From a83f3262cbfaf5f9b5cadb378e36564d61437317 Mon Sep 17 00:00:00 2001
From: hanqiangqiang <1364346467@qq.com>
Date: Mon, 3 Aug 2026 13:03:54 +0800
Subject: [PATCH] =?UTF-8?q?=E4=BF=AE=E6=94=B9Recipe=E6=A8=A1=E6=9D=BF?=
 =?UTF-8?q?=E9=85=8D=E7=BD=AE?=
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---
 .../Config/PM/PM1/DeviceModelPM1.xml          | 15 +++-
 .../Config/Recipe/Sic/Process/PN2.xml         | 79 ++++++++++---------
 2 files changed, 55 insertions(+), 39 deletions(-)

diff --git a/App/Modules/SicModules/Config/PM/PM1/DeviceModelPM1.xml b/App/Modules/SicModules/Config/PM/PM1/DeviceModelPM1.xml
index 70aaae5..cab79b2 100644
--- a/App/Modules/SicModules/Config/PM/PM1/DeviceModelPM1.xml
+++ b/App/Modules/SicModules/Config/PM/PM1/DeviceModelPM1.xml
@@ -644,9 +644,9 @@
     <IoN2Dilution id="N2Dilution" display="" schematicId="" unit="" valve1="V37" valve2="V37s" valve3="V39" valve4="V39s" valve5="V61" />
     <IoN2Dilution id="NH3_2Dilution" display="" schematicId="" unit="" valve1="V37" valve2="V37s" valve3="V39" valve4="V39s" valve5="V61" />
   </IoN2Dilutions>
-  <IoN2HighDopings classType="Aitex.Core.RT.Device.PmDevices.IoN2HighDoping" assembly="MECF.Framework.RT.EquipmentLibrary">
+  <!--<IoN2HighDopings classType="Aitex.Core.RT.Device.PmDevices.IoN2HighDoping" assembly="MECF.Framework.RT.EquipmentLibrary">
     <IoN2HighDoping id="N2HighDoping" display="" schematicId="" unit=""   valve1="" valve2="V40" valve3="V40s" scBasePath="PM.{module}.MFC.Mfc5.IsInstalled"/>
-  </IoN2HighDopings>
+  </IoN2HighDopings>-->
   <IoSiH4s classType="Aitex.Core.RT.Device.PmDevices.IoSiH4" assembly="MECF.Framework.RT.EquipmentLibrary">
     <IoSiH4 id="SiH4" display="" schematicId="" unit="" valve1="V52" valve2="V52s" valve3="V55" valve4="V56" valve5="V62" />
   </IoSiH4s>
@@ -664,6 +664,17 @@
   </IoV99s>
 
   <RecipeValveActions classType="Aitex.Core.RT.Device.PmDevices.RecipeValveAction" assembly="MECF.Framework.RT.EquipmentLibrary">
+    
+    <RecipeValveAction id="N2LowDoping" display="" schematicId="" unit="">
+      <Valve Name="V52" Purge="false" Vent="true"  Run="true" />
+      <Valve Name="V47" Purge="false" Vent="false" Run="true" />
+    </RecipeValveAction>
+    <RecipeValveAction id="N2HighDoping" display="" schematicId="" unit="">
+      <Valve Name="V52" Purge="false" Vent="true"  Run="true" />
+      <Valve Name="V40" Purge="false" Vent="false" Run="true" />
+    </RecipeValveAction>
+    
+    
     <RecipeValveAction id="SHArH2Switch" display="" schematicId="" unit="">
       <Valve Name="V33" Ar="false" H2="true"/>
       <Valve Name="V64" Ar="false" H2="true" />
diff --git a/App/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml b/App/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml
index 0a05e3a..1ef5b09 100644
--- a/App/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml
+++ b/App/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml
@@ -132,12 +132,12 @@
       </Group>
 
       <Group DisplayName="SH Flow->C Source->C3H8 Flow">
-        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="45. C3H8 Flow Mode" UnitName="" ControlName="C2H4.SetValve"  Description="">
+        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="45. C2H2 Flow Mode" UnitName="" ControlName="C2H4.SetValve"  Description="">
           <Item DisplayName="Purge" ControlName="Purge" />
           <Item DisplayName="Vent"  ControlName="Vent" />
           <Item DisplayName="Run"  ControlName="Run" />
         </Step>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="46. C3H8 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="46. C2H2 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
 
 
       </Group>
@@ -164,67 +164,72 @@
         <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="56. Dilut Flow For N2 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
         <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="57. Diluted N2 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
         <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="58. N2 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
-        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="59. N2 High Flow Mode" UnitName="" ControlName="N2HighDoping.SetValve"  Description="N2 HIGH FLOW MODE">
+        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="59. N2 Low Flow Mode" UnitName="" ControlName="N2LowDoping.SetValve"  Description="N2 HIGH FLOW MODE">
           <Item DisplayName="Purge" ControlName="Purge" />
           <Item DisplayName="Vent"  ControlName="Vent" />
           <Item DisplayName="Run"  ControlName="Run" />
         </Step>
         <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="60. N2 High Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="61. N2 High Flow (M30)" UnitName="sccm" ControlName="Mfc30.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
-      </Group>
-
-      <Group DisplayName="SH Flow->Dope->TMA Flow">
-        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="62. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve"  Description="TMA FLOW MODE">
+        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="61. N2 High Flow Mode" UnitName="" ControlName="N2HighDoping.SetValve"  Description="N2 HIGH FLOW MODE">
           <Item DisplayName="Purge" ControlName="Purge" />
           <Item DisplayName="Vent"  ControlName="Vent" />
           <Item DisplayName="Run"  ControlName="Run" />
         </Step>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="63. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="64. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="65. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="62. N2 High Flow (M30)" UnitName="sccm" ControlName="Mfc30.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
+      </Group>
+
+      <Group DisplayName="SH Flow->Dope->TMA Flow">
+        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="63. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve"  Description="TMA FLOW MODE">
+          <Item DisplayName="Purge" ControlName="Purge" />
+          <Item DisplayName="Vent"  ControlName="Vent" />
+          <Item DisplayName="Run"  ControlName="Run" />
+        </Step>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="64. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="65. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="66. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
       </Group>
 
       <Group DisplayName="SH Flow->Dope->Dope Split">
-        <Step ModuleName="" DeviceType=""  InputType="Set3RatioInput"    DisplayName="66. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="67. Dope Push Pressure (PC5)" UnitName="mbar" ControlName="Pressure5.Ramp" InputMode="" Min="0" Max="10000" Description="PC5.DopePushPressure"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="68. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M20.DopeInnerFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="69. Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19.DopeMidFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="70. Dope Outer Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M2.DopeOuterFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="Set3RatioInput"    DisplayName="67. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="68. Dope Push Pressure (PC5)" UnitName="mbar" ControlName="Pressure5.Ramp" InputMode="" Min="0" Max="10000" Description="PC5.DopePushPressure"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="69. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M20.DopeInnerFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="70. Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19.DopeMidFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="71. Dope Outer Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M2.DopeOuterFlow"/>
       </Group>
 
       <Group DisplayName="SH Flow->SH Push Flow">
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="71. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="72. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="73. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="74. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="75. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="76. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="77. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="72. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="73. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="74. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="75. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="76. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="77. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="78. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
       </Group>
     </Catalog>
 
     <Catalog DisplayName="StepInfo">
       <Group DisplayName="Purge->SH Periphery Purge">
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="78. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="79. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="79. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="80. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
       </Group>
 
       <Group DisplayName="Purge->Chamber Periphery Purge">
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="80. Gas Ring Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="10000" Description="M32.GasRingFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="81. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="82. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="83. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="84. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="81. Gas Ring Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="10000" Description="M32.GasRingFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="82. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="83. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="84. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="85. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
       </Group>
 
       <Group DisplayName="Purge->Vent Flow">
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="85. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="86. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="87. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="88. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="89. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="90. Pressure (PC8)" UnitName="mbar" ControlName="Pressure8.Ramp" InputMode="" Min="0" Max="10000" Description="PC8.DiluPres"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="91. Vent Pre-Exhaust Pressure (PC9)" UnitName="mbar" ControlName="Pressure9.Ramp" InputMode="" Min="0" Max="10000" Description="PC9.VentPre-ExhaustPres"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="86. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="87. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="88. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="89. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="90. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="91. Pressure (PC8)" UnitName="mbar" ControlName="Pressure8.Ramp" InputMode="" Min="0" Max="10000" Description="PC8.DiluPres"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="92. Vent Pre-Exhaust Pressure (PC9)" UnitName="mbar" ControlName="Pressure9.Ramp" InputMode="" Min="0" Max="10000" Description="PC9.VentPre-ExhaustPres"/>