From 9112f229e61875083d111e9d2ee1455f4230e544 Mon Sep 17 00:00:00 2001
From: "SIC1016\\caipeilun" <905168240@qq.com>
Date: Fri, 5 Jun 2026 17:08:52 +0800
Subject: [PATCH] =?UTF-8?q?=E5=A2=9E=E5=8A=A0=E5=8A=A8=E6=80=81=E6=B5=81?=
 =?UTF-8?q?=E9=87=8Fconfig?=
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---
 App/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml | 2 +-
 App/SicRT/Config/System.sccfg                            | 4 ++++
 2 files changed, 5 insertions(+), 1 deletion(-)

diff --git a/App/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml b/App/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml
index 060dfc9..f0f8144 100644
--- a/App/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml
+++ b/App/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml
@@ -112,7 +112,7 @@
           <Item DisplayName="Run"  ControlName="Run" />
         </Step>
         <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="33. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
-        <Step ModuleName="" DeviceType=""  InputType="Set3RatioInput"    DisplayName="34. HCL Source Split Ratio" UnitName="" ControlName="HCLSourSplitRatio"/>
+        <!--<Step ModuleName="" DeviceType=""  InputType="Set3RatioInput"    DisplayName="34. HCL Source Split Ratio" UnitName="" ControlName="HCLSourSplitRatio"/>-->
         <!--<Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="35. HCl Pre Split Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.HClFlowsccm"/>
         <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="36. HCl Inner Flow (M45)" UnitName="sccm" ControlName="Mfc45.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M45.HClFlowsccm"/>
         <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="37. HCl Middle Flow (M44)" UnitName="sccm" ControlName="Mfc44.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M44.HClFlowsccm"/>
diff --git a/App/SicRT/Config/System.sccfg b/App/SicRT/Config/System.sccfg
index 8802086..c5d7315 100644
--- a/App/SicRT/Config/System.sccfg
+++ b/App/SicRT/Config/System.sccfg
@@ -611,10 +611,14 @@
 			<config default="0" name="ThrottlePositionDefaultValue" description="蝶阀位置模式默认值" max="100" min="0" paramter="" tag="" unit="s" type="Double" />
 			<config default="1100" name="ThrottlePressureDefaultValue" description="蝶阀压力模式默认值" max="1500" min="0" paramter="" tag="" unit="s" type="Double" />
 			<config default="400" name="ThrottlePositionModeMaxPressure" description="蝶阀允许位置模式需要的最大压力值" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
+      <config default="1000*10,3000*10,3000*10,4000*10,6000*10,8000*10,10000*10,12000*10,14000*10,2500*10" name="MFC27DynamicFlow" description="MFC27 动态流量" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
 			<config default="1000*10,3000*10,3000*10,4000*10,6000*10,8000*10,10000*10,12000*10,14000*10,2500*10" name="MFC28DynamicFlow" description="MFC28 动态流量" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
 			<config default="500*10,2000*10,2500*10,3500*10,5500*10,7500*10,9500*10,11500*10,13000*10,2000*10" name="MFC29DynamicFlow" description="MFC29 动态流量" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
 			<config default="1000*10,3000*10,5000*10,6000*10,8000*10,10000*10,12000*10,14000*10,16000*10,4000*10" name="MFC31DynamicFlow" description="MFC31 动态流量" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
+      <config default="4000*10,7000*10,11000*10,13000*10,16000*10,19000*10,23000*10,28000*10,34000*10,11000*10" name="MFC35DynamicFlow" description="MFC35 动态流量" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
 			<config default="4000*10,7000*10,11000*10,13000*10,16000*10,19000*10,23000*10,28000*10,34000*10,11000*10" name="MFC40DynamicFlow" description="MFC40 动态流量" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
+      <config default="4000*10,7000*10,11000*10,13000*10,16000*10,19000*10,23000*10,28000*10,34000*10,11000*10" name="MFC41DynamicFlow" description="MFC41 动态流量" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
+      <config default="4000*10,7000*10,11000*10,13000*10,16000*10,19000*10,23000*10,28000*10,34000*10,11000*10" name="MFC42DynamicFlow" description="MFC42 动态流量" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
 			<config default="false" name="PreTransferPSUEnable" description="传盘是否开启PSU加热" max="" min="" paramter="" tag="" unit=""   type="Bool" />
 			<config default="true" name="PreTransferSCREnable" description="传盘是否开启SCR加热" max="" min="" paramter="" tag="" unit=""   type="Bool" />
 			<config default="false" name="ReactorSuspectorCheckEnable" description="传盘后是否检查ReactorSuspectorCheck Sensor" max="" min="" paramter="" tag="" unit=""   type="Bool" />