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修改Recipe模板配置

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This commit is contained in:
hanqiangqiang 2026-08-03 13:03:54 +08:00
parent c6db656bd8
commit a83f3262cb
2 changed files with 55 additions and 39 deletions
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15
App/Modules/SicModules/Config/PM/PM1/DeviceModelPM1.xml
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@ -644,9 +644,9 @@
<IoN2Dilution id="N2Dilution" display="" schematicId="" unit="" valve1="V37" valve2="V37s" valve3="V39" valve4="V39s" valve5="V61" />
<IoN2Dilution id="NH3_2Dilution" display="" schematicId="" unit="" valve1="V37" valve2="V37s" valve3="V39" valve4="V39s" valve5="V61" />
</IoN2Dilutions>
<IoN2HighDopings classType="Aitex.Core.RT.Device.PmDevices.IoN2HighDoping" assembly="MECF.Framework.RT.EquipmentLibrary">
<!--<IoN2HighDopings classType="Aitex.Core.RT.Device.PmDevices.IoN2HighDoping" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoN2HighDoping id="N2HighDoping" display="" schematicId="" unit="" valve1="" valve2="V40" valve3="V40s" scBasePath="PM.{module}.MFC.Mfc5.IsInstalled"/>
</IoN2HighDopings>
</IoN2HighDopings>-->
<IoSiH4s classType="Aitex.Core.RT.Device.PmDevices.IoSiH4" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoSiH4 id="SiH4" display="" schematicId="" unit="" valve1="V52" valve2="V52s" valve3="V55" valve4="V56" valve5="V62" />
</IoSiH4s>
@ -664,6 +664,17 @@
</IoV99s>
<RecipeValveActions classType="Aitex.Core.RT.Device.PmDevices.RecipeValveAction" assembly="MECF.Framework.RT.EquipmentLibrary">
<RecipeValveAction id="N2LowDoping" display="" schematicId="" unit="">
<Valve Name="V52" Purge="false" Vent="true" Run="true" />
<Valve Name="V47" Purge="false" Vent="false" Run="true" />
</RecipeValveAction>
<RecipeValveAction id="N2HighDoping" display="" schematicId="" unit="">
<Valve Name="V52" Purge="false" Vent="true" Run="true" />
<Valve Name="V40" Purge="false" Vent="false" Run="true" />
</RecipeValveAction>
<RecipeValveAction id="SHArH2Switch" display="" schematicId="" unit="">
<Valve Name="V33" Ar="false" H2="true"/>
<Valve Name="V64" Ar="false" H2="true" />

79
App/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml
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@ -132,12 +132,12 @@
</Group>
<Group DisplayName="SH Flow->C Source->C3H8 Flow">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="45. C3H8 Flow Mode" UnitName="" ControlName="C2H4.SetValve" Description="">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="45. C2H2 Flow Mode" UnitName="" ControlName="C2H4.SetValve" Description="">
<Item DisplayName="Purge" ControlName="Purge" />
<Item DisplayName="Vent" ControlName="Vent" />
<Item DisplayName="Run" ControlName="Run" />
</Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="46. C3H8 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="46. C2H2 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
</Group>
@ -164,67 +164,72 @@
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="56. Dilut Flow For N2 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="57. Diluted N2 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="58. N2 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="59. N2 High Flow Mode" UnitName="" ControlName="N2HighDoping.SetValve" Description="N2 HIGH FLOW MODE">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="59. N2 Low Flow Mode" UnitName="" ControlName="N2LowDoping.SetValve" Description="N2 HIGH FLOW MODE">
<Item DisplayName="Purge" ControlName="Purge" />
<Item DisplayName="Vent" ControlName="Vent" />
<Item DisplayName="Run" ControlName="Run" />
</Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="60. N2 High Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="61. N2 High Flow (M30)" UnitName="sccm" ControlName="Mfc30.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
</Group>
<Group DisplayName="SH Flow->Dope->TMA Flow">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="62. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve" Description="TMA FLOW MODE">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="61. N2 High Flow Mode" UnitName="" ControlName="N2HighDoping.SetValve" Description="N2 HIGH FLOW MODE">
<Item DisplayName="Purge" ControlName="Purge" />
<Item DisplayName="Vent" ControlName="Vent" />
<Item DisplayName="Run" ControlName="Run" />
</Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="63. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="65. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="62. N2 High Flow (M30)" UnitName="sccm" ControlName="Mfc30.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
</Group>
<Group DisplayName="SH Flow->Dope->TMA Flow">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="63. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve" Description="TMA FLOW MODE">
<Item DisplayName="Purge" ControlName="Purge" />
<Item DisplayName="Vent" ControlName="Vent" />
<Item DisplayName="Run" ControlName="Run" />
</Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="65. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
</Group>
<Group DisplayName="SH Flow->Dope->Dope Split">
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="66. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="67. Dope Push Pressure (PC5)" UnitName="mbar" ControlName="Pressure5.Ramp" InputMode="" Min="0" Max="10000" Description="PC5.DopePushPressure"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M20.DopeInnerFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19.DopeMidFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. Dope Outer Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M2.DopeOuterFlow"/>
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="67. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. Dope Push Pressure (PC5)" UnitName="mbar" ControlName="Pressure5.Ramp" InputMode="" Min="0" Max="10000" Description="PC5.DopePushPressure"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M20.DopeInnerFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19.DopeMidFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. Dope Outer Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M2.DopeOuterFlow"/>
</Group>
<Group DisplayName="SH Flow->SH Push Flow">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="75. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="76. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="77. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="75. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="76. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="77. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="78. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
</Group>
</Catalog>
<Catalog DisplayName="StepInfo">
<Group DisplayName="Purge->SH Periphery Purge">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="78. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="79. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="79. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="80. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
</Group>
<Group DisplayName="Purge->Chamber Periphery Purge">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="80. Gas Ring Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="10000" Description="M32.GasRingFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="81. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="82. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="83. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="84. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="81. Gas Ring Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="10000" Description="M32.GasRingFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="82. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="83. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="84. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="85. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
</Group>
<Group DisplayName="Purge->Vent Flow">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="85. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="86. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="87. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="88. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="89. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="90. Pressure (PC8)" UnitName="mbar" ControlName="Pressure8.Ramp" InputMode="" Min="0" Max="10000" Description="PC8.DiluPres"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="91. Vent Pre-Exhaust Pressure (PC9)" UnitName="mbar" ControlName="Pressure9.Ramp" InputMode="" Min="0" Max="10000" Description="PC9.VentPre-ExhaustPres"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="86. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="87. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="88. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="89. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="90. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="91. Pressure (PC8)" UnitName="mbar" ControlName="Pressure8.Ramp" InputMode="" Min="0" Max="10000" Description="PC8.DiluPres"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="92. Vent Pre-Exhaust Pressure (PC9)" UnitName="mbar" ControlName="Pressure9.Ramp" InputMode="" Min="0" Max="10000" Description="PC9.VentPre-ExhaustPres"/>