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Recipe中添加M32

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AbortRoutine超时180秒，写死
This commit is contained in:
hanqiangqiang 2026-06-15 15:20:23 +08:00
parent f96300e790
commit 8a1b917509
4 changed files with 16 additions and 14 deletions
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20
App/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml
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@ -209,18 +209,20 @@
</Group>
<Group DisplayName="Purge->Chamber Periphery Purge">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="79. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="80. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="81. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="82. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="79. Gas Ring Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="10000" Description="M32.GasRingFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="80. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="81. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="82. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="83. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
</Group>
<Group DisplayName="Purge->Vent Flow">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="83. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="84. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="85. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="86. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="87. Vent Pre-Exhaust Pressure (PC9)" UnitName="mbar" ControlName="Pressure9.Ramp" InputMode="" Min="0" Max="10000" Description="PC9.VentPre-ExhaustPres"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="84. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="85. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="86. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="87. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="88. Vent Pre-Exhaust Pressure (PC9)" UnitName="mbar" ControlName="Pressure9.Ramp" InputMode="" Min="0" Max="10000" Description="PC9.VentPre-ExhaustPres"/>
</Group>
</Catalog>

6
App/Modules/SicModules/PMs/Routines/PMProcessAbortRoutine.cs
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@ -51,7 +51,7 @@ namespace SicModules.PMs.Routines
private int _IoValueOpenCloseTimeout = 10;
private int _routineTimeOut = 10;
private int _routineTimeOut = 180;
private Stopwatch _swTimer = new Stopwatch();
public PMProcessAbortRoutine(ModuleName module, PMModule pm1) : base(module, pm1)
@ -67,7 +67,7 @@ namespace SicModules.PMs.Routines
_mfc1to16RampTime = SC.GetValue<int>($"PM.{Module}.ProcessIdle.MFC1to16RampTime");
_mfc2to40RampTime = SC.GetValue<int>($"PM.{Module}.ProcessIdle.MFC19to40RampTime");
_routineTimeOut = SC.GetValue<int>($"PM.{Module}.ProcessIdle.RoutineTimeOut");
//_routineTimeOut = SC.GetValue<int>($"PM.{Module}.ProcessIdle.RoutineTimeOut");
_swTimer.Restart();
Notify("Start");
@ -79,7 +79,7 @@ namespace SicModules.PMs.Routines
{
try
{
//CheckRoutineTimeOut();
CheckRoutineTimeOut();
//停止加热
SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut);

2
App/SicRT/Properties/AssemblyInfo.cs
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@ -51,7 +51,7 @@ using System.Windows;
// 可以指定所有值，也可以使用以下所示的 "*" 预置版本号和修订号
// 方法是按如下所示使用“*”: :
[assembly: AssemblyVersion("1.1.7.60610")]
[assembly: AssemblyVersion("1.1.8.60615")]
[assembly: AssemblyInformationalVersion("氮化硅12寸（无EFEM）")]

2
App/SicUI/Properties/AssemblyInfo.cs
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@ -55,6 +55,6 @@ using System.Windows;
// by using the '*' as shown below:
[assembly: AssemblyVersion("1.1.7.60610")]
[assembly: AssemblyVersion("1.1.8.60615")]
[assembly: AssemblyInformationalVersion("氮化硅12寸（无EFEM）")]