From 2c1d063db30ea859d1dfa8c7ca5962c42c21629d Mon Sep 17 00:00:00 2001
From: hanqiangqiang <1364346467@qq.com>
Date: Wed, 8 Apr 2026 16:19:45 +0800
Subject: [PATCH] =?UTF-8?q?=E4=BF=AE=E6=94=B9Recipe=E6=A8=A1=E6=9D=BF?=
 =?UTF-8?q?=E9=85=8D=E7=BD=AE?=
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---
 .../Config/Recipe/Sic/Process/PN2.xml         | 503 +++++++++---------
 SicUI/Bootstrapper.cs                         |  17 +-
 SicUI/Controls/Mainframe/M2C4EFEMView3.xaml   |   9 +-
 SicUI/Models/PMs/PMOperationView.xaml         |  22 +-
 4 files changed, 277 insertions(+), 274 deletions(-)

diff --git a/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml b/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml
index feeacb5..abd3756 100644
--- a/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml
+++ b/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml
@@ -1,281 +1,288 @@
 <?xml version="1.0" encoding="utf-8"?>
 <Aitex>
-	<TableRecipeFormat RecipeChamberType="Sic" RecipeVersion="1.0">
+  <TableRecipeFormat RecipeChamberType="Sic" RecipeVersion="1.0">
 
-		<!--###########################################-->
-		<Catalog DisplayName="StepInfo">
-			<Group DisplayName="Step Information">
-				<Step ModuleName="" DeviceType=""  InputType="ReadOnly"   DisplayName="Uid" UnitName="" ControlName="StepUid" />
-				<Step ModuleName="" DeviceType=""  InputType="ReadOnly"   DisplayName="Step" UnitName="" ControlName="StepNo" />
-				<Step ModuleName="" DeviceType=""  InputType="TextInput"  DisplayName="Name" UnitName="" ControlName="Name" />
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="Time" UnitName="s" ControlName="Time" InputMode="" Min="0" Max="10000" Description="" />
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="Growth Rate" UnitName="μm/h" ControlName="GrowthRate" InputMode="" Min="0" Max="10000" Description="" />
-			</Group>
-		</Catalog>
+    <!--###########################################-->
+    <Catalog DisplayName="StepInfo">
+      <Group DisplayName="Step Information">
+        <Step ModuleName="" DeviceType=""  InputType="ReadOnly"   DisplayName="Uid" UnitName="" ControlName="StepUid" />
+        <Step ModuleName="" DeviceType=""  InputType="ReadOnly"   DisplayName="Step" UnitName="" ControlName="StepNo" />
+        <Step ModuleName="" DeviceType=""  InputType="TextInput"  DisplayName="Name" UnitName="" ControlName="Name" />
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="Time" UnitName="s" ControlName="Time" InputMode="" Min="0" Max="10000" Description="" />
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="Growth Rate" UnitName="μm/h" ControlName="GrowthRate" InputMode="" Min="0" Max="10000" Description="" />
+      </Group>
+    </Catalog>
 
-		<Catalog DisplayName="StepInfo">
-			<Group DisplayName="SH Flow->SH Total Flow">
-				<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="1. Ar/H2 Switch" UnitName="" ControlName="SHArH2Switch.SetValve"  Description="">
-					<Item DisplayName="Ar" ControlName="Ar" />
-					<Item DisplayName="H2"  ControlName="H2" />
-				</Step>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="2. SH Total Flow" UnitName="sccm" ControlName="SHTotalFlow" InputMode="" Min="0" Max="1000000" Description=""/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="3. Carry Gas Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
-				<Step ModuleName="" DeviceType=""  InputType="Set3RatioInput"    DisplayName="4. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/>
-				<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="5. Flow Set Mode" UnitName="" ControlName="FlowSetMode"  Description="">
-					<Item DisplayName="Ramp" ControlName="Ramp" />
-					<Item DisplayName="Jump"  ControlName="Jump" />
-				</Step>
-			</Group>
+    <Catalog DisplayName="StepInfo">
+      <Group DisplayName="SH Flow->SH Total Flow">
+        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="1. Ar/H2 Switch" UnitName="" ControlName="SHArH2Switch.SetValve"  Description="">
+          <Item DisplayName="Ar" ControlName="Ar" />
+          <Item DisplayName="H2"  ControlName="H2" />
+        </Step>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="2. SH Total Flow" UnitName="sccm" ControlName="SHTotalFlow" InputMode="" Min="0" Max="1000000" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="3. Carry Gas Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="4. Carry Gas Flow (M41)" UnitName="sccm" ControlName="Mfc41.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="5. Carry Gas Flow (M42)" UnitName="sccm" ControlName="Mfc42.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="Set3RatioInput"    DisplayName="6. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/>
+        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="7. Flow Set Mode" UnitName="" ControlName="FlowSetMode"  Description="">
+          <Item DisplayName="Ramp" ControlName="Ramp" />
+          <Item DisplayName="Jump"  ControlName="Jump" />
+        </Step>
+      </Group>
 
-			<Group DisplayName="Pressure -> Rotation">
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="6. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="10000" Description=""/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="7. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed"  InputMode="" Min="0" Max="10000" Description=""/>
-			</Group>
-		</Catalog>
+      <Group DisplayName="Pressure -> Rotation">
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="8. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="10000" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="9. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed"  InputMode="" Min="0" Max="10000" Description=""/>
+      </Group>
+    </Catalog>
 
-		<Catalog DisplayName="StepInfo">
-			<Group DisplayName="Temperature -> Control Mode">
-				<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="8. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode"  Description="">
-					<Item DisplayName="Power"  ControlName="Power" />
-					<Item DisplayName="Follow" ControlName="PyroFollow" />
-					<Item DisplayName="Auto" ControlName="PyroAuto" />
-				</Step>
-				<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="9. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode"  Description="">
-					<Item DisplayName="Ramp" ControlName="Ramp" />
-					<Item DisplayName="Jump"  ControlName="Jump" />
-				</Step>
-				<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="10. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2"  Description="">
-					<Item DisplayName="Power"  ControlName="Power" />
-					<Item DisplayName="Follow" ControlName="PyroFollow" />
-					<Item DisplayName="Auto" ControlName="PyroAuto" />
-				</Step>
-				<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="11. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode"  Description="">
-					<Item DisplayName="Ramp" ControlName="Ramp" />
-					<Item DisplayName="Jump"  ControlName="Jump" />
-				</Step>
-			</Group>
+    <Catalog DisplayName="StepInfo">
+      <Group DisplayName="Temperature -> Control Mode">
+        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="10. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode"  Description="">
+          <Item DisplayName="Power"  ControlName="Power" />
+          <Item DisplayName="Follow" ControlName="PyroFollow" />
+          <Item DisplayName="Auto" ControlName="PyroAuto" />
+        </Step>
+        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="11. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode"  Description="">
+          <Item DisplayName="Ramp" ControlName="Ramp" />
+          <Item DisplayName="Jump"  ControlName="Jump" />
+        </Step>
+        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="12. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2"  Description="">
+          <Item DisplayName="Power"  ControlName="Power" />
+          <Item DisplayName="Follow" ControlName="PyroFollow" />
+          <Item DisplayName="Auto" ControlName="PyroAuto" />
+        </Step>
+        <Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="13. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode"  Description="">
+          <Item DisplayName="Ramp" ControlName="Ramp" />
+          <Item DisplayName="Jump"  ControlName="Jump" />
+        </Step>
+      </Group>
 
-			<Group DisplayName="Temperature -> Temp Setting">
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="12. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="13. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="14. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="15. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="16. Middle Temp Ratio" UnitName="%" ControlName="TC1.MiddleTempRatio" InputMode="" Min="0" Max="100" Description="" />
-			</Group>
+      <Group DisplayName="Temperature -> Temp Setting">
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="14. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="15. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="16. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="17. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
+      </Group>
 
-			<Group DisplayName="Temperature -> Heater Output">
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="17. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="18. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="19. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="20. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="21. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="22. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
-			</Group>
+      <Group DisplayName="Temperature -> Heater Output">
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="18. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="19. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="20. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
+        <!--<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="18. PSU2 Output Limit High" UnitName="%" ControlName="PSU2.SetOutputLimitHighByRecipe" InputMode="" Min="0" Max="100" Description="" />-->
 
-		</Catalog>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="21. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="22. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="23. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
+      </Group>
 
-		<Catalog DisplayName="StepInfo">
+    </Catalog>
 
-			<Group DisplayName="SH Flow->Si Source->Si Source Total Flow">
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="23. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
-			</Group>
+    <Catalog DisplayName="StepInfo">
 
-			<Group DisplayName="SH Flow->Si Source->SiH4 Flow">
-				<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="24. SiH4 Flow Mode" UnitName="" ControlName="SiH4.SetValve"  Description="">
-					<Item DisplayName="Purge" ControlName="Purge" />
-					<Item DisplayName="Vent"  ControlName="Vent" />
-					<Item DisplayName="Run"  ControlName="Run" />
-				</Step>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="25. SiH4 Flow (M14)" UnitName="sccm" ControlName="Mfc14.Ramp" InputMode="" Min="0" Max="10000" Description="M14.SiH4Flow"/>
-			</Group>
+      <Group DisplayName="SH Flow->Si Source->Si Source Total Flow">
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="24. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
+      </Group>
 
-			<Group DisplayName="SH Flow->Si Source->TCS Flow">
-				<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="26. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve"  Description="">
-					<Item DisplayName="Purge" ControlName="Purge" />
-					<Item DisplayName="Vent"  ControlName="Vent" />
-					<Item DisplayName="Run"  ControlName="Run" />
-				</Step>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="27. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="28. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="29. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="30. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
-			</Group>
+      <Group DisplayName="SH Flow->Si Source->SiH4 Flow">
+        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="25. SiH4 Flow Mode" UnitName="" ControlName="SiH4.SetValve"  Description="">
+          <Item DisplayName="Purge" ControlName="Purge" />
+          <Item DisplayName="Vent"  ControlName="Vent" />
+          <Item DisplayName="Run"  ControlName="Run" />
+        </Step>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="26. SiH4 Flow (M14)" UnitName="sccm" ControlName="Mfc14.Ramp" InputMode="" Min="0" Max="10000" Description="M14.SiH4Flow"/>
+      </Group>
 
-			<Group DisplayName="SH Flow->Si Source->HCl Flow">
-				<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="31. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve"  Description="">
-					<Item DisplayName="Purge" ControlName="Purge" />
-					<Item DisplayName="Vent"  ControlName="Vent" />
-					<Item DisplayName="Run"  ControlName="Run" />
-				</Step>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="32. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
-			</Group>
+      <Group DisplayName="SH Flow->Si Source->TCS Flow">
+        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="27. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve"  Description="">
+          <Item DisplayName="Purge" ControlName="Purge" />
+          <Item DisplayName="Vent"  ControlName="Vent" />
+          <Item DisplayName="Run"  ControlName="Run" />
+        </Step>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="28. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="29. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="30. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="31. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
+      </Group>
 
-			<Group DisplayName="SH Flow->Si Source->Si Source Split">
-				<Step ModuleName="" DeviceType=""  InputType="Set3RatioInput"    DisplayName="33. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="34. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="35. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="36. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="37. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
-			</Group>
+      <Group DisplayName="SH Flow->Si Source->HCl Flow">
+        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="32. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve"  Description="">
+          <Item DisplayName="Purge" ControlName="Purge" />
+          <Item DisplayName="Vent"  ControlName="Vent" />
+          <Item DisplayName="Run"  ControlName="Run" />
+        </Step>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="33. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
+        <Step ModuleName="" DeviceType=""  InputType="Set3RatioInput"    DisplayName="34. HCL Source Split Ratio" UnitName="" ControlName="HCLSourSplitRatio"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="35. HCl Pre Split Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.HClFlowsccm"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="36. HCl Inner Flow (M45)" UnitName="sccm" ControlName="Mfc45.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M45.HClFlowsccm"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="37. HCl Middle Flow (M44)" UnitName="sccm" ControlName="Mfc44.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M44.HClFlowsccm"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="38. HCl Outer Flow (M43)" UnitName="sccm" ControlName="Mfc43.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M43.HClFlowsccm"/>
+      </Group>
 
-			<Group DisplayName="SH Flow->C Source->C Source Total Flow">
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="38. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
-			</Group>
+      <Group DisplayName="SH Flow->Si Source->Si Source Split">
+        <Step ModuleName="" DeviceType=""  InputType="Set3RatioInput"    DisplayName="39. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="40. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="41. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="42. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="43. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
+      </Group>
 
-      <Group DisplayName="SH Flow->C Source->C3H8_C2H4 Flow">
-        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="39. C3H8_C2H4 Flow Mode" UnitName="" ControlName="C2H4.SetValve"  Description="">
-					<Item DisplayName="Purge" ControlName="Purge" />
-					<Item DisplayName="Vent"  ControlName="Vent" />
-					<Item DisplayName="Run"  ControlName="Run" />
-				</Step>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="40. C3H8_C2H4 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
+      <Group DisplayName="SH Flow->C Source->C Source Total Flow">
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="44. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
+      </Group>
+
+      <Group DisplayName="SH Flow->C Source->C3H8 Flow">
+        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="45. C3H8 Flow Mode" UnitName="" ControlName="C2H4.SetValve"  Description="">
+          <Item DisplayName="Purge" ControlName="Purge" />
+          <Item DisplayName="Vent"  ControlName="Vent" />
+          <Item DisplayName="Run"  ControlName="Run" />
+        </Step>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="46. C3H8 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
 
 
-			</Group>
+      </Group>
 
-			<Group DisplayName="SH Flow->C Source->C Source Split">
-				<Step ModuleName="" DeviceType=""  InputType="Set3RatioInput"    DisplayName="41. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="42. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="43. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="44. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="45. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
-			</Group>
+      <Group DisplayName="SH Flow->C Source->C Source Split">
+        <Step ModuleName="" DeviceType=""  InputType="Set3RatioInput"    DisplayName="47. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="48. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="49. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="50. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="51. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
+      </Group>
 
-			<Group DisplayName="SH Flow->Dope->Dope Total Flow">
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="46. Dope Total Flow" UnitName="sccm" ControlName="DopeTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
-			</Group>
-			<Group DisplayName="SH Flow->Dope->N2 Flow">
-				<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="47. N2 Flow Mode" UnitName="" ControlName="N2Dilution.SetValve"  Description="">
-					<Item DisplayName="Purge" ControlName="Purge" />
-					<Item DisplayName="Vent"  ControlName="Vent" />
-					<Item DisplayName="Run"  ControlName="Run" />
-				</Step>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="48. N2 Actual Flow" UnitName="sccm" ControlName="N2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="49. N2 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="50. Dilut Flow For N2 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="51. Diluted N2 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="52. N2 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
-				<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="53. N2 High Flow Mode" UnitName="" ControlName="N2HighDoping.SetValve"  Description="N2 HIGH FLOW MODE">
-					<Item DisplayName="Purge" ControlName="Purge" />
-					<Item DisplayName="Vent"  ControlName="Vent" />
-					<Item DisplayName="Run"  ControlName="Run" />
-				</Step>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="54. N2 High Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
-			</Group>
+      <Group DisplayName="SH Flow->Dope->Dope Total Flow">
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="52. Dope Total Flow" UnitName="sccm" ControlName="DopeTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
+      </Group>
+      <Group DisplayName="SH Flow->Dope->N2 Flow">
+        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="53. N2 Flow Mode" UnitName="" ControlName="N2Dilution.SetValve"  Description="">
+          <Item DisplayName="Purge" ControlName="Purge" />
+          <Item DisplayName="Vent"  ControlName="Vent" />
+          <Item DisplayName="Run"  ControlName="Run" />
+        </Step>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="54. N2 Actual Flow" UnitName="sccm" ControlName="N2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="55. N2 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="56. Dilut Flow For N2 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="57. Diluted N2 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="58. N2 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
+        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="59. N2 High Flow Mode" UnitName="" ControlName="N2HighDoping.SetValve"  Description="N2 HIGH FLOW MODE">
+          <Item DisplayName="Purge" ControlName="Purge" />
+          <Item DisplayName="Vent"  ControlName="Vent" />
+          <Item DisplayName="Run"  ControlName="Run" />
+        </Step>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="60. N2 High Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
+      </Group>
 
-			<Group DisplayName="SH Flow->Dope->TMA Flow">
-				<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="55. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve"  Description="TMA FLOW MODE">
-					<Item DisplayName="Purge" ControlName="Purge" />
-					<Item DisplayName="Vent"  ControlName="Vent" />
-					<Item DisplayName="Run"  ControlName="Run" />
-				</Step>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="56. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="57. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="58. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
-			</Group>
+      <Group DisplayName="SH Flow->Dope->TMA Flow">
+        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="61. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve"  Description="TMA FLOW MODE">
+          <Item DisplayName="Purge" ControlName="Purge" />
+          <Item DisplayName="Vent"  ControlName="Vent" />
+          <Item DisplayName="Run"  ControlName="Run" />
+        </Step>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="62. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="63. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="64. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
+      </Group>
 
-			<Group DisplayName="SH Flow->Dope->Dope Split">
-				<Step ModuleName="" DeviceType=""  InputType="Set3RatioInput"    DisplayName="59. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="60. Dope Push Pressure (PC5)" UnitName="mbar" ControlName="Pressure5.Ramp" InputMode="" Min="0" Max="10000" Description="PC5.DopePushPressure"/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="61. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M20.DopeInnerFlow"/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="62. Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19.DopeMidFlow"/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="63. Dope Outer Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M2.DopeOuterFlow"/>
-			</Group>
+      <Group DisplayName="SH Flow->Dope->Dope Split">
+        <Step ModuleName="" DeviceType=""  InputType="Set3RatioInput"    DisplayName="65. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="66. Dope Push Pressure (PC5)" UnitName="mbar" ControlName="Pressure5.Ramp" InputMode="" Min="0" Max="10000" Description="PC5.DopePushPressure"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="67. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M20.DopeInnerFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="68. Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19.DopeMidFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="69. Dope Outer Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M2.DopeOuterFlow"/>
+      </Group>
 
-			<Group DisplayName="SH Flow->SH Push Flow">
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="64. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="65. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="66. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="67. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="68. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="69. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="70. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
-			</Group>
-		</Catalog>
+      <Group DisplayName="SH Flow->SH Push Flow">
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="70. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="71. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="72. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="73. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="74. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="75. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="76. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
+      </Group>
+    </Catalog>
 
-		<Catalog DisplayName="StepInfo">
-			<Group DisplayName="Purge->SH Periphery Purge">
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="71. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="72. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
-			</Group>
+    <Catalog DisplayName="StepInfo">
+      <Group DisplayName="Purge->SH Periphery Purge">
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="77. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="78. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
+      </Group>
 
-			<Group DisplayName="Purge->Chamber Periphery Purge">
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="73. GasRing Purge Flow (M32)" UnitName="sccm"  ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="1000000" Description="M32.GasRingPurgeFlow"/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="74. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="75. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="76. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="77. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
-			</Group>
+      <Group DisplayName="Purge->Chamber Periphery Purge">
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="79. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="80. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="81. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="82. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
+      </Group>
 
-			<Group DisplayName="Purge->Vent Flow">
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="78. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="79. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
-				<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="80. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
-        </Group>
-		</Catalog>
+      <Group DisplayName="Purge->Vent Flow">
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="83. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="84. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="85. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
+      </Group>
+    </Catalog>
 
-		<!--*************************************************************-->
-		<ProcessConfig DisplayName="ProcessConfig">
-			<Configs DisplayName="Process Config">
-			</Configs>
-		</ProcessConfig>
+    <!--*************************************************************-->
+    <ProcessConfig DisplayName="ProcessConfig">
+      <Configs DisplayName="Process Config">
+      </Configs>
+    </ProcessConfig>
 
-	</TableRecipeFormat>
+  </TableRecipeFormat>
 
-	<TableRecipeSchema>
-		<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
-			<xs:simpleType name="processType">
-				<xs:restriction base="xs:string">
-					<xs:enumeration value="Process" />
-					<xs:enumeration value="Clean" />
-				</xs:restriction>
-			</xs:simpleType>
-			<xs:simpleType name="booleanType">
-				<xs:restriction base="xs:string">
-					<xs:enumeration value="0" />
-					<xs:enumeration value="1" />
-					<xs:enumeration value="False" />
-					<xs:enumeration value="True" />
-					<xs:enumeration value="false" />
-					<xs:enumeration value="true" />
-				</xs:restriction>
-			</xs:simpleType>
-			<xs:element name="TableRecipeData">
-				<xs:complexType>
-					<xs:sequence>
-						<xs:element maxOccurs="unbounded" name="Step">
-							<xs:complexType>
-								<xs:sequence>
+  <TableRecipeSchema>
+    <xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
+      <xs:simpleType name="processType">
+        <xs:restriction base="xs:string">
+          <xs:enumeration value="Process" />
+          <xs:enumeration value="Clean" />
+        </xs:restriction>
+      </xs:simpleType>
+      <xs:simpleType name="booleanType">
+        <xs:restriction base="xs:string">
+          <xs:enumeration value="0" />
+          <xs:enumeration value="1" />
+          <xs:enumeration value="False" />
+          <xs:enumeration value="True" />
+          <xs:enumeration value="false" />
+          <xs:enumeration value="true" />
+        </xs:restriction>
+      </xs:simpleType>
+      <xs:element name="TableRecipeData">
+        <xs:complexType>
+          <xs:sequence>
+            <xs:element maxOccurs="unbounded" name="Step">
+              <xs:complexType>
+                <xs:sequence>
 
-									<xs:element name="Mfc">
-										<xs:complexType>
-											<xs:attribute name="Flow.Gas1" type="xs:double" use="optional" />
-											<xs:attribute name="Flow.Gas2" type="xs:double" use="optional" />
-											<xs:attribute name="Flow.Gas3" type="xs:double" use="optional" />
-											<xs:attribute name="Flow.Gas4" type="xs:double" use="optional" />
-										</xs:complexType>
-									</xs:element>
+                  <xs:element name="Mfc">
+                    <xs:complexType>
+                      <xs:attribute name="Flow.Gas1" type="xs:double" use="optional" />
+                      <xs:attribute name="Flow.Gas2" type="xs:double" use="optional" />
+                      <xs:attribute name="Flow.Gas3" type="xs:double" use="optional" />
+                      <xs:attribute name="Flow.Gas4" type="xs:double" use="optional" />
+                    </xs:complexType>
+                  </xs:element>
 
-								</xs:sequence>
-								<xs:attribute name="StepNo" type="xs:string" use="required" />
-								<xs:attribute name="Name" type="xs:string" use="required" />
-								<xs:attribute name="Loop" type="xs:string" use="required" />
-								<xs:attribute name="Type" type="xs:string" use="required" />
-								<xs:attribute name="StepTime" type="xs:time" use="optional" />
-							</xs:complexType>
-						</xs:element>
-					</xs:sequence>
-					<xs:attribute name="RecipeChamberType" type="xs:string" fixed="Strip" use="required" />
-					<xs:attribute name="RecipeProcessType" type="xs:string" use="required" />
-					<xs:attribute name="RecipeVersion" type="xs:string" fixed="1.0" use="required" />
-					<xs:attribute name="CreatedBy" type="xs:string" use="required" />
-					<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
-					<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
-					<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
-					<xs:attribute name="Description" type="xs:string" use="required" />
-				</xs:complexType>
-			</xs:element>
-		</xs:schema>
-	</TableRecipeSchema>
+                </xs:sequence>
+                <xs:attribute name="StepNo" type="xs:string" use="required" />
+                <xs:attribute name="Name" type="xs:string" use="required" />
+                <xs:attribute name="Loop" type="xs:string" use="required" />
+                <xs:attribute name="Type" type="xs:string" use="required" />
+                <xs:attribute name="StepTime" type="xs:time" use="optional" />
+              </xs:complexType>
+            </xs:element>
+          </xs:sequence>
+          <xs:attribute name="RecipeChamberType" type="xs:string" fixed="Strip" use="required" />
+          <xs:attribute name="RecipeProcessType" type="xs:string" use="required" />
+          <xs:attribute name="RecipeVersion" type="xs:string" fixed="1.0" use="required" />
+          <xs:attribute name="CreatedBy" type="xs:string" use="required" />
+          <xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
+          <xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
+          <xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
+          <xs:attribute name="Description" type="xs:string" use="required" />
+        </xs:complexType>
+      </xs:element>
+    </xs:schema>
+  </TableRecipeSchema>
 </Aitex>
\ No newline at end of file
diff --git a/SicUI/Bootstrapper.cs b/SicUI/Bootstrapper.cs
index 6c99344..9f41529 100644
--- a/SicUI/Bootstrapper.cs
+++ b/SicUI/Bootstrapper.cs
@@ -315,22 +315,7 @@ namespace SicUI.Client
             container.Singleton<IRecipeGasFlowCalculator, RecipeGasFlowCalculatorBase>("PN2");
             container.Singleton<IRecipeGasFlowCalculator, NH3_1GasFlow>("NH3_1");
             container.Singleton<IRecipeGasFlowCalculator, NH3_2GasFlow>("NH3_2");
-            container.Singleton<IRecipeGasFlowCalculator, NH3_3GasFlow>("NH3_3");
-            container.Singleton<IRecipeGasFlowCalculator, NH3_4GasFlow>("NH3_4");
-            container.Singleton<IRecipeGasFlowCalculator, NH3_5GasFlow>("NH3_5");
-            container.Singleton<IRecipeGasFlowCalculator, NH3_6GasFlow>("NH3_6");
-            container.Singleton<IRecipeGasFlowCalculator, NH3_7GasFlow>("NH3_7");
-            container.Singleton<IRecipeGasFlowCalculator, NH3_8GasFlow>("NH3_8");
-            container.Singleton<IRecipeGasFlowCalculator, NH3_9GasFlow>("NH3_9");
-            container.Singleton<IRecipeGasFlowCalculator, NH3_10GasFlow>("NH3_10");
-            container.Singleton<IRecipeGasFlowCalculator, NH3_11GasFlow>("NH3_11");
-            container.Singleton<IRecipeGasFlowCalculator, NH3_12GasFlow>("NH3_12");
-            container.Singleton<IRecipeGasFlowCalculator, NH3_13GasFlow>("NH3_13");
-            container.Singleton<IRecipeGasFlowCalculator, NH3_14GasFlow>("NH3_14");
-            container.Singleton<IRecipeGasFlowCalculator, NH3_16GasFlow>("NH3_16");
-            container.Singleton<IRecipeGasFlowCalculator, NH3_17GasFlow>("NH3_17");
-            container.Singleton<IRecipeGasFlowCalculator, NH3_18GasFlow>("NH3_18");
-            container.Singleton<IRecipeGasFlowCalculator, NH3_13GasFlow>("NH3_19");
+
 
             container.PerRequest<MainViewModel>();
         }
diff --git a/SicUI/Controls/Mainframe/M2C4EFEMView3.xaml b/SicUI/Controls/Mainframe/M2C4EFEMView3.xaml
index 5c88456..cd2a115 100644
--- a/SicUI/Controls/Mainframe/M2C4EFEMView3.xaml
+++ b/SicUI/Controls/Mainframe/M2C4EFEMView3.xaml
@@ -1,4 +1,5 @@
-<UserControl x:Class="SicUI.Controls.M2C4Parts.M2C4EFEMView3"
+<UserControl
+    x:Class="SicUI.Controls.M2C4Parts.M2C4EFEMView3"
     xmlns="http://schemas.microsoft.com/winfx/2006/xaml/presentation"
     xmlns:x="http://schemas.microsoft.com/winfx/2006/xaml"
     xmlns:controls="clr-namespace:SicUI.Controls"
@@ -76,7 +77,7 @@
                         </TransformGroup>
                     </unitControls:Door.RenderTransform>
                 </unitControls:Door>
-              
+
             </Canvas>
             <Canvas Visibility="{Binding IsPM2Installed, Converter={StaticResource BoolVisibilityConverter}}">
                 <TextBlock
@@ -123,7 +124,7 @@
                     </unitControls:Door.RenderTransform>
                 </unitControls:Door>
                 <!--  Tray和晶圆  -->
-              
+
             </Canvas>
 
             <Canvas Visibility="{Binding IsLoadLockInstalled, Converter={StaticResource BoolVisibilityConverter}}">
@@ -177,7 +178,7 @@
                 RobotMoveInfo="{Binding TmRobotMoveInfo}"
                 RotateAngle="123"
                 ShowDock="False"
-                TranslateX="120"/>
+                TranslateX="120" />
 
             <Canvas Visibility="{Binding IsBufferInstalled, Converter={StaticResource BoolVisibilityConverter}}">
                 <TextBlock
diff --git a/SicUI/Models/PMs/PMOperationView.xaml b/SicUI/Models/PMs/PMOperationView.xaml
index d88409e..c100d69 100644
--- a/SicUI/Models/PMs/PMOperationView.xaml
+++ b/SicUI/Models/PMs/PMOperationView.xaml
@@ -1480,9 +1480,19 @@
                         IsVisy="{Binding SHLidIsOpen}"
                         RenderTransformOrigin="0.538,0.304"
                         UpStatus="{Binding BottomSectionStatus}" />
-                    <TextBlock Text="{Binding DisplayName}" Canvas.Top="5" Canvas.Left="140" FontSize="18" FontWeight="Bold" d:Text="PM1">
+                    <TextBlock
+                        Canvas.Left="140"
+                        Canvas.Top="5"
+                        d:Text="PM1"
+                        FontSize="18"
+                        FontWeight="Bold"
+                        Text="{Binding DisplayName}">
                         <TextBlock.Effect>
-                            <DropShadowEffect BlurRadius="5" Direction="290" ShadowDepth="1" Color="White"/>
+                            <DropShadowEffect
+                                BlurRadius="5"
+                                Direction="290"
+                                ShadowDepth="1"
+                                Color="White" />
                         </TextBlock.Effect>
                     </TextBlock>
 
@@ -7563,16 +7573,16 @@
                     <controlRT:AITPumpSIC
                         Canvas.Left="783"
                         Canvas.Top="341"
-                        IsShowSensor="False"
                         DeviceData="{Binding PumpData1}"
-                        EnableControl="True" />
+                        EnableControl="True"
+                        IsShowSensor="False" />
 
                     <controlRT:AITPumpSIC
                         Canvas.Left="895"
                         Canvas.Top="341"
-                        IsShowSensor="False"
                         DeviceData="{Binding PumpData2}"
-                        EnableControl="True" />
+                        EnableControl="True"
+                        IsShowSensor="False" />
                 </Canvas>
 
                 <!--  TV阀  -->