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12时设备recipe中没有PC8、M30、M 17

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hanqiangqiang 2026-07-21 09:27:51 +08:00
parent f95e71b0f7
commit c6db656bd8
3 changed files with 35 additions and 30 deletions
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61
App/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml
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@ -170,58 +170,63 @@
<Item DisplayName="Run" ControlName="Run" />
</Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="60. N2 High Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="61. N2 High Flow (M30)" UnitName="sccm" ControlName="Mfc30.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
</Group>
<Group DisplayName="SH Flow->Dope->TMA Flow">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="61. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve" Description="TMA FLOW MODE">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="62. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve" Description="TMA FLOW MODE">
<Item DisplayName="Purge" ControlName="Purge" />
<Item DisplayName="Vent" ControlName="Vent" />
<Item DisplayName="Run" ControlName="Run" />
</Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="62. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="63. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="63. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="65. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
</Group>
<Group DisplayName="SH Flow->Dope->Dope Split">
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="65. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. Dope Push Pressure (PC5)" UnitName="mbar" ControlName="Pressure5.Ramp" InputMode="" Min="0" Max="10000" Description="PC5.DopePushPressure"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="67. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M20.DopeInnerFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19.DopeMidFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. Dope Outer Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M2.DopeOuterFlow"/>
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="66. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="67. Dope Push Pressure (PC5)" UnitName="mbar" ControlName="Pressure5.Ramp" InputMode="" Min="0" Max="10000" Description="PC5.DopePushPressure"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M20.DopeInnerFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19.DopeMidFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. Dope Outer Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M2.DopeOuterFlow"/>
</Group>
<Group DisplayName="SH Flow->SH Push Flow">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="75. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="76. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="75. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="76. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="77. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
</Group>
</Catalog>
<Catalog DisplayName="StepInfo">
<Group DisplayName="Purge->SH Periphery Purge">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="77. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="78. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="78. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="79. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
</Group>
<Group DisplayName="Purge->Chamber Periphery Purge">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="79. Gas Ring Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="10000" Description="M32.GasRingFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="80. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="81. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="82. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="83. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="80. Gas Ring Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="10000" Description="M32.GasRingFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="81. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="82. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="83. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="84. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
</Group>
<Group DisplayName="Purge->Vent Flow">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="84. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="85. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="86. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="87. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="88. Vent Pre-Exhaust Pressure (PC9)" UnitName="mbar" ControlName="Pressure9.Ramp" InputMode="" Min="0" Max="10000" Description="PC9.VentPre-ExhaustPres"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="85. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="86. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="87. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="88. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="89. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="90. Pressure (PC8)" UnitName="mbar" ControlName="Pressure8.Ramp" InputMode="" Min="0" Max="10000" Description="PC8.DiluPres"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="91. Vent Pre-Exhaust Pressure (PC9)" UnitName="mbar" ControlName="Pressure9.Ramp" InputMode="" Min="0" Max="10000" Description="PC9.VentPre-ExhaustPres"/>
</Group>
</Catalog>

2
App/SicRT/Properties/AssemblyInfo.cs
View File

@ -51,7 +51,7 @@ using System.Windows;
// 可以指定所有值，也可以使用以下所示的 "*" 预置版本号和修订号
// 方法是按如下所示使用“*”: :
[assembly: AssemblyVersion("1.1.11.60709")]
[assembly: AssemblyVersion("1.1.12.60721")]
[assembly: AssemblyInformationalVersion("氮化硅12寸（无EFEM）")]

2
App/SicUI/Properties/AssemblyInfo.cs
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@ -55,6 +55,6 @@ using System.Windows;
// by using the '*' as shown below:
[assembly: AssemblyVersion("1.1.11.60709")]
[assembly: AssemblyVersion("1.1.12.60721")]
[assembly: AssemblyInformationalVersion("氮化硅12寸（无EFEM）")]