修改Recipe解析

修改Recipe气体切换时控制逻辑
This commit is contained in:
hanqiangqiang 2026-06-10 16:39:55 +08:00
parent a11d2b154d
commit 916994416a
2 changed files with 10 additions and 8 deletions

View File

@ -656,9 +656,6 @@
<!--<IoTMAs classType="Aitex.Core.RT.Device.PmDevices.IoTMA" assembly="MECF.Framework.RT.EquipmentLibrary"> <!--<IoTMAs classType="Aitex.Core.RT.Device.PmDevices.IoTMA" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoTMA id="TMA" display="" schematicId="" unit="" valve1="V41" valve2="V42" valve3="V43" valve4="V43s" valve5="V45" /> <IoTMA id="TMA" display="" schematicId="" unit="" valve1="V41" valve2="V42" valve3="V43" valve4="V43s" valve5="V45" />
</IoTMAs>--> </IoTMAs>-->
<IoSHArH2Switchs classType="Aitex.Core.RT.Device.PmDevices.IoSHArH2Switch" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoSHArH2Switch id="SHArH2Switch" display="" schematicId="" unit="" valve1="V33" valve2="V33s" valve3="V35" valve4="V36" />
</IoSHArH2Switchs>
<IoPurgeArH2Switchs classType="Aitex.Core.RT.Device.PmDevices.IoPurgeArH2Switch" assembly="MECF.Framework.RT.EquipmentLibrary"> <IoPurgeArH2Switchs classType="Aitex.Core.RT.Device.PmDevices.IoPurgeArH2Switch" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoPurgeArH2Switch id="PurgeArH2Switch" display="" schematicId="" unit="" valve1="V68" /> <IoPurgeArH2Switch id="PurgeArH2Switch" display="" schematicId="" unit="" valve1="V68" />
</IoPurgeArH2Switchs> </IoPurgeArH2Switchs>
@ -667,6 +664,12 @@
</IoV99s> </IoV99s>
<RecipeValveActions classType="Aitex.Core.RT.Device.PmDevices.RecipeValveAction" assembly="MECF.Framework.RT.EquipmentLibrary"> <RecipeValveActions classType="Aitex.Core.RT.Device.PmDevices.RecipeValveAction" assembly="MECF.Framework.RT.EquipmentLibrary">
<RecipeValveAction id="SHArH2Switch" display="" schematicId="" unit="">
<Valve Name="V33" Ar="false" H2="true"/>
<Valve Name="V64" Ar="false" H2="true" />
<Valve Name="V65" Ar="true" H2="false" />
<Valve Name="V68" Ar="true" H2="" />
</RecipeValveAction>
<RecipeValveAction id="TMA" display="" schematicId="" unit=""> <RecipeValveAction id="TMA" display="" schematicId="" unit="">
<Valve Name="V41" Purge="false" Vent="false" Run="true" LowDoping="false"/> <Valve Name="V41" Purge="false" Vent="false" Run="true" LowDoping="false"/>
<Valve Name="V42" Purge="true" Vent="true" Run="false" LowDoping="false" /> <Valve Name="V42" Purge="true" Vent="true" Run="false" LowDoping="false" />

View File

@ -165,9 +165,8 @@ namespace SicModules.PMs.RecipeExecutions
// } // }
//} //}
foreach (var key in dic.Keys) //foreach (var key in dic.Keys)
recipeStep.RecipeCommands.Add(key, dic[key]); // recipeStep.RecipeCommands.Add(key, dic[key]);
#region Remove #region Remove
//dic.Remove("StepNo"); //dic.Remove("StepNo");
@ -228,7 +227,7 @@ namespace SicModules.PMs.RecipeExecutions
//{ //{
// dic.Remove("Mfc30.Ramp"); // dic.Remove("Mfc30.Ramp");
//} //}
dic.Remove("HCLSourSplitRatio");
dic.Remove("SHTotalFlow"); dic.Remove("SHTotalFlow");
dic.Remove("SHTotalFlowSplitRatio"); dic.Remove("SHTotalFlowSplitRatio");
//dic.Remove("SiSourTotalFlow"); //dic.Remove("SiSourTotalFlow");
@ -249,10 +248,10 @@ namespace SicModules.PMs.RecipeExecutions
if (dic.ContainsKey("Loop")) if (dic.ContainsKey("Loop"))
dic.Remove("Loop"); dic.Remove("Loop");
#endregion
foreach (var key in dic.Keys) foreach (var key in dic.Keys)
recipeStep.RecipeCommands.Add(key, dic[key]); recipeStep.RecipeCommands.Add(key, dic[key]);
#endregion
} }
} }
catch (Exception ex) catch (Exception ex)