Sic-Software/SIC-12
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修改recipe内容

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修改TMIO配置
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SIC1016\caipeilun 2026-06-04 17:35:01 +08:00
parent 6d1a2b3752
commit 1526692d4e
4 changed files with 281 additions and 275 deletions
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6
App/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml
View File

@ -113,10 +113,10 @@
</Step> </Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="33. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/> <Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="33. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="34. HCL Source Split Ratio" UnitName="" ControlName="HCLSourSplitRatio"/> <Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="34. HCL Source Split Ratio" UnitName="" ControlName="HCLSourSplitRatio"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. HCl Pre Split Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.HClFlowsccm"/> <!--<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. HCl Pre Split Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.HClFlowsccm"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. HCl Inner Flow (M45)" UnitName="sccm" ControlName="Mfc45.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M45.HClFlowsccm"/> <Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. HCl Inner Flow (M45)" UnitName="sccm" ControlName="Mfc45.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M45.HClFlowsccm"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="37. HCl Middle Flow (M44)" UnitName="sccm" ControlName="Mfc44.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M44.HClFlowsccm"/> <Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="37. HCl Middle Flow (M44)" UnitName="sccm" ControlName="Mfc44.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M44.HClFlowsccm"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. HCl Outer Flow (M43)" UnitName="sccm" ControlName="Mfc43.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M43.HClFlowsccm"/> <Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. HCl Outer Flow (M43)" UnitName="sccm" ControlName="Mfc43.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M43.HClFlowsccm"/>-->
</Group> </Group>
<Group DisplayName="SH Flow->Si Source->Si Source Split"> <Group DisplayName="SH Flow->Si Source->Si Source Split">
@ -219,6 +219,8 @@
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="83. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/> <Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="83. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="84. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/> <Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="84. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="85. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/> <Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="85. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="86. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="87. Vent Pre-Exhaust Pressure (PC9)" UnitName="mbar" ControlName="Pressure9.Ramp" InputMode="" Min="0" Max="10000" Description="PC9.VentPre-ExhaustPres"/>
</Group> </Group>
</Catalog> </Catalog>

2
App/Modules/SicModules/Config/TM/DeviceModelSystem.xml
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@ -50,7 +50,7 @@
<IoSensor id="BufferWaferHigh" module="TM" display="" schematicId="" unit="" di="DI_BufferStationOptSensorHigh" textOutTrigValue="true" warningText="" alarmText="" /> <IoSensor id="BufferWaferHigh" module="TM" display="" schematicId="" unit="" di="DI_BufferStationOptSensorHigh" textOutTrigValue="true" warningText="" alarmText="" />
<IoSensor id="BufferWaferMiddle" module="TM" display="" schematicId="" unit="" di="DI_BufferStationOptSensorMid" textOutTrigValue="true" warningText="" alarmText="" /> <IoSensor id="BufferWaferMiddle" module="TM" display="" schematicId="" unit="" di="DI_BufferStationOptSensorMid" textOutTrigValue="true" warningText="" alarmText="" />
<IoSensor id="BufferWaferLow" module="TM" display="" schematicId="" unit="" di="DI_BufferStationOptSensorLow" textOutTrigValue="true" warningText="" alarmText="" /> <IoSensor id="BufferWaferLow" module="TM" display="" schematicId="" unit="" di="DI_BufferStationOptSensorLow" textOutTrigValue="true" warningText="" alarmText="" />
<IoSensor id="LLTrayPresence" module="TM" display="" schematicId="" unit="" di="DI_LoadTrayPresence" textOutTrigValue="true" warningText="" alarmText="" /> <IoSensor id="LLTrayPresence" module="TM" display="" schematicId="" unit="" di="DI_LoaderWaferPresence" textOutTrigValue="true" warningText="" alarmText="" />
<IoSensor id="LLWaferPlaced" module="TM" display="" schematicId="" unit="" di="DI_LoadWaferPlaced" textOutTrigValue="true" warningText="" alarmText="" /> <IoSensor id="LLWaferPlaced" module="TM" display="" schematicId="" unit="" di="DI_LoadWaferPlaced" textOutTrigValue="true" warningText="" alarmText="" />
<IoSensor id="UnLoadTrayPlaced" module="TM" display="" schematicId="" unit="" di="DI_UnloadStationWaferPresence" textOutTrigValue="true" warningText="" alarmText="" /> <IoSensor id="UnLoadTrayPlaced" module="TM" display="" schematicId="" unit="" di="DI_UnloadStationWaferPresence" textOutTrigValue="true" warningText="" alarmText="" />
<IoSensor id="UnLoadWaferPlaced" module="TM" display="" schematicId="" unit="" di="DI_UnloadStationWaferPresence" textOutTrigValue="true" warningText="" alarmText="" /> <IoSensor id="UnLoadWaferPlaced" module="TM" display="" schematicId="" unit="" di="DI_UnloadStationWaferPresence" textOutTrigValue="true" warningText="" alarmText="" />

2
App/Modules/SicModules/Config/TM/IODefinePlatform.xml
View File

@ -25,7 +25,7 @@
<DI_ITEM Index="26" Name="DI_LoadRSideDoorClosed" BufferOffset="26" Addr="26" Description="" Visible="false"/> <DI_ITEM Index="26" Name="DI_LoadRSideDoorClosed" BufferOffset="26" Addr="26" Description="" Visible="false"/>
<DI_ITEM Index="27" Name="DI_LoadRSideDoorOpened" BufferOffset="27" Addr="27" Description="" Visible="false"/> <DI_ITEM Index="27" Name="DI_LoadRSideDoorOpened" BufferOffset="27" Addr="27" Description="" Visible="false"/>
<DI_ITEM Index="31" Name="DI_RobotOnBackPos" BufferOffset="31" Addr="31" Description="" /> <DI_ITEM Index="31" Name="DI_RobotOnBackPos" BufferOffset="31" Addr="31" Description="" />
<DI_ITEM Index="32" Name="DI_LoadTrayPresence" BufferOffset="32" Addr="32" Description="" />
<DI_ITEM Index="33" Name="DI_LoadLeftGateINTK" BufferOffset="33" Addr="33" Description="" Visible="false"/> <DI_ITEM Index="33" Name="DI_LoadLeftGateINTK" BufferOffset="33" Addr="33" Description="" Visible="false"/>
<DI_ITEM Index="34" Name="DI_LoadRightGateINTK" BufferOffset="34" Addr="34" Description="" Visible="false"/> <DI_ITEM Index="34" Name="DI_LoadRightGateINTK" BufferOffset="34" Addr="34" Description="" Visible="false"/>
<DI_ITEM Index="35" Name="DI_LoadWaferPlaced" BufferOffset="35" Addr="35" Description="" Visible="false"/> <DI_ITEM Index="35" Name="DI_LoadWaferPlaced" BufferOffset="35" Addr="35" Description="" Visible="false"/>

18
App/SicSimulator/Config/IODefinePlatform.xml
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@ -16,7 +16,7 @@
<DI_ITEM Index="10" Name="DI_BufferStationDoorClosed" BufferOffset="10" Addr="10" Description="" /> <DI_ITEM Index="10" Name="DI_BufferStationDoorClosed" BufferOffset="10" Addr="10" Description="" />
<DI_ITEM Index="11" Name="DI_BufferStationDoorOpened" BufferOffset="11" Addr="11" Description="" /> <DI_ITEM Index="11" Name="DI_BufferStationDoorOpened" BufferOffset="11" Addr="11" Description="" />
<DI_ITEM Index="12" Name="DI_TMLidClosed" BufferOffset="12" Addr="12" Description="" /> <DI_ITEM Index="12" Name="DI_TMLidClosed" BufferOffset="12" Addr="12" Description="" />
<DI_ITEM Index="13" Name="DI_LoadLidClosed" BufferOffset="13" Addr="13" Description="" />
<DI_ITEM Index="14" Name="DI_UnloadStationLidClosed" BufferOffset="14" Addr="14" Description="" Visible="false"/> <DI_ITEM Index="14" Name="DI_UnloadStationLidClosed" BufferOffset="14" Addr="14" Description="" Visible="false"/>
<DI_ITEM Index="15" Name="DI_BufferStationLidClosed" BufferOffset="15" Addr="15" Description="" /> <DI_ITEM Index="15" Name="DI_BufferStationLidClosed" BufferOffset="15" Addr="15" Description="" />
<DI_ITEM Index="22" Name="DI_LoadLockGateClosed" BufferOffset="22" Addr="22" Description="" /> <DI_ITEM Index="22" Name="DI_LoadLockGateClosed" BufferOffset="22" Addr="22" Description="" />
@ -25,7 +25,7 @@
<DI_ITEM Index="26" Name="DI_LoadRSideDoorClosed" BufferOffset="26" Addr="26" Description="" Visible="false"/> <DI_ITEM Index="26" Name="DI_LoadRSideDoorClosed" BufferOffset="26" Addr="26" Description="" Visible="false"/>
<DI_ITEM Index="27" Name="DI_LoadRSideDoorOpened" BufferOffset="27" Addr="27" Description="" Visible="false"/> <DI_ITEM Index="27" Name="DI_LoadRSideDoorOpened" BufferOffset="27" Addr="27" Description="" Visible="false"/>
<DI_ITEM Index="31" Name="DI_RobotOnBackPos" BufferOffset="31" Addr="31" Description="" /> <DI_ITEM Index="31" Name="DI_RobotOnBackPos" BufferOffset="31" Addr="31" Description="" />
<DI_ITEM Index="32" Name="DI_LoadTrayPresence" BufferOffset="32" Addr="32" Description="" />
<DI_ITEM Index="33" Name="DI_LoadLeftGateINTK" BufferOffset="33" Addr="33" Description="" Visible="false"/> <DI_ITEM Index="33" Name="DI_LoadLeftGateINTK" BufferOffset="33" Addr="33" Description="" Visible="false"/>
<DI_ITEM Index="34" Name="DI_LoadRightGateINTK" BufferOffset="34" Addr="34" Description="" Visible="false"/> <DI_ITEM Index="34" Name="DI_LoadRightGateINTK" BufferOffset="34" Addr="34" Description="" Visible="false"/>
<DI_ITEM Index="35" Name="DI_LoadWaferPlaced" BufferOffset="35" Addr="35" Description="" Visible="false"/> <DI_ITEM Index="35" Name="DI_LoadWaferPlaced" BufferOffset="35" Addr="35" Description="" Visible="false"/>
@ -37,6 +37,7 @@
<DI_ITEM Index="41" Name="DI_UnloadStationGateINTK" BufferOffset="41" Addr="41" Description="" Visible="false"/> <DI_ITEM Index="41" Name="DI_UnloadStationGateINTK" BufferOffset="41" Addr="41" Description="" Visible="false"/>
<DI_ITEM Index="43" Name="DI_TMDryPump1Alarm" BufferOffset="43" Addr="43" Description="" /> <DI_ITEM Index="43" Name="DI_TMDryPump1Alarm" BufferOffset="43" Addr="43" Description="" />
<DI_ITEM Index="44" Name="DI_TMDryPump1Warning" BufferOffset="44" Addr="44" Description="" /> <DI_ITEM Index="44" Name="DI_TMDryPump1Warning" BufferOffset="44" Addr="44" Description="" />
<DI_ITEM Index="47" Name="DI_LoadLidClosed" BufferOffset="47" Addr="47" Description="" />
<DI_ITEM Index="49" Name="DI_TMDryPump1Running" BufferOffset="49" Addr="49" Description="" /> <DI_ITEM Index="49" Name="DI_TMDryPump1Running" BufferOffset="49" Addr="49" Description="" />
<DI_ITEM Index="50" Name="DI_WaferCassetLeftInch6" BufferOffset="50" Addr="50" Description="" Visible="false"/> <DI_ITEM Index="50" Name="DI_WaferCassetLeftInch6" BufferOffset="50" Addr="50" Description="" Visible="false"/>
<DI_ITEM Index="52" Name="DI_WaferCassetRightInch6" BufferOffset="52" Addr="52" Description="" Visible="false"/> <DI_ITEM Index="52" Name="DI_WaferCassetRightInch6" BufferOffset="52" Addr="52" Description="" Visible="false"/>
@ -46,6 +47,7 @@
<DI_ITEM Index="58" Name="DI_TrayCassetConvexSensor" BufferOffset="58" Addr="58" Description="" Visible="false"/> <DI_ITEM Index="58" Name="DI_TrayCassetConvexSensor" BufferOffset="58" Addr="58" Description="" Visible="false"/>
<DI_ITEM Index="59" Name="DI_LoadLidOpen" BufferOffset="59" Addr="59" Description=""/> <DI_ITEM Index="59" Name="DI_LoadLidOpen" BufferOffset="59" Addr="59" Description=""/>
<DI_ITEM Index="60" Name="DI_LoadLidClose" BufferOffset="60" Addr="60" Description=""/> <DI_ITEM Index="60" Name="DI_LoadLidClose" BufferOffset="60" Addr="60" Description=""/>
<DI_ITEM Index="61" Name="DI_LoaderWaferPresence" BufferOffset="61" Addr="61" Description=""/>
<DI_ITEM Index="62" Name="DI_LoadLidLockedR" BufferOffset="62" Addr="62" Description=""/> <DI_ITEM Index="62" Name="DI_LoadLidLockedR" BufferOffset="62" Addr="62" Description=""/>
<DI_ITEM Index="63" Name="DI_LoadLidUnlockedR" BufferOffset="63" Addr="63" Description=""/> <DI_ITEM Index="63" Name="DI_LoadLidUnlockedR" BufferOffset="63" Addr="63" Description=""/>
<DI_ITEM Index="64" Name="DI_LoadLidLocked" BufferOffset="64" Addr="64" Description=""/> <DI_ITEM Index="64" Name="DI_LoadLidLocked" BufferOffset="64" Addr="64" Description=""/>
@ -58,9 +60,9 @@
<DI_ITEM Index="73" Name="DI_UnloadStationWaferCYOpened" BufferOffset="73" Addr="73" Description="" Visible="false"/> <DI_ITEM Index="73" Name="DI_UnloadStationWaferCYOpened" BufferOffset="73" Addr="73" Description="" Visible="false"/>
<DI_ITEM Index="74" Name="DI_UnloadStationLifterCYUp" BufferOffset="74" Addr="74" Description="" Visible="false"/> <DI_ITEM Index="74" Name="DI_UnloadStationLifterCYUp" BufferOffset="74" Addr="74" Description="" Visible="false"/>
<DI_ITEM Index="75" Name="DI_UnloadStationLifterCYDown" BufferOffset="75" Addr="75" Description="" Visible="false"/> <DI_ITEM Index="75" Name="DI_UnloadStationLifterCYDown" BufferOffset="75" Addr="75" Description="" Visible="false"/>
<DI_ITEM Index="78" Name="DI_TMDryPump2Alarm" BufferOffset="78" Addr="78" Description="" /> <DI_ITEM Index="78" Name="DI_TMDryPump2Alarm" BufferOffset="78" Addr="78" Description="" Visible="false"/>
<DI_ITEM Index="79" Name="DI_TMDryPump2Warning" BufferOffset="79" Addr="79" Description="" /> <DI_ITEM Index="79" Name="DI_TMDryPump2Warning" BufferOffset="79" Addr="79" Description="" Visible="false"/>
<DI_ITEM Index="86" Name="DI_TMDryPump2Running" BufferOffset="86" Addr="86" Description="" /> <DI_ITEM Index="86" Name="DI_TMDryPump2Running" BufferOffset="86" Addr="86" Description="" Visible="false"/>
<DI_ITEM Index="88" Name="DI_TMPressure1ATM" BufferOffset="88" Addr="88" Description="" /> <DI_ITEM Index="88" Name="DI_TMPressure1ATM" BufferOffset="88" Addr="88" Description="" />
<DI_ITEM Index="89" Name="DI_TMPressure1VAC" BufferOffset="89" Addr="89" Description="" /> <DI_ITEM Index="89" Name="DI_TMPressure1VAC" BufferOffset="89" Addr="89" Description="" />
<DI_ITEM Index="90" Name="DI_LoadPressureATM" BufferOffset="90" Addr="90" Description="" /> <DI_ITEM Index="90" Name="DI_LoadPressureATM" BufferOffset="90" Addr="90" Description="" />
@ -114,8 +116,8 @@
<DI_ITEM Index="142" Name="DI_UnloadStationLifterCYDownFB" BufferOffset="142" Addr="142" Description="" Visible="false"/> <DI_ITEM Index="142" Name="DI_UnloadStationLifterCYDownFB" BufferOffset="142" Addr="142" Description="" Visible="false"/>
<DI_ITEM Index="143" Name="DI_TMToPMABanlanceFB" BufferOffset="143" Addr="143" Description="" /> <DI_ITEM Index="143" Name="DI_TMToPMABanlanceFB" BufferOffset="143" Addr="143" Description="" />
<DI_ITEM Index="144" Name="DI_TMToPMBBanlanceFB" BufferOffset="144" Addr="144" Description="" /> <DI_ITEM Index="144" Name="DI_TMToPMBBanlanceFB" BufferOffset="144" Addr="144" Description="" />
<DI_ITEM Index="157" Name="DI_UnloadFastPumpFB" BufferOffset="157" Addr="157" Description="V122" Visible="false"/> <DI_ITEM Index="157" Name="DI_UnloadFastPumpFB" BufferOffset="157" Addr="157" Description="V122"/>
<DI_ITEM Index="158" Name="DI_UnloadSlowPumpFB" BufferOffset="158" Addr="158" Description="V123" Visible="false"/> <DI_ITEM Index="158" Name="DI_UnloadSlowPumpFB" BufferOffset="158" Addr="158" Description="V123"/>
<DI_ITEM Index="160" Name="DI_ReactorAATMTransferReadyFB" BufferOffset="160" Addr="160" Description="" /> <DI_ITEM Index="160" Name="DI_ReactorAATMTransferReadyFB" BufferOffset="160" Addr="160" Description="" />
<DI_ITEM Index="161" Name="DI_ReactorAProcessTransferReadyFB" BufferOffset="161" Addr="161" Description="" /> <DI_ITEM Index="161" Name="DI_ReactorAProcessTransferReadyFB" BufferOffset="161" Addr="161" Description="" />
<DI_ITEM Index="162" Name="DI_ReactorBATMTransferReadyFB" BufferOffset="162" Addr="162" Description="" /> <DI_ITEM Index="162" Name="DI_ReactorBATMTransferReadyFB" BufferOffset="162" Addr="162" Description="" />
@ -208,6 +210,8 @@
<DO_ITEM Index="46" Name="DO_UnloadStationLifterCYDown" BufferOffset="46" Addr="46" Description="" Visible="false"/> <DO_ITEM Index="46" Name="DO_UnloadStationLifterCYDown" BufferOffset="46" Addr="46" Description="" Visible="false"/>
<DO_ITEM Index="47" Name="DO_TMToPMABanlance(V70-1)" BufferOffset="47" Addr="47" Description="" /> <DO_ITEM Index="47" Name="DO_TMToPMABanlance(V70-1)" BufferOffset="47" Addr="47" Description="" />
<DO_ITEM Index="48" Name="DO_TMToPMBBanlance(V70-2)" BufferOffset="48" Addr="48" Description="" /> <DO_ITEM Index="48" Name="DO_TMToPMBBanlance(V70-2)" BufferOffset="48" Addr="48" Description="" />
<DO_ITEM Index="49" Name="DO_BufferStationBDoorClose" BufferOffset="49" Addr="49" Description="" />
<DO_ITEM Index="50" Name="DO_BufferStationBDoorOpen" BufferOffset="50" Addr="50" Description="" />
<DO_ITEM Index="55" Name="DO_TowerGreen" BufferOffset="55" Addr="55" Description="" /> <DO_ITEM Index="55" Name="DO_TowerGreen" BufferOffset="55" Addr="55" Description="" />
<DO_ITEM Index="56" Name="DO_TowerYellow" BufferOffset="56" Addr="56" Description="" /> <DO_ITEM Index="56" Name="DO_TowerYellow" BufferOffset="56" Addr="56" Description="" />