修改Recipe解析
修改Recipe气体切换时控制逻辑
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@ -656,9 +656,6 @@
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<!--<IoTMAs classType="Aitex.Core.RT.Device.PmDevices.IoTMA" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoTMA id="TMA" display="" schematicId="" unit="" valve1="V41" valve2="V42" valve3="V43" valve4="V43s" valve5="V45" />
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</IoTMAs>-->
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<IoSHArH2Switchs classType="Aitex.Core.RT.Device.PmDevices.IoSHArH2Switch" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoSHArH2Switch id="SHArH2Switch" display="" schematicId="" unit="" valve1="V33" valve2="V33s" valve3="V35" valve4="V36" />
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</IoSHArH2Switchs>
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<IoPurgeArH2Switchs classType="Aitex.Core.RT.Device.PmDevices.IoPurgeArH2Switch" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoPurgeArH2Switch id="PurgeArH2Switch" display="" schematicId="" unit="" valve1="V68" />
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</IoPurgeArH2Switchs>
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@ -667,6 +664,12 @@
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</IoV99s>
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<RecipeValveActions classType="Aitex.Core.RT.Device.PmDevices.RecipeValveAction" assembly="MECF.Framework.RT.EquipmentLibrary">
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<RecipeValveAction id="SHArH2Switch" display="" schematicId="" unit="">
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<Valve Name="V33" Ar="false" H2="true"/>
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<Valve Name="V64" Ar="false" H2="true" />
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<Valve Name="V65" Ar="true" H2="false" />
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<Valve Name="V68" Ar="true" H2="" />
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</RecipeValveAction>
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<RecipeValveAction id="TMA" display="" schematicId="" unit="">
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<Valve Name="V41" Purge="false" Vent="false" Run="true" LowDoping="false"/>
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<Valve Name="V42" Purge="true" Vent="true" Run="false" LowDoping="false" />
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@ -165,9 +165,8 @@ namespace SicModules.PMs.RecipeExecutions
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// }
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//}
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foreach (var key in dic.Keys)
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recipeStep.RecipeCommands.Add(key, dic[key]);
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//foreach (var key in dic.Keys)
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// recipeStep.RecipeCommands.Add(key, dic[key]);
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#region Remove
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//dic.Remove("StepNo");
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@ -228,7 +227,7 @@ namespace SicModules.PMs.RecipeExecutions
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//{
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// dic.Remove("Mfc30.Ramp");
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//}
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dic.Remove("HCLSourSplitRatio");
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dic.Remove("SHTotalFlow");
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dic.Remove("SHTotalFlowSplitRatio");
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//dic.Remove("SiSourTotalFlow");
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@ -249,10 +248,10 @@ namespace SicModules.PMs.RecipeExecutions
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if (dic.ContainsKey("Loop"))
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dic.Remove("Loop");
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#endregion
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foreach (var key in dic.Keys)
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recipeStep.RecipeCommands.Add(key, dic[key]);
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#endregion
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}
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}
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catch (Exception ex)
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