修改气泵仿真和配置
添加MFC配置
This commit is contained in:
hanqiangqiang
parent
34546f1e44
commit
a28609dec3
@ -369,8 +369,8 @@
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<IoGasBoxTemp id="HeatTailPipe" display="HeatTailPipe" aiHeatTMA="AI_HeatTailPipe" scBasePath="PM.{module}.LineHeaterTemp" scAlarmHigh="PumpLineTempLimt" scWarningLog="PumpLineTempAlarm" doLineHeaterEnable=""/>
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</IoGasBoxTemps>
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<IoPumps classType="Aitex.Core.RT.Device.Devices.IoPump" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoPump id="Pump" module="" display="Pump" schematicId="Pump" unit="" aioType="" diDryPumpAlarm="DI_DryPumpAlarm" diPumpExhaustPress="DI_PumpExhaustPressSW" diDryPumpFlow="DI_DryPumpFlowSW" diDryPump1Running="DI_DryPump1Running" diDryPump1Warning="DI_DryPump1Warning" />
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<IoPump id="Pump2" module="" display="Pump2" schematicId="Pump2" unit="" aioType="" diDryPump1Running="DI_DryPump2Running" diDryPumpAlarm="DI_DryPump2Alarm" diDryPump1Warning="DI_DryPump2Warning" diPumpExhaustPress="DI_PumpExhaustDPSW" diDryPumpFlow="DO_PMpumpFlowTemp" />
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<IoPump id="Pump" module="" display="Pump" schematicId="Pump" unit="" aioType="" diDryPumpAlarm="DI_DryPumpAlarm" diPumpExhaustPress="DI_PumpExhaustPressSW" diDryPump1Running="DI_DryPump1Running" diDryPump1Warning="DI_DryPump1Warning" />
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<IoPump id="Pump2" module="" display="Pump2" schematicId="Pump2" unit="" aioType="" diDryPump1Running="DI_DryPump2Running" diDryPumpAlarm="DI_DryPump2Alarm" diDryPump1Warning="DI_DryPump2Warning" diPumpExhaustPress="DI_PumpExhaustDPSW" />
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</IoPumps>
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<IoPTOffsetAndKs classType="Aitex.Core.RT.Device.Devices.IoPTOffsetAndK" assembly="MECF.Framework.RT.EquipmentLibrary">
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<IoPTOffsetAndK id="PT1_Offset" module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT1_Offset" />
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@ -810,236 +810,248 @@
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<config default="0.5" name="LeakSpec" description="LeakSpec" max="100" min="0" paramter="" tag="" unit="mbar/min" type="Double" />
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<config default="3000" name="RoutineTimeOut" description="Routine超时时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
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</configs>
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<configs name="MFC">
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<config default="1.5" name="MinScale" description="MFC Min Scale" max="100" min="0" paramter="" tag="" unit="%" type="Double" />
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<config default="10" name="WarningTime" description="设置值和反馈值之差超限后，引发警告的延迟时间" max="300" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
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<config default="5" name="WarningRange" description="(反馈值-设置值)/设置值 * 100% 超过该百分比后，引发警告" max="100" min="0" paramter="" tag="" unit="%" type="Double" visible="true" />
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<config default="10" name="AlarmTime" description="设置值和反馈值之差超限后，引发报警的延迟时间" max="300" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
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<config default="10" name="AlarmRange" description="(反馈值-设置值)/设置值 * 100% 超过该百分比后，引发报警" max="100" min="0" paramter="" tag="" unit="%" type="Double" visible="true" />
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<configs name="Mfc1">
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<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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</configs>
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<configs name="Mfc2">
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<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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</configs>
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<configs name="Mfc3">
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<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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</configs>
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<configs name="Mfc4">
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<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="N2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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</configs>
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<configs name="Mfc5">
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<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="N2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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<config default="false" name="IsInstalled" description="MFC5是否安装" max="" min="" paramter="" tag="" unit="" type="Bool" />
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</configs>
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<configs name="Mfc6">
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<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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</configs>
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<configs name="Mfc7">
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<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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</configs>
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<configs name="Mfc8">
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<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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</configs>
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<configs name="Mfc9">
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<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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</configs>
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<configs name="Mfc10">
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<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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</configs>
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<configs name="Mfc11">
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<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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</configs>
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<configs name="Mfc12">
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<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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</configs>
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<configs name="Mfc13">
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<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="HCL" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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</configs>
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<configs name="Mfc14">
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<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="SiH4" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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</configs>
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<configs name="Mfc15">
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<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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</configs>
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<configs name="Mfc16">
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<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="C2H4" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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</configs>
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<configs name="Mfc17">
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<configs name="MFC">
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<config default="1.5" name="MinScale" description="MFC Min Scale" max="100" min="0" paramter="" tag="" unit="%" type="Double" />
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<config default="10" name="WarningTime" description="设置值和反馈值之差超限后，引发警告的延迟时间" max="300" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
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<config default="5" name="WarningRange" description="(反馈值-设置值)/设置值 * 100% 超过该百分比后，引发警告" max="100" min="0" paramter="" tag="" unit="%" type="Double" visible="true" />
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<config default="10" name="AlarmTime" description="设置值和反馈值之差超限后，引发报警的延迟时间" max="300" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
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<config default="10" name="AlarmRange" description="(反馈值-设置值)/设置值 * 100% 超过该百分比后，引发报警" max="100" min="0" paramter="" tag="" unit="%" type="Double" visible="true" />
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<configs name="Mfc1">
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<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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</configs>
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<configs name="Mfc18">
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<configs name="Mfc2">
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<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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</configs>
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<configs name="Mfc19">
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<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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</configs>
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<configs name="Mfc20">
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<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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</configs>
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<configs name="Mfc21">
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<configs name="Mfc3">
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<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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</configs>
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<configs name="Mfc4">
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<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="N2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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</configs>
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<configs name="Mfc22">
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<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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</configs>
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<configs name="Mfc23">
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<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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</configs>
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<configs name="Mfc25">
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<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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</configs>
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<configs name="Mfc26">
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<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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</configs>
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<configs name="Mfc27">
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<config default="200000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="5000" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
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<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
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</configs>
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<configs name="Mfc28">
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<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
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<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc29">
|
||||
<config default="15000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="750" name="DefaultSetPoint" description="DefaultSetPoint" max="15000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc30">
|
||||
<configs name="Mfc5">
|
||||
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="N2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
<config default="true" name="IsInstalled" description="MFC5是否安装" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||||
</configs>
|
||||
<configs name="Mfc6">
|
||||
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc7">
|
||||
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc8">
|
||||
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc9">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc10">
|
||||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc31">
|
||||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc32">
|
||||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc33">
|
||||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc35">
|
||||
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc36">
|
||||
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc37">
|
||||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc38">
|
||||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc40">
|
||||
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="5000" name="DefaultSetPoint" description="DefaultSetPoint" max="100000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
</configs>
|
||||
<configs name="Mfc11">
|
||||
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc12">
|
||||
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc13">
|
||||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="HCL" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc14">
|
||||
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="SiH4" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc15">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc16">
|
||||
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="C2H4" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc17">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="C2H4" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc19">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc20">
|
||||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc22">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc23">
|
||||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc25">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc26">
|
||||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc27">
|
||||
<config default="200000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="5000" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc28">
|
||||
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc29">
|
||||
<config default="15000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="750" name="DefaultSetPoint" description="DefaultSetPoint" max="15000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc31">
|
||||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc32">
|
||||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc33">
|
||||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc35">
|
||||
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc36">
|
||||
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc37">
|
||||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc38">
|
||||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc40">
|
||||
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="10000" name="DefaultSetPoint" description="DefaultSetPoint" max="200000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc41">
|
||||
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="10000" name="DefaultSetPoint" description="DefaultSetPoint" max="200000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc42">
|
||||
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="10000" name="DefaultSetPoint" description="DefaultSetPoint" max="200000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc43">
|
||||
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="100000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc44">
|
||||
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="100000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc45">
|
||||
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="100000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
</configs>
|
||||
<configs name="PC">
|
||||
<config default="10" name="WarningTime" description="设置值和反馈值之差超限后，引发警告的延迟时间" max="300" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
|
||||
<config default="5" name="WarningRange" description="(反馈值-设置值)/设置值 * 100% 超过该百分比后，引发警告" max="100" min="0" paramter="" tag="" unit="%" type="Double" visible="true" />
|
||||
@ -1464,236 +1476,248 @@
|
||||
<config default="0.5" name="LeakSpec" description="LeakSpec" max="100" min="0" paramter="" tag="" unit="mbar/min" type="Double" />
|
||||
<config default="3000" name="RoutineTimeOut" description="Routine超时时间" max="10000" min="0" paramter="" tag="" unit="s" type="Integer" />
|
||||
</configs>
|
||||
<configs name="MFC">
|
||||
<config default="1.5" name="MinScale" description="MFC Min Scale" max="100" min="0" paramter="" tag="" unit="%" type="Double" />
|
||||
<config default="10" name="WarningTime" description="设置值和反馈值之差超限后，引发警告的延迟时间" max="300" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
|
||||
<config default="5" name="WarningRange" description="(反馈值-设置值)/设置值 * 100% 超过该百分比后，引发警告" max="100" min="0" paramter="" tag="" unit="%" type="Double" visible="true" />
|
||||
<config default="10" name="AlarmTime" description="设置值和反馈值之差超限后，引发报警的延迟时间" max="300" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
|
||||
<config default="10" name="AlarmRange" description="(反馈值-设置值)/设置值 * 100% 超过该百分比后，引发报警" max="100" min="0" paramter="" tag="" unit="%" type="Double" visible="true" />
|
||||
<configs name="Mfc1">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc2">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc3">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc4">
|
||||
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="N2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc5">
|
||||
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="N2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
<config default="false" name="IsInstalled" description="MFC5是否安装" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||||
</configs>
|
||||
<configs name="Mfc6">
|
||||
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc7">
|
||||
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc8">
|
||||
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc9">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc10">
|
||||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc11">
|
||||
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc12">
|
||||
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc13">
|
||||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="HCL" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc14">
|
||||
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="SiH4" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc15">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc16">
|
||||
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="C2H4" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc17">
|
||||
<configs name="MFC">
|
||||
<config default="1.5" name="MinScale" description="MFC Min Scale" max="100" min="0" paramter="" tag="" unit="%" type="Double" />
|
||||
<config default="10" name="WarningTime" description="设置值和反馈值之差超限后，引发警告的延迟时间" max="300" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
|
||||
<config default="5" name="WarningRange" description="(反馈值-设置值)/设置值 * 100% 超过该百分比后，引发警告" max="100" min="0" paramter="" tag="" unit="%" type="Double" visible="true" />
|
||||
<config default="10" name="AlarmTime" description="设置值和反馈值之差超限后，引发报警的延迟时间" max="300" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
|
||||
<config default="10" name="AlarmRange" description="(反馈值-设置值)/设置值 * 100% 超过该百分比后，引发报警" max="100" min="0" paramter="" tag="" unit="%" type="Double" visible="true" />
|
||||
<configs name="Mfc1">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc18">
|
||||
<configs name="Mfc2">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc19">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc20">
|
||||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc21">
|
||||
<configs name="Mfc3">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc4">
|
||||
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="N2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc22">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc23">
|
||||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc25">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc26">
|
||||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc27">
|
||||
<config default="200000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="5000" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc28">
|
||||
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc29">
|
||||
<config default="15000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="750" name="DefaultSetPoint" description="DefaultSetPoint" max="15000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc30">
|
||||
<configs name="Mfc5">
|
||||
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="N2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
<config default="true" name="IsInstalled" description="MFC5是否安装" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||||
</configs>
|
||||
<configs name="Mfc6">
|
||||
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc7">
|
||||
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc8">
|
||||
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc9">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc10">
|
||||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc31">
|
||||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc32">
|
||||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc33">
|
||||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc35">
|
||||
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc36">
|
||||
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc37">
|
||||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc38">
|
||||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc40">
|
||||
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="5000" name="DefaultSetPoint" description="DefaultSetPoint" max="100000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="true" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
</configs>
|
||||
<configs name="Mfc11">
|
||||
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc12">
|
||||
<config default="1000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="50" name="DefaultSetPoint" description="DefaultSetPoint" max="1000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc13">
|
||||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="HCL" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc14">
|
||||
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="SiH4" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc15">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc16">
|
||||
<config default="500" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="C2H4" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc17">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="25" name="DefaultSetPoint" description="DefaultSetPoint" max="500" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="C2H4" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc19">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc20">
|
||||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc22">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc23">
|
||||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc25">
|
||||
<config default="10000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="10000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc26">
|
||||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc27">
|
||||
<config default="200000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="5000" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc28">
|
||||
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc29">
|
||||
<config default="15000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="750" name="DefaultSetPoint" description="DefaultSetPoint" max="15000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc31">
|
||||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc32">
|
||||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="1000" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc33">
|
||||
<config default="5000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="250" name="DefaultSetPoint" description="DefaultSetPoint" max="5000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc35">
|
||||
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="1500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc36">
|
||||
<config default="30000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="30000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc37">
|
||||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc38">
|
||||
<config default="20000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="20000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc40">
|
||||
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="10000" name="DefaultSetPoint" description="DefaultSetPoint" max="200000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc41">
|
||||
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="10000" name="DefaultSetPoint" description="DefaultSetPoint" max="200000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc42">
|
||||
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="10000" name="DefaultSetPoint" description="DefaultSetPoint" max="200000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc43">
|
||||
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="100000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc44">
|
||||
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="100000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
<configs name="Mfc45">
|
||||
<config default="100000" name="N2Scale" description="Scale" max="1000000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="500" name="DefaultSetPoint" description="DefaultSetPoint" max="100000" min="0" paramter="" tag="" unit="sccm" type="Double" />
|
||||
<config default="H2" name="GasName" description="Gas Name" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="false" name="EnableAlarm" description="Enable Alarm" max="" min="" paramter="" tag="" unit="" type="Bool" visible="true" />
|
||||
</configs>
|
||||
</configs>
|
||||
<configs name="PC">
|
||||
<config default="10" name="WarningTime" description="设置值和反馈值之差超限后，引发警告的延迟时间" max="300" min="0" paramter="" tag="" unit="s" type="Integer" visible="true" />
|
||||
<config default="5" name="WarningRange" description="(反馈值-设置值)/设置值 * 100% 超过该百分比后，引发警告" max="100" min="0" paramter="" tag="" unit="%" type="Double" visible="true" />
|
||||
|
||||
@ -36,6 +36,7 @@
|
||||
<DI_ITEM Index="34" Name="DI_GBNH3DetectorSW" BufferOffset="34" Addr="34" Description="" />
|
||||
<DI_ITEM Index="35" Name="DI_GasPipeTempCtrlAlarm" BufferOffset="35" Addr="35" Description="" />
|
||||
<DI_ITEM Index="36" Name="DI_DryPumpAlarm" BufferOffset="36" Addr="36" Description="" />
|
||||
<DI_ITEM Index="37" Name="DI_DryPump2Alarm" BufferOffset="37" Addr="37" Description="" />
|
||||
<DI_ITEM Index="38" Name="DI_PumpExhaustPressSW" BufferOffset="38" Addr="38" Description="" />
|
||||
<DI_ITEM Index="39" Name="DI_PMAExhaustDPSW" BufferOffset="39" Addr="39" Description="" />
|
||||
<DI_ITEM Index="40" Name="DI_PumpExhaustDPSW" BufferOffset="40" Addr="40" Description="" />
|
||||
@ -59,8 +60,10 @@
|
||||
<DI_ITEM Index="60" Name="DI_GBWaterLeakSW" BufferOffset="60" Addr="60" Description="" />
|
||||
<DI_ITEM Index="61" Name="DI_ShutterUpLimitSW" BufferOffset="61" Addr="61" Description="" Visible="false" />
|
||||
<DI_ITEM Index="62" Name="DI_ShutterDownLimitSW" BufferOffset="62" Addr="62" Description="" Visible="false" />
|
||||
<DI_ITEM Index="65" Name="DI_DryPump1Running" BufferOffset="65" Addr="65" Description="" />
|
||||
<DI_ITEM Index="67" Name="DI_DryPump1Warning" BufferOffset="67" Addr="67" Description="" />
|
||||
<DI_ITEM Index="65" Name="DI_DryPump1Running" BufferOffset="65" Addr="65" Description="" />
|
||||
<DI_ITEM Index="66" Name="DI_DryPump2Running" BufferOffset="66" Addr="66" Description="" />
|
||||
<DI_ITEM Index="67" Name="DI_DryPump1Warning" BufferOffset="67" Addr="67" Description="" />
|
||||
<DI_ITEM Index="68" Name="DI_DryPump2Warning" BufferOffset="68" Addr="68" Description="" />
|
||||
<DI_ITEM Index="70" Name="DI_EMOStatusSW" BufferOffset="70" Addr="70" Description="" />
|
||||
<DI_ITEM Index="71" Name="DI_PumpCabDoorClosed" BufferOffset="71" Addr="71" Description="" />
|
||||
<DI_ITEM Index="72" Name="DI_FacilityWarningSW" BufferOffset="72" Addr="72" Description="" />
|
||||
|
||||
@ -52,12 +52,16 @@ namespace SicSimulator.Instances
|
||||
IO.DI["DI_TMDryPump1Warning"].Value = true;
|
||||
IO.DI["DI_TMDryPump1Running"].Value = true;
|
||||
|
||||
IO.DI["DI_TMDryPump2Alarm"].Value = true;
|
||||
IO.DI["DI_TMDryPump2Warning"].Value = true;
|
||||
IO.DI["DI_TMDryPump2Running"].Value = true;
|
||||
|
||||
//IO.DI["DI_TMDryPump2Alarm"].Value = true;
|
||||
//IO.DI["DI_TMDryPump2Warning"].Value = true;
|
||||
//IO.DI["DI_TMDryPump2Running"].Value = true;
|
||||
|
||||
IO.DI["DI_LoadDoorClosed"].Value = true;
|
||||
IO.DI["DI_ReactorADoorClosed"].Value = true;
|
||||
|
||||
|
||||
IO.DI["DI_RobotOnBackPos"].Value = true;
|
||||
|
||||
IO.AI["AI_TMPressure1"].Value = 300;
|
||||
@ -111,6 +115,10 @@ namespace SicSimulator.Instances
|
||||
IO.DI[$"{mod}.DI_DryPump1Warning"].Value = true;
|
||||
IO.DI[$"{mod}.DI_DryPump1Running"].Value = true;
|
||||
|
||||
IO.DI[$"{mod}.DI_DryPump2Alarm"].Value = true;
|
||||
IO.DI[$"{mod}.DI_DryPump2Warning"].Value = true;
|
||||
IO.DI[$"{mod}.DI_DryPump2Running"].Value = true;
|
||||
|
||||
IO.DI[$"{mod}.DI_ServoReady"].Value = true;
|
||||
IO.AI[$"{mod}.AI_ForelinePress"].Value = 300;
|
||||
IO.AI[$"{mod}.AI_ChamPress"].Value = 300;
|
||||
|
||||
Loading…
Reference in New Issue
Block a user