hanqiangqiang
|
8a1b917509
|
Recipe中添加M32
AbortRoutine超时180秒，写死
|
2026-06-15 15:20:23 +08:00 |
|
hanqiangqiang
|
2a6bdd9ddf
|
删除Routine中V34操作
|
2026-06-10 17:30:25 +08:00 |
|
hanqiangqiang
|
e15d908acc
|
修改Routine中相关V65操作
5修改SHTotalFlow默认最大值
|
2026-06-10 16:51:26 +08:00 |
|
hanqiangqiang
|
916994416a
|
修改Recipe解析
修改Recipe气体切换时控制逻辑
|
2026-06-10 16:39:55 +08:00 |
|
hanqiangqiang
|
a11d2b154d
|
重新整理Routine和仿真
|
2026-06-10 15:41:00 +08:00 |
|
hanqiangqiang
|
9588fe0121
|
修改Routine
修改PC9相关仿真
|
2026-06-10 13:11:53 +08:00 |
|
|
|
b73d39a6b1
|
refactor: 将Framework库和RT、UI放在同一个解决方案中。
|
2026-06-01 17:48:28 +08:00 |
|
