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修改Recipe模板配置

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This commit is contained in:
hanqiangqiang 2026-04-08 16:19:45 +08:00
parent be420ec451
commit 2c1d063db3
4 changed files with 277 additions and 274 deletions
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163
Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml
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@ -21,56 +21,59 @@
</Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="2. SH Total Flow" UnitName="sccm" ControlName="SHTotalFlow" InputMode="" Min="0" Max="1000000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="3. Carry Gas Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="4. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/>
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="5. Flow Set Mode" UnitName="" ControlName="FlowSetMode" Description="">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="4. Carry Gas Flow (M41)" UnitName="sccm" ControlName="Mfc41.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="5. Carry Gas Flow (M42)" UnitName="sccm" ControlName="Mfc42.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="6. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/>
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="7. Flow Set Mode" UnitName="" ControlName="FlowSetMode" Description="">
<Item DisplayName="Ramp" ControlName="Ramp" />
<Item DisplayName="Jump" ControlName="Jump" />
</Step>
</Group>
<Group DisplayName="Pressure -> Rotation">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="6. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="7. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="8. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="9. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed" InputMode="" Min="0" Max="10000" Description=""/>
</Group>
</Catalog>
<Catalog DisplayName="StepInfo">
<Group DisplayName="Temperature -> Control Mode">
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="8. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode" Description="">
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="10. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode" Description="">
<Item DisplayName="Power" ControlName="Power" />
<Item DisplayName="Follow" ControlName="PyroFollow" />
<Item DisplayName="Auto" ControlName="PyroAuto" />
</Step>
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="9. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode" Description="">
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="11. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode" Description="">
<Item DisplayName="Ramp" ControlName="Ramp" />
<Item DisplayName="Jump" ControlName="Jump" />
</Step>
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="10. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2" Description="">
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="12. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2" Description="">
<Item DisplayName="Power" ControlName="Power" />
<Item DisplayName="Follow" ControlName="PyroFollow" />
<Item DisplayName="Auto" ControlName="PyroAuto" />
</Step>
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="11. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode" Description="">
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="13. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode" Description="">
<Item DisplayName="Ramp" ControlName="Ramp" />
<Item DisplayName="Jump" ControlName="Jump" />
</Step>
</Group>
<Group DisplayName="Temperature -> Temp Setting">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="12. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="13. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="14. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="15. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="16. Middle Temp Ratio" UnitName="%" ControlName="TC1.MiddleTempRatio" InputMode="" Min="0" Max="100" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="14. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="15. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="16. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="17. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
</Group>
<Group DisplayName="Temperature -> Heater Output">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="17. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="19. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="20. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="21. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="22. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="19. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="20. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
<!--<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU2 Output Limit High" UnitName="%" ControlName="PSU2.SetOutputLimitHighByRecipe" InputMode="" Min="0" Max="100" Description="" />-->
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="21. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="22. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="23. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
</Group>
</Catalog>
@ -78,140 +81,144 @@
<Catalog DisplayName="StepInfo">
<Group DisplayName="SH Flow->Si Source->Si Source Total Flow">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="23. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="24. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
</Group>
<Group DisplayName="SH Flow->Si Source->SiH4 Flow">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="24. SiH4 Flow Mode" UnitName="" ControlName="SiH4.SetValve" Description="">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="25. SiH4 Flow Mode" UnitName="" ControlName="SiH4.SetValve" Description="">
<Item DisplayName="Purge" ControlName="Purge" />
<Item DisplayName="Vent" ControlName="Vent" />
<Item DisplayName="Run" ControlName="Run" />
</Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="25. SiH4 Flow (M14)" UnitName="sccm" ControlName="Mfc14.Ramp" InputMode="" Min="0" Max="10000" Description="M14.SiH4Flow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="26. SiH4 Flow (M14)" UnitName="sccm" ControlName="Mfc14.Ramp" InputMode="" Min="0" Max="10000" Description="M14.SiH4Flow"/>
</Group>
<Group DisplayName="SH Flow->Si Source->TCS Flow">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="26. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve" Description="">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="27. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve" Description="">
<Item DisplayName="Purge" ControlName="Purge" />
<Item DisplayName="Vent" ControlName="Vent" />
<Item DisplayName="Run" ControlName="Run" />
</Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="27. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="28. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="29. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="30. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="28. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="29. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="30. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="31. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
</Group>
<Group DisplayName="SH Flow->Si Source->HCl Flow">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="31. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve" Description="">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="32. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve" Description="">
<Item DisplayName="Purge" ControlName="Purge" />
<Item DisplayName="Vent" ControlName="Vent" />
<Item DisplayName="Run" ControlName="Run" />
</Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="32. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="33. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="34. HCL Source Split Ratio" UnitName="" ControlName="HCLSourSplitRatio"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. HCl Pre Split Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.HClFlowsccm"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. HCl Inner Flow (M45)" UnitName="sccm" ControlName="Mfc45.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M45.HClFlowsccm"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="37. HCl Middle Flow (M44)" UnitName="sccm" ControlName="Mfc44.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M44.HClFlowsccm"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. HCl Outer Flow (M43)" UnitName="sccm" ControlName="Mfc43.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M43.HClFlowsccm"/>
</Group>
<Group DisplayName="SH Flow->Si Source->Si Source Split">
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="33. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="34. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="37. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="39. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="40. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="41. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="42. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="43. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
</Group>
<Group DisplayName="SH Flow->C Source->C Source Total Flow">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="44. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
</Group>
<Group DisplayName="SH Flow->C Source->C3H8_C2H4 Flow">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="39. C3H8_C2H4 Flow Mode" UnitName="" ControlName="C2H4.SetValve" Description="">
<Group DisplayName="SH Flow->C Source->C3H8 Flow">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="45. C3H8 Flow Mode" UnitName="" ControlName="C2H4.SetValve" Description="">
<Item DisplayName="Purge" ControlName="Purge" />
<Item DisplayName="Vent" ControlName="Vent" />
<Item DisplayName="Run" ControlName="Run" />
</Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="40. C3H8_C2H4 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="46. C3H8 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
</Group>
<Group DisplayName="SH Flow->C Source->C Source Split">
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="41. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="42. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="43. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="44. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="45. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="47. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="48. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="49. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="50. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="51. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
</Group>
<Group DisplayName="SH Flow->Dope->Dope Total Flow">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="46. Dope Total Flow" UnitName="sccm" ControlName="DopeTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="52. Dope Total Flow" UnitName="sccm" ControlName="DopeTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
</Group>
<Group DisplayName="SH Flow->Dope->N2 Flow">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="47. N2 Flow Mode" UnitName="" ControlName="N2Dilution.SetValve" Description="">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="53. N2 Flow Mode" UnitName="" ControlName="N2Dilution.SetValve" Description="">
<Item DisplayName="Purge" ControlName="Purge" />
<Item DisplayName="Vent" ControlName="Vent" />
<Item DisplayName="Run" ControlName="Run" />
</Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="48. N2 Actual Flow" UnitName="sccm" ControlName="N2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="49. N2 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="50. Dilut Flow For N2 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="51. Diluted N2 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="52. N2 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="53. N2 High Flow Mode" UnitName="" ControlName="N2HighDoping.SetValve" Description="N2 HIGH FLOW MODE">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="54. N2 Actual Flow" UnitName="sccm" ControlName="N2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="55. N2 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="56. Dilut Flow For N2 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="57. Diluted N2 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="58. N2 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="59. N2 High Flow Mode" UnitName="" ControlName="N2HighDoping.SetValve" Description="N2 HIGH FLOW MODE">
<Item DisplayName="Purge" ControlName="Purge" />
<Item DisplayName="Vent" ControlName="Vent" />
<Item DisplayName="Run" ControlName="Run" />
</Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="54. N2 High Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="60. N2 High Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
</Group>
<Group DisplayName="SH Flow->Dope->TMA Flow">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="55. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve" Description="TMA FLOW MODE">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="61. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve" Description="TMA FLOW MODE">
<Item DisplayName="Purge" ControlName="Purge" />
<Item DisplayName="Vent" ControlName="Vent" />
<Item DisplayName="Run" ControlName="Run" />
</Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="56. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="57. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="58. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="62. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="63. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
</Group>
<Group DisplayName="SH Flow->Dope->Dope Split">
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="59. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="60. Dope Push Pressure (PC5)" UnitName="mbar" ControlName="Pressure5.Ramp" InputMode="" Min="0" Max="10000" Description="PC5.DopePushPressure"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="61. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M20.DopeInnerFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="62. Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19.DopeMidFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="63. Dope Outer Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M2.DopeOuterFlow"/>
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="65. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. Dope Push Pressure (PC5)" UnitName="mbar" ControlName="Pressure5.Ramp" InputMode="" Min="0" Max="10000" Description="PC5.DopePushPressure"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="67. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M20.DopeInnerFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19.DopeMidFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. Dope Outer Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M2.DopeOuterFlow"/>
</Group>
<Group DisplayName="SH Flow->SH Push Flow">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="65. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="67. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="75. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="76. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
</Group>
</Catalog>
<Catalog DisplayName="StepInfo">
<Group DisplayName="Purge->SH Periphery Purge">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="77. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="78. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
</Group>
<Group DisplayName="Purge->Chamber Periphery Purge">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. GasRing Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="1000000" Description="M32.GasRingPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="75. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="76. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="77. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="79. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="80. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="81. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="82. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
</Group>
<Group DisplayName="Purge->Vent Flow">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="78. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="79. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="80. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="83. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="84. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="85. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
</Group>
</Catalog>

17
SicUI/Bootstrapper.cs
View File

@ -315,22 +315,7 @@ namespace SicUI.Client
container.Singleton<IRecipeGasFlowCalculator, RecipeGasFlowCalculatorBase>("PN2");
container.Singleton<IRecipeGasFlowCalculator, NH3_1GasFlow>("NH3_1");
container.Singleton<IRecipeGasFlowCalculator, NH3_2GasFlow>("NH3_2");
container.Singleton<IRecipeGasFlowCalculator, NH3_3GasFlow>("NH3_3");
container.Singleton<IRecipeGasFlowCalculator, NH3_4GasFlow>("NH3_4");
container.Singleton<IRecipeGasFlowCalculator, NH3_5GasFlow>("NH3_5");
container.Singleton<IRecipeGasFlowCalculator, NH3_6GasFlow>("NH3_6");
container.Singleton<IRecipeGasFlowCalculator, NH3_7GasFlow>("NH3_7");
container.Singleton<IRecipeGasFlowCalculator, NH3_8GasFlow>("NH3_8");
container.Singleton<IRecipeGasFlowCalculator, NH3_9GasFlow>("NH3_9");
container.Singleton<IRecipeGasFlowCalculator, NH3_10GasFlow>("NH3_10");
container.Singleton<IRecipeGasFlowCalculator, NH3_11GasFlow>("NH3_11");
container.Singleton<IRecipeGasFlowCalculator, NH3_12GasFlow>("NH3_12");
container.Singleton<IRecipeGasFlowCalculator, NH3_13GasFlow>("NH3_13");
container.Singleton<IRecipeGasFlowCalculator, NH3_14GasFlow>("NH3_14");
container.Singleton<IRecipeGasFlowCalculator, NH3_16GasFlow>("NH3_16");
container.Singleton<IRecipeGasFlowCalculator, NH3_17GasFlow>("NH3_17");
container.Singleton<IRecipeGasFlowCalculator, NH3_18GasFlow>("NH3_18");
container.Singleton<IRecipeGasFlowCalculator, NH3_13GasFlow>("NH3_19");
container.PerRequest<MainViewModel>();
}

3
SicUI/Controls/Mainframe/M2C4EFEMView3.xaml
View File

@ -1,4 +1,5 @@
<UserControl x:Class="SicUI.Controls.M2C4Parts.M2C4EFEMView3"
<UserControl
x:Class="SicUI.Controls.M2C4Parts.M2C4EFEMView3"
xmlns="http://schemas.microsoft.com/winfx/2006/xaml/presentation"
xmlns:x="http://schemas.microsoft.com/winfx/2006/xaml"
xmlns:controls="clr-namespace:SicUI.Controls"

22
SicUI/Models/PMs/PMOperationView.xaml
View File

@ -1480,9 +1480,19 @@
IsVisy="{Binding SHLidIsOpen}"
RenderTransformOrigin="0.538,0.304"
UpStatus="{Binding BottomSectionStatus}" />
<TextBlock Text="{Binding DisplayName}" Canvas.Top="5" Canvas.Left="140" FontSize="18" FontWeight="Bold" d:Text="PM1">
<TextBlock
Canvas.Left="140"
Canvas.Top="5"
d:Text="PM1"
FontSize="18"
FontWeight="Bold"
Text="{Binding DisplayName}">
<TextBlock.Effect>
<DropShadowEffect BlurRadius="5" Direction="290" ShadowDepth="1" Color="White"/>
<DropShadowEffect
BlurRadius="5"
Direction="290"
ShadowDepth="1"
Color="White" />
</TextBlock.Effect>
</TextBlock>
@ -7563,16 +7573,16 @@
<controlRT:AITPumpSIC
Canvas.Left="783"
Canvas.Top="341"
IsShowSensor="False"
DeviceData="{Binding PumpData1}"
EnableControl="True" />
EnableControl="True"
IsShowSensor="False" />
<controlRT:AITPumpSIC
Canvas.Left="895"
Canvas.Top="341"
IsShowSensor="False"
DeviceData="{Binding PumpData2}"
EnableControl="True" />
EnableControl="True"
IsShowSensor="False" />
</Canvas>
<!-- TV阀 -->