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增加动态流量config

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SIC1016\caipeilun 2026-06-05 17:08:52 +08:00
parent 81c3d05a82
commit 9112f229e6
2 changed files with 5 additions and 1 deletions
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2
App/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml
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@ -112,7 +112,7 @@
<Item DisplayName="Run" ControlName="Run" />
</Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="33. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="34. HCL Source Split Ratio" UnitName="" ControlName="HCLSourSplitRatio"/>
<!--<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="34. HCL Source Split Ratio" UnitName="" ControlName="HCLSourSplitRatio"/>-->
<!--<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. HCl Pre Split Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.HClFlowsccm"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. HCl Inner Flow (M45)" UnitName="sccm" ControlName="Mfc45.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M45.HClFlowsccm"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="37. HCl Middle Flow (M44)" UnitName="sccm" ControlName="Mfc44.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M44.HClFlowsccm"/>

4
App/SicRT/Config/System.sccfg
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@ -611,10 +611,14 @@
<config default="0" name="ThrottlePositionDefaultValue" description="蝶阀位置模式默认值" max="100" min="0" paramter="" tag="" unit="s" type="Double" />
<config default="1100" name="ThrottlePressureDefaultValue" description="蝶阀压力模式默认值" max="1500" min="0" paramter="" tag="" unit="s" type="Double" />
<config default="400" name="ThrottlePositionModeMaxPressure" description="蝶阀允许位置模式需要的最大压力值" max="1100" min="0" paramter="" tag="" unit="mbar" type="Double" />
<config default="1000*10,3000*10,3000*10,4000*10,6000*10,8000*10,10000*10,12000*10,14000*10,2500*10" name="MFC27DynamicFlow" description="MFC27 动态流量" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
<config default="1000*10,3000*10,3000*10,4000*10,6000*10,8000*10,10000*10,12000*10,14000*10,2500*10" name="MFC28DynamicFlow" description="MFC28 动态流量" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
<config default="500*10,2000*10,2500*10,3500*10,5500*10,7500*10,9500*10,11500*10,13000*10,2000*10" name="MFC29DynamicFlow" description="MFC29 动态流量" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
<config default="1000*10,3000*10,5000*10,6000*10,8000*10,10000*10,12000*10,14000*10,16000*10,4000*10" name="MFC31DynamicFlow" description="MFC31 动态流量" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
<config default="4000*10,7000*10,11000*10,13000*10,16000*10,19000*10,23000*10,28000*10,34000*10,11000*10" name="MFC35DynamicFlow" description="MFC35 动态流量" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
<config default="4000*10,7000*10,11000*10,13000*10,16000*10,19000*10,23000*10,28000*10,34000*10,11000*10" name="MFC40DynamicFlow" description="MFC40 动态流量" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
<config default="4000*10,7000*10,11000*10,13000*10,16000*10,19000*10,23000*10,28000*10,34000*10,11000*10" name="MFC41DynamicFlow" description="MFC41 动态流量" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
<config default="4000*10,7000*10,11000*10,13000*10,16000*10,19000*10,23000*10,28000*10,34000*10,11000*10" name="MFC42DynamicFlow" description="MFC42 动态流量" max="" min="" paramter="" tag="" visible="false" unit="" type="String" />
<config default="false" name="PreTransferPSUEnable" description="传盘是否开启PSU加热" max="" min="" paramter="" tag="" unit="" type="Bool" />
<config default="true" name="PreTransferSCREnable" description="传盘是否开启SCR加热" max="" min="" paramter="" tag="" unit="" type="Bool" />
<config default="false" name="ReactorSuspectorCheckEnable" description="传盘后是否检查ReactorSuspectorCheck Sensor" max="" min="" paramter="" tag="" unit="" type="Bool" />