diff --git a/App/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml b/App/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml
index 7ae15fc..0a05e3a 100644
--- a/App/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml
+++ b/App/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml
@@ -170,58 +170,63 @@
           <Item DisplayName="Run"  ControlName="Run" />
         </Step>
         <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="60. N2 High Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="61. N2 High Flow (M30)" UnitName="sccm" ControlName="Mfc30.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
       </Group>
 
       <Group DisplayName="SH Flow->Dope->TMA Flow">
-        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="61. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve"  Description="TMA FLOW MODE">
+        <Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="62. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve"  Description="TMA FLOW MODE">
           <Item DisplayName="Purge" ControlName="Purge" />
           <Item DisplayName="Vent"  ControlName="Vent" />
           <Item DisplayName="Run"  ControlName="Run" />
         </Step>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="62. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="63. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="64. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="63. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="64. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="65. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
       </Group>
 
       <Group DisplayName="SH Flow->Dope->Dope Split">
-        <Step ModuleName="" DeviceType=""  InputType="Set3RatioInput"    DisplayName="65. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="66. Dope Push Pressure (PC5)" UnitName="mbar" ControlName="Pressure5.Ramp" InputMode="" Min="0" Max="10000" Description="PC5.DopePushPressure"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="67. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M20.DopeInnerFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="68. Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19.DopeMidFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="69. Dope Outer Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M2.DopeOuterFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="Set3RatioInput"    DisplayName="66. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="67. Dope Push Pressure (PC5)" UnitName="mbar" ControlName="Pressure5.Ramp" InputMode="" Min="0" Max="10000" Description="PC5.DopePushPressure"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="68. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M20.DopeInnerFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="69. Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19.DopeMidFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="70. Dope Outer Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M2.DopeOuterFlow"/>
       </Group>
 
       <Group DisplayName="SH Flow->SH Push Flow">
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="70. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="71. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="72. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="73. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="74. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="75. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="76. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="71. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="72. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="73. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="74. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="75. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="76. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="77. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
       </Group>
     </Catalog>
 
     <Catalog DisplayName="StepInfo">
       <Group DisplayName="Purge->SH Periphery Purge">
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="77. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="78. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="78. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="79. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
       </Group>
 
       <Group DisplayName="Purge->Chamber Periphery Purge">
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="79. Gas Ring Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="10000" Description="M32.GasRingFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="80. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="81. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="82. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="83. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="80. Gas Ring Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="10000" Description="M32.GasRingFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="81. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="82. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="83. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="84. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
       </Group>
 
       <Group DisplayName="Purge->Vent Flow">
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="84. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="85. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="86. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="87. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
-        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="88. Vent Pre-Exhaust Pressure (PC9)" UnitName="mbar" ControlName="Pressure9.Ramp" InputMode="" Min="0" Max="10000" Description="PC9.VentPre-ExhaustPres"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="85. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="86. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="87. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="88. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="89. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="90. Pressure (PC8)" UnitName="mbar" ControlName="Pressure8.Ramp" InputMode="" Min="0" Max="10000" Description="PC8.DiluPres"/>
+        <Step ModuleName="" DeviceType=""  InputType="DoubleInput"  DisplayName="91. Vent Pre-Exhaust Pressure (PC9)" UnitName="mbar" ControlName="Pressure9.Ramp" InputMode="" Min="0" Max="10000" Description="PC9.VentPre-ExhaustPres"/>
+        
+
         
       </Group>
     </Catalog>
diff --git a/App/SicRT/Properties/AssemblyInfo.cs b/App/SicRT/Properties/AssemblyInfo.cs
index f4289dc..cd9cb41 100644
--- a/App/SicRT/Properties/AssemblyInfo.cs
+++ b/App/SicRT/Properties/AssemblyInfo.cs
@@ -51,7 +51,7 @@ using System.Windows;
 // 可以指定所有值，也可以使用以下所示的 "*" 预置版本号和修订号
 // 方法是按如下所示使用“*”: :
 
-[assembly: AssemblyVersion("1.1.11.60709")]
+[assembly: AssemblyVersion("1.1.12.60721")]
 [assembly: AssemblyInformationalVersion("氮化硅12寸（无EFEM）")]
 
 
diff --git a/App/SicUI/Properties/AssemblyInfo.cs b/App/SicUI/Properties/AssemblyInfo.cs
index 005bf06..13c8e70 100644
--- a/App/SicUI/Properties/AssemblyInfo.cs
+++ b/App/SicUI/Properties/AssemblyInfo.cs
@@ -55,6 +55,6 @@ using System.Windows;
 // by using the '*' as shown below:
 
 
-[assembly: AssemblyVersion("1.1.11.60709")]
+[assembly: AssemblyVersion("1.1.12.60721")]
 [assembly: AssemblyInformationalVersion("氮化硅12寸（无EFEM）")]