Sic-Software/SIC-12
4
0
Fork 0
Code Issues Pull Requests Actions Packages Projects Releases Wiki Activity

refactor: 更新PM互锁表。

Browse Source
This commit is contained in:
SL 2026-06-06 11:05:45 +08:00
parent 48f9d22026
commit 837c01f1cc
2 changed files with 944 additions and 124 deletions
Show Stats Download Patch File Download Diff File Expand all files Collapse all files

410
App/Modules/SicModules/Config/PM/PM1/interlockPM1.xml
View File

@ -22,6 +22,10 @@
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
</Action>
<Action do="PM1.DO_ArSupply(V32)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-2">
@ -42,6 +46,7 @@
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
</Action>
<Action do="PM1.DO_SHH2/ArSwitch(V33)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-3">
@ -66,6 +71,8 @@
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
</Action>
<Action do="PM1.DO_ChamBodyArPurge(V68)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-39">
@ -182,6 +189,13 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_HighN2Run/Vent(V40)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-10">
@ -248,6 +262,13 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_TMARun(V41)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-11">
@ -314,6 +335,13 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_TCSRun/Vent(V53)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-23">
@ -380,6 +408,13 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_HCLRun/Vent(V54)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-24">
@ -446,6 +481,13 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_SiH4Run(V55)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-25">
@ -512,6 +554,13 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_C2H4Run(V59)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-29">
@ -578,6 +627,13 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_TMARelease(V43)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-13">
@ -643,6 +699,14 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_TCSRelease(V48)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-18">
@ -708,6 +772,15 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_TCSAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-43"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_TMABypass(V45)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-15">
@ -725,6 +798,7 @@
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
</Action>
<Action do="PM1.DO_TCSBypass(V49)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-19">
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
@ -741,6 +815,7 @@
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
</Action>
<Action do="PM1.DO_TMAVac(V46)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-16">
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
@ -848,6 +923,13 @@
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit do="PM1.DO_CleanRoutineSucceed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-173" ignoreReverse="true"/>
<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_HCLSwitch(V51)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-21">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -917,6 +999,13 @@
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit do="PM1.DO_CleanRoutineSucceed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-173" ignoreReverse="true"/>
<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_SiH4Switch(V52)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-22">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -986,6 +1075,13 @@
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit do="PM1.DO_CleanRoutineSucceed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-173" ignoreReverse="true"/>
<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_C2H4Switch(V58)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-28">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -1055,6 +1151,13 @@
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit do="PM1.DO_CleanRoutineSucceed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-173" ignoreReverse="true"/>
<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_ReactorLeakCheck(V69)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-42">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -1074,6 +1177,9 @@
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
</Action>
<Action do="PM1.DO_GasBoxVentPump(V72)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-45">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -1097,6 +1203,9 @@
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_EPV2-1FB" value="true" tip="" tip.zh-CN="" tip.en-US="DI-282" ignoreReverse="true"/>
<Limit do="PM1.DO_TVEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-140" ignoreReverse="true"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
</Action>
<Action do="PM1.DO_MOVac(V73)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-46">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -1190,6 +1299,8 @@
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
</Action>
<Action do="PM1.DO_HeaterEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-56">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -1235,6 +1346,13 @@
<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
<Limit do="PM1.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_InnerHeaterEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-57">
@ -1301,6 +1419,12 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_MiddleHeaterEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-58">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -1366,6 +1490,12 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_OuterHeaterEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-59">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -1431,6 +1561,12 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_ChamMoveBodyUp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-64">
<Limit di="PM1.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
@ -1518,6 +1654,7 @@
<Limit di="PM1.DI_SHGasConnectorLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-102"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
</Action>
<Action do="PM1.DO_ChamMoveBodyBackward" value="true" tip="" tip.zh-CN="" tip.en-US="DO-68">
<Limit di="PM1.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
@ -1831,6 +1968,8 @@
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
</Action>
<Action do="PM1.DO_OuterGasFinal(V88)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-41">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
@ -1856,6 +1995,8 @@
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
</Action>
<Action do="PM1.DO_CarryGasFinal(V97)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-54">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
@ -1881,6 +2022,8 @@
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
</Action>
<Action do="PM1.DO_InnerGasFinal(V89)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-112">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
@ -1906,6 +2049,8 @@
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
</Action>
<Action do="PM1.DO_MiddleGasFinal(V90)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-113">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
@ -1931,6 +2076,8 @@
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
</Action>
<Action do="PM1.DO_OpticPurgeFinal(V91)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-114">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
@ -1956,6 +2103,8 @@
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
</Action>
<Action do="PM1.DO_GasRingPurgeFinal(V92)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-115">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
@ -1981,6 +2130,8 @@
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
</Action>
<Action do="PM1.DO_ChamberPurgeFinal(V93)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-116">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
@ -2006,6 +2157,8 @@
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
</Action>
<Action do="PM1.DO_RotationUpPurgeFinal(V94)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-117">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
@ -2031,6 +2184,8 @@
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
</Action>
<Action do="PM1.DO_ConfinementRingFinal(V95)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-118">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
@ -2056,6 +2211,8 @@
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
</Action>
<Action do="PM1.DO_HeaterWFFinal(V96)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-119">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
@ -2081,6 +2238,8 @@
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
</Action>
<Action do="PM1.DO_OpenLidPurge" value="true" tip="" tip.zh-CN="" tip.en-US="DO-111">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
@ -2136,6 +2295,10 @@
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit do="PM1.DO_TC1AETempRaisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
</Action>
<Action do="PM1.DO_ConfinementRingJogDown" value="true" tip="" tip.zh-CN="" tip.en-US="DO-163">
@ -2166,6 +2329,8 @@
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_EPV2-1FB" value="true" tip="" tip.zh-CN="" tip.en-US="DI-282" ignoreReverse="true"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
</Action>
<Action do="PM1.DO_CyclePurgeRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-176">
@ -2190,6 +2355,9 @@
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
</Action>
<Action do="PM1.DO_ExchangeMoRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-177">
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
@ -2208,6 +2376,8 @@
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
</Action>
<Action do="PM1.DO_CleanRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-178">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -2231,6 +2401,9 @@
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
</Action>
<Action do="PM1.DO_PurgeRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-179">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -2256,6 +2429,8 @@
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
</Action>
<Action do="PM1.DO_PumpRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-180">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -2279,6 +2454,8 @@
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
</Action>
<Action do="PM1.DO_VentRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-181">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -2302,6 +2479,8 @@
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
</Action>
<Action do="PM1.DO_ProcessIdleRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-185">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -2323,6 +2502,8 @@
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
</Action>
<Action do="PM1.DO_ATMIdleRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-186">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -2346,6 +2527,8 @@
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
</Action>
<Action do="PM1.DO_VACIdleRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-187">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -2369,6 +2552,8 @@
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
</Action>
<Action do="PM1.DO_ProcessRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-174">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -2439,6 +2624,14 @@
<!-- Is Service Mode -->
<Limit pollbool="PM1.IsService" value="false" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
<Limit do="PM1.DO_CleanRoutineSucceed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-173" ignoreReverse="true"/>
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_TCSAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-43"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_VACTransferAllowed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-182">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -2464,6 +2657,8 @@
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
</Action>
<Action do="PM1.DO_ATMTransferAllowed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-183">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
@ -2484,6 +2679,7 @@
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
</Action>
<Action do="PM1.DO_PreprocessRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-175">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -2551,6 +2747,13 @@
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit do="PM1.DO_CleanRoutineSucceed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-173" ignoreReverse="true"/>
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_TCSAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-43"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_PostProcessRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-184">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -2577,6 +2780,36 @@
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_TCSAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-43"/>
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
<Limit do="PM1.DO_SpareFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
<Limit do="PM1.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
<Limit do="PM1.DO_TC1AETempRaisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
</Action>
<Action do="PM1.DO_SCR1Enable" value="true" tip="DO_SCR1Enable" tip.zh-CN="" tip.en-US="DO-134">
@ -2643,6 +2876,12 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_SCR2Enable" value="true" tip="DO_SCR2Enable" tip.zh-CN="" tip.en-US="DO-135">
@ -2709,6 +2948,12 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_SCR3Enable" value="true" tip="DO_SCR3Enable" tip.zh-CN="" tip.en-US="DO-136">
@ -2775,6 +3020,12 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<!--<Action do="PM1.DO_TMAVent(V42)" value="false" tip="" tip.zh-CN="" tip.en-US="DO-12" ignoreReverse="true">
<Limit di="PM1.DI_TMARunFB(V41)" value="false" tip="" tip.zh-CN="" tip.en-US="DI-171"/>
@ -2785,4 +3036,163 @@
<Action do="PM1.DO_C2H4Vent(V60)" value="false" tip="" tip.zh-CN="" tip.en-US="DO-30" ignoreReverse="true">
<Limit di="PM1.DI_C2H4RunFB(V59)" value="false" tip="" tip.zh-CN="" tip.en-US="DI-189"/>
</Action>-->
<Action do="PM1.DO_H2Supply(V30)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-4">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="PM1.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
</Action>
<Action do="PM1.DO_CarrierGasH2(V64)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-35">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
</Action>
<Action do="PM1.DO_CarrierGasAr(V65)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-36">
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
</Action>
<Action do="PM1.DO_GasBoxVentBypass(V25)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-50">
</Action>
<Action do="PM1.DO_DORVac(V75)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-48">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
</Action>
<Action do="PM1.DO_PumpBypass(V27)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52">
</Action>
<Action do="PM1.DO_TopLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-77">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
<Limit di="PM1.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
</Action>
<Action do="PM1.DO_TopLidTighten" value="true" tip="" tip.zh-CN="" tip.en-US="DO-78">
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
</Action>
<Action do="PM1.DO_TopLidSwingLock" value="true" tip="" tip.zh-CN="" tip.en-US="DO-79">
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
</Action>
<Action do="PM1.DO_TopLidSwingUnlock" value="true" tip="" tip.zh-CN="" tip.en-US="DO-80">
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
</Action>
</Interlock>

498
App/Modules/SicModules/Config/PM/PM2/interlockPM2.xml
View File

File diff suppressed because it is too large Load Diff