From 4177e5b14a5f3524a50e24d4af828db02a7fdd8f Mon Sep 17 00:00:00 2001
From: hanqiangqiang <1364346467@qq.com>
Date: Thu, 6 Aug 2026 11:16:31 +0800
Subject: [PATCH] =?UTF-8?q?=E4=BF=AE=E6=94=B9Recipe=E6=A8=A1=E6=9D=BF?=
 =?UTF-8?q?=E9=85=8D=E7=BD=AE?=
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---
 .../Config/PM/PM1/DeviceModelPM1.xml          |   4 +-
 .../Config/Recipe/Sic/Process/PN2.xml         | 146 ++++++++----------
 App/SicRT/Properties/AssemblyInfo.cs          |   2 +-
 App/SicUI/Properties/AssemblyInfo.cs          |   2 +-
 4 files changed, 69 insertions(+), 85 deletions(-)

diff --git a/App/Modules/SicModules/Config/PM/PM1/DeviceModelPM1.xml b/App/Modules/SicModules/Config/PM/PM1/DeviceModelPM1.xml
index cab79b2..984c3b3 100644
--- a/App/Modules/SicModules/Config/PM/PM1/DeviceModelPM1.xml
+++ b/App/Modules/SicModules/Config/PM/PM1/DeviceModelPM1.xml
@@ -647,9 +647,9 @@
   <!--<IoN2HighDopings classType="Aitex.Core.RT.Device.PmDevices.IoN2HighDoping" assembly="MECF.Framework.RT.EquipmentLibrary">
     <IoN2HighDoping id="N2HighDoping" display="" schematicId="" unit=""   valve1="" valve2="V40" valve3="V40s" scBasePath="PM.{module}.MFC.Mfc5.IsInstalled"/>
   </IoN2HighDopings>-->
-  <IoSiH4s classType="Aitex.Core.RT.Device.PmDevices.IoSiH4" assembly="MECF.Framework.RT.EquipmentLibrary">
+  <!--<IoSiH4s classType="Aitex.Core.RT.Device.PmDevices.IoSiH4" assembly="MECF.Framework.RT.EquipmentLibrary">
     <IoSiH4 id="SiH4" display="" schematicId="" unit="" valve1="V52" valve2="V52s" valve3="V55" valve4="V56" valve5="V62" />
-  </IoSiH4s>
+  </IoSiH4s>-->
   <IoTCSs classType="Aitex.Core.RT.Device.PmDevices.IoTCS" assembly="MECF.Framework.RT.EquipmentLibrary">
     <IoTCS id="TCS" display="" schematicId="" unit="" valve1="V48" valve2="V48s" valve3="V49" valve4="V53" valve5="V53s" />
   </IoTCSs>
diff --git a/App/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml b/App/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml
index 1ef5b09..97f2853 100644
--- a/App/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml
+++ b/App/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml
@@ -79,157 +79,141 @@
     </Catalog>
 
     <Catalog DisplayName="StepInfo">
-
-      <Group DisplayName="SH Flow->Si Source->Si Source Total Flow">
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="24. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
-      </Group>
-
-      <Group DisplayName="SH Flow->Si Source->SiH4 Flow">
-        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="25. SiH4 Flow Mode" UnitName="" ControlName="SiH4.SetValve"  Description="">
-          <Item DisplayName="Purge" ControlName="Purge" />
-          <Item DisplayName="Vent"  ControlName="Vent" />
-          <Item DisplayName="Run"  ControlName="Run" />
-        </Step>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="26. SiH4 Flow (M14)" UnitName="sccm" ControlName="Mfc14.Ramp" InputMode="" Min="0" Max="10000" Description="M14.SiH4Flow"/>
-      </Group>
-
       <Group DisplayName="SH Flow->Si Source->TCS Flow">
-        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="27. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve"  Description="">
+        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="24. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve"  Description="">
           <Item DisplayName="Purge" ControlName="Purge" />
           <Item DisplayName="Vent"  ControlName="Vent" />
           <Item DisplayName="Run"  ControlName="Run" />
         </Step>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="28. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="29. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="30. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="31. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="25. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="26. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="27. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="28. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
       </Group>
 
       <Group DisplayName="SH Flow->Si Source->HCl Flow">
-        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="32. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve"  Description="">
+        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="29. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve"  Description="">
           <Item DisplayName="Purge" ControlName="Purge" />
           <Item DisplayName="Vent"  ControlName="Vent" />
           <Item DisplayName="Run"  ControlName="Run" />
         </Step>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="33. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
-        <!--<Step ModuleName="" DeviceType=""  InputType="Set3RatioInput"    DisplayName="34. HCL Source Split Ratio" UnitName="" ControlName="HCLSourSplitRatio"/>-->
-        <!--<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="35. HCl Pre Split Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.HClFlowsccm"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="36. HCl Inner Flow (M45)" UnitName="sccm" ControlName="Mfc45.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M45.HClFlowsccm"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="37. HCl Middle Flow (M44)" UnitName="sccm" ControlName="Mfc44.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M44.HClFlowsccm"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="38. HCl Outer Flow (M43)" UnitName="sccm" ControlName="Mfc43.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M43.HClFlowsccm"/>-->
-      </Group>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="30. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
+       </Group>
 
+      <Group DisplayName="SH Flow->Si Source->Si Source Total Flow">
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="31. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
+      </Group>
       <Group DisplayName="SH Flow->Si Source->Si Source Split">
-        <Step ModuleName="" DeviceType=""  InputType="Set3RatioInput"    DisplayName="39. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="40. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="41. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="42. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="43. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="Set3RatioInput"    DisplayName="32. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="33. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="34. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="35. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="36. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
       </Group>
 
       <Group DisplayName="SH Flow->C Source->C Source Total Flow">
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="44. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="37. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
       </Group>
 
       <Group DisplayName="SH Flow->C Source->C3H8 Flow">
-        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="45. C2H2 Flow Mode" UnitName="" ControlName="C2H4.SetValve"  Description="">
+        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="38. C2H2 Flow Mode" UnitName="" ControlName="C2H4.SetValve"  Description="">
           <Item DisplayName="Purge" ControlName="Purge" />
           <Item DisplayName="Vent"  ControlName="Vent" />
           <Item DisplayName="Run"  ControlName="Run" />
         </Step>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="46. C2H2 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="39. C2H2 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
 
 
       </Group>
 
       <Group DisplayName="SH Flow->C Source->C Source Split">
-        <Step ModuleName="" DeviceType=""  InputType="Set3RatioInput"    DisplayName="47. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="48. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="49. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="50. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="51. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="Set3RatioInput"    DisplayName="40. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="41. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="42. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="43. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="44. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
       </Group>
 
       <Group DisplayName="SH Flow->Dope->Dope Total Flow">
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="52. Dope Total Flow" UnitName="sccm" ControlName="DopeTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="45. Dope Total Flow" UnitName="sccm" ControlName="DopeTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
       </Group>
       <Group DisplayName="SH Flow->Dope->N2 Flow">
-        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="53. N2 Flow Mode" UnitName="" ControlName="N2Dilution.SetValve"  Description="">
+        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="46. N2 Flow Mode" UnitName="" ControlName="N2Dilution.SetValve"  Description="">
           <Item DisplayName="Purge" ControlName="Purge" />
           <Item DisplayName="Vent"  ControlName="Vent" />
           <Item DisplayName="Run"  ControlName="Run" />
         </Step>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="54. N2 Actual Flow" UnitName="sccm" ControlName="N2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="55. N2 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="56. Dilut Flow For N2 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="57. Diluted N2 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="58. N2 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
-        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="59. N2 Low Flow Mode" UnitName="" ControlName="N2LowDoping.SetValve"  Description="N2 HIGH FLOW MODE">
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="47. N2 Actual Flow" UnitName="sccm" ControlName="N2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="48. N2 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="49. Dilut Flow For N2 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="50. Diluted N2 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="51. N2 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
+        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="52. N2 Low Flow Mode" UnitName="" ControlName="N2LowDoping.SetValve"  Description="N2 HIGH FLOW MODE">
           <Item DisplayName="Purge" ControlName="Purge" />
           <Item DisplayName="Vent"  ControlName="Vent" />
           <Item DisplayName="Run"  ControlName="Run" />
         </Step>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="60. N2 High Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
-        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="61. N2 High Flow Mode" UnitName="" ControlName="N2HighDoping.SetValve"  Description="N2 HIGH FLOW MODE">
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="53. N2 High Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
+        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="54. N2 High Flow Mode" UnitName="" ControlName="N2HighDoping.SetValve"  Description="N2 HIGH FLOW MODE">
           <Item DisplayName="Purge" ControlName="Purge" />
           <Item DisplayName="Vent"  ControlName="Vent" />
           <Item DisplayName="Run"  ControlName="Run" />
         </Step>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="62. N2 High Flow (M30)" UnitName="sccm" ControlName="Mfc30.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="55. N2 High Flow (M30)" UnitName="sccm" ControlName="Mfc30.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
       </Group>
 
       <Group DisplayName="SH Flow->Dope->TMA Flow">
-        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="63. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve"  Description="TMA FLOW MODE">
+        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="56. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve"  Description="TMA FLOW MODE">
           <Item DisplayName="Purge" ControlName="Purge" />
           <Item DisplayName="Vent"  ControlName="Vent" />
           <Item DisplayName="Run"  ControlName="Run" />
         </Step>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="64. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="65. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="66. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="57. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="58. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="59. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
       </Group>
 
       <Group DisplayName="SH Flow->Dope->Dope Split">
-        <Step ModuleName="" DeviceType=""  InputType="Set3RatioInput"    DisplayName="67. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="68. Dope Push Pressure (PC5)" UnitName="mbar" ControlName="Pressure5.Ramp" InputMode="" Min="0" Max="10000" Description="PC5.DopePushPressure"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="69. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M20.DopeInnerFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="70. Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19.DopeMidFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="71. Dope Outer Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M2.DopeOuterFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="Set3RatioInput"    DisplayName="60. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="61. Dope Push Pressure (PC5)" UnitName="mbar" ControlName="Pressure5.Ramp" InputMode="" Min="0" Max="10000" Description="PC5.DopePushPressure"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="62. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M20.DopeInnerFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="63. Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19.DopeMidFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="64. Dope Outer Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M2.DopeOuterFlow"/>
       </Group>
 
       <Group DisplayName="SH Flow->SH Push Flow">
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="72. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="73. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="74. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="75. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="76. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="77. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="78. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="65. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="66. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="67. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="68. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="69. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="70. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="71. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
       </Group>
     </Catalog>
 
     <Catalog DisplayName="StepInfo">
       <Group DisplayName="Purge->SH Periphery Purge">
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="79. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="80. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="72. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="73. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
       </Group>
 
       <Group DisplayName="Purge->Chamber Periphery Purge">
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="81. Gas Ring Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="10000" Description="M32.GasRingFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="82. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="83. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="84. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="85. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="74. Gas Ring Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="10000" Description="M32.GasRingFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="75. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="76. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="77. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="78. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
       </Group>
 
       <Group DisplayName="Purge->Vent Flow">
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="86. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="87. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="88. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="89. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="90. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="91. Pressure (PC8)" UnitName="mbar" ControlName="Pressure8.Ramp" InputMode="" Min="0" Max="10000" Description="PC8.DiluPres"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="92. Vent Pre-Exhaust Pressure (PC9)" UnitName="mbar" ControlName="Pressure9.Ramp" InputMode="" Min="0" Max="10000" Description="PC9.VentPre-ExhaustPres"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="79. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="80. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="81. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="82. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="83. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="84. Pressure (PC8)" UnitName="mbar" ControlName="Pressure8.Ramp" InputMode="" Min="0" Max="10000" Description="PC8.DiluPres"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="85. Vent Pre-Exhaust Pressure (PC9)" UnitName="mbar" ControlName="Pressure9.Ramp" InputMode="" Min="0" Max="10000" Description="PC9.VentPre-ExhaustPres"/>
         
 
         
diff --git a/App/SicRT/Properties/AssemblyInfo.cs b/App/SicRT/Properties/AssemblyInfo.cs
index cd9cb41..b31cc2b 100644
--- a/App/SicRT/Properties/AssemblyInfo.cs
+++ b/App/SicRT/Properties/AssemblyInfo.cs
@@ -51,7 +51,7 @@ using System.Windows;
 // 可以指定所有值，也可以使用以下所示的 "*" 预置版本号和修订号
 // 方法是按如下所示使用“*”: :
 
-[assembly: AssemblyVersion("1.1.12.60721")]
+[assembly: AssemblyVersion("1.1.13.60803")]
 [assembly: AssemblyInformationalVersion("氮化硅12寸（无EFEM）")]
 
 
diff --git a/App/SicUI/Properties/AssemblyInfo.cs b/App/SicUI/Properties/AssemblyInfo.cs
index 13c8e70..611273e 100644
--- a/App/SicUI/Properties/AssemblyInfo.cs
+++ b/App/SicUI/Properties/AssemblyInfo.cs
@@ -55,6 +55,6 @@ using System.Windows;
 // by using the '*' as shown below:
 
 
-[assembly: AssemblyVersion("1.1.12.60721")]
+[assembly: AssemblyVersion("1.1.13.60803")]
 [assembly: AssemblyInformationalVersion("氮化硅12寸（无EFEM）")]