修改Recipe模板配置
This commit is contained in:
hanqiangqiang
parent
a83f3262cb
commit
4177e5b14a
@ -647,9 +647,9 @@
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<!--<IoN2HighDopings classType="Aitex.Core.RT.Device.PmDevices.IoN2HighDoping" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoN2HighDoping id="N2HighDoping" display="" schematicId="" unit="" valve1="" valve2="V40" valve3="V40s" scBasePath="PM.{module}.MFC.Mfc5.IsInstalled"/>
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</IoN2HighDopings>-->
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<IoSiH4s classType="Aitex.Core.RT.Device.PmDevices.IoSiH4" assembly="MECF.Framework.RT.EquipmentLibrary">
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<!--<IoSiH4s classType="Aitex.Core.RT.Device.PmDevices.IoSiH4" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoSiH4 id="SiH4" display="" schematicId="" unit="" valve1="V52" valve2="V52s" valve3="V55" valve4="V56" valve5="V62" />
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</IoSiH4s>
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</IoSiH4s>-->
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<IoTCSs classType="Aitex.Core.RT.Device.PmDevices.IoTCS" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoTCS id="TCS" display="" schematicId="" unit="" valve1="V48" valve2="V48s" valve3="V49" valve4="V53" valve5="V53s" />
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</IoTCSs>
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@ -79,157 +79,141 @@
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</Catalog>
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<Catalog DisplayName="StepInfo">
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<Group DisplayName="SH Flow->Si Source->Si Source Total Flow">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="24. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
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</Group>
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<Group DisplayName="SH Flow->Si Source->SiH4 Flow">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="25. SiH4 Flow Mode" UnitName="" ControlName="SiH4.SetValve" Description="">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="26. SiH4 Flow (M14)" UnitName="sccm" ControlName="Mfc14.Ramp" InputMode="" Min="0" Max="10000" Description="M14.SiH4Flow"/>
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</Group>
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<Group DisplayName="SH Flow->Si Source->TCS Flow">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="27. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve" Description="">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="24. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve" Description="">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="28. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="29. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="30. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="31. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="25. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="26. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="27. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="28. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
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</Group>
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<Group DisplayName="SH Flow->Si Source->HCl Flow">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="32. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve" Description="">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="29. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve" Description="">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="33. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
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<!--<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="34. HCL Source Split Ratio" UnitName="" ControlName="HCLSourSplitRatio"/>-->
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<!--<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. HCl Pre Split Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.HClFlowsccm"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. HCl Inner Flow (M45)" UnitName="sccm" ControlName="Mfc45.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M45.HClFlowsccm"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="37. HCl Middle Flow (M44)" UnitName="sccm" ControlName="Mfc44.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M44.HClFlowsccm"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. HCl Outer Flow (M43)" UnitName="sccm" ControlName="Mfc43.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M43.HClFlowsccm"/>-->
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</Group>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="30. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
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</Group>
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<Group DisplayName="SH Flow->Si Source->Si Source Total Flow">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="31. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
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</Group>
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<Group DisplayName="SH Flow->Si Source->Si Source Split">
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<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="39. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="40. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="41. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="42. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="43. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
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<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="32. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="33. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="34. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
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</Group>
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<Group DisplayName="SH Flow->C Source->C Source Total Flow">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="44. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="37. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
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</Group>
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<Group DisplayName="SH Flow->C Source->C3H8 Flow">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="45. C2H2 Flow Mode" UnitName="" ControlName="C2H4.SetValve" Description="">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="38. C2H2 Flow Mode" UnitName="" ControlName="C2H4.SetValve" Description="">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="46. C2H2 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="39. C2H2 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
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</Group>
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<Group DisplayName="SH Flow->C Source->C Source Split">
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<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="47. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="48. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="49. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="50. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="51. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
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<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="40. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="41. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="42. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="43. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="44. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
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</Group>
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<Group DisplayName="SH Flow->Dope->Dope Total Flow">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="52. Dope Total Flow" UnitName="sccm" ControlName="DopeTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="45. Dope Total Flow" UnitName="sccm" ControlName="DopeTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
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</Group>
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<Group DisplayName="SH Flow->Dope->N2 Flow">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="53. N2 Flow Mode" UnitName="" ControlName="N2Dilution.SetValve" Description="">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="46. N2 Flow Mode" UnitName="" ControlName="N2Dilution.SetValve" Description="">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="54. N2 Actual Flow" UnitName="sccm" ControlName="N2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="55. N2 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="56. Dilut Flow For N2 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="57. Diluted N2 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="58. N2 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="59. N2 Low Flow Mode" UnitName="" ControlName="N2LowDoping.SetValve" Description="N2 HIGH FLOW MODE">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="47. N2 Actual Flow" UnitName="sccm" ControlName="N2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="48. N2 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="49. Dilut Flow For N2 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="50. Diluted N2 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="51. N2 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="52. N2 Low Flow Mode" UnitName="" ControlName="N2LowDoping.SetValve" Description="N2 HIGH FLOW MODE">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="60. N2 High Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="61. N2 High Flow Mode" UnitName="" ControlName="N2HighDoping.SetValve" Description="N2 HIGH FLOW MODE">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="53. N2 High Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="54. N2 High Flow Mode" UnitName="" ControlName="N2HighDoping.SetValve" Description="N2 HIGH FLOW MODE">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="62. N2 High Flow (M30)" UnitName="sccm" ControlName="Mfc30.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="55. N2 High Flow (M30)" UnitName="sccm" ControlName="Mfc30.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
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</Group>
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<Group DisplayName="SH Flow->Dope->TMA Flow">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="63. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve" Description="TMA FLOW MODE">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="56. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve" Description="TMA FLOW MODE">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="65. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="57. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="58. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="59. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
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</Group>
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<Group DisplayName="SH Flow->Dope->Dope Split">
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<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="67. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. Dope Push Pressure (PC5)" UnitName="mbar" ControlName="Pressure5.Ramp" InputMode="" Min="0" Max="10000" Description="PC5.DopePushPressure"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M20.DopeInnerFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19.DopeMidFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. Dope Outer Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M2.DopeOuterFlow"/>
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<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="60. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="61. Dope Push Pressure (PC5)" UnitName="mbar" ControlName="Pressure5.Ramp" InputMode="" Min="0" Max="10000" Description="PC5.DopePushPressure"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="62. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M20.DopeInnerFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="63. Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19.DopeMidFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. Dope Outer Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M2.DopeOuterFlow"/>
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</Group>
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<Group DisplayName="SH Flow->SH Push Flow">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="75. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="76. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="77. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="78. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="65. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="67. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Purge->SH Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="79. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="80. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Chamber Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="81. Gas Ring Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="10000" Description="M32.GasRingFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="82. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="83. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="84. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="85. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. Gas Ring Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="10000" Description="M32.GasRingFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="75. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="76. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="77. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="78. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Vent Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="86. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="87. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="88. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="89. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="90. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="91. Pressure (PC8)" UnitName="mbar" ControlName="Pressure8.Ramp" InputMode="" Min="0" Max="10000" Description="PC8.DiluPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="92. Vent Pre-Exhaust Pressure (PC9)" UnitName="mbar" ControlName="Pressure9.Ramp" InputMode="" Min="0" Max="10000" Description="PC9.VentPre-ExhaustPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="79. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="80. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="81. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="82. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="83. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="84. Pressure (PC8)" UnitName="mbar" ControlName="Pressure8.Ramp" InputMode="" Min="0" Max="10000" Description="PC8.DiluPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="85. Vent Pre-Exhaust Pressure (PC9)" UnitName="mbar" ControlName="Pressure9.Ramp" InputMode="" Min="0" Max="10000" Description="PC9.VentPre-ExhaustPres"/>
|
||||
|
||||
|
||||
|
||||
|
||||
@ -51,7 +51,7 @@ using System.Windows;
|
||||
// 可以指定所有值，也可以使用以下所示的 "*" 预置版本号和修订号
|
||||
// 方法是按如下所示使用“*”: :
|
||||
|
||||
[assembly: AssemblyVersion("1.1.12.60721")]
|
||||
[assembly: AssemblyVersion("1.1.13.60803")]
|
||||
[assembly: AssemblyInformationalVersion("氮化硅12寸（无EFEM）")]
|
||||
|
||||
|
||||
|
||||
@ -55,6 +55,6 @@ using System.Windows;
|
||||
// by using the '*' as shown below:
|
||||
|
||||
|
||||
[assembly: AssemblyVersion("1.1.12.60721")]
|
||||
[assembly: AssemblyVersion("1.1.13.60803")]
|
||||
[assembly: AssemblyInformationalVersion("氮化硅12寸（无EFEM）")]
|
||||
|
||||
|
||||
Loading…
Reference in New Issue
Block a user