整理气路图和相关配置内容
This commit is contained in:
hanqiangqiang
parent
ff6c08e69a
commit
ecdeac75ce
@ -1,282 +0,0 @@
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<?xml version="1.0" encoding="utf-8"?>
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<Aitex>
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<TableRecipeFormat RecipeChamberType="Sic" RecipeVersion="1.0">
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<!--###########################################-->
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<Catalog DisplayName="StepInfo">
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<Group DisplayName="Step Information">
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<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Uid" UnitName="" ControlName="StepUid" />
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<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Step" UnitName="" ControlName="StepNo" />
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<Step ModuleName="" DeviceType="" InputType="TextInput" DisplayName="Name" UnitName="" ControlName="Name" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Time" UnitName="s" ControlName="Time" InputMode="" Min="0" Max="10000" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Growth Rate" UnitName="μm/h" ControlName="GrowthRate" InputMode="" Min="0" Max="10000" Description="" />
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</Group>
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</Catalog>
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<Catalog DisplayName="StepInfo">
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<Group DisplayName="SH Flow->SH Total Flow">
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="1. Ar/H2 Switch" UnitName="" ControlName="SHArH2Switch.SetValve" Description="">
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<Item DisplayName="Ar" ControlName="Ar" />
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<Item DisplayName="H2" ControlName="H2" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="2. SH Total Flow" UnitName="sccm" ControlName="SHTotalFlow" InputMode="" Min="0" Max="1000000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="3. Carry Gas Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="4. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="5. Flow Set Mode" UnitName="" ControlName="FlowSetMode" Description="">
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<Item DisplayName="Ramp" ControlName="Ramp" />
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<Item DisplayName="Jump" ControlName="Jump" />
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</Step>
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</Group>
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<Group DisplayName="Pressure -> Rotation">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="6. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="10000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="7. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed" InputMode="" Min="0" Max="10000" Description=""/>
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</Group>
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</Catalog>
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<Catalog DisplayName="StepInfo">
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<Group DisplayName="Temperature -> Control Mode">
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="8. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode" Description="">
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<Item DisplayName="Power" ControlName="Power" />
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<Item DisplayName="Follow" ControlName="PyroFollow" />
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<Item DisplayName="Auto" ControlName="PyroAuto" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="9. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode" Description="">
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<Item DisplayName="Ramp" ControlName="Ramp" />
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<Item DisplayName="Jump" ControlName="Jump" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="10. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2" Description="">
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<Item DisplayName="Power" ControlName="Power" />
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<Item DisplayName="Follow" ControlName="PyroFollow" />
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<Item DisplayName="Auto" ControlName="PyroAuto" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="11. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode" Description="">
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<Item DisplayName="Ramp" ControlName="Ramp" />
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<Item DisplayName="Jump" ControlName="Jump" />
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</Step>
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</Group>
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<Group DisplayName="Temperature -> Temp Setting">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="12. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="13. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="14. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="15. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="16. Middle Temp Ratio" UnitName="%" ControlName="TC1.MiddleTempRatio" InputMode="" Min="0" Max="100" Description="" />
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</Group>
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<Group DisplayName="Temperature -> Heater Output">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="17. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="19. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
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<!--<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU2 Output Limit High" UnitName="%" ControlName="PSU2.SetOutputLimitHighByRecipe" InputMode="" Min="0" Max="100" Description="" />-->
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="20. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="21. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="22. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
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</Group>
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</Catalog>
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<Catalog DisplayName="StepInfo">
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<Group DisplayName="SH Flow->Si Source->Si Source Total Flow">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="23. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
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</Group>
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<Group DisplayName="SH Flow->Si Source->SiH4 Flow">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="24. SiH4 Flow Mode" UnitName="" ControlName="SiH4.SetValve" Description="">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="25. SiH4 Flow (M14)" UnitName="sccm" ControlName="Mfc14.Ramp" InputMode="" Min="0" Max="10000" Description="M14.SiH4Flow"/>
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</Group>
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<Group DisplayName="SH Flow->Si Source->TCS Flow">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="26. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve" Description="">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="27. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="28. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="29. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="30. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
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</Group>
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<Group DisplayName="SH Flow->Si Source->HCl Flow">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="31. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve" Description="">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="32. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
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</Group>
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<Group DisplayName="SH Flow->Si Source->Si Source Split">
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<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="33. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="34. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="37. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
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</Group>
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<Group DisplayName="SH Flow->C Source->C Source Total Flow">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
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</Group>
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<Group DisplayName="SH Flow->C Source->C3H8_C2H4 Flow">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="39. C3H8_C2H4 Flow Mode" UnitName="" ControlName="C2H4.SetValve" Description="">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="40. C3H8_C2H4 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
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</Group>
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<Group DisplayName="SH Flow->C Source->C Source Split">
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<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="41. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="42. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="43. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="44. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="45. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
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</Group>
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<!--<Group DisplayName="SH Flow->Dope->Dope Total Flow">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="46. Dope Total Flow" UnitName="sccm" ControlName="DopeTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
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</Group>-->
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<Group DisplayName="SH Flow->Dope->N2 Flow">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="46. NH3 Flow Mode" UnitName="" ControlName="N2Dilution.SetValve" Description="">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="47. NH3 Actual Flow" UnitName="sccm" ControlName="N2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="48. NH3 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="49. Dilut Flow For NH3 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="50. Diluted NH3 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="51. NH3 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="52. N2 Flow Mode" UnitName="" ControlName="N2HighDoping.SetValve" Description="N2 HIGH FLOW MODE">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="53. N2 Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
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</Group>
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<Group DisplayName="SH Flow->Dope->TMA Flow">
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<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="54. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve" Description="TMA FLOW MODE">
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<Item DisplayName="Purge" ControlName="Purge" />
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<Item DisplayName="Vent" ControlName="Vent" />
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<Item DisplayName="Run" ControlName="Run" />
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</Step>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="55. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="56. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="57. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
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</Group>
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<!--<Group DisplayName="SH Flow->Dope->Dope Split">
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<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="59. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
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</Group>-->
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<Group DisplayName="SH Flow->SH Push Flow">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="58. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="59. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="60. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="61. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="62. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="63. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
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</Group>
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</Catalog>
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<Catalog DisplayName="StepInfo">
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<Group DisplayName="Purge->SH Periphery Purge">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="65. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
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</Group>
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<Group DisplayName="Purge->Chamber Periphery Purge">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="67. GasRing Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="1000000" Description="M32.GasRingPurgeFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
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</Group>
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<Group DisplayName="Purge->Vent Flow">
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="75. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
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<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="76. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
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</Group>
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</Catalog>
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<!--*************************************************************-->
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<ProcessConfig DisplayName="ProcessConfig">
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<Configs DisplayName="Process Config">
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</Configs>
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</ProcessConfig>
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</TableRecipeFormat>
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<TableRecipeSchema>
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<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
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||||
<xs:simpleType name="processType">
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||||
<xs:restriction base="xs:string">
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||||
<xs:enumeration value="Process" />
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||||
<xs:enumeration value="Clean" />
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||||
</xs:restriction>
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||||
</xs:simpleType>
|
||||
<xs:simpleType name="booleanType">
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||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="0" />
|
||||
<xs:enumeration value="1" />
|
||||
<xs:enumeration value="False" />
|
||||
<xs:enumeration value="True" />
|
||||
<xs:enumeration value="false" />
|
||||
<xs:enumeration value="true" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:element name="TableRecipeData">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
<xs:element maxOccurs="unbounded" name="Step">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
|
||||
<xs:element name="Mfc">
|
||||
<xs:complexType>
|
||||
<xs:attribute name="Flow.Gas1" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas2" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas3" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas4" type="xs:double" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
|
||||
</xs:sequence>
|
||||
<xs:attribute name="StepNo" type="xs:string" use="required" />
|
||||
<xs:attribute name="Name" type="xs:string" use="required" />
|
||||
<xs:attribute name="Loop" type="xs:string" use="required" />
|
||||
<xs:attribute name="Type" type="xs:string" use="required" />
|
||||
<xs:attribute name="StepTime" type="xs:time" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:sequence>
|
||||
<xs:attribute name="RecipeChamberType" type="xs:string" fixed="Strip" use="required" />
|
||||
<xs:attribute name="RecipeProcessType" type="xs:string" use="required" />
|
||||
<xs:attribute name="RecipeVersion" type="xs:string" fixed="1.0" use="required" />
|
||||
<xs:attribute name="CreatedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="Description" type="xs:string" use="required" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:schema>
|
||||
</TableRecipeSchema>
|
||||
</Aitex>
|
||||
@ -1,292 +0,0 @@
|
||||
<?xml version="1.0" encoding="utf-8"?>
|
||||
<Aitex>
|
||||
<TableRecipeFormat RecipeChamberType="Sic" RecipeVersion="1.0">
|
||||
|
||||
<!--###########################################-->
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Step Information">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Uid" UnitName="" ControlName="StepUid" />
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Step" UnitName="" ControlName="StepNo" />
|
||||
<Step ModuleName="" DeviceType="" InputType="TextInput" DisplayName="Name" UnitName="" ControlName="Name" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Time" UnitName="s" ControlName="Time" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Growth Rate" UnitName="μm/h" ControlName="GrowthRate" InputMode="" Min="0" Max="10000" Description="" />
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="SH Flow->SH Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="1. Ar/H2 Switch" UnitName="" ControlName="SHArH2Switch.SetValve" Description="">
|
||||
<Item DisplayName="Ar" ControlName="Ar" />
|
||||
<Item DisplayName="H2" ControlName="H2" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="2. SH Total Flow" UnitName="sccm" ControlName="SHTotalFlow" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="3. Carry Gas Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="4. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="5. Flow Set Mode" UnitName="" ControlName="FlowSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Pressure -> Rotation">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="6. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="7. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Temperature -> Control Mode">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="8. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="9. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="10. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="11. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Temp Setting">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="12. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="13. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="14. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="15. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="16. Middle Temp Ratio" UnitName="%" ControlName="TC1.MiddleTempRatio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Heater Output">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="17. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="19. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="20. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="21. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="22. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="23. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->SiH4 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="24. SiH4 Flow Mode" UnitName="" ControlName="SiH4.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="25. SiH4 Flow (M14)" UnitName="sccm" ControlName="Mfc14.Ramp" InputMode="" Min="0" Max="10000" Description="M14.SiH4Flow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->TCS Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="26. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="27. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="28. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="29. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="30. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->HCl Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="31. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="32. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="33. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="34. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="37. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C3H8_C2H4 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="39. C3H8_C2H4 Flow Mode" UnitName="" ControlName="C2H4.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="40. C3H8_C2H4 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
|
||||
|
||||
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="41. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="42. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="43. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="44. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="45. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->Dope Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="46. Dope Total Flow" UnitName="sccm" ControlName="DopeTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
<Group DisplayName="SH Flow->Dope->N2 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="47. N2 Flow Mode" UnitName="" ControlName="N2Dilution.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="48. N2 Actual Flow" UnitName="sccm" ControlName="N2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="49. N2 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="50. Dilut Flow For N2 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="51. Diluted N2 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="52. N2 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="53. N2 Low Flow Mode" UnitName="" ControlName="N2NH3_10LowFlowMode.SetValve" Description="N2 Low flow mode">
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="54. N2 High Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="55. N2 High Flow Mode" UnitName="" ControlName="N2NH3_10HighFlowMode.SetValve" Description="N2 High flow mode">
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="56. N2 High Flow (M30)" UnitName="sccm" ControlName="Mfc30.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->TMA Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="57. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve" Description="TMA FLOW MODE">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="58. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="59. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="60. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->Dope Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="61. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="62. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M20.DopeInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="63. Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19.DopeMidFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. Dope Outer Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M2.DopeOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->SH Push Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="65. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="67. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Purge->SH Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Chamber Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. GasRing Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="1000000" Description="M32.GasRingPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="75. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="76. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="77. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="78. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Vent Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="79. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="80. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="81. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="82. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="83. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="86. Pressure (PC8)" UnitName="mbar" ControlName="Pressure8.Ramp" InputMode="" Min="0" Max="10000" Description="PC8.DiluPres"/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
|
||||
|
||||
|
||||
|
||||
<!--*************************************************************-->
|
||||
<ProcessConfig DisplayName="ProcessConfig">
|
||||
<Configs DisplayName="Process Config">
|
||||
</Configs>
|
||||
</ProcessConfig>
|
||||
|
||||
</TableRecipeFormat>
|
||||
|
||||
<TableRecipeSchema>
|
||||
<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
|
||||
<xs:simpleType name="processType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="Process" />
|
||||
<xs:enumeration value="Clean" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:simpleType name="booleanType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="0" />
|
||||
<xs:enumeration value="1" />
|
||||
<xs:enumeration value="False" />
|
||||
<xs:enumeration value="True" />
|
||||
<xs:enumeration value="false" />
|
||||
<xs:enumeration value="true" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:element name="TableRecipeData">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
<xs:element maxOccurs="unbounded" name="Step">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
|
||||
<xs:element name="Mfc">
|
||||
<xs:complexType>
|
||||
<xs:attribute name="Flow.Gas1" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas2" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas3" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas4" type="xs:double" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
|
||||
</xs:sequence>
|
||||
<xs:attribute name="StepNo" type="xs:string" use="required" />
|
||||
<xs:attribute name="Name" type="xs:string" use="required" />
|
||||
<xs:attribute name="Loop" type="xs:string" use="required" />
|
||||
<xs:attribute name="Type" type="xs:string" use="required" />
|
||||
<xs:attribute name="StepTime" type="xs:time" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:sequence>
|
||||
<xs:attribute name="RecipeChamberType" type="xs:string" fixed="Strip" use="required" />
|
||||
<xs:attribute name="RecipeProcessType" type="xs:string" use="required" />
|
||||
<xs:attribute name="RecipeVersion" type="xs:string" fixed="1.0" use="required" />
|
||||
<xs:attribute name="CreatedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="Description" type="xs:string" use="required" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:schema>
|
||||
</TableRecipeSchema>
|
||||
</Aitex>
|
||||
@ -1,292 +0,0 @@
|
||||
<?xml version="1.0" encoding="utf-8"?>
|
||||
<Aitex>
|
||||
<TableRecipeFormat RecipeChamberType="Sic" RecipeVersion="1.0">
|
||||
|
||||
<!--###########################################-->
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Step Information">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Uid" UnitName="" ControlName="StepUid" />
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Step" UnitName="" ControlName="StepNo" />
|
||||
<Step ModuleName="" DeviceType="" InputType="TextInput" DisplayName="Name" UnitName="" ControlName="Name" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Time" UnitName="s" ControlName="Time" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Growth Rate" UnitName="μm/h" ControlName="GrowthRate" InputMode="" Min="0" Max="10000" Description="" />
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="SH Flow->SH Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="1. Ar/H2 Switch" UnitName="" ControlName="SHArH2Switch.SetValve" Description="">
|
||||
<Item DisplayName="Ar" ControlName="Ar" />
|
||||
<Item DisplayName="H2" ControlName="H2" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="2. SH Total Flow" UnitName="sccm" ControlName="SHTotalFlow" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="3. Carry Gas Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="4. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="5. Flow Set Mode" UnitName="" ControlName="FlowSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Pressure -> Rotation">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="6. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="7. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Temperature -> Control Mode">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="8. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="9. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="10. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="11. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Temp Setting">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="12. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="13. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="14. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="15. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="16. Middle Temp Ratio" UnitName="%" ControlName="TC1.MiddleTempRatio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Heater Output">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="17. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="19. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="20. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="21. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="22. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="23. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->SiH4 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="24. SiH4 Flow Mode" UnitName="" ControlName="SiH4.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="25. SiH4 Flow (M14)" UnitName="sccm" ControlName="Mfc14.Ramp" InputMode="" Min="0" Max="10000" Description="M14.SiH4Flow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->TCS Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="26. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="27. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="28. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="29. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="30. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->HCl Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="31. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="32. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="33. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="34. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="37. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C3H8_C2H4 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="39. C3H8_C2H4 Flow Mode" UnitName="" ControlName="C2H4.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="40. C3H8_C2H4 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
|
||||
|
||||
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="41. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="42. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="43. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="44. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="45. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->Dope Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="46. Dope Total Flow" UnitName="sccm" ControlName="DopeTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
<Group DisplayName="SH Flow->Dope->N2 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="47. N2 Flow Mode" UnitName="" ControlName="N2Dilution.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="48. N2 Actual Flow" UnitName="sccm" ControlName="N2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="49. N2 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="50. Dilut Flow For N2 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="51. Diluted N2 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="52. N2 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="53. N2 Low Flow Mode" UnitName="" ControlName="N2NH3_11LowFlowMode.SetValve" Description="N2 Low flow mode">
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="54. N2 High Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="55. N2 High Flow Mode" UnitName="" ControlName="N2NH3_11HighFlowMode.SetValve" Description="N2 High flow mode">
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="56. N2 High Flow (M30)" UnitName="sccm" ControlName="Mfc30.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->TMA Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="57. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve" Description="TMA FLOW MODE">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="58. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="59. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="60. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->Dope Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="61. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="62. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M20.DopeInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="63. Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19.DopeMidFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. Dope Outer Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M2.DopeOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->SH Push Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="65. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="67. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Purge->SH Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Chamber Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. GasRing Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="1000000" Description="M32.GasRingPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="75. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="76. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="77. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="78. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Vent Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="79. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="80. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="81. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="82. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="83. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="86. Pressure (PC8)" UnitName="mbar" ControlName="Pressure8.Ramp" InputMode="" Min="0" Max="10000" Description="PC8.DiluPres"/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
|
||||
|
||||
|
||||
|
||||
<!--*************************************************************-->
|
||||
<ProcessConfig DisplayName="ProcessConfig">
|
||||
<Configs DisplayName="Process Config">
|
||||
</Configs>
|
||||
</ProcessConfig>
|
||||
|
||||
</TableRecipeFormat>
|
||||
|
||||
<TableRecipeSchema>
|
||||
<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
|
||||
<xs:simpleType name="processType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="Process" />
|
||||
<xs:enumeration value="Clean" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:simpleType name="booleanType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="0" />
|
||||
<xs:enumeration value="1" />
|
||||
<xs:enumeration value="False" />
|
||||
<xs:enumeration value="True" />
|
||||
<xs:enumeration value="false" />
|
||||
<xs:enumeration value="true" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:element name="TableRecipeData">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
<xs:element maxOccurs="unbounded" name="Step">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
|
||||
<xs:element name="Mfc">
|
||||
<xs:complexType>
|
||||
<xs:attribute name="Flow.Gas1" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas2" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas3" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas4" type="xs:double" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
|
||||
</xs:sequence>
|
||||
<xs:attribute name="StepNo" type="xs:string" use="required" />
|
||||
<xs:attribute name="Name" type="xs:string" use="required" />
|
||||
<xs:attribute name="Loop" type="xs:string" use="required" />
|
||||
<xs:attribute name="Type" type="xs:string" use="required" />
|
||||
<xs:attribute name="StepTime" type="xs:time" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:sequence>
|
||||
<xs:attribute name="RecipeChamberType" type="xs:string" fixed="Strip" use="required" />
|
||||
<xs:attribute name="RecipeProcessType" type="xs:string" use="required" />
|
||||
<xs:attribute name="RecipeVersion" type="xs:string" fixed="1.0" use="required" />
|
||||
<xs:attribute name="CreatedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="Description" type="xs:string" use="required" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:schema>
|
||||
</TableRecipeSchema>
|
||||
</Aitex>
|
||||
@ -1,282 +0,0 @@
|
||||
<?xml version="1.0" encoding="utf-8"?>
|
||||
<Aitex>
|
||||
<TableRecipeFormat RecipeChamberType="Sic" RecipeVersion="1.0">
|
||||
|
||||
<!--###########################################-->
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Step Information">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Uid" UnitName="" ControlName="StepUid" />
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Step" UnitName="" ControlName="StepNo" />
|
||||
<Step ModuleName="" DeviceType="" InputType="TextInput" DisplayName="Name" UnitName="" ControlName="Name" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Time" UnitName="s" ControlName="Time" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Growth Rate" UnitName="μm/h" ControlName="GrowthRate" InputMode="" Min="0" Max="10000" Description="" />
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="SH Flow->SH Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="1. Ar/H2 Switch" UnitName="" ControlName="SHArH2Switch.SetValve" Description="">
|
||||
<Item DisplayName="Ar" ControlName="Ar" />
|
||||
<Item DisplayName="H2" ControlName="H2" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="2. SH Total Flow" UnitName="sccm" ControlName="SHTotalFlow" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="3. Carry Gas Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="4. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="5. Flow Set Mode" UnitName="" ControlName="FlowSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Pressure -> Rotation">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="6. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="7. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Temperature -> Control Mode">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="8. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="9. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="10. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="11. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Temp Setting">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="12. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="13. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="14. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="15. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="16. Middle Temp Ratio" UnitName="%" ControlName="TC1.MiddleTempRatio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Heater Output">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="17. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="19. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="20. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="21. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="22. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="23. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->TCS Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="24. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="25. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="26. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="27. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="28. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->HCl Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="29. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="30. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="31. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="32. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="33. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="34. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C3H8_C2H4 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="37. C3H8_C2H4 Flow Mode" UnitName="" ControlName="C2H4.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. C3H8_C2H4 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
|
||||
|
||||
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="39. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="40. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="41. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="42. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="43. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<!--<Group DisplayName="SH Flow->Dope->Dope Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="44. Dope Total Flow" UnitName="sccm" ControlName="DopeTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>-->
|
||||
<Group DisplayName="SH Flow->Dope->N2 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="44. NH3 Flow Mode" UnitName="" ControlName="NH3_2Dilution.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="45. NH3 Actual Flow" UnitName="sccm" ControlName="NH3_2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="46. NH3 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="47. Dilut Flow For NH3 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="48. Diluted NH3 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="49. NH3 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="50. N2 Flow Mode" UnitName="" ControlName="N2NH3_2Doping.SetValve" Description="N2 HIGH FLOW MODE">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="51. N2 Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->TMA Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="52. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve" Description="TMA FLOW MODE">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
<Item DisplayName="LowDoping" ControlName="LowDoping" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="53. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="54. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="55. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
|
||||
</Group>
|
||||
|
||||
<!--<Group DisplayName="SH Flow->Dope->Dope Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="57. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
|
||||
</Group>-->
|
||||
|
||||
<Group DisplayName="SH Flow->SH Push Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="56. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="57. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="58. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="59. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="60. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="61. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="62. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Purge->SH Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="63. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Chamber Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="65. GasRing Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="1000000" Description="M32.GasRingPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="67. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Vent Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Add->New">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="75. V34Value" UnitName="" ControlName="V34Value.SetValve" Description="">
|
||||
<Item DisplayName="Close" ControlName="Close" />
|
||||
<Item DisplayName="Open" ControlName="Open" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="76. V100Value" UnitName="" ControlName="V100Value.SetValve" Description="">
|
||||
<Item DisplayName="Close" ControlName="Close" />
|
||||
<Item DisplayName="Open" ControlName="Open" />
|
||||
</Step>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<!--*************************************************************-->
|
||||
<ProcessConfig DisplayName="ProcessConfig">
|
||||
<Configs DisplayName="Process Config">
|
||||
</Configs>
|
||||
</ProcessConfig>
|
||||
|
||||
</TableRecipeFormat>
|
||||
|
||||
<TableRecipeSchema>
|
||||
<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
|
||||
<xs:simpleType name="processType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="Process" />
|
||||
<xs:enumeration value="Clean" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:simpleType name="booleanType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="0" />
|
||||
<xs:enumeration value="1" />
|
||||
<xs:enumeration value="False" />
|
||||
<xs:enumeration value="True" />
|
||||
<xs:enumeration value="false" />
|
||||
<xs:enumeration value="true" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:element name="TableRecipeData">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
<xs:element maxOccurs="unbounded" name="Step">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
|
||||
<xs:element name="Mfc">
|
||||
<xs:complexType>
|
||||
<xs:attribute name="Flow.Gas1" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas2" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas3" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas4" type="xs:double" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
|
||||
</xs:sequence>
|
||||
<xs:attribute name="StepNo" type="xs:string" use="required" />
|
||||
<xs:attribute name="Name" type="xs:string" use="required" />
|
||||
<xs:attribute name="Loop" type="xs:string" use="required" />
|
||||
<xs:attribute name="Type" type="xs:string" use="required" />
|
||||
<xs:attribute name="StepTime" type="xs:time" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:sequence>
|
||||
<xs:attribute name="RecipeChamberType" type="xs:string" fixed="Strip" use="required" />
|
||||
<xs:attribute name="RecipeProcessType" type="xs:string" use="required" />
|
||||
<xs:attribute name="RecipeVersion" type="xs:string" fixed="1.0" use="required" />
|
||||
<xs:attribute name="CreatedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="Description" type="xs:string" use="required" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:schema>
|
||||
</TableRecipeSchema>
|
||||
</Aitex>
|
||||
@ -1,288 +0,0 @@
|
||||
<?xml version="1.0" encoding="utf-8"?>
|
||||
<Aitex>
|
||||
<TableRecipeFormat RecipeChamberType="Sic" RecipeVersion="1.0">
|
||||
|
||||
<!--###########################################-->
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Step Information">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Uid" UnitName="" ControlName="StepUid" />
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Step" UnitName="" ControlName="StepNo" />
|
||||
<Step ModuleName="" DeviceType="" InputType="TextInput" DisplayName="Name" UnitName="" ControlName="Name" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Time" UnitName="s" ControlName="Time" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Growth Rate" UnitName="μm/h" ControlName="GrowthRate" InputMode="" Min="0" Max="10000" Description="" />
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="SH Flow->SH Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="1. Ar/H2 Switch" UnitName="" ControlName="SHArH2Switch.SetValve" Description="">
|
||||
<Item DisplayName="Ar" ControlName="Ar" />
|
||||
<Item DisplayName="H2" ControlName="H2" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="2. SH Total Flow" UnitName="sccm" ControlName="SHTotalFlow" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="3. Carry Gas Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="4. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="5. Flow Set Mode" UnitName="" ControlName="FlowSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Pressure -> Rotation">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="6. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="7. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Temperature -> Control Mode">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="8. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="9. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="10. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="11. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Temp Setting">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="12. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="13. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="14. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="15. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="16. Middle Temp Ratio" UnitName="%" ControlName="TC1.MiddleTempRatio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Heater Output">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="17. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="19. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="20. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="21. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="22. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="23. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->TCS Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="24. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="25. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="26. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="27. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="28. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->HCl Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="29. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="30. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="31. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="32. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="33. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="34. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C3H8_C2H4 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="37. C3H8_C2H4 Flow Mode" UnitName="" ControlName="C2H4.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. C3H8_C2H4 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
|
||||
|
||||
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="39. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="40. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="41. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="42. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="43. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->Dope Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="44. Dope Total Flow" UnitName="sccm" ControlName="DopeTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
<Group DisplayName="SH Flow->Dope->N2 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="45. N2 Flow Mode" UnitName="" ControlName="N2NH3_13Doping.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="46. N2 Actual Flow" UnitName="sccm" ControlName="N2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="47. N2 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="48. Dilut Flow For N2 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="49. Diluted N2 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="50. N2 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="51. N2 Low Flow Mode" UnitName="" ControlName="N2NH3_8LowFlowMode.SetValve" Description="N2 Low flow mode">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="52. N2 High Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="53. N2 High Flow Mode" UnitName="" ControlName="N2NH3_8HighFlowMode.SetValve" Description="N2 High flow mode">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->TMA Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="54. TMA Flow Mode" UnitName="" ControlName="TMANH3_13.SetValve" Description="TMA FLOW MODE">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
<Item DisplayName="LowDopingVent" ControlName="LowDopingVent" />
|
||||
<Item DisplayName="LowDopingRun" ControlName="LowDopingRun" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="55. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="56. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="57. TMA Push Flow (M21)" UnitName="sccm" ControlName="Mfc21.Ramp" InputMode="" Min="0" Max="10000" Description="M21.TMA Flow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="58. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->Dope Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="59. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="60. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M20.DopeInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="61. Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19.DopeMidFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="62. Dope Outer Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M2.DopeOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->SH Push Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="63. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="65. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="67. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Purge->SH Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Chamber Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. GasRing Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="1000000" Description="M32.GasRingPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="75. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="76. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Vent Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="77. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="78. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="79. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="80. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="81. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="82. Pressure (PC8)" UnitName="mbar" ControlName="Pressure8.Ramp" InputMode="" Min="0" Max="10000" Description="PC8.DiluPres"/>
|
||||
|
||||
</Group>
|
||||
|
||||
</Catalog>
|
||||
|
||||
|
||||
|
||||
|
||||
|
||||
<!--*************************************************************-->
|
||||
<ProcessConfig DisplayName="ProcessConfig">
|
||||
<Configs DisplayName="Process Config">
|
||||
</Configs>
|
||||
</ProcessConfig>
|
||||
|
||||
</TableRecipeFormat>
|
||||
|
||||
<TableRecipeSchema>
|
||||
<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
|
||||
<xs:simpleType name="processType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="Process" />
|
||||
<xs:enumeration value="Clean" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:simpleType name="booleanType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="0" />
|
||||
<xs:enumeration value="1" />
|
||||
<xs:enumeration value="False" />
|
||||
<xs:enumeration value="True" />
|
||||
<xs:enumeration value="false" />
|
||||
<xs:enumeration value="true" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:element name="TableRecipeData">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
<xs:element maxOccurs="unbounded" name="Step">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
|
||||
<xs:element name="Mfc">
|
||||
<xs:complexType>
|
||||
<xs:attribute name="Flow.Gas1" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas2" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas3" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas4" type="xs:double" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
|
||||
</xs:sequence>
|
||||
<xs:attribute name="StepNo" type="xs:string" use="required" />
|
||||
<xs:attribute name="Name" type="xs:string" use="required" />
|
||||
<xs:attribute name="Loop" type="xs:string" use="required" />
|
||||
<xs:attribute name="Type" type="xs:string" use="required" />
|
||||
<xs:attribute name="StepTime" type="xs:time" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:sequence>
|
||||
<xs:attribute name="RecipeChamberType" type="xs:string" fixed="Strip" use="required" />
|
||||
<xs:attribute name="RecipeProcessType" type="xs:string" use="required" />
|
||||
<xs:attribute name="RecipeVersion" type="xs:string" fixed="1.0" use="required" />
|
||||
<xs:attribute name="CreatedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="Description" type="xs:string" use="required" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:schema>
|
||||
</TableRecipeSchema>
|
||||
</Aitex>
|
||||
@ -1,291 +0,0 @@
|
||||
<?xml version="1.0" encoding="utf-8"?>
|
||||
<Aitex>
|
||||
<TableRecipeFormat RecipeChamberType="Sic" RecipeVersion="1.0">
|
||||
|
||||
<!--###########################################-->
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Step Information">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Uid" UnitName="" ControlName="StepUid" />
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Step" UnitName="" ControlName="StepNo" />
|
||||
<Step ModuleName="" DeviceType="" InputType="TextInput" DisplayName="Name" UnitName="" ControlName="Name" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Time" UnitName="s" ControlName="Time" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Growth Rate" UnitName="μm/h" ControlName="GrowthRate" InputMode="" Min="0" Max="10000" Description="" />
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="SH Flow->SH Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="1. Ar/H2 Switch" UnitName="" ControlName="SHArH2Switch.SetValve" Description="">
|
||||
<Item DisplayName="Ar" ControlName="Ar" />
|
||||
<Item DisplayName="H2" ControlName="H2" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="2. SH Total Flow" UnitName="sccm" ControlName="SHTotalFlow" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="3. Carry Gas Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="4. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="5. Flow Set Mode" UnitName="" ControlName="FlowSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Pressure -> Rotation">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="6. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="7. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Temperature -> Control Mode">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="8. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="9. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="10. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="11. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Temp Setting">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="12. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="13. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="14. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="15. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="16. Middle Temp Ratio" UnitName="%" ControlName="TC1.MiddleTempRatio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Heater Output">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="17. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="19. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="20. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="21. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="22. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="23. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->TCS Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="24. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="25. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="26. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="27. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="28. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->HCl Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="29. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="30. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="31. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="32. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="33. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="34. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C3H8_C2H4 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="37. C3H8_C2H4 Flow Mode" UnitName="" ControlName="C2H4.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. C3H8_C2H4 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
|
||||
|
||||
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="39. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="40. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="41. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="42. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="43. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->Dope Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="44. Dope Total Flow" UnitName="sccm" ControlName="DopeTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
<Group DisplayName="SH Flow->Dope->N2 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="45. N2 Flow Mode" UnitName="" ControlName="N2Dilution.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="46. N2 Actual Flow" UnitName="sccm" ControlName="N2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="47. N2 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="48. Dilut Flow For N2 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="49. Diluted N2 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="50. N2 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="51. N2 Low Flow Mode" UnitName="" ControlName="N2NH3_8LowFlowMode.SetValve" Description="N2 Low flow mode">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="52. N2 High Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="53. N2 High Flow Mode" UnitName="" ControlName="N2NH3_8HighFlowMode.SetValve" Description="N2 High flow mode">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="54. N2 High Flow (M30)" UnitName="sccm" ControlName="Mfc30.Ramp" InputMode="" Min="0" Max="10000" Description="M30.PN2Flow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->TMA Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="55. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve" Description="TMA FLOW MODE">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="56. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="57. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="58. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->Dope Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="59. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="60. Dope Push Pressure (PC5)" UnitName="mbar" ControlName="Pressure5.Ramp" InputMode="" Min="0" Max="10000" Description="PC5.DopePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="60. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M20.DopeInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="61. Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19.DopeMidFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="62. Dope Outer Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M2.DopeOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->SH Push Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="63. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="65. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="67. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Purge->SH Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Chamber Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. GasRing Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="1000000" Description="M32.GasRingPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="75. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="76. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Vent Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="77. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="78. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="79. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="80. Vent Pre-Exhaust Pressure (PC9)" UnitName="mbar" ControlName="Pressure9.Ramp" InputMode="" Min="0" Max="10000" Description="PC9.VentPre-ExhaustPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="81. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="82. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="83. Pressure (PC8)" UnitName="mbar" ControlName="Pressure8.Ramp" InputMode="" Min="0" Max="10000" Description="PC8.DiluPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="84. V47Value" UnitName="" ControlName="V47Value.SetValve" Description="">
|
||||
<Item DisplayName="Close" ControlName="Close" />
|
||||
<Item DisplayName="Open" ControlName="Open" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
</Catalog>
|
||||
|
||||
|
||||
|
||||
|
||||
|
||||
<!--*************************************************************-->
|
||||
<ProcessConfig DisplayName="ProcessConfig">
|
||||
<Configs DisplayName="Process Config">
|
||||
</Configs>
|
||||
</ProcessConfig>
|
||||
|
||||
</TableRecipeFormat>
|
||||
|
||||
<TableRecipeSchema>
|
||||
<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
|
||||
<xs:simpleType name="processType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="Process" />
|
||||
<xs:enumeration value="Clean" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:simpleType name="booleanType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="0" />
|
||||
<xs:enumeration value="1" />
|
||||
<xs:enumeration value="False" />
|
||||
<xs:enumeration value="True" />
|
||||
<xs:enumeration value="false" />
|
||||
<xs:enumeration value="true" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:element name="TableRecipeData">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
<xs:element maxOccurs="unbounded" name="Step">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
|
||||
<xs:element name="Mfc">
|
||||
<xs:complexType>
|
||||
<xs:attribute name="Flow.Gas1" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas2" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas3" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas4" type="xs:double" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
|
||||
</xs:sequence>
|
||||
<xs:attribute name="StepNo" type="xs:string" use="required" />
|
||||
<xs:attribute name="Name" type="xs:string" use="required" />
|
||||
<xs:attribute name="Loop" type="xs:string" use="required" />
|
||||
<xs:attribute name="Type" type="xs:string" use="required" />
|
||||
<xs:attribute name="StepTime" type="xs:time" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:sequence>
|
||||
<xs:attribute name="RecipeChamberType" type="xs:string" fixed="Strip" use="required" />
|
||||
<xs:attribute name="RecipeProcessType" type="xs:string" use="required" />
|
||||
<xs:attribute name="RecipeVersion" type="xs:string" fixed="1.0" use="required" />
|
||||
<xs:attribute name="CreatedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="Description" type="xs:string" use="required" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:schema>
|
||||
</TableRecipeSchema>
|
||||
</Aitex>
|
||||
@ -1,293 +0,0 @@
|
||||
<?xml version="1.0" encoding="utf-8"?>
|
||||
<Aitex>
|
||||
<TableRecipeFormat RecipeChamberType="Sic" RecipeVersion="1.0">
|
||||
|
||||
<!--###########################################-->
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Step Information">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Uid" UnitName="" ControlName="StepUid" />
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Step" UnitName="" ControlName="StepNo" />
|
||||
<Step ModuleName="" DeviceType="" InputType="TextInput" DisplayName="Name" UnitName="" ControlName="Name" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Time" UnitName="s" ControlName="Time" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Growth Rate" UnitName="μm/h" ControlName="GrowthRate" InputMode="" Min="0" Max="10000" Description="" />
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="SH Flow->SH Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="1. Ar/H2 Switch" UnitName="" ControlName="SHArH2Switch.SetValve" Description="">
|
||||
<Item DisplayName="Ar" ControlName="Ar" />
|
||||
<Item DisplayName="H2" ControlName="H2" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="2. SH Total Flow" UnitName="sccm" ControlName="SHTotalFlow" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="3. Carry Gas Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="4. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="5. Flow Set Mode" UnitName="" ControlName="FlowSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Pressure -> Rotation">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="6. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="7. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Temperature -> Control Mode">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="8. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="9. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="10. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="11. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Temp Setting">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="12. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="13. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="14. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="15. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="16. Middle Temp Ratio" UnitName="%" ControlName="TC1.MiddleTempRatio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Heater Output">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="17. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="19. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="20. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="21. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="22. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="23. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->SiH4 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="24. SiH4 Flow Mode" UnitName="" ControlName="SiH4.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="25. SiH4 Flow (M14)" UnitName="sccm" ControlName="Mfc14.Ramp" InputMode="" Min="0" Max="10000" Description="M14.SiH4Flow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->TCS Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="26. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="27. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="28. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="29. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="30. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->HCl Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="31. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="32. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="33. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="34. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="37. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C3H8_C2H4 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="39. C3H8_C2H4 Flow Mode" UnitName="" ControlName="C2H4.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="40. C3H8_C2H4 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
|
||||
|
||||
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="41. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="42. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="43. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="44. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="45. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->Dope Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="46. Dope Total Flow" UnitName="sccm" ControlName="DopeTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
<Group DisplayName="SH Flow->Dope->N2 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="47. N2 Flow Mode" UnitName="" ControlName="N2Dilution.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="48. N2 Actual Flow" UnitName="sccm" ControlName="N2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="49. N2 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="50. Dilut Flow For N2 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="51. Diluted N2 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="52. N2 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="53. N2 Low Flow Mode" UnitName="" ControlName="N2NH3_16LowFlowMode.SetValve" Description="N2 Low flow mode">
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="54. N2 High Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="55. N2 High Flow Mode" UnitName="" ControlName="N2NH3_16HighFlowMode.SetValve" Description="N2 High flow mode">
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="56. N2 High Flow (M30)" UnitName="sccm" ControlName="Mfc30.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->TMA Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="57. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve" Description="TMA FLOW MODE">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="58. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="59. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="60. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->Dope Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="61. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="62. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M20.DopeInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="63. Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19.DopeMidFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. Dope Outer Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M2.DopeOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->SH Push Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="65. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="67. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Purge->SH Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Chamber Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. GasRing Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="1000000" Description="M32.GasRingPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="75. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="76. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="77. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="78. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Vent Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="79. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="80. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="81. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="82. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="83. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="86. Pressure (PC8)" UnitName="mbar" ControlName="Pressure8.Ramp" InputMode="" Min="0" Max="10000" Description="PC8.DiluPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="86. Pressure (PC9)" UnitName="mbar" ControlName="Pressure9.Ramp" InputMode="" Min="0" Max="10000" Description="PC9.DiluPres"/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
|
||||
|
||||
|
||||
|
||||
<!--*************************************************************-->
|
||||
<ProcessConfig DisplayName="ProcessConfig">
|
||||
<Configs DisplayName="Process Config">
|
||||
</Configs>
|
||||
</ProcessConfig>
|
||||
|
||||
</TableRecipeFormat>
|
||||
|
||||
<TableRecipeSchema>
|
||||
<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
|
||||
<xs:simpleType name="processType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="Process" />
|
||||
<xs:enumeration value="Clean" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:simpleType name="booleanType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="0" />
|
||||
<xs:enumeration value="1" />
|
||||
<xs:enumeration value="False" />
|
||||
<xs:enumeration value="True" />
|
||||
<xs:enumeration value="false" />
|
||||
<xs:enumeration value="true" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:element name="TableRecipeData">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
<xs:element maxOccurs="unbounded" name="Step">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
|
||||
<xs:element name="Mfc">
|
||||
<xs:complexType>
|
||||
<xs:attribute name="Flow.Gas1" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas2" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas3" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas4" type="xs:double" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
|
||||
</xs:sequence>
|
||||
<xs:attribute name="StepNo" type="xs:string" use="required" />
|
||||
<xs:attribute name="Name" type="xs:string" use="required" />
|
||||
<xs:attribute name="Loop" type="xs:string" use="required" />
|
||||
<xs:attribute name="Type" type="xs:string" use="required" />
|
||||
<xs:attribute name="StepTime" type="xs:time" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:sequence>
|
||||
<xs:attribute name="RecipeChamberType" type="xs:string" fixed="Strip" use="required" />
|
||||
<xs:attribute name="RecipeProcessType" type="xs:string" use="required" />
|
||||
<xs:attribute name="RecipeVersion" type="xs:string" fixed="1.0" use="required" />
|
||||
<xs:attribute name="CreatedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="Description" type="xs:string" use="required" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:schema>
|
||||
</TableRecipeSchema>
|
||||
</Aitex>
|
||||
@ -1,276 +0,0 @@
|
||||
<?xml version="1.0" encoding="utf-8"?>
|
||||
<Aitex>
|
||||
<TableRecipeFormat RecipeChamberType="Sic" RecipeVersion="1.0">
|
||||
|
||||
<!--###########################################-->
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Step Information">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Uid" UnitName="" ControlName="StepUid" />
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Step" UnitName="" ControlName="StepNo" />
|
||||
<Step ModuleName="" DeviceType="" InputType="TextInput" DisplayName="Name" UnitName="" ControlName="Name" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Time" UnitName="s" ControlName="Time" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Growth Rate" UnitName="μm/h" ControlName="GrowthRate" InputMode="" Min="0" Max="10000" Description="" />
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="SH Flow->SH Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="1. Ar/H2 Switch" UnitName="" ControlName="SHArH2Switch.SetValve" Description="">
|
||||
<Item DisplayName="Ar" ControlName="Ar" />
|
||||
<Item DisplayName="H2" ControlName="H2" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="2. SH Total Flow" UnitName="sccm" ControlName="SHTotalFlow" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="3. Carry Gas Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="4. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="5. Flow Set Mode" UnitName="" ControlName="FlowSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Pressure -> Rotation">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="6. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="7. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Temperature -> Control Mode">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="8. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="9. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="10. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="11. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Temp Setting">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="12. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="13. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="14. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="15. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="16. Middle Temp Ratio" UnitName="%" ControlName="TC1.MiddleTempRatio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Heater Output">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="17. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="19. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="20. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="21. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="22. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="23. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->TCS Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="24. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="25. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="26. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="27. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="28. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->HCl Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="29. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="30. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="31. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="32. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="33. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="34. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C3H8_C2H4 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="37. C3H8_C2H4 Flow Mode" UnitName="" ControlName="C2H4.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. C3H8_C2H4 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
|
||||
|
||||
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="39. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="40. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="41. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="42. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="43. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<!--<Group DisplayName="SH Flow->Dope->Dope Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="44. Dope Total Flow" UnitName="sccm" ControlName="DopeTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>-->
|
||||
<Group DisplayName="SH Flow->Dope->N2 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="44. NH3 Flow Mode" UnitName="" ControlName="NH3_2Dilution.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="45. NH3 Actual Flow" UnitName="sccm" ControlName="NH3_2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="46. NH3 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="47. Dilut Flow For NH3 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="48. Diluted NH3 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="49. NH3 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="50. N2 Low Flow Mode" UnitName="" ControlName="N2NH3_8LowFlowMode.SetValve" Description="N2 Low flow mode">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="51. N2 High Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="52. N2 High Flow Mode" UnitName="" ControlName="N2NH3_8HighFlowMode.SetValve" Description="N2 High flow mode">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->TMA Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="53. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve" Description="TMA FLOW MODE">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="54. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="55. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="56. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->Dope Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="57. Dope Push Pressure (PC5)" UnitName="mbar" ControlName="Pressure5.Ramp" InputMode="" Min="0" Max="10000" Description="PC5.DopePushPressure"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->SH Push Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="58. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="59. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="60. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="61. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="62. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="63. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Purge->SH Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="65. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Chamber Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="67. GasRing Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="1000000" Description="M32.GasRingPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Vent Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="75. Vent Pre-Exhaust Pressure (PC9)" UnitName="mbar" ControlName="Pressure9.Ramp" InputMode="" Min="0" Max="10000" Description="PC9.VentPre-ExhaustPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="76. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="77. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<!--*************************************************************-->
|
||||
<ProcessConfig DisplayName="ProcessConfig">
|
||||
<Configs DisplayName="Process Config">
|
||||
</Configs>
|
||||
</ProcessConfig>
|
||||
|
||||
</TableRecipeFormat>
|
||||
|
||||
<TableRecipeSchema>
|
||||
<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
|
||||
<xs:simpleType name="processType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="Process" />
|
||||
<xs:enumeration value="Clean" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:simpleType name="booleanType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="0" />
|
||||
<xs:enumeration value="1" />
|
||||
<xs:enumeration value="False" />
|
||||
<xs:enumeration value="True" />
|
||||
<xs:enumeration value="false" />
|
||||
<xs:enumeration value="true" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:element name="TableRecipeData">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
<xs:element maxOccurs="unbounded" name="Step">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
|
||||
<xs:element name="Mfc">
|
||||
<xs:complexType>
|
||||
<xs:attribute name="Flow.Gas1" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas2" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas3" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas4" type="xs:double" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
|
||||
</xs:sequence>
|
||||
<xs:attribute name="StepNo" type="xs:string" use="required" />
|
||||
<xs:attribute name="Name" type="xs:string" use="required" />
|
||||
<xs:attribute name="Loop" type="xs:string" use="required" />
|
||||
<xs:attribute name="Type" type="xs:string" use="required" />
|
||||
<xs:attribute name="StepTime" type="xs:time" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:sequence>
|
||||
<xs:attribute name="RecipeChamberType" type="xs:string" fixed="Strip" use="required" />
|
||||
<xs:attribute name="RecipeProcessType" type="xs:string" use="required" />
|
||||
<xs:attribute name="RecipeVersion" type="xs:string" fixed="1.0" use="required" />
|
||||
<xs:attribute name="CreatedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="Description" type="xs:string" use="required" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:schema>
|
||||
</TableRecipeSchema>
|
||||
</Aitex>
|
||||
@ -1,271 +0,0 @@
|
||||
<?xml version="1.0" encoding="utf-8"?>
|
||||
<Aitex>
|
||||
<TableRecipeFormat RecipeChamberType="Sic" RecipeVersion="1.0">
|
||||
|
||||
<!--###########################################-->
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Step Information">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Uid" UnitName="" ControlName="StepUid" />
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Step" UnitName="" ControlName="StepNo" />
|
||||
<Step ModuleName="" DeviceType="" InputType="TextInput" DisplayName="Name" UnitName="" ControlName="Name" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Time" UnitName="s" ControlName="Time" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Growth Rate" UnitName="μm/h" ControlName="GrowthRate" InputMode="" Min="0" Max="10000" Description="" />
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="SH Flow->SH Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="1. Ar/H2 Switch" UnitName="" ControlName="SHArH2Switch.SetValve" Description="">
|
||||
<Item DisplayName="Ar" ControlName="Ar" />
|
||||
<Item DisplayName="H2" ControlName="H2" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="2. SH Total Flow" UnitName="sccm" ControlName="SHTotalFlow" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="3. Carry Gas Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="4. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="5. Flow Set Mode" UnitName="" ControlName="FlowSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Pressure -> Rotation">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="6. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="7. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Temperature -> Control Mode">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="8. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="9. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="10. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="11. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Temp Setting">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="12. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="13. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="14. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="15. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="16. Middle Temp Ratio" UnitName="%" ControlName="TC1.MiddleTempRatio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Heater Output">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="17. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="19. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="20. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="21. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="22. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="23. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->TCS Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="24. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="25. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="26. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="27. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="28. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->HCl Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="29. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="30. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="31. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="32. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="33. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="34. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C3H8_C2H4 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="37. C3H8_C2H4 Flow Mode" UnitName="" ControlName="C2H4.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. C3H8_C2H4 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
|
||||
|
||||
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="39. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="40. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="41. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="42. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="43. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<!--<Group DisplayName="SH Flow->Dope->Dope Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="44. Dope Total Flow" UnitName="sccm" ControlName="DopeTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>-->
|
||||
<Group DisplayName="SH Flow->Dope->N2 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="44. NH3 Flow Mode" UnitName="" ControlName="NH3_2Dilution.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="45. NH3 Actual Flow" UnitName="sccm" ControlName="NH3_2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="46. NH3 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="47. Dilut Flow For NH3 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="48. Diluted NH3 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="49. NH3 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="50. N2 Flow Mode" UnitName="" ControlName="N2NH3_2Doping.SetValve" Description="N2 HIGH FLOW MODE">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="51. N2 Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->TMA Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="52. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve" Description="TMA FLOW MODE">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="53. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="54. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="55. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->Dope Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="56. Dope Push Pressure (PC5)" UnitName="mbar" ControlName="Pressure5.Ramp" InputMode="" Min="0" Max="10000" Description="PC5.DopePushPressure"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->SH Push Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="57. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="58. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="59. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="60. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="61. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="62. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="63. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Purge->SH Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="65. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Chamber Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. GasRing Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="1000000" Description="M32.GasRingPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="67. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Vent Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. Vent Pre-Exhaust Pressure (PC9)" UnitName="mbar" ControlName="Pressure9.Ramp" InputMode="" Min="0" Max="10000" Description="PC9.VentPre-ExhaustPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="75. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="76. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<!--*************************************************************-->
|
||||
<ProcessConfig DisplayName="ProcessConfig">
|
||||
<Configs DisplayName="Process Config">
|
||||
</Configs>
|
||||
</ProcessConfig>
|
||||
|
||||
</TableRecipeFormat>
|
||||
|
||||
<TableRecipeSchema>
|
||||
<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
|
||||
<xs:simpleType name="processType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="Process" />
|
||||
<xs:enumeration value="Clean" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:simpleType name="booleanType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="0" />
|
||||
<xs:enumeration value="1" />
|
||||
<xs:enumeration value="False" />
|
||||
<xs:enumeration value="True" />
|
||||
<xs:enumeration value="false" />
|
||||
<xs:enumeration value="true" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:element name="TableRecipeData">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
<xs:element maxOccurs="unbounded" name="Step">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
|
||||
<xs:element name="Mfc">
|
||||
<xs:complexType>
|
||||
<xs:attribute name="Flow.Gas1" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas2" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas3" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas4" type="xs:double" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
|
||||
</xs:sequence>
|
||||
<xs:attribute name="StepNo" type="xs:string" use="required" />
|
||||
<xs:attribute name="Name" type="xs:string" use="required" />
|
||||
<xs:attribute name="Loop" type="xs:string" use="required" />
|
||||
<xs:attribute name="Type" type="xs:string" use="required" />
|
||||
<xs:attribute name="StepTime" type="xs:time" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:sequence>
|
||||
<xs:attribute name="RecipeChamberType" type="xs:string" fixed="Strip" use="required" />
|
||||
<xs:attribute name="RecipeProcessType" type="xs:string" use="required" />
|
||||
<xs:attribute name="RecipeVersion" type="xs:string" fixed="1.0" use="required" />
|
||||
<xs:attribute name="CreatedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="Description" type="xs:string" use="required" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:schema>
|
||||
</TableRecipeSchema>
|
||||
</Aitex>
|
||||
@ -1,290 +0,0 @@
|
||||
<?xml version="1.0" encoding="utf-8"?>
|
||||
<Aitex>
|
||||
<TableRecipeFormat RecipeChamberType="Sic" RecipeVersion="1.0">
|
||||
|
||||
<!--###########################################-->
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Step Information">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Uid" UnitName="" ControlName="StepUid" />
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Step" UnitName="" ControlName="StepNo" />
|
||||
<Step ModuleName="" DeviceType="" InputType="TextInput" DisplayName="Name" UnitName="" ControlName="Name" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Time" UnitName="s" ControlName="Time" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Growth Rate" UnitName="μm/h" ControlName="GrowthRate" InputMode="" Min="0" Max="10000" Description="" />
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="SH Flow->SH Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="1. Ar/H2 Switch" UnitName="" ControlName="SHArH2Switch.SetValve" Description="">
|
||||
<Item DisplayName="Ar" ControlName="Ar" />
|
||||
<Item DisplayName="H2" ControlName="H2" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="2. SH Total Flow" UnitName="sccm" ControlName="SHTotalFlow" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="3. Carry Gas Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="4. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="5. Flow Set Mode" UnitName="" ControlName="FlowSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Pressure -> Rotation">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="6. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="7. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Temperature -> Control Mode">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="8. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="9. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="10. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="11. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Temp Setting">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="12. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="13. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="14. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="15. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="16. Middle Temp Ratio" UnitName="%" ControlName="TC1.MiddleTempRatio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Heater Output">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="17. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="19. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="20. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="21. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="22. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="23. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->TCS Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="24. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="25. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="26. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="27. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="28. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->HCl Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="29. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="30. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="31. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="32. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="33. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="34. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C3H8_C2H4 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="37. C3H8_C2H4 Flow Mode" UnitName="" ControlName="C2H4.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. C3H8_C2H4 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
|
||||
|
||||
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="39. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="40. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="41. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="42. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="43. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->Dope Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="44. Dope Total Flow" UnitName="sccm" ControlName="DopeTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
<Group DisplayName="SH Flow->Dope->N2 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="45. N2 Flow Mode" UnitName="" ControlName="N2NH3_13Doping.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="46. N2 Actual Flow" UnitName="sccm" ControlName="N2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="47. N2 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="48. Dilut Flow For N2 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="49. Diluted N2 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="50. N2 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="51. N2 Low Flow Mode" UnitName="" ControlName="N2NH3_8LowFlowMode.SetValve" Description="N2 Low flow mode">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="52. N2 High Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="53. N2 High Flow Mode" UnitName="" ControlName="N2NH3_8HighFlowMode.SetValve" Description="N2 High flow mode">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->TMA Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="54. TMA Flow Mode" UnitName="" ControlName="TMANH3_13.SetValve" Description="TMA FLOW MODE">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
<Item DisplayName="LowDopingVent" ControlName="LowDopingVent" />
|
||||
<Item DisplayName="LowDopingRun" ControlName="LowDopingRun" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="55. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="56. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="57. TMA Push Flow (M21)" UnitName="sccm" ControlName="Mfc21.Ramp" InputMode="" Min="0" Max="10000" Description="M21.TMA Flow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="58. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->Dope Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="59. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="60. Dope Push Pressure (PC5)" UnitName="mbar" ControlName="Pressure5.Ramp" InputMode="" Min="0" Max="10000" Description="PC5.DopePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="61. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M20.DopeInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="62. Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19.DopeMidFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="63. Dope Outer Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M2.DopeOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->SH Push Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="65. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="67. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Purge->SH Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Chamber Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. GasRing Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="1000000" Description="M32.GasRingPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="75. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="76. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="77. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Vent Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="78. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="79. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="80. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="81. Vent Pre-Exhaust Pressure (PC9)" UnitName="mbar" ControlName="Pressure9.Ramp" InputMode="" Min="0" Max="10000" Description="PC9.VentPre-ExhaustPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="82. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="83. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="84. Pressure (PC8)" UnitName="mbar" ControlName="Pressure8.Ramp" InputMode="" Min="0" Max="10000" Description="PC8.DiluPres"/>
|
||||
|
||||
</Group>
|
||||
|
||||
</Catalog>
|
||||
|
||||
|
||||
|
||||
|
||||
|
||||
<!--*************************************************************-->
|
||||
<ProcessConfig DisplayName="ProcessConfig">
|
||||
<Configs DisplayName="Process Config">
|
||||
</Configs>
|
||||
</ProcessConfig>
|
||||
|
||||
</TableRecipeFormat>
|
||||
|
||||
<TableRecipeSchema>
|
||||
<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
|
||||
<xs:simpleType name="processType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="Process" />
|
||||
<xs:enumeration value="Clean" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:simpleType name="booleanType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="0" />
|
||||
<xs:enumeration value="1" />
|
||||
<xs:enumeration value="False" />
|
||||
<xs:enumeration value="True" />
|
||||
<xs:enumeration value="false" />
|
||||
<xs:enumeration value="true" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:element name="TableRecipeData">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
<xs:element maxOccurs="unbounded" name="Step">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
|
||||
<xs:element name="Mfc">
|
||||
<xs:complexType>
|
||||
<xs:attribute name="Flow.Gas1" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas2" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas3" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas4" type="xs:double" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
|
||||
</xs:sequence>
|
||||
<xs:attribute name="StepNo" type="xs:string" use="required" />
|
||||
<xs:attribute name="Name" type="xs:string" use="required" />
|
||||
<xs:attribute name="Loop" type="xs:string" use="required" />
|
||||
<xs:attribute name="Type" type="xs:string" use="required" />
|
||||
<xs:attribute name="StepTime" type="xs:time" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:sequence>
|
||||
<xs:attribute name="RecipeChamberType" type="xs:string" fixed="Strip" use="required" />
|
||||
<xs:attribute name="RecipeProcessType" type="xs:string" use="required" />
|
||||
<xs:attribute name="RecipeVersion" type="xs:string" fixed="1.0" use="required" />
|
||||
<xs:attribute name="CreatedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="Description" type="xs:string" use="required" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:schema>
|
||||
</TableRecipeSchema>
|
||||
</Aitex>
|
||||
@ -1,270 +0,0 @@
|
||||
<?xml version="1.0" encoding="utf-8"?>
|
||||
<Aitex>
|
||||
<TableRecipeFormat RecipeChamberType="Sic" RecipeVersion="1.0">
|
||||
|
||||
<!--###########################################-->
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Step Information">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Uid" UnitName="" ControlName="StepUid" />
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Step" UnitName="" ControlName="StepNo" />
|
||||
<Step ModuleName="" DeviceType="" InputType="TextInput" DisplayName="Name" UnitName="" ControlName="Name" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Time" UnitName="s" ControlName="Time" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Growth Rate" UnitName="μm/h" ControlName="GrowthRate" InputMode="" Min="0" Max="10000" Description="" />
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="SH Flow->SH Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="1. Ar/H2 Switch" UnitName="" ControlName="SHArH2Switch.SetValve" Description="">
|
||||
<Item DisplayName="Ar" ControlName="Ar" />
|
||||
<Item DisplayName="H2" ControlName="H2" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="2. SH Total Flow" UnitName="sccm" ControlName="SHTotalFlow" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="3. Carry Gas Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="4. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="5. Flow Set Mode" UnitName="" ControlName="FlowSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Pressure -> Rotation">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="6. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="7. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Temperature -> Control Mode">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="8. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="9. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="10. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="11. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Temp Setting">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="12. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="13. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="14. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="15. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="16. Middle Temp Ratio" UnitName="%" ControlName="TC1.MiddleTempRatio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Heater Output">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="17. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="19. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="20. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="21. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="22. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="23. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->TCS Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="24. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="25. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="26. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="27. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="28. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->HCl Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="29. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="30. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="31. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="32. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="33. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="34. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C3H8_C2H4 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="37. C3H8_C2H4 Flow Mode" UnitName="" ControlName="C2H4.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. C3H8_C2H4 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
|
||||
|
||||
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="39. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="40. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="41. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="42. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="43. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<!--<Group DisplayName="SH Flow->Dope->Dope Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="44. Dope Total Flow" UnitName="sccm" ControlName="DopeTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>-->
|
||||
<Group DisplayName="SH Flow->Dope->N2 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="44. NH3 Flow Mode" UnitName="" ControlName="NH3_2Dilution.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="45. NH3 Actual Flow" UnitName="sccm" ControlName="NH3_2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="46. NH3 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="47. Dilut Flow For NH3 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="48. Diluted NH3 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="49. NH3 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="50. N2 Flow Mode" UnitName="" ControlName="N2NH3_2Doping.SetValve" Description="N2 HIGH FLOW MODE">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="51. N2 Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->TMA Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="52. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve" Description="TMA FLOW MODE">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="53. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="54. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="55. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
|
||||
</Group>
|
||||
|
||||
<!--<Group DisplayName="SH Flow->Dope->Dope Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="57. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
|
||||
</Group>-->
|
||||
|
||||
<Group DisplayName="SH Flow->SH Push Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="56. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="57. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="58. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="59. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="60. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="61. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="62. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Purge->SH Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="63. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Chamber Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="65. GasRing Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="1000000" Description="M32.GasRingPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="67. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Vent Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<!--*************************************************************-->
|
||||
<ProcessConfig DisplayName="ProcessConfig">
|
||||
<Configs DisplayName="Process Config">
|
||||
</Configs>
|
||||
</ProcessConfig>
|
||||
|
||||
</TableRecipeFormat>
|
||||
|
||||
<TableRecipeSchema>
|
||||
<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
|
||||
<xs:simpleType name="processType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="Process" />
|
||||
<xs:enumeration value="Clean" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:simpleType name="booleanType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="0" />
|
||||
<xs:enumeration value="1" />
|
||||
<xs:enumeration value="False" />
|
||||
<xs:enumeration value="True" />
|
||||
<xs:enumeration value="false" />
|
||||
<xs:enumeration value="true" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:element name="TableRecipeData">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
<xs:element maxOccurs="unbounded" name="Step">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
|
||||
<xs:element name="Mfc">
|
||||
<xs:complexType>
|
||||
<xs:attribute name="Flow.Gas1" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas2" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas3" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas4" type="xs:double" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
|
||||
</xs:sequence>
|
||||
<xs:attribute name="StepNo" type="xs:string" use="required" />
|
||||
<xs:attribute name="Name" type="xs:string" use="required" />
|
||||
<xs:attribute name="Loop" type="xs:string" use="required" />
|
||||
<xs:attribute name="Type" type="xs:string" use="required" />
|
||||
<xs:attribute name="StepTime" type="xs:time" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:sequence>
|
||||
<xs:attribute name="RecipeChamberType" type="xs:string" fixed="Strip" use="required" />
|
||||
<xs:attribute name="RecipeProcessType" type="xs:string" use="required" />
|
||||
<xs:attribute name="RecipeVersion" type="xs:string" fixed="1.0" use="required" />
|
||||
<xs:attribute name="CreatedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="Description" type="xs:string" use="required" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:schema>
|
||||
</TableRecipeSchema>
|
||||
</Aitex>
|
||||
@ -1,287 +0,0 @@
|
||||
<?xml version="1.0" encoding="utf-8"?>
|
||||
<Aitex>
|
||||
<TableRecipeFormat RecipeChamberType="Sic" RecipeVersion="1.0">
|
||||
|
||||
<!--###########################################-->
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Step Information">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Uid" UnitName="" ControlName="StepUid" />
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Step" UnitName="" ControlName="StepNo" />
|
||||
<Step ModuleName="" DeviceType="" InputType="TextInput" DisplayName="Name" UnitName="" ControlName="Name" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Time" UnitName="s" ControlName="Time" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Growth Rate" UnitName="μm/h" ControlName="GrowthRate" InputMode="" Min="0" Max="10000" Description="" />
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="SH Flow->SH Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="1. Ar/H2 Switch" UnitName="" ControlName="SHArH2Switch.SetValve" Description="">
|
||||
<Item DisplayName="Ar" ControlName="Ar" />
|
||||
<Item DisplayName="H2" ControlName="H2" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="2. SH Total Flow" UnitName="sccm" ControlName="SHTotalFlow" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="3. Carry Gas Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="4. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="5. Flow Set Mode" UnitName="" ControlName="FlowSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Pressure -> Rotation">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="6. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="7. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Temperature -> Control Mode">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="8. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="9. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="10. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="11. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Temp Setting">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="12. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="13. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="14. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="15. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="16. Middle Temp Ratio" UnitName="%" ControlName="TC1.MiddleTempRatio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Heater Output">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="17. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="19. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<!--<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU2 Output Limit High" UnitName="%" ControlName="PSU2.SetOutputLimitHighByRecipe" InputMode="" Min="0" Max="100" Description="" />-->
|
||||
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="20. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="21. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="22. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="23. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->SiH4 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="24. SiH4 Flow Mode" UnitName="" ControlName="SiH4.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="25. SiH4 Flow (M14)" UnitName="sccm" ControlName="Mfc14.Ramp" InputMode="" Min="0" Max="10000" Description="M14.SiH4Flow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->TCS Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="26. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="27. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="28. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="29. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="30. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->HCl Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="31. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="32. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="33. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="34. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="37. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C3H8_C2H4 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="39. C3H8_C2H4 Flow Mode" UnitName="" ControlName="C2H4.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="40. C3H8_C2H4 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
|
||||
|
||||
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="41. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="42. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="43. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="44. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="45. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->Dope Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="46. Dope Total Flow" UnitName="sccm" ControlName="DopeTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->N2 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="47. NH3 Flow Mode" UnitName="" ControlName="N2Dilution.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="48. NH3 Actual Flow" UnitName="sccm" ControlName="N2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="49. NH3 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="50. Dilut Flow For NH3 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="51. Diluted NH3 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="52. NH3 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="53. N2 Flow Mode" UnitName="" ControlName="N2HighDoping.SetValve" Description="N2 HIGH FLOW MODE">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="54. N2 Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->TMA Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="55. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve" Description="TMA FLOW MODE">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="56. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="57. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="58. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->Dope Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="59. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="60. Dope Push Pressure (PC5)" UnitName="mbar" ControlName="Pressure5.Ramp" InputMode="" Min="0" Max="10000" Description="PC5.DopePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="61. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M20.DopeInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="62. Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19.DopeMidFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="63. Dope Outer Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M2.DopeOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->SH Push Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="65. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="67. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Purge->SH Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Chamber Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. GasRing Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="1000000" Description="M32.GasRingPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="75. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="76. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="77. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Vent Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="78. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="79. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="80. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="81. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="82. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="83. PN2 Bubb Pressure (PC8)" UnitName="mbar" ControlName="Pressure8.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<!--*************************************************************-->
|
||||
<ProcessConfig DisplayName="ProcessConfig">
|
||||
<Configs DisplayName="Process Config">
|
||||
</Configs>
|
||||
</ProcessConfig>
|
||||
|
||||
</TableRecipeFormat>
|
||||
|
||||
<TableRecipeSchema>
|
||||
<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
|
||||
<xs:simpleType name="processType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="Process" />
|
||||
<xs:enumeration value="Clean" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:simpleType name="booleanType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="0" />
|
||||
<xs:enumeration value="1" />
|
||||
<xs:enumeration value="False" />
|
||||
<xs:enumeration value="True" />
|
||||
<xs:enumeration value="false" />
|
||||
<xs:enumeration value="true" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:element name="TableRecipeData">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
<xs:element maxOccurs="unbounded" name="Step">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
|
||||
<xs:element name="Mfc">
|
||||
<xs:complexType>
|
||||
<xs:attribute name="Flow.Gas1" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas2" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas3" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas4" type="xs:double" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
|
||||
</xs:sequence>
|
||||
<xs:attribute name="StepNo" type="xs:string" use="required" />
|
||||
<xs:attribute name="Name" type="xs:string" use="required" />
|
||||
<xs:attribute name="Loop" type="xs:string" use="required" />
|
||||
<xs:attribute name="Type" type="xs:string" use="required" />
|
||||
<xs:attribute name="StepTime" type="xs:time" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:sequence>
|
||||
<xs:attribute name="RecipeChamberType" type="xs:string" fixed="Strip" use="required" />
|
||||
<xs:attribute name="RecipeProcessType" type="xs:string" use="required" />
|
||||
<xs:attribute name="RecipeVersion" type="xs:string" fixed="1.0" use="required" />
|
||||
<xs:attribute name="CreatedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="Description" type="xs:string" use="required" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:schema>
|
||||
</TableRecipeSchema>
|
||||
</Aitex>
|
||||
@ -1,282 +0,0 @@
|
||||
<?xml version="1.0" encoding="utf-8"?>
|
||||
<Aitex>
|
||||
<TableRecipeFormat RecipeChamberType="Sic" RecipeVersion="1.0">
|
||||
|
||||
<!--###########################################-->
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Step Information">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Uid" UnitName="" ControlName="StepUid" />
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Step" UnitName="" ControlName="StepNo" />
|
||||
<Step ModuleName="" DeviceType="" InputType="TextInput" DisplayName="Name" UnitName="" ControlName="Name" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Time" UnitName="s" ControlName="Time" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Growth Rate" UnitName="μm/h" ControlName="GrowthRate" InputMode="" Min="0" Max="10000" Description="" />
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="SH Flow->SH Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="1. Ar/H2 Switch" UnitName="" ControlName="SHArH2Switch.SetValve" Description="">
|
||||
<Item DisplayName="Ar" ControlName="Ar" />
|
||||
<Item DisplayName="H2" ControlName="H2" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="2. SH Total Flow" UnitName="sccm" ControlName="SHTotalFlow" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="3. Carry Gas Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="4. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="5. Flow Set Mode" UnitName="" ControlName="FlowSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Pressure -> Rotation">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="6. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="7. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Temperature -> Control Mode">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="8. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="9. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="10. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="11. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Temp Setting">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="12. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="13. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="14. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="15. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="16. Middle Temp Ratio" UnitName="%" ControlName="TC1.MiddleTempRatio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Heater Output">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="17. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="19. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<!--<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU2 Output Limit High" UnitName="%" ControlName="PSU2.SetOutputLimitHighByRecipe" InputMode="" Min="0" Max="100" Description="" />-->
|
||||
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="20. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="21. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="22. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="23. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->SiH4 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="24. SiH4 Flow Mode" UnitName="" ControlName="SiH4.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="25. SiH4 Flow (M14)" UnitName="sccm" ControlName="Mfc14.Ramp" InputMode="" Min="0" Max="10000" Description="M14.SiH4Flow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->TCS Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="26. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="27. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="28. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="29. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="30. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->HCl Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="31. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="32. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="33. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="34. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="37. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C3H8_C2H4 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="39. C3H8_C2H4 Flow Mode" UnitName="" ControlName="C2H4.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="40. C3H8_C2H4 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
|
||||
|
||||
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="41. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="42. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="43. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="44. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="45. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<!--<Group DisplayName="SH Flow->Dope->Dope Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="46. Dope Total Flow" UnitName="sccm" ControlName="DopeTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>-->
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->N2 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="46. NH3 Flow Mode" UnitName="" ControlName="N2Dilution.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="47. NH3 Actual Flow" UnitName="sccm" ControlName="N2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="48. NH3 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="49. Dilut Flow For NH3 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="50. Diluted NH3 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="51. NH3 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="52. N2 Flow Mode" UnitName="" ControlName="N2HighDoping.SetValve" Description="N2 HIGH FLOW MODE">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="53. N2 Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->TMA Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="54. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve" Description="TMA FLOW MODE">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="55. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="56. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="57. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
|
||||
</Group>
|
||||
|
||||
<!--<Group DisplayName="SH Flow->Dope->Dope Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="59. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
|
||||
</Group>-->
|
||||
|
||||
<Group DisplayName="SH Flow->SH Push Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="58. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="59. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="60. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="61. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="62. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="63. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Purge->SH Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="65. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Chamber Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="67. GasRing Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="1000000" Description="M32.GasRingPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Vent Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="75. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="76. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<!--*************************************************************-->
|
||||
<ProcessConfig DisplayName="ProcessConfig">
|
||||
<Configs DisplayName="Process Config">
|
||||
</Configs>
|
||||
</ProcessConfig>
|
||||
|
||||
</TableRecipeFormat>
|
||||
|
||||
<TableRecipeSchema>
|
||||
<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
|
||||
<xs:simpleType name="processType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="Process" />
|
||||
<xs:enumeration value="Clean" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:simpleType name="booleanType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="0" />
|
||||
<xs:enumeration value="1" />
|
||||
<xs:enumeration value="False" />
|
||||
<xs:enumeration value="True" />
|
||||
<xs:enumeration value="false" />
|
||||
<xs:enumeration value="true" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:element name="TableRecipeData">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
<xs:element maxOccurs="unbounded" name="Step">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
|
||||
<xs:element name="Mfc">
|
||||
<xs:complexType>
|
||||
<xs:attribute name="Flow.Gas1" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas2" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas3" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas4" type="xs:double" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
|
||||
</xs:sequence>
|
||||
<xs:attribute name="StepNo" type="xs:string" use="required" />
|
||||
<xs:attribute name="Name" type="xs:string" use="required" />
|
||||
<xs:attribute name="Loop" type="xs:string" use="required" />
|
||||
<xs:attribute name="Type" type="xs:string" use="required" />
|
||||
<xs:attribute name="StepTime" type="xs:time" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:sequence>
|
||||
<xs:attribute name="RecipeChamberType" type="xs:string" fixed="Strip" use="required" />
|
||||
<xs:attribute name="RecipeProcessType" type="xs:string" use="required" />
|
||||
<xs:attribute name="RecipeVersion" type="xs:string" fixed="1.0" use="required" />
|
||||
<xs:attribute name="CreatedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="Description" type="xs:string" use="required" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:schema>
|
||||
</TableRecipeSchema>
|
||||
</Aitex>
|
||||
@ -1,303 +0,0 @@
|
||||
<?xml version="1.0" encoding="utf-8"?>
|
||||
<Aitex>
|
||||
<TableRecipeFormat RecipeChamberType="Sic" RecipeVersion="1.0">
|
||||
|
||||
<!--###########################################-->
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Step Information">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Uid" UnitName="" ControlName="StepUid" />
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Step" UnitName="" ControlName="StepNo" />
|
||||
<Step ModuleName="" DeviceType="" InputType="TextInput" DisplayName="Name" UnitName="" ControlName="Name" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Time" UnitName="s" ControlName="Time" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Growth Rate" UnitName="μm/h" ControlName="GrowthRate" InputMode="" Min="0" Max="10000" Description="" />
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="SH Flow->SH Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="1. Ar/H2 Switch" UnitName="" ControlName="SHArH2Switch.SetValve" Description="">
|
||||
<Item DisplayName="Ar" ControlName="Ar" />
|
||||
<Item DisplayName="H2" ControlName="H2" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="2. SH Total Flow" UnitName="sccm" ControlName="SHTotalFlow" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="3. Carry Gas Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="4. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="5. Flow Set Mode" UnitName="" ControlName="FlowSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Pressure -> Rotation">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="6. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="7. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Temperature -> Control Mode">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="8. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="9. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="10. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="11. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Temp Setting">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="12. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="13. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="14. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="15. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="16. Middle Temp Ratio" UnitName="%" ControlName="TC1.MiddleTempRatio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Heater Output">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="17. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="19. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="20. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="21. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="22. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="23. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->SiH4 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="24. SiH4 Flow Mode" UnitName="" ControlName="SiH4.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="25. SiH4 Flow (M14)" UnitName="sccm" ControlName="Mfc14.Ramp" InputMode="" Min="0" Max="10000" Description="M14.SiH4Flow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->TCS Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="26. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="27. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="28. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="29. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="30. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->HCl Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="31. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="32. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="33. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="34. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="37. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C3H8_C2H4 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="39. C3H8_C2H4 Flow Mode" UnitName="" ControlName="C2H4.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="40. C3H8_C2H4 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
|
||||
|
||||
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="41. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="42. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="43. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="44. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="45. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->Dope Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="46. Dope Total Flow" UnitName="sccm" ControlName="DopeTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
<Group DisplayName="SH Flow->Dope->N2 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="47. N2 Flow Mode" UnitName="" ControlName="N2Dilution.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="48. N2 Actual Flow" UnitName="sccm" ControlName="N2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="49. N2 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="50. Dilut Flow For N2 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="51. Diluted N2 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="52. N2 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="53. N2 High Flow Mode" UnitName="" ControlName="N2HighDoping.SetValve" Description="N2 HIGH FLOW MODE">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="54. N2 High Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->TMA Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="55. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve" Description="TMA FLOW MODE">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="56. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="57. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="58. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->Dope Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="59. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="61. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M20.DopeInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="62. Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19.DopeMidFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="63. Dope Outer Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M2.DopeOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->SH Push Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="65. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="67. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Purge->SH Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Chamber Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. GasRing Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="1000000" Description="M32.GasRingPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="75. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="76. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="77. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Vent Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="78. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="79. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="80. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="81. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="82. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
|
||||
</Group>
|
||||
|
||||
|
||||
<Group DisplayName="Add->New">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="84. V38Value" UnitName="" ControlName="V38Value.SetValve" Description="">
|
||||
<Item DisplayName="Close" ControlName="Close" />
|
||||
<Item DisplayName="Open" ControlName="Open" />
|
||||
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="85. V47Value" UnitName="" ControlName="V47Value.SetValve" Description="">
|
||||
<Item DisplayName="Close" ControlName="Close" />
|
||||
<Item DisplayName="Open" ControlName="Open" />
|
||||
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="86. Pressure (PC8)" UnitName="mbar" ControlName="Pressure8.Ramp" InputMode="" Min="0" Max="10000" Description="PC8.DiluPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="87. PN2 Flow (M30)" UnitName="sccm" ControlName="Mfc30.Ramp" InputMode="" Min="0" Max="10000" Description="M30.PN2Flow"/>
|
||||
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
|
||||
|
||||
|
||||
|
||||
<!--*************************************************************-->
|
||||
<ProcessConfig DisplayName="ProcessConfig">
|
||||
<Configs DisplayName="Process Config">
|
||||
</Configs>
|
||||
</ProcessConfig>
|
||||
|
||||
</TableRecipeFormat>
|
||||
|
||||
<TableRecipeSchema>
|
||||
<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
|
||||
<xs:simpleType name="processType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="Process" />
|
||||
<xs:enumeration value="Clean" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:simpleType name="booleanType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="0" />
|
||||
<xs:enumeration value="1" />
|
||||
<xs:enumeration value="False" />
|
||||
<xs:enumeration value="True" />
|
||||
<xs:enumeration value="false" />
|
||||
<xs:enumeration value="true" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:element name="TableRecipeData">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
<xs:element maxOccurs="unbounded" name="Step">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
|
||||
<xs:element name="Mfc">
|
||||
<xs:complexType>
|
||||
<xs:attribute name="Flow.Gas1" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas2" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas3" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas4" type="xs:double" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
|
||||
</xs:sequence>
|
||||
<xs:attribute name="StepNo" type="xs:string" use="required" />
|
||||
<xs:attribute name="Name" type="xs:string" use="required" />
|
||||
<xs:attribute name="Loop" type="xs:string" use="required" />
|
||||
<xs:attribute name="Type" type="xs:string" use="required" />
|
||||
<xs:attribute name="StepTime" type="xs:time" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:sequence>
|
||||
<xs:attribute name="RecipeChamberType" type="xs:string" fixed="Strip" use="required" />
|
||||
<xs:attribute name="RecipeProcessType" type="xs:string" use="required" />
|
||||
<xs:attribute name="RecipeVersion" type="xs:string" fixed="1.0" use="required" />
|
||||
<xs:attribute name="CreatedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="Description" type="xs:string" use="required" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:schema>
|
||||
</TableRecipeSchema>
|
||||
</Aitex>
|
||||
@ -1,281 +0,0 @@
|
||||
<?xml version="1.0" encoding="utf-8"?>
|
||||
<Aitex>
|
||||
<TableRecipeFormat RecipeChamberType="Sic" RecipeVersion="1.0">
|
||||
|
||||
<!--###########################################-->
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Step Information">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Uid" UnitName="" ControlName="StepUid" />
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Step" UnitName="" ControlName="StepNo" />
|
||||
<Step ModuleName="" DeviceType="" InputType="TextInput" DisplayName="Name" UnitName="" ControlName="Name" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Time" UnitName="s" ControlName="Time" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Growth Rate" UnitName="μm/h" ControlName="GrowthRate" InputMode="" Min="0" Max="10000" Description="" />
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="SH Flow->SH Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="1. Ar/H2 Switch" UnitName="" ControlName="SHArH2Switch.SetValve" Description="">
|
||||
<Item DisplayName="Ar" ControlName="Ar" />
|
||||
<Item DisplayName="H2" ControlName="H2" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="2. SH Total Flow" UnitName="sccm" ControlName="SHTotalFlow" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="3. Carry Gas Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="4. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="5. Flow Set Mode" UnitName="" ControlName="FlowSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Pressure -> Rotation">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="6. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="7. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Temperature -> Control Mode">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="8. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="9. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="10. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="11. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Temp Setting">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="12. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="13. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="14. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="15. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="16. Middle Temp Ratio" UnitName="%" ControlName="TC1.MiddleTempRatio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Heater Output">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="17. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="19. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<!--<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU2 Output Limit High" UnitName="%" ControlName="PSU2.SetOutputLimitHighByRecipe" InputMode="" Min="0" Max="100" Description="" />-->
|
||||
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="20. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="21. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="22. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="23. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->TCS Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="24. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="25. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="26. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="27. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="28. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->HCl Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="29. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="30. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="31. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="32. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="33. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="34. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C3H8_C2H4 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="37. C3H8_C2H4 Flow Mode" UnitName="" ControlName="C2H4.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. C3H8_C2H4 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
|
||||
|
||||
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="39. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="40. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="41. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="42. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="43. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->N2 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="44. NH3 Flow Mode" UnitName="" ControlName="N2Dilution.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="45. NH3 Actual Flow" UnitName="sccm" ControlName="N2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="46. NH3 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="47. Dilut Flow For NH3 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="48. Diluted NH3 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="49. NH3 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="50. N2 Flow Mode" UnitName="" ControlName="N2HighDoping.SetValve" Description="N2 HIGH FLOW MODE">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="51. N2 Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->TMA Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="52. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve" Description="TMA FLOW MODE">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="53. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="54. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="55. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->SH Push Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="56. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="57. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="58. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="59. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="60. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="61. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="62. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Purge->SH Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="63. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Chamber Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="65. GasRing Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="1000000" Description="M32.GasRingPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="67. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Vent Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Add->New">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="75. V34Value" UnitName="" ControlName="V34Value.SetValve" Description="">
|
||||
<Item DisplayName="Close" ControlName="Close" />
|
||||
<Item DisplayName="Open" ControlName="Open" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="76. V42Value" UnitName="" ControlName="V42Value.SetValve" Description="">
|
||||
<Item DisplayName="Close" ControlName="Close" />
|
||||
<Item DisplayName="Open" ControlName="Open" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="77. V100Value" UnitName="" ControlName="V100Value.SetValve" Description="">
|
||||
<Item DisplayName="Close" ControlName="Close" />
|
||||
<Item DisplayName="Open" ControlName="Open" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="78. Mfc (M21)" UnitName="sccm" ControlName="Mfc21.Ramp" InputMode="" Min="0" Max="10000" Description="M21.VentPushFlow"/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<!--*************************************************************-->
|
||||
<ProcessConfig DisplayName="ProcessConfig">
|
||||
<Configs DisplayName="Process Config">
|
||||
</Configs>
|
||||
</ProcessConfig>
|
||||
|
||||
</TableRecipeFormat>
|
||||
|
||||
<TableRecipeSchema>
|
||||
<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
|
||||
<xs:simpleType name="processType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="Process" />
|
||||
<xs:enumeration value="Clean" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:simpleType name="booleanType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="0" />
|
||||
<xs:enumeration value="1" />
|
||||
<xs:enumeration value="False" />
|
||||
<xs:enumeration value="True" />
|
||||
<xs:enumeration value="false" />
|
||||
<xs:enumeration value="true" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:element name="TableRecipeData">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
<xs:element maxOccurs="unbounded" name="Step">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
|
||||
<xs:element name="Mfc">
|
||||
<xs:complexType>
|
||||
<xs:attribute name="Flow.Gas1" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas2" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas3" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas4" type="xs:double" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
|
||||
</xs:sequence>
|
||||
<xs:attribute name="StepNo" type="xs:string" use="required" />
|
||||
<xs:attribute name="Name" type="xs:string" use="required" />
|
||||
<xs:attribute name="Loop" type="xs:string" use="required" />
|
||||
<xs:attribute name="Type" type="xs:string" use="required" />
|
||||
<xs:attribute name="StepTime" type="xs:time" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:sequence>
|
||||
<xs:attribute name="RecipeChamberType" type="xs:string" fixed="Strip" use="required" />
|
||||
<xs:attribute name="RecipeProcessType" type="xs:string" use="required" />
|
||||
<xs:attribute name="RecipeVersion" type="xs:string" fixed="1.0" use="required" />
|
||||
<xs:attribute name="CreatedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="Description" type="xs:string" use="required" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:schema>
|
||||
</TableRecipeSchema>
|
||||
</Aitex>
|
||||
@ -1,270 +0,0 @@
|
||||
<?xml version="1.0" encoding="utf-8"?>
|
||||
<Aitex>
|
||||
<TableRecipeFormat RecipeChamberType="Sic" RecipeVersion="1.0">
|
||||
|
||||
<!--###########################################-->
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Step Information">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Uid" UnitName="" ControlName="StepUid" />
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Step" UnitName="" ControlName="StepNo" />
|
||||
<Step ModuleName="" DeviceType="" InputType="TextInput" DisplayName="Name" UnitName="" ControlName="Name" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Time" UnitName="s" ControlName="Time" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Growth Rate" UnitName="μm/h" ControlName="GrowthRate" InputMode="" Min="0" Max="10000" Description="" />
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="SH Flow->SH Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="1. Ar/H2 Switch" UnitName="" ControlName="SHArH2Switch.SetValve" Description="">
|
||||
<Item DisplayName="Ar" ControlName="Ar" />
|
||||
<Item DisplayName="H2" ControlName="H2" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="2. SH Total Flow" UnitName="sccm" ControlName="SHTotalFlow" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="3. Carry Gas Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="4. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="5. Flow Set Mode" UnitName="" ControlName="FlowSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Pressure -> Rotation">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="6. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="7. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Temperature -> Control Mode">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="8. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="9. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="10. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="11. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Temp Setting">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="12. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="13. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="14. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="15. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="16. Middle Temp Ratio" UnitName="%" ControlName="TC1.MiddleTempRatio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Heater Output">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="17. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="19. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="20. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="21. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="22. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="23. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->TCS Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="24. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="25. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="26. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="27. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="28. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->HCl Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="29. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="30. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="31. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="32. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="33. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="34. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C3H8_C2H4 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="37. C3H8_C2H4 Flow Mode" UnitName="" ControlName="C2H4.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. C3H8_C2H4 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
|
||||
|
||||
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="39. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="40. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="41. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="42. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="43. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<!--<Group DisplayName="SH Flow->Dope->Dope Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="44. Dope Total Flow" UnitName="sccm" ControlName="DopeTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>-->
|
||||
<Group DisplayName="SH Flow->Dope->N2 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="44. NH3 Flow Mode" UnitName="" ControlName="NH3_2Dilution.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="45. NH3 Actual Flow" UnitName="sccm" ControlName="NH3_2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="46. NH3 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="47. Dilut Flow For NH3 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="48. Diluted NH3 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="49. NH3 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="50. N2 Flow Mode" UnitName="" ControlName="N2NH3_2Doping.SetValve" Description="N2 HIGH FLOW MODE">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="51. N2 Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->TMA Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="52. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve" Description="TMA FLOW MODE">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="53. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="54. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="55. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
|
||||
</Group>
|
||||
|
||||
<!--<Group DisplayName="SH Flow->Dope->Dope Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="57. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
|
||||
</Group>-->
|
||||
|
||||
<Group DisplayName="SH Flow->SH Push Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="56. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="57. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="58. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="59. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="60. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="61. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="62. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Purge->SH Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="63. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Chamber Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="65. GasRing Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="1000000" Description="M32.GasRingPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="67. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Vent Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<!--*************************************************************-->
|
||||
<ProcessConfig DisplayName="ProcessConfig">
|
||||
<Configs DisplayName="Process Config">
|
||||
</Configs>
|
||||
</ProcessConfig>
|
||||
|
||||
</TableRecipeFormat>
|
||||
|
||||
<TableRecipeSchema>
|
||||
<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
|
||||
<xs:simpleType name="processType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="Process" />
|
||||
<xs:enumeration value="Clean" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:simpleType name="booleanType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="0" />
|
||||
<xs:enumeration value="1" />
|
||||
<xs:enumeration value="False" />
|
||||
<xs:enumeration value="True" />
|
||||
<xs:enumeration value="false" />
|
||||
<xs:enumeration value="true" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:element name="TableRecipeData">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
<xs:element maxOccurs="unbounded" name="Step">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
|
||||
<xs:element name="Mfc">
|
||||
<xs:complexType>
|
||||
<xs:attribute name="Flow.Gas1" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas2" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas3" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas4" type="xs:double" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
|
||||
</xs:sequence>
|
||||
<xs:attribute name="StepNo" type="xs:string" use="required" />
|
||||
<xs:attribute name="Name" type="xs:string" use="required" />
|
||||
<xs:attribute name="Loop" type="xs:string" use="required" />
|
||||
<xs:attribute name="Type" type="xs:string" use="required" />
|
||||
<xs:attribute name="StepTime" type="xs:time" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:sequence>
|
||||
<xs:attribute name="RecipeChamberType" type="xs:string" fixed="Strip" use="required" />
|
||||
<xs:attribute name="RecipeProcessType" type="xs:string" use="required" />
|
||||
<xs:attribute name="RecipeVersion" type="xs:string" fixed="1.0" use="required" />
|
||||
<xs:attribute name="CreatedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="Description" type="xs:string" use="required" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:schema>
|
||||
</TableRecipeSchema>
|
||||
</Aitex>
|
||||
@ -1,286 +0,0 @@
|
||||
<?xml version="1.0" encoding="utf-8"?>
|
||||
<Aitex>
|
||||
<TableRecipeFormat RecipeChamberType="Sic" RecipeVersion="1.0">
|
||||
|
||||
<!--###########################################-->
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Step Information">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Uid" UnitName="" ControlName="StepUid" />
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Step" UnitName="" ControlName="StepNo" />
|
||||
<Step ModuleName="" DeviceType="" InputType="TextInput" DisplayName="Name" UnitName="" ControlName="Name" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Time" UnitName="s" ControlName="Time" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Growth Rate" UnitName="μm/h" ControlName="GrowthRate" InputMode="" Min="0" Max="10000" Description="" />
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="SH Flow->SH Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="1. Ar/H2 Switch" UnitName="" ControlName="SHArH2Switch.SetValve" Description="">
|
||||
<Item DisplayName="Ar" ControlName="Ar" />
|
||||
<Item DisplayName="H2" ControlName="H2" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="2. SH Total Flow" UnitName="sccm" ControlName="SHTotalFlow" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="3. Carry Gas Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="4. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="5. Flow Set Mode" UnitName="" ControlName="FlowSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Pressure -> Rotation">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="6. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="7. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Temperature -> Control Mode">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="8. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="9. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="10. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="11. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Temp Setting">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="12. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="13. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="14. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="15. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="16. Middle Temp Ratio" UnitName="%" ControlName="TC1.MiddleTempRatio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Heater Output">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="17. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="19. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="20. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="21. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="22. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="23. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->TCS Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="24. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="25. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="26. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="27. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="28. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->HCl Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="29. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="30. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="31. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="32. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="33. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="34. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C3H8_C2H4 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="37. C3H8_C2H4 Flow Mode" UnitName="" ControlName="C2H4.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. C3H8_C2H4 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
|
||||
|
||||
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="39. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="40. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="41. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="42. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="43. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->Dope Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="44. Dope Total Flow" UnitName="sccm" ControlName="DopeTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
<Group DisplayName="SH Flow->Dope->N2 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="45. N2 Flow Mode" UnitName="" ControlName="N2Dilution.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="46. N2 Actual Flow" UnitName="sccm" ControlName="N2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="47. N2 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="48. Dilut Flow For N2 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="49. Diluted N2 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="50. N2 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="51. N2 Low Flow Mode" UnitName="" ControlName="N2NH3_8LowFlowMode.SetValve" Description="N2 Low flow mode">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="52. N2 High Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="53. N2 High Flow Mode" UnitName="" ControlName="N2NH3_8HighFlowMode.SetValve" Description="N2 High flow mode">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="54. N2 High Flow (M30)" UnitName="sccm" ControlName="Mfc30.Ramp" InputMode="" Min="0" Max="10000" Description="M30.PN2Flow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->TMA Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="55. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve" Description="TMA FLOW MODE">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="56. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="57. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="58. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->Dope Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="59. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="60. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M20.DopeInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="61. Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19.DopeMidFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="62. Dope Outer Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M2.DopeOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->SH Push Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="63. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="65. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="67. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Purge->SH Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Chamber Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. GasRing Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="1000000" Description="M32.GasRingPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="75. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="76. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Vent Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="77. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="78. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="79. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="80. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="81. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="82. Pressure (PC8)" UnitName="mbar" ControlName="Pressure8.Ramp" InputMode="" Min="0" Max="10000" Description="PC8.DiluPres"/>
|
||||
|
||||
</Group>
|
||||
|
||||
</Catalog>
|
||||
|
||||
|
||||
|
||||
|
||||
|
||||
<!--*************************************************************-->
|
||||
<ProcessConfig DisplayName="ProcessConfig">
|
||||
<Configs DisplayName="Process Config">
|
||||
</Configs>
|
||||
</ProcessConfig>
|
||||
|
||||
</TableRecipeFormat>
|
||||
|
||||
<TableRecipeSchema>
|
||||
<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
|
||||
<xs:simpleType name="processType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="Process" />
|
||||
<xs:enumeration value="Clean" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:simpleType name="booleanType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="0" />
|
||||
<xs:enumeration value="1" />
|
||||
<xs:enumeration value="False" />
|
||||
<xs:enumeration value="True" />
|
||||
<xs:enumeration value="false" />
|
||||
<xs:enumeration value="true" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:element name="TableRecipeData">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
<xs:element maxOccurs="unbounded" name="Step">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
|
||||
<xs:element name="Mfc">
|
||||
<xs:complexType>
|
||||
<xs:attribute name="Flow.Gas1" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas2" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas3" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas4" type="xs:double" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
|
||||
</xs:sequence>
|
||||
<xs:attribute name="StepNo" type="xs:string" use="required" />
|
||||
<xs:attribute name="Name" type="xs:string" use="required" />
|
||||
<xs:attribute name="Loop" type="xs:string" use="required" />
|
||||
<xs:attribute name="Type" type="xs:string" use="required" />
|
||||
<xs:attribute name="StepTime" type="xs:time" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:sequence>
|
||||
<xs:attribute name="RecipeChamberType" type="xs:string" fixed="Strip" use="required" />
|
||||
<xs:attribute name="RecipeProcessType" type="xs:string" use="required" />
|
||||
<xs:attribute name="RecipeVersion" type="xs:string" fixed="1.0" use="required" />
|
||||
<xs:attribute name="CreatedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="Description" type="xs:string" use="required" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:schema>
|
||||
</TableRecipeSchema>
|
||||
</Aitex>
|
||||
@ -1,277 +0,0 @@
|
||||
<?xml version="1.0" encoding="utf-8"?>
|
||||
<Aitex>
|
||||
<TableRecipeFormat RecipeChamberType="Sic" RecipeVersion="1.0">
|
||||
|
||||
<!--###########################################-->
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Step Information">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Uid" UnitName="" ControlName="StepUid" />
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnly" DisplayName="Step" UnitName="" ControlName="StepNo" />
|
||||
<Step ModuleName="" DeviceType="" InputType="TextInput" DisplayName="Name" UnitName="" ControlName="Name" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Time" UnitName="s" ControlName="Time" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="Growth Rate" UnitName="μm/h" ControlName="GrowthRate" InputMode="" Min="0" Max="10000" Description="" />
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="SH Flow->SH Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="1. Ar/H2 Switch" UnitName="" ControlName="SHArH2Switch.SetValve" Description="">
|
||||
<Item DisplayName="Ar" ControlName="Ar" />
|
||||
<Item DisplayName="H2" ControlName="H2" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="2. SH Total Flow" UnitName="sccm" ControlName="SHTotalFlow" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="3. Carry Gas Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="4. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="5. Flow Set Mode" UnitName="" ControlName="FlowSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Pressure -> Rotation">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="6. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="7. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Temperature -> Control Mode">
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="8. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="9. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="10. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2" Description="">
|
||||
<Item DisplayName="Power" ControlName="Power" />
|
||||
<Item DisplayName="Follow" ControlName="PyroFollow" />
|
||||
<Item DisplayName="Auto" ControlName="PyroAuto" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="11. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode" Description="">
|
||||
<Item DisplayName="Ramp" ControlName="Ramp" />
|
||||
<Item DisplayName="Jump" ControlName="Jump" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Temp Setting">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="12. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="13. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="14. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="15. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="16. Middle Temp Ratio" UnitName="%" ControlName="TC1.MiddleTempRatio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Temperature -> Heater Output">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="17. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="19. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<!--<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU2 Output Limit High" UnitName="%" ControlName="PSU2.SetOutputLimitHighByRecipe" InputMode="" Min="0" Max="100" Description="" />-->
|
||||
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="20. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="21. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="22. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
|
||||
</Group>
|
||||
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="23. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->SiH4 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="24. SiH4 Flow Mode" UnitName="" ControlName="SiH4.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="25. SiH4 Flow (M14)" UnitName="sccm" ControlName="Mfc14.Ramp" InputMode="" Min="0" Max="10000" Description="M14.SiH4Flow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->TCS Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="26. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="27. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="28. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="29. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="30. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->HCl Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="31. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="32. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Si Source->Si Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="33. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="34. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="37. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Total Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C3H8_C2H4 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="39. C3H8_C2H4 Flow Mode" UnitName="" ControlName="C2H4.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="40. C3H8_C2H4 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
|
||||
|
||||
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->C Source->C Source Split">
|
||||
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="41. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="42. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="43. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="44. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="45. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->N2 Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="46. NH3 Flow Mode" UnitName="" ControlName="N2Dilution.SetValve" Description="">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="47. NH3 Actual Flow" UnitName="sccm" ControlName="N2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="48. NH3 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="49. Dilut Flow For NH3 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="50. Diluted NH3 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="51. NH3 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="52. N2 Low Flow Mode" UnitName="" ControlName="N2NH3_10LowFlowMode.SetValve" Description="N2 Low flow mode">
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="53. N2 High Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="54. N2 High Flow Mode" UnitName="" ControlName="N2NH3_10HighFlowMode.SetValve" Description="N2 High flow mode">
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->Dope->TMA Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="55. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve" Description="TMA FLOW MODE">
|
||||
<Item DisplayName="Purge" ControlName="Purge" />
|
||||
<Item DisplayName="Vent" ControlName="Vent" />
|
||||
<Item DisplayName="Run" ControlName="Run" />
|
||||
</Step>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="56. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="54. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="58. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="SH Flow->SH Push Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="59. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="60. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="61. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="62. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="63. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="65. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<Catalog DisplayName="StepInfo">
|
||||
<Group DisplayName="Purge->SH Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="67. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Chamber Periphery Purge">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. GasRing Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="1000000" Description="M32.GasRingPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
|
||||
</Group>
|
||||
|
||||
<Group DisplayName="Purge->Vent Flow">
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="75. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="76. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
|
||||
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="77. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
|
||||
</Group>
|
||||
</Catalog>
|
||||
|
||||
<!--*************************************************************-->
|
||||
<ProcessConfig DisplayName="ProcessConfig">
|
||||
<Configs DisplayName="Process Config">
|
||||
</Configs>
|
||||
</ProcessConfig>
|
||||
|
||||
</TableRecipeFormat>
|
||||
|
||||
<TableRecipeSchema>
|
||||
<xs:schema attributeFormDefault="unqualified" elementFormDefault="qualified" xmlns:xs="http://www.w3.org/2001/XMLSchema">
|
||||
<xs:simpleType name="processType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="Process" />
|
||||
<xs:enumeration value="Clean" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:simpleType name="booleanType">
|
||||
<xs:restriction base="xs:string">
|
||||
<xs:enumeration value="0" />
|
||||
<xs:enumeration value="1" />
|
||||
<xs:enumeration value="False" />
|
||||
<xs:enumeration value="True" />
|
||||
<xs:enumeration value="false" />
|
||||
<xs:enumeration value="true" />
|
||||
</xs:restriction>
|
||||
</xs:simpleType>
|
||||
<xs:element name="TableRecipeData">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
<xs:element maxOccurs="unbounded" name="Step">
|
||||
<xs:complexType>
|
||||
<xs:sequence>
|
||||
|
||||
<xs:element name="Mfc">
|
||||
<xs:complexType>
|
||||
<xs:attribute name="Flow.Gas1" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas2" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas3" type="xs:double" use="optional" />
|
||||
<xs:attribute name="Flow.Gas4" type="xs:double" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
|
||||
</xs:sequence>
|
||||
<xs:attribute name="StepNo" type="xs:string" use="required" />
|
||||
<xs:attribute name="Name" type="xs:string" use="required" />
|
||||
<xs:attribute name="Loop" type="xs:string" use="required" />
|
||||
<xs:attribute name="Type" type="xs:string" use="required" />
|
||||
<xs:attribute name="StepTime" type="xs:time" use="optional" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:sequence>
|
||||
<xs:attribute name="RecipeChamberType" type="xs:string" fixed="Strip" use="required" />
|
||||
<xs:attribute name="RecipeProcessType" type="xs:string" use="required" />
|
||||
<xs:attribute name="RecipeVersion" type="xs:string" fixed="1.0" use="required" />
|
||||
<xs:attribute name="CreatedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="CreationTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="LastRevisedBy" type="xs:string" use="required" />
|
||||
<xs:attribute name="LastRevisionTime" type="xs:dateTime" use="required" />
|
||||
<xs:attribute name="Description" type="xs:string" use="required" />
|
||||
</xs:complexType>
|
||||
</xs:element>
|
||||
</xs:schema>
|
||||
</TableRecipeSchema>
|
||||
</Aitex>
|
||||
@ -260,63 +260,9 @@
|
||||
<None Include="Config\Recipe\Sic\Process\RecipeFormat.xml">
|
||||
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
|
||||
</None>
|
||||
<None Include="Config\Recipe\Sic\Process\NH3_1.xml">
|
||||
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
|
||||
</None>
|
||||
<None Include="Config\Recipe\Sic\Process\NH3_2.xml">
|
||||
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
|
||||
</None>
|
||||
<None Include="Config\Recipe\Sic\Process\NH3_3.xml">
|
||||
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
|
||||
</None>
|
||||
<None Include="Config\Recipe\Sic\Process\NH3_4.xml">
|
||||
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
|
||||
</None>
|
||||
<None Include="Config\Recipe\Sic\Process\NH3_5.xml">
|
||||
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
|
||||
</None>
|
||||
<None Include="Config\Recipe\Sic\Process\NH3_6.xml">
|
||||
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
|
||||
</None>
|
||||
<None Include="Config\Recipe\Sic\Process\PN2.xml">
|
||||
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
|
||||
</None>
|
||||
<None Include="Config\Recipe\Sic\Process\NH3_7.xml">
|
||||
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
|
||||
</None>
|
||||
<None Include="Config\Recipe\Sic\Process\NH3_8.xml">
|
||||
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
|
||||
</None>
|
||||
<None Include="Config\Recipe\Sic\Process\NH3_11.xml">
|
||||
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
|
||||
</None>
|
||||
<None Include="Config\Recipe\Sic\Process\NH3_10.xml">
|
||||
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
|
||||
</None>
|
||||
<None Include="Config\Recipe\Sic\Process\NH3_9.xml">
|
||||
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
|
||||
</None>
|
||||
<None Include="Config\Recipe\Sic\Process\NH3_12.xml">
|
||||
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
|
||||
</None>
|
||||
<None Include="Config\Recipe\Sic\Process\NH3_13.xml">
|
||||
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
|
||||
</None>
|
||||
<None Include="Config\Recipe\Sic\Process\NH3_14.xml">
|
||||
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
|
||||
</None>
|
||||
<None Include="Config\Recipe\Sic\Process\NH3_16.xml">
|
||||
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
|
||||
</None>
|
||||
<None Include="Config\Recipe\Sic\Process\NH3_17.xml">
|
||||
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
|
||||
</None>
|
||||
<None Include="Config\Recipe\Sic\Process\NH3_18.xml">
|
||||
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
|
||||
</None>
|
||||
<None Include="Config\Recipe\Sic\Process\NH3_19.xml">
|
||||
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
|
||||
</None>
|
||||
<Content Include="Config\Recipe\Sic\Routine\RecipeFormat.xml">
|
||||
<CopyToOutputDirectory>Always</CopyToOutputDirectory>
|
||||
</Content>
|
||||
|
||||
@ -85,21 +85,5 @@
|
||||
|
||||
<ViewModelItems defaultViewModel="SicUI.Models.PMs.PMOperationViewModel,SicUI">
|
||||
<Item key="PN2" viewModel="SicUI.Models.PMs.PMOperationViewModel,SicUI" ></Item>
|
||||
<Item key="NH3_1" viewModel="SicUI.Models.PMs.PMOperationNH3_1ViewModel,SicUI" ></Item>
|
||||
<Item key="NH3_2" viewModel="SicUI.Models.PMs.PMOperationNH3_2ViewModel,SicUI" ></Item>
|
||||
<Item key="NH3_3" viewModel="SicUI.Models.PMs.PMOperationNH3_3ViewModel,SicUI" ></Item>
|
||||
<Item key="NH3_6" viewModel="SicUI.Models.PMs.PMOperationNH3_6ViewModel,SicUI" ></Item>
|
||||
<Item key="NH3_7" viewModel="SicUI.Models.PMs.PMOperationNH3_7ViewModel,SicUI" ></Item>
|
||||
<Item key="NH3_8" viewModel="SicUI.Models.PMs.PMOperationNH3_8ViewModel,SicUI" ></Item>
|
||||
<Item key="NH3_9" viewModel="SicUI.Models.PMs.PMOperationNH3_9ViewModel,SicUI" ></Item>
|
||||
<Item key="NH3_10" viewModel="SicUI.Models.PMs.PMOperationNH3_10ViewModel,SicUI" ></Item>
|
||||
<Item key="NH3_11" viewModel="SicUI.Models.PMs.PMOperationNH3_11ViewModel,SicUI" ></Item>
|
||||
<Item key="NH3_12" viewModel="SicUI.Models.PMs.PMOperationNH3_12ViewModel,SicUI" ></Item>
|
||||
<Item key="NH3_13" viewModel="SicUI.Models.PMs.PMOperationNH3_13ViewModel,SicUI" ></Item>
|
||||
<Item key="NH3_14" viewModel="SicUI.Models.PMs.PMOperationNH3_14ViewModel,SicUI" ></Item>
|
||||
<Item key="NH3_16" viewModel="SicUI.Models.PMs.PMOperationNH3_16ViewModel,SicUI" ></Item>
|
||||
<Item key="NH3_17" viewModel="SicUI.Models.PMs.PMOperationNH3_17ViewModel,SicUI" ></Item>
|
||||
<Item key="NH3_18" viewModel="SicUI.Models.PMs.PMOperationNH3_18ViewModel,SicUI" ></Item>
|
||||
<Item key="NH3_19" viewModel="SicUI.Models.PMs.PMOperationNH3_19ViewModel,SicUI" ></Item>
|
||||
</ViewModelItems>
|
||||
</menu>
|
||||
@ -594,7 +594,7 @@
|
||||
<configs name="PM1">
|
||||
<config default="PM1" name="DisplayName" description="PM自定义名称" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="#00FFFFFF" name="BackgroundColor" description="PM页面自定义背景色" max="" min="" paramter="" tag="" unit="" type="Color" />
|
||||
<config default="PN2" name="OperationView" description="PM气路图界面" max="" min="" paramter="PN2;NH3_1;NH3_2;NH3_3;NH3_6;NH3_7;NH3_8;NH3_9;NH3_10;NH3_11;NH3_12;NH3_13;NH3_14;NH3_16;NH3_17;NH3_18;NH3_19" tag="ReadOnlySelection" unit="" type="String" />
|
||||
<config default="PN2" name="OperationView" description="PM气路图界面" max="" min="" paramter="PN2" tag="ReadOnlySelection" unit="" type="String" />
|
||||
<config default="false" name="BypassInterlock" description="Bypass Interlock" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||||
<config default="false" name="BypassEnableTable" description="Bypass EnableTable" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||||
<config default="Sic" visible="false" name="RecipeChamberType" description="Recipe Chamber Type" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
@ -1246,7 +1246,7 @@
|
||||
<configs name="PM2">
|
||||
<config default="PM2" name="DisplayName" description="PM自定义名称" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
<config default="#00FFFFFF" name="BackgroundColor" description="PM页面自定义背景色" max="" min="" paramter="" tag="" unit="" type="Color" />
|
||||
<config default="PN2" name="OperationView" description="PM气路图界面" max="" min="" paramter="PN2;NH3_1;NH3_2;NH3_3;NH3_6;NH3_7;NH3_8;NH3_9;NH3_10;NH3_11;NH3_12;NH3_13;NH3_14;NH3_16;NH3_17;NH3_18;NH3_19" tag="ReadOnlySelection" unit="" type="String" />
|
||||
<config default="PN2" name="OperationView" description="PM气路图界面" max="" min="" paramter="PN2" tag="ReadOnlySelection" unit="" type="String" />
|
||||
<config default="false" name="BypassInterlock" description="Bypass Interlock" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||||
<config default="false" name="BypassEnableTable" description="Bypass EnableTable" max="" min="" paramter="" tag="" unit="" type="Bool" />
|
||||
<config default="Sic" visible="false" name="RecipeChamberType" description="Recipe Chamber Type" max="" min="" paramter="" tag="" unit="" type="String" />
|
||||
|
||||
@ -15,6 +15,7 @@
|
||||
xmlns:mc="http://schemas.openxmlformats.org/markup-compatibility/2006"
|
||||
xmlns:unitControls="clr-namespace:MECF.Framework.UI.Client.Ctrlib.UnitControls;assembly=MECF.Framework.UI.Client"
|
||||
xmlns:lex="http://wpflocalizeextension.codeplex.com"
|
||||
d:Background="#91b0cd"
|
||||
d:DesignHeight="800"
|
||||
d:DesignWidth="1920"
|
||||
mc:Ignorable="d"
|
||||
|
||||
@ -15,6 +15,7 @@
|
||||
xmlns:unitControls="clr-namespace:MECF.Framework.UI.Client.Ctrlib.UnitControls;assembly=MECF.Framework.UI.Client"
|
||||
xmlns:vr="clr-namespace:SicUI.Models.Operations.Overviews"
|
||||
xmlns:waferAssociation="clr-namespace:MECF.Framework.UI.Client.CenterViews.Operations.WaferAssociation;assembly=MECF.Framework.UI.Client"
|
||||
d:Background="#91b0cd"
|
||||
d:DesignHeight="760"
|
||||
d:DesignWidth="1900"
|
||||
lex:LocalizeDictionary.DesignCulture="zh"
|
||||
|
||||
File diff suppressed because it is too large
Load Diff
@ -1,28 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using System.Windows;
|
||||
using System.Windows.Controls;
|
||||
using System.Windows.Data;
|
||||
using System.Windows.Documents;
|
||||
using System.Windows.Input;
|
||||
using System.Windows.Media;
|
||||
using System.Windows.Media.Imaging;
|
||||
using System.Windows.Navigation;
|
||||
using System.Windows.Shapes;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
/// <summary>
|
||||
/// PMOperationNH3_10View.xaml 的交互逻辑
|
||||
/// </summary>
|
||||
public partial class PMOperationNH3_10View : UserControl
|
||||
{
|
||||
public PMOperationNH3_10View()
|
||||
{
|
||||
InitializeComponent();
|
||||
}
|
||||
}
|
||||
}
|
||||
@ -1,12 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
public class PMOperationNH3_10ViewModel: PMOperationViewModel
|
||||
{
|
||||
}
|
||||
}
|
||||
File diff suppressed because it is too large
Load Diff
@ -1,28 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using System.Windows;
|
||||
using System.Windows.Controls;
|
||||
using System.Windows.Data;
|
||||
using System.Windows.Documents;
|
||||
using System.Windows.Input;
|
||||
using System.Windows.Media;
|
||||
using System.Windows.Media.Imaging;
|
||||
using System.Windows.Navigation;
|
||||
using System.Windows.Shapes;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
/// <summary>
|
||||
/// PMOperationNH3_11View.xaml 的交互逻辑
|
||||
/// </summary>
|
||||
public partial class PMOperationNH3_11View : UserControl
|
||||
{
|
||||
public PMOperationNH3_11View()
|
||||
{
|
||||
InitializeComponent();
|
||||
}
|
||||
}
|
||||
}
|
||||
@ -1,12 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
public class PMOperationNH3_11ViewModel: PMOperationViewModel
|
||||
{
|
||||
}
|
||||
}
|
||||
File diff suppressed because it is too large
Load Diff
@ -1,28 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using System.Windows;
|
||||
using System.Windows.Controls;
|
||||
using System.Windows.Data;
|
||||
using System.Windows.Documents;
|
||||
using System.Windows.Input;
|
||||
using System.Windows.Media;
|
||||
using System.Windows.Media.Imaging;
|
||||
using System.Windows.Navigation;
|
||||
using System.Windows.Shapes;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
/// <summary>
|
||||
/// PMOperationNH3_12View.xaml 的交互逻辑
|
||||
/// </summary>
|
||||
public partial class PMOperationNH3_12View : UserControl
|
||||
{
|
||||
public PMOperationNH3_12View()
|
||||
{
|
||||
InitializeComponent();
|
||||
}
|
||||
}
|
||||
}
|
||||
@ -1,12 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
public class PMOperationNH3_12ViewModel: PMOperationViewModel
|
||||
{
|
||||
}
|
||||
}
|
||||
File diff suppressed because it is too large
Load Diff
@ -1,28 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using System.Windows;
|
||||
using System.Windows.Controls;
|
||||
using System.Windows.Data;
|
||||
using System.Windows.Documents;
|
||||
using System.Windows.Input;
|
||||
using System.Windows.Media;
|
||||
using System.Windows.Media.Imaging;
|
||||
using System.Windows.Navigation;
|
||||
using System.Windows.Shapes;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
/// <summary>
|
||||
/// PMOperationNH3_13View.xaml 的交互逻辑
|
||||
/// </summary>
|
||||
public partial class PMOperationNH3_13View : UserControl
|
||||
{
|
||||
public PMOperationNH3_13View()
|
||||
{
|
||||
InitializeComponent();
|
||||
}
|
||||
}
|
||||
}
|
||||
@ -1,12 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
public class PMOperationNH3_13ViewModel: PMOperationViewModel
|
||||
{
|
||||
}
|
||||
}
|
||||
File diff suppressed because it is too large
Load Diff
@ -1,28 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using System.Windows;
|
||||
using System.Windows.Controls;
|
||||
using System.Windows.Data;
|
||||
using System.Windows.Documents;
|
||||
using System.Windows.Input;
|
||||
using System.Windows.Media;
|
||||
using System.Windows.Media.Imaging;
|
||||
using System.Windows.Navigation;
|
||||
using System.Windows.Shapes;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
/// <summary>
|
||||
/// PMOperationNH3_14View.xaml 的交互逻辑
|
||||
/// </summary>
|
||||
public partial class PMOperationNH3_14View : UserControl
|
||||
{
|
||||
public PMOperationNH3_14View()
|
||||
{
|
||||
InitializeComponent();
|
||||
}
|
||||
}
|
||||
}
|
||||
@ -1,12 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
public class PMOperationNH3_14ViewModel: PMOperationViewModel
|
||||
{
|
||||
}
|
||||
}
|
||||
File diff suppressed because it is too large
Load Diff
@ -1,28 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using System.Windows;
|
||||
using System.Windows.Controls;
|
||||
using System.Windows.Data;
|
||||
using System.Windows.Documents;
|
||||
using System.Windows.Input;
|
||||
using System.Windows.Media;
|
||||
using System.Windows.Media.Imaging;
|
||||
using System.Windows.Navigation;
|
||||
using System.Windows.Shapes;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
/// <summary>
|
||||
/// PMOperationNH3_16View.xaml 的交互逻辑
|
||||
/// </summary>
|
||||
public partial class PMOperationNH3_16View : UserControl
|
||||
{
|
||||
public PMOperationNH3_16View()
|
||||
{
|
||||
InitializeComponent();
|
||||
}
|
||||
}
|
||||
}
|
||||
@ -1,12 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
public class PMOperationNH3_16ViewModel: PMOperationViewModel
|
||||
{
|
||||
}
|
||||
}
|
||||
File diff suppressed because it is too large
Load Diff
@ -1,28 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using System.Windows;
|
||||
using System.Windows.Controls;
|
||||
using System.Windows.Data;
|
||||
using System.Windows.Documents;
|
||||
using System.Windows.Input;
|
||||
using System.Windows.Media;
|
||||
using System.Windows.Media.Imaging;
|
||||
using System.Windows.Navigation;
|
||||
using System.Windows.Shapes;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
/// <summary>
|
||||
/// PMOperationNH3_17View.xaml 的交互逻辑
|
||||
/// </summary>
|
||||
public partial class PMOperationNH3_17View : UserControl
|
||||
{
|
||||
public PMOperationNH3_17View()
|
||||
{
|
||||
InitializeComponent();
|
||||
}
|
||||
}
|
||||
}
|
||||
@ -1,12 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
public class PMOperationNH3_17ViewModel: PMOperationViewModel
|
||||
{
|
||||
}
|
||||
}
|
||||
File diff suppressed because it is too large
Load Diff
@ -1,28 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using System.Windows;
|
||||
using System.Windows.Controls;
|
||||
using System.Windows.Data;
|
||||
using System.Windows.Documents;
|
||||
using System.Windows.Input;
|
||||
using System.Windows.Media;
|
||||
using System.Windows.Media.Imaging;
|
||||
using System.Windows.Navigation;
|
||||
using System.Windows.Shapes;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
/// <summary>
|
||||
/// PMOperationNH3_18View.xaml 的交互逻辑
|
||||
/// </summary>
|
||||
public partial class PMOperationNH3_18View : UserControl
|
||||
{
|
||||
public PMOperationNH3_18View()
|
||||
{
|
||||
InitializeComponent();
|
||||
}
|
||||
}
|
||||
}
|
||||
@ -1,12 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
public class PMOperationNH3_18ViewModel : PMOperationViewModel
|
||||
{
|
||||
}
|
||||
}
|
||||
File diff suppressed because it is too large
Load Diff
@ -1,28 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using System.Windows;
|
||||
using System.Windows.Controls;
|
||||
using System.Windows.Data;
|
||||
using System.Windows.Documents;
|
||||
using System.Windows.Input;
|
||||
using System.Windows.Media;
|
||||
using System.Windows.Media.Imaging;
|
||||
using System.Windows.Navigation;
|
||||
using System.Windows.Shapes;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
/// <summary>
|
||||
/// PMOperationNH3_19View.xaml 的交互逻辑
|
||||
/// </summary>
|
||||
public partial class PMOperationNH3_19View : UserControl
|
||||
{
|
||||
public PMOperationNH3_19View()
|
||||
{
|
||||
InitializeComponent();
|
||||
}
|
||||
}
|
||||
}
|
||||
@ -1,12 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
public class PMOperationNH3_19ViewModel : PMOperationViewModel
|
||||
{
|
||||
}
|
||||
}
|
||||
File diff suppressed because it is too large
Load Diff
@ -1,28 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using System.Windows;
|
||||
using System.Windows.Controls;
|
||||
using System.Windows.Data;
|
||||
using System.Windows.Documents;
|
||||
using System.Windows.Input;
|
||||
using System.Windows.Media;
|
||||
using System.Windows.Media.Imaging;
|
||||
using System.Windows.Navigation;
|
||||
using System.Windows.Shapes;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
/// <summary>
|
||||
/// PMOperationNH3_1View.xaml 的交互逻辑
|
||||
/// </summary>
|
||||
public partial class PMOperationNH3_1View : UserControl
|
||||
{
|
||||
public PMOperationNH3_1View()
|
||||
{
|
||||
InitializeComponent();
|
||||
}
|
||||
}
|
||||
}
|
||||
@ -1,12 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
internal class PMOperationNH3_1ViewModel: PMOperationViewModel
|
||||
{
|
||||
}
|
||||
}
|
||||
File diff suppressed because it is too large
Load Diff
@ -1,28 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using System.Windows;
|
||||
using System.Windows.Controls;
|
||||
using System.Windows.Data;
|
||||
using System.Windows.Documents;
|
||||
using System.Windows.Input;
|
||||
using System.Windows.Media;
|
||||
using System.Windows.Media.Imaging;
|
||||
using System.Windows.Navigation;
|
||||
using System.Windows.Shapes;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
/// <summary>
|
||||
/// PMOperationNH3_2View.xaml 的交互逻辑
|
||||
/// </summary>
|
||||
public partial class PMOperationNH3_2View : UserControl
|
||||
{
|
||||
public PMOperationNH3_2View()
|
||||
{
|
||||
InitializeComponent();
|
||||
}
|
||||
}
|
||||
}
|
||||
@ -1,12 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
public class PMOperationNH3_2ViewModel : PMOperationViewModel
|
||||
{
|
||||
}
|
||||
}
|
||||
File diff suppressed because it is too large
Load Diff
@ -1,28 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using System.Windows;
|
||||
using System.Windows.Controls;
|
||||
using System.Windows.Data;
|
||||
using System.Windows.Documents;
|
||||
using System.Windows.Input;
|
||||
using System.Windows.Media;
|
||||
using System.Windows.Media.Imaging;
|
||||
using System.Windows.Navigation;
|
||||
using System.Windows.Shapes;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
/// <summary>
|
||||
/// PMOperationNH3_3View.xaml 的交互逻辑
|
||||
/// </summary>
|
||||
public partial class PMOperationNH3_3View : UserControl
|
||||
{
|
||||
public PMOperationNH3_3View()
|
||||
{
|
||||
InitializeComponent();
|
||||
}
|
||||
}
|
||||
}
|
||||
@ -1,12 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
public class PMOperationNH3_3ViewModel: PMOperationViewModel
|
||||
{
|
||||
}
|
||||
}
|
||||
File diff suppressed because it is too large
Load Diff
@ -1,28 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using System.Windows;
|
||||
using System.Windows.Controls;
|
||||
using System.Windows.Data;
|
||||
using System.Windows.Documents;
|
||||
using System.Windows.Input;
|
||||
using System.Windows.Media;
|
||||
using System.Windows.Media.Imaging;
|
||||
using System.Windows.Navigation;
|
||||
using System.Windows.Shapes;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
/// <summary>
|
||||
/// PMOperationNH3_6View.xaml 的交互逻辑
|
||||
/// </summary>
|
||||
public partial class PMOperationNH3_6View : UserControl
|
||||
{
|
||||
public PMOperationNH3_6View()
|
||||
{
|
||||
InitializeComponent();
|
||||
}
|
||||
}
|
||||
}
|
||||
@ -1,12 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
public class PMOperationNH3_6ViewModel : PMOperationViewModel
|
||||
{
|
||||
}
|
||||
}
|
||||
File diff suppressed because it is too large
Load Diff
@ -1,28 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using System.Windows;
|
||||
using System.Windows.Controls;
|
||||
using System.Windows.Data;
|
||||
using System.Windows.Documents;
|
||||
using System.Windows.Input;
|
||||
using System.Windows.Media;
|
||||
using System.Windows.Media.Imaging;
|
||||
using System.Windows.Navigation;
|
||||
using System.Windows.Shapes;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
/// <summary>
|
||||
/// PMOperationNH3_7View.xaml 的交互逻辑
|
||||
/// </summary>
|
||||
public partial class PMOperationNH3_7View : UserControl
|
||||
{
|
||||
public PMOperationNH3_7View()
|
||||
{
|
||||
InitializeComponent();
|
||||
}
|
||||
}
|
||||
}
|
||||
@ -1,12 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
public class PMOperationNH3_7ViewModel : PMOperationViewModel
|
||||
{
|
||||
}
|
||||
}
|
||||
File diff suppressed because it is too large
Load Diff
@ -1,28 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using System.Windows;
|
||||
using System.Windows.Controls;
|
||||
using System.Windows.Data;
|
||||
using System.Windows.Documents;
|
||||
using System.Windows.Input;
|
||||
using System.Windows.Media;
|
||||
using System.Windows.Media.Imaging;
|
||||
using System.Windows.Navigation;
|
||||
using System.Windows.Shapes;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
/// <summary>
|
||||
/// PMOperationNH3_8View.xaml 的交互逻辑
|
||||
/// </summary>
|
||||
public partial class PMOperationNH3_8View : UserControl
|
||||
{
|
||||
public PMOperationNH3_8View()
|
||||
{
|
||||
InitializeComponent();
|
||||
}
|
||||
}
|
||||
}
|
||||
@ -1,12 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
public class PMOperationNH3_8ViewModel: PMOperationViewModel
|
||||
{
|
||||
}
|
||||
}
|
||||
File diff suppressed because it is too large
Load Diff
@ -1,28 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
using System.Windows;
|
||||
using System.Windows.Controls;
|
||||
using System.Windows.Data;
|
||||
using System.Windows.Documents;
|
||||
using System.Windows.Input;
|
||||
using System.Windows.Media;
|
||||
using System.Windows.Media.Imaging;
|
||||
using System.Windows.Navigation;
|
||||
using System.Windows.Shapes;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
/// <summary>
|
||||
/// PMOperationNH3_9View.xaml 的交互逻辑
|
||||
/// </summary>
|
||||
public partial class PMOperationNH3_9View : UserControl
|
||||
{
|
||||
public PMOperationNH3_9View()
|
||||
{
|
||||
InitializeComponent();
|
||||
}
|
||||
}
|
||||
}
|
||||
@ -1,12 +0,0 @@
|
||||
using System;
|
||||
using System.Collections.Generic;
|
||||
using System.Linq;
|
||||
using System.Text;
|
||||
using System.Threading.Tasks;
|
||||
|
||||
namespace SicUI.Models.PMs
|
||||
{
|
||||
public class PMOperationNH3_9ViewModel: PMOperationViewModel
|
||||
{
|
||||
}
|
||||
}
|
||||
File diff suppressed because it is too large
Load Diff
@ -160,6 +160,7 @@
|
||||
<Generator>MSBuild:Compile</Generator>
|
||||
<SubType>Designer</SubType>
|
||||
</ApplicationDefinition>
|
||||
<Compile Include="Bootstrapper.cs" />
|
||||
<Compile Include="Controls\AITPump.xaml.cs">
|
||||
<DependentUpon>AITPump.xaml</DependentUpon>
|
||||
</Compile>
|
||||
@ -372,72 +373,7 @@
|
||||
<DependentUpon>App.xaml</DependentUpon>
|
||||
<SubType>Code</SubType>
|
||||
</Compile>
|
||||
<Compile Include="Bootstrapper.cs" />
|
||||
<Compile Include="MainViewModel.cs" />
|
||||
<Compile Include="Models\PMs\PMOperationNH3_10ViewModel.cs" />
|
||||
<Compile Include="Models\PMs\PMOperationNH3_12View.xaml.cs">
|
||||
<DependentUpon>PMOperationNH3_12View.xaml</DependentUpon>
|
||||
</Compile>
|
||||
<Compile Include="Models\PMs\PMOperationNH3_12ViewModel.cs" />
|
||||
<Compile Include="Models\PMs\PMOperationNH3_13View.xaml.cs">
|
||||
<DependentUpon>PMOperationNH3_13View.xaml</DependentUpon>
|
||||
</Compile>
|
||||
<Compile Include="Models\PMs\PMOperationNH3_13ViewModel.cs" />
|
||||
<Compile Include="Models\PMs\PMOperationNH3_14View.xaml.cs">
|
||||
<DependentUpon>PMOperationNH3_14View.xaml</DependentUpon>
|
||||
</Compile>
|
||||
<Compile Include="Models\PMs\PMOperationNH3_14ViewModel.cs" />
|
||||
<Compile Include="Models\PMs\PMOperationNH3_16View.xaml.cs">
|
||||
<DependentUpon>PMOperationNH3_16View.xaml</DependentUpon>
|
||||
</Compile>
|
||||
<Compile Include="Models\PMs\PMOperationNH3_16ViewModel.cs" />
|
||||
<Compile Include="Models\PMs\PMOperationNH3_17View.xaml.cs">
|
||||
<DependentUpon>PMOperationNH3_17View.xaml</DependentUpon>
|
||||
</Compile>
|
||||
<Compile Include="Models\PMs\PMOperationNH3_17ViewModel.cs" />
|
||||
<Compile Include="Models\PMs\PMOperationNH3_18View.xaml.cs">
|
||||
<DependentUpon>PMOperationNH3_18View.xaml</DependentUpon>
|
||||
</Compile>
|
||||
<Compile Include="Models\PMs\PMOperationNH3_18ViewModel.cs" />
|
||||
<Compile Include="Models\PMs\PMOperationNH3_19View.xaml.cs">
|
||||
<DependentUpon>PMOperationNH3_19View.xaml</DependentUpon>
|
||||
</Compile>
|
||||
<Compile Include="Models\PMs\PMOperationNH3_19ViewModel.cs" />
|
||||
<Compile Include="Models\PMs\PMOperationNH3_1View.xaml.cs">
|
||||
<DependentUpon>PMOperationNH3_1View.xaml</DependentUpon>
|
||||
</Compile>
|
||||
<Compile Include="Models\PMs\PMOperationNH3_1ViewModel.cs" />
|
||||
<Compile Include="Models\PMs\PMOperationNH3_2View.xaml.cs">
|
||||
<DependentUpon>PMOperationNH3_2View.xaml</DependentUpon>
|
||||
</Compile>
|
||||
<Compile Include="Models\PMs\PMOperationNH3_2ViewModel.cs" />
|
||||
<Compile Include="Models\PMs\PMOperationNH3_3View.xaml.cs">
|
||||
<DependentUpon>PMOperationNH3_3View.xaml</DependentUpon>
|
||||
</Compile>
|
||||
<Compile Include="Models\PMs\PMOperationNH3_3ViewModel.cs" />
|
||||
<Compile Include="Models\PMs\PMOperationNH3_11View.xaml.cs">
|
||||
<DependentUpon>PMOperationNH3_11View.xaml</DependentUpon>
|
||||
</Compile>
|
||||
<Compile Include="Models\PMs\PMOperationNH3_11ViewModel.cs" />
|
||||
<Compile Include="Models\PMs\PMOperationNH3_6View.xaml.cs">
|
||||
<DependentUpon>PMOperationNH3_6View.xaml</DependentUpon>
|
||||
</Compile>
|
||||
<Compile Include="Models\PMs\PMOperationNH3_6ViewModel.cs" />
|
||||
<Compile Include="Models\PMs\PMOperationNH3_7View.xaml.cs">
|
||||
<DependentUpon>PMOperationNH3_7View.xaml</DependentUpon>
|
||||
</Compile>
|
||||
<Compile Include="Models\PMs\PMOperationNH3_7ViewModel.cs" />
|
||||
<Compile Include="Models\PMs\PMOperationNH3_8View.xaml.cs">
|
||||
<DependentUpon>PMOperationNH3_8View.xaml</DependentUpon>
|
||||
</Compile>
|
||||
<Compile Include="Models\PMs\PMOperationNH3_8ViewModel.cs" />
|
||||
<Compile Include="Models\PMs\PMOperationNH3_10View.xaml.cs">
|
||||
<DependentUpon>PMOperationNH3_10View.xaml</DependentUpon>
|
||||
</Compile>
|
||||
<Compile Include="Models\PMs\PMOperationNH3_9View.xaml.cs">
|
||||
<DependentUpon>PMOperationNH3_9View.xaml</DependentUpon>
|
||||
</Compile>
|
||||
<Compile Include="Models\PMs\PMOperationNH3_9ViewModel.cs" />
|
||||
<Compile Include="RtIpAddressInput.xaml.cs">
|
||||
<DependentUpon>RtIpAddressInput.xaml</DependentUpon>
|
||||
</Compile>
|
||||
@ -662,70 +598,6 @@
|
||||
<Generator>MSBuild:Compile</Generator>
|
||||
<SubType>Designer</SubType>
|
||||
</Page>
|
||||
<Page Include="Models\PMs\PMOperationNH3_12View.xaml">
|
||||
<SubType>Designer</SubType>
|
||||
<Generator>MSBuild:Compile</Generator>
|
||||
</Page>
|
||||
<Page Include="Models\PMs\PMOperationNH3_13View.xaml">
|
||||
<SubType>Designer</SubType>
|
||||
<Generator>MSBuild:Compile</Generator>
|
||||
</Page>
|
||||
<Page Include="Models\PMs\PMOperationNH3_14View.xaml">
|
||||
<SubType>Designer</SubType>
|
||||
<Generator>MSBuild:Compile</Generator>
|
||||
</Page>
|
||||
<Page Include="Models\PMs\PMOperationNH3_16View.xaml">
|
||||
<SubType>Designer</SubType>
|
||||
<Generator>MSBuild:Compile</Generator>
|
||||
</Page>
|
||||
<Page Include="Models\PMs\PMOperationNH3_17View.xaml">
|
||||
<SubType>Designer</SubType>
|
||||
<Generator>MSBuild:Compile</Generator>
|
||||
</Page>
|
||||
<Page Include="Models\PMs\PMOperationNH3_18View.xaml">
|
||||
<SubType>Designer</SubType>
|
||||
<Generator>MSBuild:Compile</Generator>
|
||||
</Page>
|
||||
<Page Include="Models\PMs\PMOperationNH3_19View.xaml">
|
||||
<SubType>Designer</SubType>
|
||||
<Generator>MSBuild:Compile</Generator>
|
||||
</Page>
|
||||
<Page Include="Models\PMs\PMOperationNH3_1View.xaml">
|
||||
<SubType>Designer</SubType>
|
||||
<Generator>MSBuild:Compile</Generator>
|
||||
</Page>
|
||||
<Page Include="Models\PMs\PMOperationNH3_2View.xaml">
|
||||
<SubType>Designer</SubType>
|
||||
<Generator>MSBuild:Compile</Generator>
|
||||
</Page>
|
||||
<Page Include="Models\PMs\PMOperationNH3_3View.xaml">
|
||||
<SubType>Designer</SubType>
|
||||
<Generator>MSBuild:Compile</Generator>
|
||||
</Page>
|
||||
<Page Include="Models\PMs\PMOperationNH3_11View.xaml">
|
||||
<SubType>Designer</SubType>
|
||||
<Generator>MSBuild:Compile</Generator>
|
||||
</Page>
|
||||
<Page Include="Models\PMs\PMOperationNH3_6View.xaml">
|
||||
<SubType>Designer</SubType>
|
||||
<Generator>MSBuild:Compile</Generator>
|
||||
</Page>
|
||||
<Page Include="Models\PMs\PMOperationNH3_7View.xaml">
|
||||
<SubType>Designer</SubType>
|
||||
<Generator>MSBuild:Compile</Generator>
|
||||
</Page>
|
||||
<Page Include="Models\PMs\PMOperationNH3_8View.xaml">
|
||||
<SubType>Designer</SubType>
|
||||
<Generator>MSBuild:Compile</Generator>
|
||||
</Page>
|
||||
<Page Include="Models\PMs\PMOperationNH3_10View.xaml">
|
||||
<SubType>Designer</SubType>
|
||||
<Generator>MSBuild:Compile</Generator>
|
||||
</Page>
|
||||
<Page Include="Models\PMs\PMOperationNH3_9View.xaml">
|
||||
<SubType>Designer</SubType>
|
||||
<Generator>MSBuild:Compile</Generator>
|
||||
</Page>
|
||||
<Page Include="Models\PMs\PMOperationView.xaml">
|
||||
<Generator>MSBuild:Compile</Generator>
|
||||
<SubType>Designer</SubType>
|
||||
|
||||
Loading…
Reference in New Issue
Block a user