRoutineRunning" doTmLeakCheckRoutineRunning= "DO_TMLeakCheckRoutineRunning" doTmPumpDownRoutineRunning= "DO_TMPumpDownRoutineRunning" doTmServoPressRoutineRunning= "DO_TMServoPressRoutineRunning" doTmVentUpRoutineRunning= "DO_TMVentUpRoutineRunning" doLLCyclePurgeRoutineRunning= "DO_LoadCyclePurgeRoutineRunning" doLLLeakCheckRoutineRunning= "DO_LoadLeakCheckRoutineRunning" doLLPumpDownRoutineRunning= "DO_LoadPumpDownRoutineRunning" doLLVentUpRoutineRunning= "DO_LoadVentUpRoutineRunning" diVacRobotExtenLLEnableFB= "DI_VacRobotExtenLoadEnableFB" diVacRobotExtendBufferEnableFB= "DI_VacRobotExtendBufferEnableFB" diVacRobotExtendPMAEnableFB= "DI_VacRobotExtendPMAEnableFB" diATMRobotExtendUnloadEnableFB= "DI_ATMRobotExtendUnloadEnableFB" diATMRobotExtendLoadLSideEnableFB= "DI_ATMRobotExtendLoadLSideEnableFB" diATMRobotExtendLoadRSideEnableFB= "DI_ATMRobotExtendLoadRSideEnableFB" diVacRobotExtendUnloadEnableFB= "DI_VacRobotExtendUnloadEnableFB" diVacRobotExtendPMBEnableFB= "DI_VacRobotExtendPMBEnableFB" doVacRobotExtenLLEnable= "DO_VacRobotExtenLoadEnable" doVacRobotExtendBufferEnable= "DO_VacRobotExtendBufferEnable" doVacRobotExtendPMAEnable= "DO_VacRobotExtendPMAEnable" doVacRobotExtendUnloadEnable= "DO_VacRobotExtendUnloadEnable" doVacRobotExtendPMBEnable= "DO_VacRobotExtendPMBEnable" doATMRobotExtendUnloadEnable= "DO_ATMRobotExtendUnloadEnable" doATMRobotExtendLoaLSideEnable= "DO_ATMRobotExtendLoaLSideEnable" doATMRobotExtendLoaRSideEnable= "DO_ATMRobotExtendLoaRSideEnable" doRectorAATMTransferReady= "DO_ReactorAATMTransferReady" doRectorAProcessTransferReady= "DO_ReactorAProcessTransferReady" doPm1LidClosed= "DO_PM1LidClosed" doRectorBATMTransferReady= "DO_ReactorBATMTransferReady" doRectorBProcessTransferReady= "DO_ReactorBProcessTransferReady" doPm2LidClosed= "DO_PM2LidClosed" doUnLoadPurgeRoutineRunning= "DO_UnLoadCyclePurgeRoutineRunning" doUnLoadLeakCheckRoutineRunning= "DO_UnLoadLeakCheckRoutineRunning" doUnLoadPumpDownRoutineRunning= "DO_UnLoadPumpDownRoutineRunning" doUnLoadVentUpRoutineRunning= "DO_UnLoadVentUpRoutineRunning" diTMLidClosed= "DI_TMLidClosed" diBufferLidClosed= "DI_BufferStationLidClosed" diPM1DoorClosed= "DI_ReactorADoorClosed" diPM2DoorClosed= "DI_ReactorBDoorClosed" />
</IoInterLocks>
<IoMfcs classType= "Aitex.Core.RT.Device.Devices.IoMFC" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoMfc3 id= "Mfc60" module= "TM" display= "Mfc60" schematicId= "Mfc60" unit= "sccm"
aiFlow="AI_M60FlowRead" aoFlow="AO_M60FlowSetpoint"
scBasePath="TM.MFC"
Valve="TMVent"
DisableFbSpErrMonWhenValveClosed="true"
aioType="float" />
</IoMfcs>
<TcAdses classType= "Aitex.Core.RT.Device.Devices.SicAds" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<TcAds id= "MainPLC" module= "PM1" display= "" schematicId= "" unit= "" option= "true" doShutDown= "DO_AbortProcessShutdownFlag" />
<TcAds id= "MainPLC" module= "PM2" display= "" schematicId= "" unit= "" option= "true" doShutDown= "DO_AbortProcessShutdownFlag" />
</TcAdses>
<WcfPlcs assembly= "MECF.Framework.Common" classType= "MECF.Framework.Common.PLC.WcfPlc" >
<WcfPlc id= "MainPLC" module= "PM1" display= "" schematicId= "" unit= "" option= "true" />
<WcfPlc id= "MainPLC" module= "PM2" display= "" schematicId= "" unit= "" option= "true" />
</WcfPlcs>
<TcAdses assembly= "SicModules" classType= "SicModules.Devices.SicAds" >
<TcAds id= "MainPLC" module= "TM" display= "" schematicId= "" unit= "" option= "true" />
</TcAdses>
<WcfPlcs assembly= "MECF.Framework.Common" classType= "MECF.Framework.Common.PLC.WcfPlc" >
<WcfPlc id= "MainPLC" module= "TM" display= "" schematicId= "" unit= "" option= "true" />
</WcfPlcs>
<IoSignalTowers classType= "MECF.Framework.RT.EquipmentLibrary.Devices.IoSignalTower" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoSignalTower id= "SignalTower" module= "TM" display= "SignalTower" schematicId= "TMSignalTower"
eventFile="STEvents.xml"
doGreen="DO_TowerGreen"
doYellow="DO_TowerYellow"
doRed="DO_TowerRed"
doBuzzer="DO_Buzzer" />
</IoSignalTowers>
<IoSensors classType= "Aitex.Core.RT.Device.Devices.IoSensor" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoSensor id= "TMLidClosed" module= "TM" display= "" schematicId= "" unit= "" di= "DI_TMLidClosed" textOutTrigValue= "false" warningText= "" alarmText= "Alarm200 TM Lid Opened [TDI-12]" />
<IoSensor id= "LLLidClosed" module= "LoadLock" display= "" schematicId= "" unit= "" di= "DI_LoadLidClosed" textOutTrigValue= "false" infoText= "Information23 LoadLid Opened [TDI-13]" warningText= "" alarmText= "" />
<IoSensor id= "UnloadLidClosed" module= "UnLoad" display= "" schematicId= "" unit= "" di= "DI_UnloadStationLidClosed" textOutTrigValue= "false" warningText= "" alarmText= "" />
<IoSensor id= "BufferLidClosed" module= "Buffer" display= "" schematicId= "" unit= "" di= "DI_BufferStationLidClosed" textOutTrigValue= "false" warningText= "" alarmText= "Alarm202 BufferStation Lid Opened [TDI-15]" />
<IoSensor id= "LoadLockGateClosed" module= "TM" display= "" schematicId= "" unit= "" di= "DI_LoadLockGateClosed" textOutTrigValue= "true" infoText= "Information11 LoadLockGate.Closed [TDI-22]" warningText= "" alarmText= "" />
<IoSensor id= "BufferWaferHigh" module= "TM" display= "" schematicId= "" unit= "" di= "DI_BufferStationOptSensorHigh" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "BufferWaferMiddle" module= "TM" display= "" schematicId= "" unit= "" di= "DI_BufferStationOptSensorMid" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "BufferWaferLow" module= "TM" display= "" schematicId= "" unit= "" di= "DI_BufferStationOptSensorLow" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "LLTrayPresence" module= "TM" display= "" schematicId= "" unit= "" di= "DI_LoadTrayPresence" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "LLWaferPlaced" module= "TM" display= "" schematicId= "" unit= "" di= "DI_LoadWaferPlaced" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "UnLoadTrayPlaced" module= "TM" display= "" schematicId= "" unit= "" di= "DI_UnloadStationWaferPresence" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "UnLoadWaferPlaced" module= "TM" display= "" schematicId= "" unit= "" di= "DI_UnloadStationWaferPresence" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "ForelineBasePressureReady" module= "TM" display= "" schematicId= "" unit= "" di= "DI_ForelineBasePressureReady" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "LoadTrayHomeSensor" module= "TM" display= "" schematicId= "" unit= "" di= "DI_LoadHomeTraySensor" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "CassALWaferConvexSensor" module= "TM" display= "" schematicId= "" unit= "" di= "DI_WaferCassetLeftConvexSensor" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "CassARWaferConvexSensor" module= "TM" display= "" schematicId= "" unit= "" di= "DI_WaferCassetRightConvexSensor" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "CassALInch6Sensor" module= "TM" display= "" schematicId= "" unit= "" di= "DI_WaferCassetLeftInch6" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "CassARInch6Sensor" module= "TM" display= "" schematicId= "" unit= "" di= "DI_WaferCassetRightInch6" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "CassBLInch6Sensor" module= "TM" display= "" schematicId= "" unit= "" di= "DI_TrayCassetInch6" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "CassBLWaferConvexSensor" module= "TM" display= "" schematicId= "" unit= "" di= "DI_TrayCassetConvexSensor" textOutTrigValue= "true" warningText= "" alarmText= "" />
<IoSensor id= "SensorLoadDoorClosed" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_LoadDoorClosed" infoText= "Information1 LoadDoor.Closed [TDI-0]" warningText= "" alarmText= "" />
<IoSensor id= "SensorLoadDoorOpened" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_LoadDoorOpened" infoText= "Information2 LoadDoor.Opened [TDI-1]" warningText= "" alarmText= "" />
<IoSensor id= "SensorUnloadStationDoorClosed" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_UnloadStationDoorClosed" infoText= "Information3 UnloadStationDoor.Closed [TDI-2]" warningText= "" alarmText= "" />
<IoSensor id= "SensorUnloadStationDoorOpened" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_UnloadStationDoorOpened" infoText= "Information4 UnloadStationDoor.Opened [TDI-3]" warningText= "" alarmText= "" />
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<IoSensor id= "SensorReactorADoorClosed" module= "TM" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ReactorADoorClosed" infoText= "Information5 ReactorA.Door.Closed [TDI-4]" warningText= "" alarmText= "" />
<IoSensor id= "SensorReactorADoorOpened" module= "TM" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ReactorADoorOpened" infoText= "Information6 ReactorA.Door.Opened [TDI-5]" warningText= "" alarmText= "" />
<IoSensor id= "SensorReactorBDoorClosed" module= "TM" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ReactorBDoorClosed" infoText= "Information7 ReactorB.Door.Closed [TDI-6]" warningText= "" alarmText= "" />
<IoSensor id= "SensorReactorBDoorOpened" module= "TM" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_ReactorBDoorOpened" infoText= "Information8 ReactorB.Door.Opened [TDI-7]" warningText= "" alarmText= "" />
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<IoSensor id= "SensorBufferStationDoorClosed" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_BufferStationDoorClosed" infoText= "Information9 BufferStationDoor.Closed [TDI-10]" warningText= "" alarmText= "" />
<IoSensor id= "SensorBufferStationDoorOpened" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_BufferStationDoorOpened" infoText= "Information10 BufferStationDoor.Closed [TDI-11]" warningText= "" alarmText= "" />
<IoSensor id= "SensorRobotOnBackPos" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_RobotOnBackPos" infoText= "Information12 RobotOnBackPos [TDI-31]" warningText= "" alarmText= "" />
<IoSensor id= "SensorLoadWaferPresence" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_LoadWaferPresence" infoText= "Information13 Load position with Tray [TDI-32]" warningText= "" alarmText= "" />
<IoSensor id= "SensorBufferStationOptSensorHigh" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_BufferStationOptSensorHigh" infoText= "Information14 Buffer High Position with Tray [TDI-37]" warningText= "" alarmText= "" />
<IoSensor id= "SensorBufferStationOptSensorMid" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_BufferStationOptSensorMid" infoText= "Information15 Buffer Middle Position with Tray [TDI-38]" warningText= "" alarmText= "" />
<IoSensor id= "SensorBufferStationOptSensorLow" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_BufferStationOptSensorLow" infoText= "Information16 Buffer Low Position with Tray [TDI-39]" warningText= "" alarmText= "" />
<IoSensor id= "SensorTMDryPump1Alarm" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_TMDryPump1Alarm" infoText= "" warningText= "" alarmText= "Alarm203 TMDryPump1 Alarm [TDI-43]" />
<IoSensor id= "SensorTMDryPump1Warning" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_TMDryPump1Warning" infoText= "" warningText= "" alarmText= "Alarm204 TMDryPump1 Warning [TDI-44]" />
<IoSensor id= "SensorTMDryPump1Running" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "false" di= "DI_TMDryPump1Running" infoText= "" warningText= "" alarmText= "Alarm205 TMDryPump1 Not Runing [TDI-49]" />
<IoSensor id= "SensorLoadLidLocked" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_LoadLidLocked" infoText= "Information17 LoadLockLid.Locked [TDI-64]" warningText= "" alarmText= "" />
<IoSensor id= "SensorLoadLidUnlocked" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_LoadLidUnlocked" infoText= "Information18 LoadLockLid.Unlocked [TDI-65]" warningText= "" alarmText= "" />
<IoSensor id= "SensorTMPressure1ATM" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_TMPressure1ATM" infoText= "Information19 TM at ATM [TDI-88]" warningText= "" alarmText= "" />
<IoSensor id= "SensorTMPressure1VAC" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_TMPressure1VAC" infoText= "Information20 TM at VAC [TDI-89]" warningText= "" alarmText= "" />
<IoSensor id= "SensorLoadPressureATM" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_LoadPressureATM" infoText= "Information21 Load at ATM [TDI-90]" warningText= "" alarmText= "" />
<IoSensor id= "SensorLoadPressureVAC" module= "" display= "" schematicId= "" unit= "" aioType= "" textOutTrigValue= "true" di= "DI_LoadPressureVAC" infoText= "Information22 Load at VAC [TDI-91]" warningText= "" alarmText= "" />
</IoSensors>
<IoPumps classType= "SicModules.Devices.IoPump" assembly= "SicModules" >
<IoPump id= "TMPump1" module= "TM" display= "Pump1" schematicId= "TMPump1" unit= "" diRunning= "DI_TMDryPump1Running" diAlarm= "DI_TMDryPump1Alarm" diWarning= "DI_TMDryPump1Warning" />
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<IoPump id= "TMPump2" module= "TM" display= "Pump2" schematicId= "TMPump2" unit= "" diRunning= "DI_TMDryPump2Running" diAlarm= "DI_TMDryPump2Alarm" diWarning= "DI_TMDryPump2Warning" />
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</IoPumps>
<IoValves classType= "Aitex.Core.RT.Device.Devices.IoValve" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoValve id= "LoadSlowPump" module= "TM" display= "V84" schematicId= "LoadSlowPump" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_LoadSlowPumpFB" doOpen= "DO_LoadSlowPump" />
<IoValve id= "LoadFastPump" module= "TM" display= "V83" schematicId= "LoadFastPump" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_LoadFastPumpFB" doOpen= "DO_LoadFastPump" />
<IoValve id= "TMSlowPump" module= "TM" display= "V82" schematicId= "TMSlowPump" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TMSlowPumpFB" doOpen= "DO_TMSlowPump" />
<IoValve id= "TMFastPump" module= "TM" display= "V81" schematicId= "TMFastPump" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TMFastPumpFB" doOpen= "DO_TMFastPump" />
<IoValve id= "UnLoadSlowPump" module= "TM" display= "V123" schematicId= "UnLoadSlowPump" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_UnloadSlowPumpFB" doOpen= "DO_UnloadSlowPump" />
<IoValve id= "UnLoadFastPump" module= "TM" display= "V122" schematicId= "UnLoadFastPump" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_UnloadFastPumpFB" doOpen= "DO_UnloadFastPump" />
<IoValve id= "BufferVent" module= "TM" display= "V80" schematicId= "BufferVent" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_BufferVentFB" doOpen= "DO_BufferVent" />
<IoValve id= "LoadVent" module= "TM" display= "V79" schematicId= "LoadVent" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_LoadVentFB" doOpen= "DO_LoadVent" />
<IoValve id= "TMVent" module= "TM" display= "V77" schematicId= "TMVent" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TMVentFB" doOpen= "DO_TMVent" />
<IoValve id= "UnLoadVent" module= "TM" display= "V78" schematicId= "UnLoadVent" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_UnloadVentFB" doOpen= "DO_UnloadVent" />
<IoValve id= "TMLoadBanlance" module= "TM" display= "V85" schematicId= "TMLoadBanlance" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "DI_TMLoadBanlanceFB" doOpen= "DO_TMLoadBanlance" />
<IoValve id= "TMUnLoadBanlance" module= "TM" display= "V124" schematicId= "TMToUnloadBanlance" unit= "" isNc= "true" isDefaultOpen= "false" diOpen= "" doOpen= "DO_TMToUnloadBanlance" />
</IoValves>
<IoSlitValves classType= "Aitex.Core.RT.Device.Unit.IoSlitValve" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoSlitValve id= "LoadLockDoor" module= "TM" display= "LLDoor" Type= "" unit= "" schematicId= "LLDoor" scTimeout= "System.SlitValveMotionTimeout" diOpen= "DI_LoadDoorOpened" diClose= "DI_LoadDoorClosed" doOpen= "DO_LoadDoorOpen" doClose= "DO_LoadDoorClose" />
<IoSlitValve id= "PM1Door" module= "TM" display= "PM1Door" Type= "" unit= "" schematicId= "PM1Door" scTimeout= "System.SlitValveMotionTimeout" diOpen= "DI_ReactorADoorOpened" diClose= "DI_ReactorADoorClosed" doOpen= "DO_RectorADoorOpen" doClose= "DO_RectorADoorClose" />
<IoSlitValve id= "PM2Door" module= "TM" display= "PM2Door" Type= "" unit= "" schematicId= "PM2Door" scTimeout= "System.SlitValveMotionTimeout" diOpen= "DI_ReactorBDoorOpened" diClose= "DI_ReactorBDoorClosed" doOpen= "DO_RectorBDoorOpen" doClose= "DO_RectorBDoorClose" />
<IoSlitValve id= "BufferDoor" module= "TM" display= "BufferDoor" Type= "" unit= "" schematicId= "BufferDoor" scTimeout= "System.SlitValveMotionTimeout" diOpen= "DI_BufferStationDoorOpened" diClose= "DI_BufferStationDoorClosed" doOpen= "DO_BufferStationDoorOpen" doClose= "DO_BufferStationDoorClose" />
<IoSlitValve id= "UnLoadSubDoor" module= "EFEM" display= "UnLoadSubDoor" Type= "" unit= "" schematicId= "UnLoadSubDoor" scTimeout= "System.SlitValveMotionTimeout" diOpen= "DI_UnloadSubStationDoorOpened" diClose= "DI_UnloadSubStationDoorClosed" doOpen= "DO_UnloadSubStationDoorOpen" doClose= "DO_UnloadSubStationDoorClose" />
<IoSlitValve id= "LoadLockLSideDoor" module= "EFEM" display= "LLLSideDoor" Type= "" unit= "" schematicId= "LLLSideDoor" scTimeout= "System.SlitValveMotionTimeout" diOpen= "DI_LoadLSideDoorOpened" diClose= "DI_LoadLSideDoorClosed" doOpen= "DO_LoadLSideDoorOpen" doClose= "DO_LoadLSideDoorClose" />
<IoSlitValve id= "LoadLockRSideDoor" module= "EFEM" display= "LLRSideDoor" Type= "" unit= "" schematicId= "LLRSideDoor" scTimeout= "System.SlitValveMotionTimeout" diOpen= "DI_LoadRSideDoorOpened" diClose= "DI_LoadRSideDoorClosed" doOpen= "DO_LoadRSideDoorOpen" doClose= "DO_LoadRSideDoorClose" />
</IoSlitValves>
<IoPressureMeter3s classType= "Aitex.Core.RT.Device.Unit.IoPressureMeter3" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoPressureMeter3 id= "LLPressure" module= "TM" display= "LLPressure" schematicId= "LLPressure" unit= "mbar" aioType= "float" aiValue= "AI_LoadPressure" formatString= "F1" MaxValue= "1500" />
<IoPressureMeter3 id= "UnLoadPressure" module= "TM" display= "UnLoadPressure" schematicId= "UnLoadPressure" unit= "mbar" aioType= "float" aiValue= "AI_UnloadPressure" formatString= "F1" MaxValue= "1500" />
<IoPressureMeter3 id= "TMPressure" module= "TM" display= "TMPressure" schematicId= "TMPressure" unit= "mbar" aioType= "float" aiValue= "AI_TMPressure1" formatString= "F1" MaxValue= "1500" />
<IoPressureMeter3 id= "PM1Pressure2" module= "TM" display= "PM1Pressure2" schematicId= "PM1Pressure2" unit= "mbar" aioType= "float" aiValue= "AI_PM1Pressure2" formatString= "F1" MaxValue= "1500" />
<IoPressureMeter3 id= "PM2Pressure2" module= "TM" display= "PM2Pressure2" schematicId= "PM2Pressure2" unit= "mbar" aioType= "float" aiValue= "AI_PM2Pressure2" formatString= "F1" MaxValue= "1500" />
</IoPressureMeter3s>
<IoTempMeters classType= "Aitex.Core.RT.Device.Devices.IoTempMeter" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoTempMeter module= "UnLoad" id= "UnLoadTemp" display= "" schematicId= "" aioType= "float" aiFeedback= "AI_UnloadTemp" />
<IoTempMeter module= "Buffer" id= "BufferTemp" display= "" schematicId= "" aioType= "float" aiFeedback= "AI_BufferTemp" />
</IoTempMeters>
<IoLift4s classType= "Aitex.Core.RT.Device.Unit.IoLift4" assembly= "MECF.Framework.RT.EquipmentLibrary" >
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<IoLift4 id= "LoadLidLock" module= "LoadLock" display= "LoadLidLock" schematicId= "LoadLidLock" unit= "" aioType= "" diUp= "DI_LoadLidOpen" diDown= "DI_LoadLidClose" doUp= "DO_LoadLidOpen" doDown= "DO_LoadLidClose" scTimeout= "10" />
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<IoLift4 id= "UnLoadLift" module= "UnLoad" display= "UnLoadLift" schematicId= "UnLoadLift" unit= "" aioType= "" diUp= "DI_UnloadStationLifterCYUp" diDown= "DI_UnloadStationLifterCYDown" doUp= "DO_UnloadStationLifterCYUp" doDown= "DO_UnloadStationLifterCYDown" scTimeout= "10" />
</IoLift4s>
<IoClaws classType= "Aitex.Core.RT.Device.Unit.IoClaw" assembly= "MECF.Framework.RT.EquipmentLibrary" >
<IoClaw id= "LLWaferClaw" module= "LoadLock" display= "LLWaferClaw" schematicId= "LLWaferClaw" unit= "" aioType= "" diUp= "DI_LoadWaferCYClamped" diDown= "DI_LoadWafeCYOpened" doUp= "DO_LoadWaferCYClamp" doDown= "DO_LoadWaferCYOpen" scTimeout= "10" />
<IoClaw id= "LLTrayClaw" module= "LoadLock" display= "LLTrayClaw" schematicId= "LLTrayClaw" unit= "" aioType= "" diUp= "DI_LoadTrayCYClamped" diDown= "DI_LoadTrayCYOpend" doUp= "DO_LoadTrayCYClamp" doDown= "DO_LoadTrayCYOpen" scTimeout= "10" />
<IoClaw id= "UnLoadWaferClaw" module= "UnLoad" display= "UnLoadWaferClaw" schematicId= "UnLoadWaferClaw" unit= "" aioType= "" diUp= "DI_UnloadStationWaferCYClamped" diDown= "DI_UnloadStationWaferCYOpened" doUp= "DO_UnloadStationWaferCYClamp" doDown= "DO_UnloadStationWaferCYOpen" scTimeout= "10" />
</IoClaws>
<TMRobots assembly= "SicModules" classType= "SicModules.TMs.SicTMRobot" >
<TMRobot id= "TMRobot" module= "TMRobot" display= "" schematicId= "" unit= "" />
</TMRobots>
<TMs assembly= "SicModules" classType= "SicModules.TMs.SicTM" >
<TM id= "TM" module= "System" display= "" schematicId= "" unit= "" DiTMLidClosedAlarm= "DI_TMLidClosed" DiLLLidClosedAlarm= "DI_LLLidClosed" DiBufferLidClosedAlarm= "DI_BufferLidClosed" aiLLTemp= "AI_LoadTemp" aiBufferTemp= "AI_BufferTemp" />
</TMs>
<LLs assembly= "SicModules" classType= "SicModules.LLs.SicLoadLock" >
<TM id= "LoadLock" module= "LoadLock" display= "" schematicId= "" unit= "" />
</LLs>
<Unloads assembly= "SicModules" classType= "SicModules.UnLoads.SicUnLoad" >
<Unload id= "UnLoad" module= "UnLoad" display= "" schematicId= "" unit= "" />
</Unloads>
<Buffers assembly= "SicModules" classType= "SicModules.Buffers.SicBuffer" >
<Buffer id= "Buffer" module= "Buffer" display= "" schematicId= "" unit= "" />
</Buffers>
</DeviceModelDefine>
