diff --git a/App/Modules/SicModules/PMs/RecipeExecutions/PostProcess.cs b/App/Modules/SicModules/PMs/RecipeExecutions/PostProcess.cs
index b5fbb42..114b7f7 100644
--- a/App/Modules/SicModules/PMs/RecipeExecutions/PostProcess.cs
+++ b/App/Modules/SicModules/PMs/RecipeExecutions/PostProcess.cs
@@ -170,8 +170,8 @@ namespace SicModules.PMs.RecipeExecutions
                 SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
                 SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
 
-                ////打开V65
-                //SetIoValueByGroup((int)RoutineStep.SetV65, IoGroupName.V65, true, _IoValueOpenCloseTimeout);
+                //打开V65
+                SetIoValueByGroup((int)RoutineStep.SetV65, IoGroupName.V65, true, _IoValueOpenCloseTimeout);
 
                 //打开V68
                 SetIoValueByGroup((int)RoutineStep.SetV68, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout);
diff --git a/App/Modules/SicModules/PMs/Routines/PMCleanRoutine.cs b/App/Modules/SicModules/PMs/Routines/PMCleanRoutine.cs
index d83e71f..3f6aa53 100644
--- a/App/Modules/SicModules/PMs/Routines/PMCleanRoutine.cs
+++ b/App/Modules/SicModules/PMs/Routines/PMCleanRoutine.cs
@@ -302,8 +302,8 @@ namespace SicModules.PMs.Routines
                 SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
                 SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
 
-                ////打开V65
-                //SetIoValueByGroup((int)RoutineStep.SetV65, IoGroupName.V65, true, _IoValueOpenCloseTimeout);
+                //打开V65
+                SetIoValueByGroup((int)RoutineStep.SetV65, IoGroupName.V65, true, _IoValueOpenCloseTimeout);
 
                 //设置MFC和PC的模式
                 SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All);
diff --git a/App/Modules/SicModules/PMs/Routines/PMProcessAbortRoutine.cs b/App/Modules/SicModules/PMs/Routines/PMProcessAbortRoutine.cs
index f54f613..6459243 100644
--- a/App/Modules/SicModules/PMs/Routines/PMProcessAbortRoutine.cs
+++ b/App/Modules/SicModules/PMs/Routines/PMProcessAbortRoutine.cs
@@ -131,8 +131,8 @@ namespace SicModules.PMs.Routines
                 SetIoValueByGroupNoWait((int)RoutineStep.SetGroupD, IoGroupName.D, true);
                 SetIoValueByGroupNoWait((int)RoutineStep.SetGroupG, IoGroupName.G, true);
 
-                ////打开V65
-                //SetIoValueByGroupNoWait((int)RoutineStep.SetV65, IoGroupName.V65, true);
+                //打开V65
+                SetIoValueByGroupNoWait((int)RoutineStep.SetV65, IoGroupName.V65, true);
 
                 //打开V68
                 SetIoValueByGroupNoWait((int)RoutineStep.SetV68, IoGroupName.GasIn1, true);
diff --git a/App/Modules/SicModules/PMs/Routines/PMPumpRoutine.cs b/App/Modules/SicModules/PMs/Routines/PMPumpRoutine.cs
index c44e4e4..880a804 100644
--- a/App/Modules/SicModules/PMs/Routines/PMPumpRoutine.cs
+++ b/App/Modules/SicModules/PMs/Routines/PMPumpRoutine.cs
@@ -215,8 +215,8 @@ namespace SicModules.PMs.Routines
                 //打开J阀门
                 SetIoValueByGroup((int)RoutineStep.SetGroupJ, IoGroupName.J, true, _IoValueOpenCloseTimeout);
 
-                ////打开V65
-                //SetIoValueByGroup((int)RoutineStep.SetV65, IoGroupName.V65, true, _IoValueOpenCloseTimeout);
+                //打开V65
+                SetIoValueByGroup((int)RoutineStep.SetV65, IoGroupName.V65, true, _IoValueOpenCloseTimeout);
 
                 //打开EPV2
                 SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
diff --git a/App/Modules/SicModules/PMs/Routines/PMPurgeRoutine.cs b/App/Modules/SicModules/PMs/Routines/PMPurgeRoutine.cs
index 00e31fb..cf76dc2 100644
--- a/App/Modules/SicModules/PMs/Routines/PMPurgeRoutine.cs
+++ b/App/Modules/SicModules/PMs/Routines/PMPurgeRoutine.cs
@@ -326,8 +326,8 @@ namespace SicModules.PMs.Routines
                 SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
                 SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
 
-                ////打开V65
-                //SetIoValueByGroup((int)RoutineStep.SetV65, IoGroupName.V65, true, _IoValueOpenCloseTimeout);
+                //打开V65
+                SetIoValueByGroup((int)RoutineStep.SetV65, IoGroupName.V65, true, _IoValueOpenCloseTimeout);
 
                 //设置MFC和PC的模式
                 SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All);
diff --git a/App/Modules/SicModules/PMs/Routines/PMToIsolationRoutine.cs b/App/Modules/SicModules/PMs/Routines/PMToIsolationRoutine.cs
index 5823c4e..5d4e493 100644
--- a/App/Modules/SicModules/PMs/Routines/PMToIsolationRoutine.cs
+++ b/App/Modules/SicModules/PMs/Routines/PMToIsolationRoutine.cs
@@ -150,8 +150,8 @@ namespace SicModules.PMs.Routines
                 SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
                 SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
 
-                ////打开V65
-                //SetIoValueByGroup((int)RoutineStep.SetV65, IoGroupName.V65, true, _IoValueOpenCloseTimeout);
+                //打开V65
+                SetIoValueByGroup((int)RoutineStep.SetV65, IoGroupName.V65, true, _IoValueOpenCloseTimeout);
 
                 //打开D/G 阀门
                 SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
diff --git a/App/Modules/SicModules/PMs/Routines/PMToProcessIdleRoutine.cs b/App/Modules/SicModules/PMs/Routines/PMToProcessIdleRoutine.cs
index c8f4e97..3c29b70 100644
--- a/App/Modules/SicModules/PMs/Routines/PMToProcessIdleRoutine.cs
+++ b/App/Modules/SicModules/PMs/Routines/PMToProcessIdleRoutine.cs
@@ -318,8 +318,8 @@ namespace SicModules.PMs.Routines
                 SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
                 SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
 
-                ////打开V65
-                //SetIoValueByGroup((int)RoutineStep.SetV65, IoGroupName.V65, true, _IoValueOpenCloseTimeout);
+                //打开V65
+                SetIoValueByGroup((int)RoutineStep.SetV65, IoGroupName.V65, true, _IoValueOpenCloseTimeout);
 
                 //设置MFC和PC的模式
                 SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All);
diff --git a/App/Modules/SicModules/PMs/Routines/PMVacIdleRoutine.cs b/App/Modules/SicModules/PMs/Routines/PMVacIdleRoutine.cs
index 79c1ae5..9ecbef1 100644
--- a/App/Modules/SicModules/PMs/Routines/PMVacIdleRoutine.cs
+++ b/App/Modules/SicModules/PMs/Routines/PMVacIdleRoutine.cs
@@ -216,8 +216,8 @@ namespace SicModules.PMs.Routines
                 //打开J阀门
                 SetIoValueByGroup((int)RoutineStep.SetGroupJ, IoGroupName.J, true, _IoValueOpenCloseTimeout);
 
-                ////打开V65
-                //SetIoValueByGroup((int)RoutineStep.SetV65, IoGroupName.V65, true, _IoValueOpenCloseTimeout);
+                //打开V65
+                SetIoValueByGroup((int)RoutineStep.SetV65, IoGroupName.V65, true, _IoValueOpenCloseTimeout);
 
                 //打开EPV2
                 SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
diff --git a/App/SicRT/Config/System.sccfg b/App/SicRT/Config/System.sccfg
index c5d7315..e6e19af 100644
--- a/App/SicRT/Config/System.sccfg
+++ b/App/SicRT/Config/System.sccfg
@@ -100,7 +100,7 @@
 					<config default="Ar"   name="Default"   description="Default Value"   max="" min="" paramter="Ar;H2" tag="ReadOnlySelection" unit="" type="String" visible="true" />
 				</configs>
 				<configs name="SHTotalFlow">
-					<config default="140000"   name="Default"   description="Default Value"   max="200000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="true" />
+					<config default="140000"   name="Default"   description="Default Value"   max="600000" min="0" paramter="" tag="" unit="sccm" type="Integer" visible="true" />
 					<config default="0"   name="Min"   description="Minimum Value"   max="0" min="0" paramter="" tag="" unit="sccm" type="Integer"  visible="false" />
 					<config default="200000"   name="Max"   description="Maximum Value"   max="200000" min="200000" paramter="" tag="" unit="sccm" type="Integer"  visible="false" />
 				</configs>