diff --git a/App/Modules/SicModules/Config/PM/PM1/interlockPM1.xml b/App/Modules/SicModules/Config/PM/PM1/interlockPM1.xml
index b9600b1..6b3c329 100644
--- a/App/Modules/SicModules/Config/PM/PM1/interlockPM1.xml
+++ b/App/Modules/SicModules/Config/PM/PM1/interlockPM1.xml
@@ -190,7 +190,7 @@
 		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
 		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
 		<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
-		<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
+		
 		<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
 		<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
 		<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
@@ -263,7 +263,7 @@
 		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
 		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
 		<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
-		<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
+		
 		<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
 		<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
 		<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
@@ -336,7 +336,7 @@
 		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
 		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
 		<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
-		<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
+		
 		<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
 		<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
 		<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
@@ -409,7 +409,7 @@
 		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
 		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
 		<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
-		<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
+		
 		<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
 		<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
 		<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
@@ -482,7 +482,7 @@
 		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
 		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
 		<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
-		<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
+		
 		<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
 		<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
 		<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
@@ -555,7 +555,7 @@
 		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
 		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
 		<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
-		<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
+		
 		<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
 		<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
 		<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
@@ -628,7 +628,7 @@
 		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
 		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
 		<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
-		<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
+		
 		<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
 		<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
 		<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
@@ -701,7 +701,7 @@
 		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
 		<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
 		<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
-		<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
+		
 		<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
 		<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
 		<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
@@ -774,7 +774,7 @@
 		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
 		<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
 		<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
-		<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
+		
 		<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
 		<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
 		<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
@@ -923,7 +923,7 @@
 		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
 		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
     <Limit do="PM1.DO_CleanRoutineSucceed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-173" ignoreReverse="true"/>
-		<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
+		
 		<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
 		<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
 		<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
@@ -999,7 +999,7 @@
 		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
 		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
     <Limit do="PM1.DO_CleanRoutineSucceed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-173" ignoreReverse="true"/>
-		<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
+		
 		<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
 		<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
 		<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
@@ -1075,7 +1075,7 @@
 		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
 		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
     <Limit do="PM1.DO_CleanRoutineSucceed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-173" ignoreReverse="true"/>
-		<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
+		
 		<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
 		<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
 		<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
@@ -1151,7 +1151,7 @@
 		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
 		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
     <Limit do="PM1.DO_CleanRoutineSucceed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-173" ignoreReverse="true"/>
-		<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
+		
 		<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
 		<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
 		<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
@@ -1346,7 +1346,7 @@
 		<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
 		<Limit do="PM1.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
 		<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
-		<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
+		
 		<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
 		<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
 		<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
@@ -1419,7 +1419,7 @@
 		<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
 		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
 		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
-		<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
+		
 		<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
 		<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
 		<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
@@ -1490,7 +1490,7 @@
 		<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
 		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
 		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
-		<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
+		
 		<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
 		<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
 		<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
@@ -1561,7 +1561,7 @@
 		<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
 		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
 		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
-		<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
+		
 		<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
 		<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
 		<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
@@ -2625,7 +2625,7 @@
     <Limit pollbool="PM1.IsService" value="false" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
     <Limit do="PM1.DO_CleanRoutineSucceed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-173" ignoreReverse="true"/>
 		<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
-		<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
+		
 		<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
 		<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
 		<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
@@ -2748,7 +2748,7 @@
 		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
     <Limit do="PM1.DO_CleanRoutineSucceed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-173" ignoreReverse="true"/>
 		<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
-		<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
+		
 		<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
 		<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
 		<Limit di="PM1.DI_TCSAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-43"/>
@@ -2876,7 +2876,7 @@
 		<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
 		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
 		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
-		<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
+		
 		<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
 		<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
 		<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
@@ -2948,7 +2948,7 @@
 		<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
 		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
 		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
-		<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
+		
 		<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
 		<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
 		<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
@@ -3020,7 +3020,7 @@
 		<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
 		<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
 		<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
-		<Limit di="PM1.DI_TMPumpFlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-24"/>
+		
 		<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
 		<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
 		<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
diff --git a/App/Modules/SicModules/Config/TM/interlock.xml b/App/Modules/SicModules/Config/TM/interlock.xml
index 6286ddb..5f38440 100644
--- a/App/Modules/SicModules/Config/TM/interlock.xml
+++ b/App/Modules/SicModules/Config/TM/interlock.xml
@@ -165,7 +165,7 @@
   <Action do="TM.DO_VacRobotExtenLoadEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-19">
     <Limit di="TM.DI_LoadDoorOpened" value="true" tip="" tip.zh-CN="" tip.en-US="DI-1"/>
     <Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
-    <Limit di="TM.DI_LoadTrayCYOpend" value="true" tip="" tip.zh-CN="" tip.en-US="DI-69"/>
+ 
   </Action>
   <Action do="TM.DO_VacRobotExtendUnloadEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-20">
     <Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>