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58 Commits
master ... develop

Author SHA1 Message Date
hanqiangqiang
8a1b917509 Recipe中添加M32 
AbortRoutine超时180秒，写死
 2026-06-15 15:20:23 +08:00
hanqiangqiang
f96300e790 删除PM2中的V34配置 2026-06-15 09:04:53 +08:00
hanqiangqiang
2a6bdd9ddf 删除Routine中V34操作 2026-06-10 17:30:25 +08:00
hanqiangqiang
e15d908acc 修改Routine中相关V65操作 
5修改SHTotalFlow默认最大值
 2026-06-10 16:51:26 +08:00
hanqiangqiang
bf633dee0e 修改PM TM Interlock配置 2026-06-10 16:41:44 +08:00
hanqiangqiang
916994416a 修改Recipe解析 
修改Recipe气体切换时控制逻辑
 2026-06-10 16:39:55 +08:00
hanqiangqiang
a11d2b154d 重新整理Routine和仿真 2026-06-10 15:41:00 +08:00
hanqiangqiang
9588fe0121 修改Routine 
修改PC9相关仿真
 2026-06-10 13:11:53 +08:00
hanqiangqiang
9f9c717299 修改VS2022兼容问题 2026-06-08 16:56:30 +08:00
SL
4f93b74136 release: v1.1.6 2026-06-06 13:36:21 +08:00
SL
87b420a866 fix: 修正PM点表中AI-177重复定义的问题。 2026-06-06 13:21:46 +08:00
SL
4a13bbb9e3 refactor: 更新TM互锁表。 2026-06-06 11:35:11 +08:00
SL
837c01f1cc refactor: 更新PM互锁表。 2026-06-06 11:34:58 +08:00
SIC1016\caipeilun
48f9d22026 Merge branch 'develop' of http://112.124.35.216:65000/Sic-Software/SIC-12 into develop 2026-06-05 17:33:05 +08:00
SL
bae2f56e90 release: v1.1.5 2026-06-05 17:10:19 +08:00
SL
e846277687 fix: 修正IoProviderConfig中的BlockIndex配置错误的问题。 2026-06-05 17:09:44 +08:00
SIC1016\caipeilun
9112f229e6 增加动态流量config 2026-06-05 17:08:52 +08:00
SL
81c3d05a82 refactor: 调整点表，增加新的AI、AO数据块，供PSU4使用。 2026-06-05 10:01:34 +08:00
SL
ce7562bf1b refactor: 移除管理员方式启动SicUI的相关配置。 2026-06-05 10:00:25 +08:00
SL
039d1c77db fix: 修正MainView初始化时某些元素找不到导致引发NullReference异常的问题。 2026-06-05 09:59:58 +08:00
SL
187984f5b9 refactor: 简化PLC模拟器Buffer的初始化逻辑。 2026-06-05 09:59:19 +08:00
SIC1016\caipeilun
1526692d4e 修改recipe内容 
修改TMIO配置
 2026-06-04 17:35:01 +08:00
SIC1016\caipeilun
6d1a2b3752 1.修改气路图界面相关 
2.修改TM IO相关
 2026-06-04 14:46:30 +08:00
SIC1016\caipeilun
78a10fcf91 修改气路图 
添加mfc配置
修改device参数
更新valve的ui文本，解决常闭常开信息错误的问题
 2026-06-04 09:07:09 +08:00
SIC1016\caipeilun
51a9ebefd5 修改库的引用路径 2026-06-03 16:44:16 +08:00
SL
cf8b375796 fix: 修正缺少引用导致Simulator无法启动的问题。 2026-06-01 18:13:04 +08:00
SL
b73d39a6b1 refactor: 将Framework库和RT、UI放在同一个解决方案中。 2026-06-01 17:48:28 +08:00
hanqiangqiang
1948f4290d 调整UI错误部分，修改干泵绑定，更新版本号 2026-06-01 10:03:53 +08:00
hanqiangqiang
32852232e4 整理气路布局 2026-05-29 16:56:34 +08:00
hanqiangqiang
b2d0ea9bf3 1整理气路，尽量整体显示完整 2临时屏蔽Load腔开关按钮 2026-05-29 16:09:13 +08:00
hanqiangqiang
42149f271c 新增Load腔开盖操作，修改界面、配置和仿真 2026-05-29 11:03:40 +08:00
hanqiangqiang
bfbc90c5a9 整理气路布局，设备触目屏分辨率小，气路图不能完整显示 
添加气路漏画部分
 2026-05-29 09:49:19 +08:00
hanqiangqiang
98bf58818c 更新dll，修改仿真异常 2026-05-29 08:29:54 +08:00
hanqiangqiang
10adac2e57 整理新增MFC配置 2026-05-28 14:18:50 +08:00
hanqiangqiang
e05a33e50a 重修修改气路，检查界面配置 2026-05-28 13:39:17 +08:00
hanqiangqiang
1420ab0fa1 修改气路临时保存 
修改版本号
 2026-05-28 11:33:08 +08:00
hanqiangqiang
f6b4a74d7a 临时保存新版本气路 2026-05-27 17:26:08 +08:00
hanqiangqiang
c686da0915 更新气路图临时保存 2026-05-26 17:18:44 +08:00
hanqiangqiang
176cd7b598 修改PLC的IO配置后，仿真无法运行问题修改 2026-05-21 15:23:06 +08:00
hanqiangqiang
3a8f3d0ab1 修改IoProviderConfig仿真内容 2026-05-20 15:35:56 +08:00
hanqiangqiang
187ae65ace 根据PLC的DB块重新IoProviderConfig配置文件 2026-05-20 15:33:31 +08:00
hanqiangqiang
7a79ee8dff 添加MCF状态显示 2026-05-13 16:59:12 +08:00
hanqiangqiang
dd1b96ddc3 同步最新dll 2026-05-13 16:46:24 +08:00
hanqiangqiang
861f3487f2 修改buffer层数问题，使用全局变量 2026-04-22 09:39:19 +08:00
hanqiangqiang
86658365fa 修改PM气路图中的数据绑定问题 2026-04-20 16:30:49 +08:00
hanqiangqiang
9c33a97641 修改Buffer相关内容，界面显示和初始化层数 2026-04-09 11:22:33 +08:00
hanqiangqiang
798c139462 添加PM气路中气动阀配置问题 2026-04-09 10:50:43 +08:00
hanqiangqiang
c2641efdd9 调整模块界面布局 2026-04-09 10:35:31 +08:00
hanqiangqiang
7646429961 修改Recipe不能RUN问题 2026-04-08 16:37:48 +08:00
hanqiangqiang
2c1d063db3 修改Recipe模板配置 2026-04-08 16:19:45 +08:00
hanqiangqiang
be420ec451 测试Routine流程，修改调试Routine中修改各种配置或者条件或者仿真问题导致的流程失败 2026-04-08 14:31:35 +08:00
hanqiangqiang
cac67d78d9 添加M41-M45配置 
修改Routine
 2026-04-07 16:08:18 +08:00
hanqiangqiang
a28609dec3 修改气泵仿真和配置 
添加MFC配置
 2026-04-01 09:46:54 +08:00
hanqiangqiang
34546f1e44 添加PM气路图中相关配置内容 2026-03-31 16:08:31 +08:00
hanqiangqiang
b91d4df0c5 整理TM界面，添加泵配置 2026-03-31 15:54:40 +08:00
hanqiangqiang
ff84911ef3 整理主界面 
添加各个模块界面
 2026-03-31 15:14:52 +08:00
hanqiangqiang
ecdeac75ce 整理气路图和相关配置内容 2026-03-24 17:33:10 +08:00
hanqiangqiang
ff6c08e69a 修改基础配置机台类型 2026-03-24 15:18:49 +08:00
4372 changed files with 511233 additions and 178848 deletions
Show Stats Expand all files Collapse all files

9
.gitignore vendored
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@ -28,10 +28,18 @@ x86/
[Aa][Rr][Mm]64/
bld/
[Bb]in/
# NSIS 工具链 - 强制纳入版本管理
!App/SicSetup/Sic_Setup/NSIS/Bin/
!App/SicSetup/Sic_Setup/NSIS/Bin/**
[Oo]bj/
[Oo]ut/
[Ll]og/
[Ll]ogs/
# Framework 源码 Log 模块 - 强制纳入版本管理
!Framework/**/Log/
!Framework/**/Log/**
!Framework/**/Logs/
!Framework/**/Logs/**
# Visual Studio 2015/2017 cache/options directory
.vs/
@ -90,7 +98,6 @@ StyleCopReport.xml
*.tmp
*.tmp_proj
*_wpftmp.csproj
*.log
*.vspscc
*.vssscc
.builds

0
Modules/SicModules/Aligners/AlignerModule.cs → App/Modules/SicModules/Aligners/AlignerModule.cs
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0
Modules/SicModules/Aligners/AlignerModuleBase.cs → App/Modules/SicModules/Aligners/AlignerModuleBase.cs
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0
Modules/SicModules/Aligners/Routines/AlignerAlignRoutine.cs → App/Modules/SicModules/Aligners/Routines/AlignerAlignRoutine.cs
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0
Modules/SicModules/Aligners/Routines/AlignerBaseRoutine.cs → App/Modules/SicModules/Aligners/Routines/AlignerBaseRoutine.cs
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0
Modules/SicModules/Aligners/Routines/AlignerHomeRoutine.cs → App/Modules/SicModules/Aligners/Routines/AlignerHomeRoutine.cs
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0
Modules/SicModules/Aligners/SicAligner.cs → App/Modules/SicModules/Aligners/SicAligner.cs
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2
Modules/SicModules/Buffers/BufferModule.cs → App/Modules/SicModules/Buffers/BufferModule.cs
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@ -115,7 +115,7 @@ namespace SicModules.Buffers
private BufferHomeRoutine _homeRoutine;
private BufferCoolingRoutine _coolingRoutine;
public BufferModule(ModuleName module) : base(3)
public BufferModule(ModuleName module) : base(1)
{
Module = module.ToString();
Name = module.ToString();

0
Modules/SicModules/Buffers/BufferModuleBase.cs → App/Modules/SicModules/Buffers/BufferModuleBase.cs
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0
Modules/SicModules/Buffers/Routines/BufferCoolingRoutine.cs → App/Modules/SicModules/Buffers/Routines/BufferCoolingRoutine.cs
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0
Modules/SicModules/Buffers/Routines/BufferHomeRoutine.cs → App/Modules/SicModules/Buffers/Routines/BufferHomeRoutine.cs
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0
Modules/SicModules/Buffers/SicBuffer.cs → App/Modules/SicModules/Buffers/SicBuffer.cs
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0
Modules/SicModules/Cassettes/CassetteModule.cs → App/Modules/SicModules/Cassettes/CassetteModule.cs
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0
Modules/SicModules/Cassettes/CassetteModuleBase.cs → App/Modules/SicModules/Cassettes/CassetteModuleBase.cs
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0
Modules/SicModules/Cassettes/SicCassette.cs → App/Modules/SicModules/Cassettes/SicCassette.cs
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0
Modules/SicModules/Config/Common/Common.xml → App/Modules/SicModules/Config/Common/Common.xml
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0
Modules/SicModules/Config/PM/MfcRor/MfcRor.xml → App/Modules/SicModules/Config/PM/MfcRor/MfcRor.xml
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30
Modules/SicModules/Config/PM/PM1/DeviceModelPM1.xml → App/Modules/SicModules/Config/PM/PM1/DeviceModelPM1.xml
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@ -75,12 +75,12 @@
<IoValve id="V19" display="ArSafetyBypass" schematicId="V19" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_ArSafetyBypassFB(V19)" doOpen="DO_ArSafetyBypass(V19)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V19s" display="ArSafetyBypass" schematicId="V19s" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_ArSafetyBypassFB(V19)" doOpen="DO_ArSafetyBypass(V19)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V27" display="PumpBypass" schematicId="V27" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PumpBypassFB(V27)" doOpen="DO_PumpBypass(V27)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V30" display="H2Supply2" schematicId="V30" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SupplyFB(V30)" doOpen="DO_H2Supply(V30)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V31" display="H2Supply" schematicId="V31" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SupplyFB(V31)" doOpen="DO_H2Supply(V31)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V32" display="ArSupply" schematicId="V32" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_ArSupplyFB(V32)" doOpen="DO_ArSupply(V32)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V33" display="H2ArSwitch" schematicId="V33" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SHH2/ArSwitchFB(V33)" doOpen="DO_SHH2/ArSwitch(V33)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V33s" display="H2ArSwitch" schematicId="V33s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SHH2/ArSwitchFB(V33)" doOpen="DO_SHH2/ArSwitch(V33)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V34" display="NH3Source" schematicId="V34" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_NH3SourceFB(V34)" doOpen="DO_NH3Source(V34)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V35" display="H2ArLine1" schematicId="V35" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2ArLine1FB(V35)" doOpen="DO_H2ArLine1(V35)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V35" display="H2ArLine1" schematicId="V35" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2ArLine1FB(V35)" doOpen="DO_H2ArLine1(V35)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V36" display="H2ArLine2" schematicId="V36" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2ArLine2FB(V36)" doOpen="DO_H2ArLine2(V36)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V37" display="N2.Switch" schematicId="V37" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_N2SwitchFB(V37)" doOpen="DO_N2Switch(V37)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V37s" display="N2.Switch" schematicId="V37s" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_N2SwitchFB(V37)" doOpen="DO_N2Switch(V37)" diCloseSensor="" diOpenSensor="" />
@ -121,6 +121,8 @@
<IoValve id="V61" display="DoppingFinal" schematicId="V61" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_DoppingFinalFB(V61)" doOpen="DO_DoppingFinal(V61)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V62" display="SilaneFinal" schematicId="V62" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SilaneFinalFB(V62)" doOpen="DO_SilaneFinal(V62)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V63" display="PropaneFinal" schematicId="V63" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_PropaneFinalFB(V63)" doOpen="DO_PropaneFinal(V63)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V64" display="CarrierGasH2" schematicId="V64" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CarrierGasH2FB(V64)" doOpen="DO_CarrierGasH2(V64)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V65" display="CarrierGasAr" schematicId="V65" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_CarrierGasArFB(V65)" doOpen="DO_CarrierGasAr(V65)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V68" display="ChamBodyArPurge" schematicId="V68" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_ChamBodyArPurgeFB(V68)" doOpen="DO_ChamBodyArPurge(V68)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V69" display="ReactorLeakCheck" schematicId="V69" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_ReactorLeakCheckFB(V69)" doOpen="DO_ReactorLeakCheck(V69)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V70" display="TMPressBalance" schematicId="V70" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_TMPressBalanceFB(V70)" doOpen="DO_TMPressBalance(V70)" diCloseSensor="" diOpenSensor="" />
@ -139,7 +141,7 @@
<IoValve id="V94" display="RotationUpPurgeFinal" schematicId="V94" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_RotationUpPurgeFinalFB(V94)" doOpen="DO_RotationUpPurgeFinal(V94)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V95" display="ConfinementRingFinal" schematicId="V95" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_ConfinementRingFinalFB(V95)" doOpen="DO_ConfinementRingFinal(V95)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V96" display="HeaterWFFinal" schematicId="V96" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_HeaterWFFinalFB(V96)" doOpen="DO_HeaterWFFinal(V96)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V97" display="CarryGasFinal" schematicId="V97" unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_CarryGasFinal(V97)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V97" display="CarryGasFinal" schematicId="V97" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CarryGasFinalFB(V97)" doOpen="DO_CarryGasFinal(V97)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V111" display="OpenLidPurge" schematicId="V111" unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_OpenLidPurge" diCloseSensor="" diOpenSensor="" />
<IoValve id="EPV2" display="EPV2" schematicId="EPV2" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_EPV2-1FB" doOpen="DO_EPV2" diCloseSensor="" diOpenSensor="" />
<IoValve id="HeatEnable" display="HeatEnable" schematicId="HeatEnable" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PSUEnableFB" doOpen="DO_HeaterEnable" diCloseSensor="" diOpenSensor="" />
@ -192,7 +194,12 @@
<IoMfc id="Mfc36" display="Mfc36" schematicId="Mfc36" unit="sccm" aiActMode="AI_M36ActMode" aoSetMode="AO_M36CtrlMode" aiFlow="AI_M36" aoFlow="AO_M36" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC36Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm136 MFC36 Offline[DI-386]" />
<IoMfc id="Mfc37" display="Mfc37" schematicId="Mfc37" unit="sccm" aiActMode="AI_M37ActMode" aoSetMode="AO_M37CtrlMode" aiFlow="AI_M37" aoFlow="AO_M37" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC37Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm137 MFC37 Offline[DI-387]" />
<IoMfc id="Mfc38" display="Mfc38" schematicId="Mfc38" unit="sccm" aiActMode="AI_M38ActMode" aoSetMode="AO_M38CtrlMode" aiFlow="AI_M38" aoFlow="AO_M38" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC38Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm138 MFC38 Offline[DI-388]" />
<IoMfc id="Mfc40" display="Mfc40" schematicId="Mfc40" unit="sccm" aiActMode="AI_M40ActMode" aoSetMode="AO_M40CtrlMode" aiFlow="AI_M40" aoFlow="AO_M40" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="" />
<IoMfc id="Mfc40" display="Mfc40" schematicId="Mfc40" unit="sccm" aiActMode="AI_M40ActMode" aoSetMode="AO_M40CtrlMode" aiFlow="AI_M40" aoFlow="AO_M40" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC40Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="" />
<IoMfc id="Mfc41" display="Mfc41" schematicId="Mfc41" unit="sccm" aiActMode="AI_M41ActMode" aoSetMode="AO_M41CtrlMode" aiFlow="AI_M41" aoFlow="AO_M41" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC41Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm141 MFC41 Offline[DI-391]" />
<IoMfc id="Mfc42" display="Mfc42" schematicId="Mfc42" unit="sccm" aiActMode="AI_M42ActMode" aoSetMode="AO_M42CtrlMode" aiFlow="AI_M42" aoFlow="AO_M42" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC42Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm142 MFC42 Offline[DI-392]" />
<IoMfc id="Mfc43" display="Mfc43" schematicId="Mfc43" unit="sccm" aiActMode="AI_M43ActMode" aoSetMode="AO_M43CtrlMode" aiFlow="AI_M43" aoFlow="AO_M43" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC43Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm143 MFC43 Offline[DI-393]" />
<IoMfc id="Mfc44" display="Mfc44" schematicId="Mfc44" unit="sccm" aiActMode="AI_M44ActMode" aoSetMode="AO_M44CtrlMode" aiFlow="AI_M44" aoFlow="AO_M44" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC44Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm144 MFC44 Offline[DI-394]" />
<IoMfc id="Mfc45" display="Mfc45" schematicId="Mfc45" unit="sccm" aiActMode="AI_M45ActMode" aoSetMode="AO_M45CtrlMode" aiFlow="AI_M45" aoFlow="AO_M45" scBasePath="PM.PM1.MFC" aioType="float" formatString="F1" diAlarm="DI_MFC45Offline" maskDOProcessIdle="DO_ProcessIdleRunning" maskDOPreProcess="DO_PreprocessRunning" maskDOPostProcess="DO_PostProcessRunning" maskDOProcess="DO_ProcessRunning" AlarmText="Alarm145 MFC45 Offline[DI-395]" />
</IoMfcs>
<IoPressureMeters classType="Aitex.Core.RT.Device.Devices.IoPressure" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoPressureMeter id="Pressure1" display="PC1" schematicId="Pressure1" scBasePath="PM.{module}.PC" unit="mbar" aioType="float" aiOpenDegree="AI_PC1Valve" aiActMode="AI_PC1ActMode" aoSetMode="AO_PC1CtrlMode" aiValue="AI_PressCtrl1" aoValue="AO_PressCtrl1" formatString="0.0" diAlarm="DI_PC01Offline" AlarmText="Alarm141 PC1 Offline[DI-391]" />
@ -369,7 +376,8 @@
<IoGasBoxTemp id="HeatTailPipe" display="HeatTailPipe" aiHeatTMA="AI_HeatTailPipe" scBasePath="PM.{module}.LineHeaterTemp" scAlarmHigh="PumpLineTempLimt" scWarningLog="PumpLineTempAlarm" doLineHeaterEnable=""/>
</IoGasBoxTemps>
<IoPumps classType="Aitex.Core.RT.Device.Devices.IoPump" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoPump id="Pump" module="" display="Pump" schematicId="Pump" unit="" aioType="" diDryPumpAlarm="DI_DryPumpAlarm" diPumpExhaustPress="DI_PumpExhaustPressSW" diDryPumpFlow="DI_DryPumpFlowSW" diDryPump1Running="DI_DryPump1Running" diDryPump1Warning="DI_DryPump1Warning" />
<IoPump id="Pump" module="" display="Pump" schematicId="Pump" unit="" aioType="" diDryPumpAlarm="DI_DryPumpAlarm" diPumpExhaustPress="DI_PumpExhaustPressSW" diDryPump1Running="DI_DryPump1Running" diDryPump1Warning="DI_DryPump1Warning" />
<IoPump id="Pump2" module="" display="Pump2" schematicId="Pump2" unit="" aioType="" diDryPump1Running="DI_DryPump2Running" diDryPumpAlarm="DI_DryPump2Alarm" diDryPump1Warning="DI_DryPump2Warning" diPumpExhaustPress="DI_PumpExhaustDPSW" />
</IoPumps>
<IoPTOffsetAndKs classType="Aitex.Core.RT.Device.Devices.IoPTOffsetAndK" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoPTOffsetAndK id="PT1_Offset" module="" display="PT" schematicId="" unit="" aioType="float" aoOffset="AO_PT1_Offset" />
@ -648,9 +656,6 @@
<!--<IoTMAs classType="Aitex.Core.RT.Device.PmDevices.IoTMA" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoTMA id="TMA" display="" schematicId="" unit="" valve1="V41" valve2="V42" valve3="V43" valve4="V43s" valve5="V45" />
</IoTMAs>-->
<IoSHArH2Switchs classType="Aitex.Core.RT.Device.PmDevices.IoSHArH2Switch" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoSHArH2Switch id="SHArH2Switch" display="" schematicId="" unit="" valve1="V33" valve2="V33s" valve3="V35" valve4="V36" />
</IoSHArH2Switchs>
<IoPurgeArH2Switchs classType="Aitex.Core.RT.Device.PmDevices.IoPurgeArH2Switch" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoPurgeArH2Switch id="PurgeArH2Switch" display="" schematicId="" unit="" valve1="V68" />
</IoPurgeArH2Switchs>
@ -659,6 +664,12 @@
</IoV99s>
<RecipeValveActions classType="Aitex.Core.RT.Device.PmDevices.RecipeValveAction" assembly="MECF.Framework.RT.EquipmentLibrary">
<RecipeValveAction id="SHArH2Switch" display="" schematicId="" unit="">
<Valve Name="V33" Ar="false" H2="true"/>
<Valve Name="V64" Ar="false" H2="true" />
<Valve Name="V65" Ar="true" H2="false" />
<Valve Name="V68" Ar="true" H2="" />
</RecipeValveAction>
<RecipeValveAction id="TMA" display="" schematicId="" unit="">
<Valve Name="V41" Purge="false" Vent="false" Run="true" LowDoping="false"/>
<Valve Name="V42" Purge="true" Vent="true" Run="false" LowDoping="false" />
@ -705,9 +716,6 @@
<RecipeValveAction id="N2NH3_16HighFlowMode" display="" schematicId="" unit="">
<Valve Name="V47" Vent="false" Run="true" />
</RecipeValveAction>
<RecipeValveAction id="V34Value" display="" schematicId="" unit="">
<Valve Name="V34" Open="true" Close="false" />
</RecipeValveAction>
<RecipeValveAction id="V38Value" display="" schematicId="" unit="">
<Valve Name="V38" Open="true" Close="false" />
</RecipeValveAction>

0
Modules/SicModules/Config/PM/PM1/NH3_RealtimeGasFlowPM1.xml → App/Modules/SicModules/Config/PM/PM1/NH3_RealtimeGasFlowPM1.xml
View File

0
Modules/SicModules/Config/PM/PM1/ProcessDeviceItemsPM1.xml → App/Modules/SicModules/Config/PM/PM1/ProcessDeviceItemsPM1.xml
View File

0
Modules/SicModules/Config/PM/PM1/RealtimeGasFlowPM1.xml → App/Modules/SicModules/Config/PM/PM1/RealtimeGasFlowPM1.xml
View File

53
Modules/SicModules/Config/PM/PM1/_ioDefinePM1.xml → App/Modules/SicModules/Config/PM/PM1/_ioDefinePM1.xml
View File

@ -36,6 +36,7 @@
<DI_ITEM Index="34" Name="DI_GBNH3DetectorSW" BufferOffset="34" Addr="34" Description="" />
<DI_ITEM Index="35" Name="DI_GasPipeTempCtrlAlarm" BufferOffset="35" Addr="35" Description="" />
<DI_ITEM Index="36" Name="DI_DryPumpAlarm" BufferOffset="36" Addr="36" Description="" />
<DI_ITEM Index="37" Name="DI_DryPump2Alarm" BufferOffset="37" Addr="37" Description="" />
<DI_ITEM Index="38" Name="DI_PumpExhaustPressSW" BufferOffset="38" Addr="38" Description="" />
<DI_ITEM Index="39" Name="DI_PMAExhaustDPSW" BufferOffset="39" Addr="39" Description="" />
<DI_ITEM Index="40" Name="DI_PumpExhaustDPSW" BufferOffset="40" Addr="40" Description="" />
@ -60,7 +61,9 @@
<DI_ITEM Index="61" Name="DI_ShutterUpLimitSW" BufferOffset="61" Addr="61" Description="" Visible="false" />
<DI_ITEM Index="62" Name="DI_ShutterDownLimitSW" BufferOffset="62" Addr="62" Description="" Visible="false" />
<DI_ITEM Index="65" Name="DI_DryPump1Running" BufferOffset="65" Addr="65" Description="" />
<DI_ITEM Index="66" Name="DI_DryPump2Running" BufferOffset="66" Addr="66" Description="" />
<DI_ITEM Index="67" Name="DI_DryPump1Warning" BufferOffset="67" Addr="67" Description="" />
<DI_ITEM Index="68" Name="DI_DryPump2Warning" BufferOffset="68" Addr="68" Description="" />
<DI_ITEM Index="70" Name="DI_EMOStatusSW" BufferOffset="70" Addr="70" Description="" />
<DI_ITEM Index="71" Name="DI_PumpCabDoorClosed" BufferOffset="71" Addr="71" Description="" />
<DI_ITEM Index="72" Name="DI_FacilityWarningSW" BufferOffset="72" Addr="72" Description="" />
@ -104,7 +107,7 @@
<DI_ITEM Index="161" Name="DI_H2SupplyFB(V31)" BufferOffset="161" Addr="161" Description="" />
<DI_ITEM Index="162" Name="DI_ArSupplyFB(V32)" BufferOffset="162" Addr="162" Description="" />
<DI_ITEM Index="163" Name="DI_SHH2/ArSwitchFB(V33)" BufferOffset="163" Addr="163" Description="" />
<DI_ITEM Index="164" Name="DI_NH3SourceFB(V34)" BufferOffset="164" Addr="164" Description="" />
<DI_ITEM Index="164" Name="DI_H2SupplyFB(V30)" BufferOffset="164" Addr="164" Description="" />
<DI_ITEM Index="165" Name="DI_H2ArLine1FB(V35)" BufferOffset="165" Addr="165" Description="" />
<DI_ITEM Index="166" Name="DI_H2ArLine2FB(V36)" BufferOffset="166" Addr="166" Description="" />
<DI_ITEM Index="167" Name="DI_N2SwitchFB(V37)" BufferOffset="167" Addr="167" Description="" />
@ -135,6 +138,8 @@
<DI_ITEM Index="192" Name="DI_DoppingFinalFB(V61)" BufferOffset="192" Addr="192" Description="" />
<DI_ITEM Index="193" Name="DI_SilaneFinalFB(V62)" BufferOffset="193" Addr="193" Description="" />
<DI_ITEM Index="194" Name="DI_PropaneFinalFB(V63)" BufferOffset="194" Addr="194" Description="" />
<DI_ITEM Index="195" Name="DI_CarrierGasH2FB(V64)" BufferOffset="195" Addr="195" Description="" />
<DI_ITEM Index="196" Name="DI_CarrierGasArFB(V65)" BufferOffset="196" Addr="196" Description="" />
<DI_ITEM Index="197" Name="DI_ArSafetyBypassFB(V19)" BufferOffset="197" Addr="197" Description="" />
<DI_ITEM Index="199" Name="DI_ChamBodyArPurgeFB(V68)" BufferOffset="199" Addr="199" Description="" />
<DI_ITEM Index="200" Name="DI_SHPurgeFinalFB(V87)" BufferOffset="200" Addr="200" Description="" />
@ -148,6 +153,7 @@
<DI_ITEM Index="209" Name="DI_DORRefillFB(V76)" BufferOffset="209" Addr="209" Description="" />
<DI_ITEM Index="211" Name="DI_NdopeDiluteVentFB(V103)" BufferOffset="211" Addr="211" Description="" />
<DI_ITEM Index="212" Name="DI_PumpBypassFB(V27)" BufferOffset="212" Addr="212" Description="" />
<DI_ITEM Index="214" Name="DI_CarryGasFinalFB(V97)" BufferOffset="214" Addr="214" Description="" />
<DI_ITEM Index="216" Name="DI_PSUEnableFB" BufferOffset="216" Addr="216" Description="" />
<DI_ITEM Index="217" Name="DI_InnerHeaterEnableFB" BufferOffset="217" Addr="217" Description="" />
<DI_ITEM Index="218" Name="DI_MiddleHeaterEnableFB" BufferOffset="218" Addr="218" Description="" />
@ -309,7 +315,7 @@
<DO_ITEM Index="1" Name="DO_H2Supply(V31)" BufferOffset="1" Addr="1" Description="" />
<DO_ITEM Index="2" Name="DO_ArSupply(V32)" BufferOffset="2" Addr="2" Description="" />
<DO_ITEM Index="3" Name="DO_SHH2/ArSwitch(V33)" BufferOffset="3" Addr="3" Description="" />
<DO_ITEM Index="4" Name="DO_NH3Source(V34)" BufferOffset="4" Addr="4" Description="" />
<DO_ITEM Index="4" Name="DO_H2Supply(V30)" BufferOffset="4" Addr="4" Description="" />
<DO_ITEM Index="5" Name="DO_H2ArLine1(V35)" BufferOffset="5" Addr="5" Description="" />
<DO_ITEM Index="6" Name="DO_H2ArLine2(V36)" BufferOffset="6" Addr="6" Description="" />
<DO_ITEM Index="7" Name="DO_N2Switch(V37)" BufferOffset="7" Addr="7" Description="" />
@ -639,7 +645,7 @@
<AI_ITEM Index="176" Name="AI_PC6ActMode" BufferOffset="176" Addr="176" DataType="Int32" Description="" />
<AI_ITEM Index="177" Name="AI_PC7ActMode" BufferOffset="177" Addr="177" DataType="Int32" Description="" />
<AI_ITEM Index="178" Name="AI_PC8ActMode" BufferOffset="178" Addr="178" DataType="Int32" Description="" />
<AI_ITEM Index="177" Name="AI_PC9ActMode" BufferOffset="179" Addr="179" DataType="Int32" Description="" />
<AI_ITEM Index="179" Name="AI_PC9ActMode" BufferOffset="179" Addr="179" DataType="Int32" Description="" />
</Block>
<Block Index="1">
<AI_ITEM Index="181" Name="AI_PSUInnerWorkingOP" BufferOffset="0" Addr="0" Description="" />
@ -690,6 +696,28 @@
<AI_ITEM Index="276" Name="AI_PSU3SimArms" BufferOffset="95" Addr="95" Description="" />
<AI_ITEM Index="277" Name="AI_PSU3Alarm" BufferOffset="96" Addr="96" Description="" />
</Block>
<Block Index="2">
<AI_ITEM Index="281" Name="AI_M41" BufferOffset="0" Addr="0" Description="" />
<AI_ITEM Index="282" Name="AI_M42" BufferOffset="1" Addr="1" Description="" />
<AI_ITEM Index="283" Name="AI_M43" BufferOffset="2" Addr="2" Description="" />
<AI_ITEM Index="284" Name="AI_M44" BufferOffset="3" Addr="3" Description="" />
<AI_ITEM Index="285" Name="AI_M45" BufferOffset="4" Addr="4" Description="" />
<AI_ITEM Index="301" Name="AI_M41ActMode" BufferOffset="20" Addr="20" Description="" />
<AI_ITEM Index="302" Name="AI_M42ActMode" BufferOffset="21" Addr="21" Description="" />
<AI_ITEM Index="303" Name="AI_M43ActMode" BufferOffset="22" Addr="22" Description="" />
<AI_ITEM Index="304" Name="AI_M44ActMode" BufferOffset="23" Addr="23" Description="" />
<AI_ITEM Index="305" Name="AI_M45ActMode" BufferOffset="24" Addr="24" Description="" />
</Block>
<Block Index="4">
<AI_ITEM Index="331" Name="AI_PSU4OutputVoltage" BufferOffset="0" Addr="0" Description="" />
<AI_ITEM Index="332" Name="AI_PSU4OutputArms" BufferOffset="1" Addr="1" Description="" />
<AI_ITEM Index="333" Name="AI_PSU4OutputPower" BufferOffset="2" Addr="2" Description="" />
<AI_ITEM Index="334" Name="AI_PSU4Status" BufferOffset="3" Addr="3" Description="" />
<AI_ITEM Index="335" Name="AI_PSU4SimVoltage" BufferOffset="4" Addr="4" Description="" />
<AI_ITEM Index="336" Name="AI_PSU4SimArms" BufferOffset="5" Addr="5" Description="" />
<AI_ITEM Index="337" Name="AI_PSU4Alarm" BufferOffset="6" Addr="6" Description="" />
</Block>
</Ana_In>
<Ana_Out>
<Block Index="0">
@ -924,5 +952,24 @@
<AO_ITEM Index="273" Name="AO_PSU3ArmLimited" BufferOffset="92" Addr="92" Description="" />
<AO_ITEM Index="280" Name="AO_PSU3Constant" BufferOffset="99" Addr="99" Description="" />
</Block>
<Block Index="2">
<AO_ITEM Index="281" Name="AO_M41" BufferOffset="0" Addr="0" Description="" />
<AO_ITEM Index="282" Name="AO_M42" BufferOffset="1" Addr="1" Description="" />
<AO_ITEM Index="283" Name="AO_M43" BufferOffset="2" Addr="2" Description="" />
<AO_ITEM Index="284" Name="AO_M44" BufferOffset="3" Addr="3" Description="" />
<AO_ITEM Index="285" Name="AO_M45" BufferOffset="4" Addr="4" Description="" />
<AO_ITEM Index="301" Name="AO_M41CtrlMode" BufferOffset="20" Addr="20" Description="" />
<AO_ITEM Index="302" Name="AO_M42CtrlMode" BufferOffset="21" Addr="21" Description="" />
<AO_ITEM Index="303" Name="AO_M43CtrlMode" BufferOffset="22" Addr="22" Description="" />
<AO_ITEM Index="304" Name="AO_M44CtrlMode" BufferOffset="23" Addr="23" Description="" />
<AO_ITEM Index="305" Name="AO_M45CtrlMode" BufferOffset="24" Addr="24" Description="" />
</Block>
<Block Index="4">
<AO_ITEM Index="331" Name="AO_PSU4Enable" BufferOffset="0" Addr="0" Description="" />
<AO_ITEM Index="332" Name="AO_PSU4Reset" BufferOffset="1" Addr="1" Description="" />
<AO_ITEM Index="333" Name="AO_PSU4ArmLimited" BufferOffset="2" Addr="2" Description="" />
<AO_ITEM Index="340" Name="AO_PSU4Constant" BufferOffset="9" Addr="9" Description="" />
</Block>
</Ana_Out>
</IO_DEFINE>

410
Modules/SicModules/Config/PM/PM1/interlockPM1.xml → App/Modules/SicModules/Config/PM/PM1/interlockPM1.xml
View File

@ -22,6 +22,10 @@
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
</Action>
<Action do="PM1.DO_ArSupply(V32)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-2">
@ -42,6 +46,7 @@
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
</Action>
<Action do="PM1.DO_SHH2/ArSwitch(V33)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-3">
@ -66,6 +71,8 @@
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
</Action>
<Action do="PM1.DO_ChamBodyArPurge(V68)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-39">
@ -182,6 +189,13 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_HighN2Run/Vent(V40)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-10">
@ -248,6 +262,13 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_TMARun(V41)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-11">
@ -314,6 +335,13 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_TCSRun/Vent(V53)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-23">
@ -380,6 +408,13 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_HCLRun/Vent(V54)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-24">
@ -446,6 +481,13 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_SiH4Run(V55)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-25">
@ -512,6 +554,13 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_C2H4Run(V59)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-29">
@ -578,6 +627,13 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_TMARelease(V43)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-13">
@ -643,6 +699,14 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_TCSRelease(V48)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-18">
@ -708,6 +772,15 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_ConfinementRingUp" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_TCSAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-43"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_TMABypass(V45)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-15">
@ -725,6 +798,7 @@
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
</Action>
<Action do="PM1.DO_TCSBypass(V49)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-19">
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
@ -741,6 +815,7 @@
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
</Action>
<Action do="PM1.DO_TMAVac(V46)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-16">
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
@ -848,6 +923,13 @@
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit do="PM1.DO_CleanRoutineSucceed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-173" ignoreReverse="true"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_HCLSwitch(V51)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-21">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -917,6 +999,13 @@
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit do="PM1.DO_CleanRoutineSucceed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-173" ignoreReverse="true"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_SiH4Switch(V52)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-22">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -986,6 +1075,13 @@
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit do="PM1.DO_CleanRoutineSucceed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-173" ignoreReverse="true"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_C2H4Switch(V58)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-28">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -1055,6 +1151,13 @@
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit do="PM1.DO_CleanRoutineSucceed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-173" ignoreReverse="true"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_ReactorLeakCheck(V69)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-42">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -1074,6 +1177,9 @@
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
</Action>
<Action do="PM1.DO_GasBoxVentPump(V72)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-45">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -1097,6 +1203,9 @@
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_EPV2-1FB" value="true" tip="" tip.zh-CN="" tip.en-US="DI-282" ignoreReverse="true"/>
<Limit do="PM1.DO_TVEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-140" ignoreReverse="true"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
</Action>
<Action do="PM1.DO_MOVac(V73)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-46">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -1190,6 +1299,8 @@
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
</Action>
<Action do="PM1.DO_HeaterEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-56">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -1235,6 +1346,13 @@
<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
<Limit do="PM1.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_ChamMiddleFlow2SW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-46"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_InnerHeaterEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-57">
@ -1301,6 +1419,12 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_MiddleHeaterEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-58">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -1366,6 +1490,12 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_OuterHeaterEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-59">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -1431,6 +1561,12 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_ChamMoveBodyUp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-64">
<Limit di="PM1.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
@ -1518,6 +1654,7 @@
<Limit di="PM1.DI_SHGasConnectorLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DI-102"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
</Action>
<Action do="PM1.DO_ChamMoveBodyBackward" value="true" tip="" tip.zh-CN="" tip.en-US="DO-68">
<Limit di="PM1.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
@ -1831,6 +1968,8 @@
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
</Action>
<Action do="PM1.DO_OuterGasFinal(V88)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-41">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
@ -1856,6 +1995,8 @@
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
</Action>
<Action do="PM1.DO_CarryGasFinal(V97)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-54">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
@ -1881,6 +2022,8 @@
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
</Action>
<Action do="PM1.DO_InnerGasFinal(V89)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-112">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
@ -1906,6 +2049,8 @@
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
</Action>
<Action do="PM1.DO_MiddleGasFinal(V90)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-113">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
@ -1931,6 +2076,8 @@
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
</Action>
<Action do="PM1.DO_OpticPurgeFinal(V91)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-114">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
@ -1956,6 +2103,8 @@
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
</Action>
<Action do="PM1.DO_GasRingPurgeFinal(V92)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-115">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
@ -1981,6 +2130,8 @@
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
</Action>
<Action do="PM1.DO_ChamberPurgeFinal(V93)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-116">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
@ -2006,6 +2157,8 @@
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
</Action>
<Action do="PM1.DO_RotationUpPurgeFinal(V94)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-117">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
@ -2031,6 +2184,8 @@
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
</Action>
<Action do="PM1.DO_ConfinementRingFinal(V95)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-118">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
@ -2056,6 +2211,8 @@
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
</Action>
<Action do="PM1.DO_HeaterWFFinal(V96)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-119">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
@ -2081,6 +2238,8 @@
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
</Action>
<Action do="PM1.DO_OpenLidPurge" value="true" tip="" tip.zh-CN="" tip.en-US="DO-111">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
@ -2136,6 +2295,10 @@
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit do="PM1.DO_TC1AETempRaisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
</Action>
<Action do="PM1.DO_ConfinementRingJogDown" value="true" tip="" tip.zh-CN="" tip.en-US="DO-163">
@ -2166,6 +2329,8 @@
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_EPV2-1FB" value="true" tip="" tip.zh-CN="" tip.en-US="DI-282" ignoreReverse="true"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
</Action>
<Action do="PM1.DO_CyclePurgeRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-176">
@ -2190,6 +2355,9 @@
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DORPressVacSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
</Action>
<Action do="PM1.DO_ExchangeMoRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-177">
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
@ -2208,6 +2376,8 @@
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
</Action>
<Action do="PM1.DO_CleanRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-178">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -2231,6 +2401,9 @@
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
</Action>
<Action do="PM1.DO_PurgeRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-179">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -2256,6 +2429,8 @@
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
</Action>
<Action do="PM1.DO_PumpRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-180">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -2279,6 +2454,8 @@
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
</Action>
<Action do="PM1.DO_VentRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-181">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -2302,6 +2479,8 @@
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
</Action>
<Action do="PM1.DO_ProcessIdleRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-185">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -2323,6 +2502,8 @@
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
</Action>
<Action do="PM1.DO_ATMIdleRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-186">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -2346,6 +2527,8 @@
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
</Action>
<Action do="PM1.DO_VACIdleRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-187">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -2369,6 +2552,8 @@
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
</Action>
<Action do="PM1.DO_ProcessRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-174">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -2439,6 +2624,14 @@
<!-- Is Service Mode -->
<Limit pollbool="PM1.IsService" value="false" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
<Limit do="PM1.DO_CleanRoutineSucceed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-173" ignoreReverse="true"/>
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_TCSAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-43"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_VACTransferAllowed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-182">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -2464,6 +2657,8 @@
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
</Action>
<Action do="PM1.DO_ATMTransferAllowed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-183">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
@ -2484,6 +2679,7 @@
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
</Action>
<Action do="PM1.DO_PreprocessRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-175">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -2551,6 +2747,13 @@
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit do="PM1.DO_CleanRoutineSucceed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-173" ignoreReverse="true"/>
<Limit di="PM1.DI_Foreline2FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-22"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_TCSAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-43"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_PostProcessRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-184">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
@ -2577,6 +2780,36 @@
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_TCSAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-43"/>
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
<Limit di="PM1.DI_FacilityWarningSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-72"/>
<Limit di="PM1.DI_UPS1Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
<Limit di="PM1.DI_UPS2Enable" value="false" tip="" tip.zh-CN="" tip.en-US="DI-79"/>
<Limit di="PM1.DI_TransformerOTSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-83"/>
<Limit do="PM1.DO_ChamMiddleFlow2Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-195"/>
<Limit do="PM1.DO_SHFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-196"/>
<Limit do="PM1.DO_ChamTopFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-197"/>
<Limit do="PM1.DO_ChamMiddleFlow1Temp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-198"/>
<Limit do="PM1.DO_ChamBottomFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-199"/>
<Limit do="PM1.DO_SpareFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-200"/>
<Limit do="PM1.DO_PowerRod1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-201"/>
<Limit do="PM1.DO_PowerRod2FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-202"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_ElectrodeWFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-204"/>
<Limit do="PM1.DO_TMPump1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-205"/>
<Limit do="PM1.DO_TransformerFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-206"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
<Limit do="PM1.DO_PyroCommunicationError" value="false" tip="" tip.zh-CN="" tip.en-US="DO-220"/>
<Limit do="PM1.DO_TC1PyroWarmMaxDiff" value="false" tip="" tip.zh-CN="" tip.en-US="DO-230"/>
<Limit do="PM1.DO_TC1AETempRaisingFast" value="false" tip="" tip.zh-CN="" tip.en-US="DO-231"/>
<Limit di="PM1.DI_PSU1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-320"/>
<Limit di="PM1.DI_PSU2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-321"/>
<Limit di="PM1.DI_PSU3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-322"/>
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
</Action>
<Action do="PM1.DO_SCR1Enable" value="true" tip="DO_SCR1Enable" tip.zh-CN="" tip.en-US="DO-134">
@ -2643,6 +2876,12 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_SCR2Enable" value="true" tip="DO_SCR2Enable" tip.zh-CN="" tip.en-US="DO-135">
@ -2709,6 +2948,12 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<Action do="PM1.DO_SCR3Enable" value="true" tip="DO_SCR3Enable" tip.zh-CN="" tip.en-US="DO-136">
@ -2775,6 +3020,12 @@
<Limit di="PM1.DI_SCR1Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-323"/>
<Limit di="PM1.DI_SCR2Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-324"/>
<Limit di="PM1.DI_SCR3Alarm" value="false" tip="" tip.zh-CN="" tip.en-US="DI-325"/>
<Limit di="PM1.DI_Spare1FlowSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-26"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit do="PM1.DO_ForelineFlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-203"/>
<Limit do="PM1.DO_Spare1FlowTemp" value="true" tip="" tip.zh-CN="" tip.en-US="DO-207"/>
</Action>
<!--<Action do="PM1.DO_TMAVent(V42)" value="false" tip="" tip.zh-CN="" tip.en-US="DO-12" ignoreReverse="true">
<Limit di="PM1.DI_TMARunFB(V41)" value="false" tip="" tip.zh-CN="" tip.en-US="DI-171"/>
@ -2785,4 +3036,163 @@
<Action do="PM1.DO_C2H4Vent(V60)" value="false" tip="" tip.zh-CN="" tip.en-US="DO-30" ignoreReverse="true">
<Limit di="PM1.DI_C2H4RunFB(V59)" value="false" tip="" tip.zh-CN="" tip.en-US="DI-189"/>
</Action>-->
<Action do="PM1.DO_H2Supply(V30)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-4">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="PM1.DI_DORPressATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
<Limit di="PM1.DI_GBExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-32"/>
<Limit di="PM1.DI_GBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-33"/>
<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
<Limit di="PM1.DI_PumpExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-40"/>
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
</Action>
<Action do="PM1.DO_CarrierGasH2(V64)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-35">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit do="PM1.DO_SlitVlvClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DO-152"/>
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
<Limit di="PM1.DI_DryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-65"/>
<Limit di="PM1.DI_DryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-66"/>
<Limit di="PM1.DI_DryPumpAlarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-36"/>
<Limit di="PM1.DI_DryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-37"/>
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
<Limit di="PM1.DI_H2PressureSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-57"/>
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
</Action>
<Action do="PM1.DO_CarrierGasAr(V65)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-36">
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
<Limit di="PM1.DI_PumpExhaustPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-38"/>
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
<Limit di="PM1.DI_ArInletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-56"/>
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
</Action>
<Action do="PM1.DO_GasBoxVentBypass(V25)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-50">
</Action>
<Action do="PM1.DO_DORVac(V75)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-48">
<Limit di="PM1.DI_ChamLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-0"/>
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
</Action>
<Action do="PM1.DO_PumpBypass(V27)" value="true" tip="" tip.zh-CN="" tip.en-US="DO-52">
</Action>
<Action do="PM1.DO_TopLidLoosen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-77">
<Limit di="PM1.DI_ChamPressAboveATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-4"/>
<Limit di="PM1.DI_DORPressATMSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-7"/>
<Limit di="PM1.DI_PMATMSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-9"/>
<Limit di="PM1.DI_HeaterTempUpLimitSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-10"/>
<Limit di="PM1.DI_HeaterTempLowLimitSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-11"/>
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
<Limit di="PM1.DI_PMAExhaustDPSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-39"/>
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
<Limit do="PM1.DO_ReactorPressRisingRateFast" value="true" tip="" tip.zh-CN="" tip.en-US="DO-192"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
</Action>
<Action do="PM1.DO_TopLidTighten" value="true" tip="" tip.zh-CN="" tip.en-US="DO-78">
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
</Action>
<Action do="PM1.DO_TopLidSwingLock" value="true" tip="" tip.zh-CN="" tip.en-US="DO-79">
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
</Action>
<Action do="PM1.DO_TopLidSwingUnlock" value="true" tip="" tip.zh-CN="" tip.en-US="DO-80">
<Limit di="PM1.DI_PMH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-30"/>
<Limit di="PM1.DI_GBHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="PM1.DI_ReactorHCLDetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-52"/>
<Limit di="PM1.DI_GBH2DetectorSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-59"/>
<Limit di="PM1.DI_ScrubberIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-41"/>
<Limit di="PM1.DI_FacilityIntlkSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-42"/>
<Limit di="PM1.DI_GN2InletPressSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-55"/>
<Limit di="PM1.DI_EMOStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-70"/>
<Limit di="PM1.DI_MainCBStatusSW" value="true" tip="" tip.zh-CN="" tip.en-US="DI-76"/>
<Limit di="PM1.DI_ProcessStopSW" value="false" tip="" tip.zh-CN="" tip.en-US="DI-81"/>
<Limit di="PM1.DI_UPS1LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-84"/>
<Limit di="PM1.DI_UPS2LowBattery" value="false" tip="" tip.zh-CN="" tip.en-US="DI-85"/>
</Action>
</Interlock>

7
Modules/SicModules/Config/PM/PM2/DeviceModelPM2.xml → App/Modules/SicModules/Config/PM/PM2/DeviceModelPM2.xml
View File

@ -74,11 +74,11 @@
<IoValve id="V19" display="ArSafetyBypass" schematicId="V19" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_ArSafetyBypassFB(V19)" doOpen="DO_ArSafetyBypass(V19)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V19s" display="ArSafetyBypass" schematicId="V19s" unit="" isNc="false" isDefaultOpen="false" diOpen="DI_ArSafetyBypassFB(V19)" doOpen="DO_ArSafetyBypass(V19)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V27" display="PumpBypass" schematicId="V27" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PumpBypassFB(V27)" doOpen="DO_PumpBypass(V27)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V30" display="H2Supply2" schematicId="V30" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SupplyFB(V30)" doOpen="DO_H2Supply(V30)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V31" display="H2Supply" schematicId="V31" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2SupplyFB(V31)" doOpen="DO_H2Supply(V31)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V32" display="ArSupply" schematicId="V32" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_ArSupplyFB(V32)" doOpen="DO_ArSupply(V32)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V33" display="H2ArSwitch" schematicId="V33" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_SHH2/ArSwitchFB(V33)" doOpen="DO_SHH2/ArSwitch(V33)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V33s" display="H2ArSwitch" schematicId="V33s" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_SHH2/ArSwitchFB(V33)" doOpen="DO_SHH2/ArSwitch(V33)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V34" display="NH3Source" schematicId="V34" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_NH3SourceFB(V34)" doOpen="DO_NH3Source(V34)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V35" display="H2ArLine1" schematicId="V35" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_H2ArLine1FB(V35)" doOpen="DO_H2ArLine1(V35)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V36" display="H2ArLine2" schematicId="V36" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_H2ArLine2FB(V36)" doOpen="DO_H2ArLine2(V36)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V37" display="N2.Switch" schematicId="V37" unit="" isNc="false" isDefaultOpen="true" diOpen="DI_N2SwitchFB(V37)" doOpen="DO_N2Switch(V37)" diCloseSensor="" diOpenSensor="" />
@ -138,7 +138,7 @@
<IoValve id="V94" display="RotationUpPurgeFinal" schematicId="V94" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_RotationUpPurgeFinalFB(V94)" doOpen="DO_RotationUpPurgeFinal(V94)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V95" display="ConfinementRingFinal" schematicId="V95" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_ConfinementRingFinalFB(V95)" doOpen="DO_ConfinementRingFinal(V95)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V96" display="HeaterWFFinal" schematicId="V96" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_HeaterWFFinalFB(V96)" doOpen="DO_HeaterWFFinal(V96)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V97" display="CarryGasFinal" schematicId="V97" unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_CarryGasFinal(V97)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V97" display="CarryGasFinal" schematicId="V97" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_CarryGasFinalFB(V97)" doOpen="DO_CarryGasFinal(V97)" diCloseSensor="" diOpenSensor="" />
<IoValve id="V111" display="OpenLidPurge" schematicId="V111" unit="" isNc="true" isDefaultOpen="false" diOpen="" doOpen="DO_OpenLidPurge" diCloseSensor="" diOpenSensor="" />
<IoValve id="EPV2" display="EPV2" schematicId="EPV2" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_EPV2-1FB" doOpen="DO_EPV2" diCloseSensor="" diOpenSensor="" />
<IoValve id="HeatEnable" display="HeatEnable" schematicId="HeatEnable" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_PSUEnableFB" doOpen="DO_HeaterEnable" diCloseSensor="" diOpenSensor="" />
@ -707,9 +707,6 @@
<RecipeValveAction id="N2NH3_16HighFlowMode" display="" schematicId="" unit="">
<Valve Name="V47" Vent="false" Run="true" />
</RecipeValveAction>
<RecipeValveAction id="V34Value" display="" schematicId="" unit="">
<Valve Name="V34" Open="true" Close="false" />
</RecipeValveAction>
<RecipeValveAction id="V38Value" display="" schematicId="" unit="">
<Valve Name="V38" Open="true" Close="false" />
</RecipeValveAction>

0
Modules/SicModules/Config/PM/PM2/ProcessDeviceItemsPM2.xml → App/Modules/SicModules/Config/PM/PM2/ProcessDeviceItemsPM2.xml
View File

0
Modules/SicModules/Config/PM/PM2/RealtimeGasFlowPM2.xml → App/Modules/SicModules/Config/PM/PM2/RealtimeGasFlowPM2.xml
View File

7
Modules/SicModules/Config/PM/PM2/_ioDefinePM2.xml → App/Modules/SicModules/Config/PM/PM2/_ioDefinePM2.xml
View File

@ -104,7 +104,7 @@
<DI_ITEM Index="161" Name="DI_H2SupplyFB(V31)" BufferOffset="161" Addr="161" Description="" />
<DI_ITEM Index="162" Name="DI_ArSupplyFB(V32)" BufferOffset="162" Addr="162" Description="" />
<DI_ITEM Index="163" Name="DI_SHH2/ArSwitchFB(V33)" BufferOffset="163" Addr="163" Description="" />
<DI_ITEM Index="164" Name="DI_NH3SourceFB(V34)" BufferOffset="164" Addr="164" Description="" />
<DI_ITEM Index="164" Name="DI_H2SupplyFB(V30)" BufferOffset="164" Addr="164" Description="" />
<DI_ITEM Index="165" Name="DI_H2ArLine1FB(V35)" BufferOffset="165" Addr="165" Description="" />
<DI_ITEM Index="166" Name="DI_H2ArLine2FB(V36)" BufferOffset="166" Addr="166" Description="" />
<DI_ITEM Index="167" Name="DI_N2SwitchFB(V37)" BufferOffset="167" Addr="167" Description="" />
@ -148,6 +148,7 @@
<DI_ITEM Index="209" Name="DI_DORRefillFB(V76)" BufferOffset="209" Addr="209" Description="" />
<DI_ITEM Index="211" Name="DI_NdopeDiluteVentFB(V103)" BufferOffset="211" Addr="211" Description="" />
<DI_ITEM Index="212" Name="DI_PumpBypassFB(V27)" BufferOffset="212" Addr="212" Description="" />
<DI_ITEM Index="214" Name="DI_CarryGasFinalFB(V97)" BufferOffset="214" Addr="214" Description="" />
<DI_ITEM Index="216" Name="DI_PSUEnableFB" BufferOffset="216" Addr="216" Description="" />
<DI_ITEM Index="217" Name="DI_InnerHeaterEnableFB" BufferOffset="217" Addr="217" Description="" />
<DI_ITEM Index="218" Name="DI_MiddleHeaterEnableFB" BufferOffset="218" Addr="218" Description="" />
@ -310,7 +311,7 @@
<DO_ITEM Index="1" Name="DO_H2Supply(V31)" BufferOffset="1" Addr="1" Description="" />
<DO_ITEM Index="2" Name="DO_ArSupply(V32)" BufferOffset="2" Addr="2" Description="" />
<DO_ITEM Index="3" Name="DO_SHH2/ArSwitch(V33)" BufferOffset="3" Addr="3" Description="" />
<DO_ITEM Index="4" Name="DO_NH3Source(V34)" BufferOffset="4" Addr="4" Description="" />
<DO_ITEM Index="4" Name="DO_H2Supply(V30)" BufferOffset="4" Addr="4" Description="" />
<DO_ITEM Index="5" Name="DO_H2ArLine1(V35)" BufferOffset="5" Addr="5" Description="" />
<DO_ITEM Index="6" Name="DO_H2ArLine2(V36)" BufferOffset="6" Addr="6" Description="" />
<DO_ITEM Index="7" Name="DO_N2Switch(V37)" BufferOffset="7" Addr="7" Description="" />
@ -643,7 +644,7 @@
<AI_ITEM Index="176" Name="AI_PC6ActMode" BufferOffset="176" Addr="176" DataType="Int32" Description="" />
<AI_ITEM Index="177" Name="AI_PC7ActMode" BufferOffset="177" Addr="177" DataType="Int32" Description="" />
<AI_ITEM Index="178" Name="AI_PC8ActMode" BufferOffset="178" Addr="178" DataType="Int32" Description="" />
<AI_ITEM Index="177" Name="AI_PC9ActMode" BufferOffset="179" Addr="179" DataType="Int32" Description="" />
<AI_ITEM Index="179" Name="AI_PC9ActMode" BufferOffset="179" Addr="179" DataType="Int32" Description="" />
</Block>
<Block Index="1">
<AI_ITEM Index="181" Name="AI_PSUInnerWorkingOP" BufferOffset="0" Addr="0" Description="" />

498
Modules/SicModules/Config/PM/PM2/interlockPM2.xml → App/Modules/SicModules/Config/PM/PM2/interlockPM2.xml
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File diff suppressed because it is too large Load Diff

0
Modules/SicModules/Config/Recipe/Sic/Clean/RecipeFormat.xml → App/Modules/SicModules/Config/Recipe/Sic/Clean/RecipeFormat.xml
View File

0
Modules/SicModules/Config/Recipe/Sic/Content/RecipeFormat.xml → App/Modules/SicModules/Config/Recipe/Sic/Content/RecipeFormat.xml
View File

191
Modules/SicModules/Config/Recipe/Sic/Process/NH3_14.xml → App/Modules/SicModules/Config/Recipe/Sic/Process/PN2.xml
View File

@ -21,56 +21,59 @@
</Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="2. SH Total Flow" UnitName="sccm" ControlName="SHTotalFlow" InputMode="" Min="0" Max="1000000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="3. Carry Gas Flow (M40)" UnitName="sccm" ControlName="Mfc40.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="4. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/>
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="5. Flow Set Mode" UnitName="" ControlName="FlowSetMode" Description="">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="4. Carry Gas Flow (M41)" UnitName="sccm" ControlName="Mfc41.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="5. Carry Gas Flow (M42)" UnitName="sccm" ControlName="Mfc42.Ramp" InputMode="" Min="0" Max="1000000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="6. SH Total Flow Split Ratio" UnitName="" ControlName="SHTotalFlowSplitRatio"/>
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="7. Flow Set Mode" UnitName="" ControlName="FlowSetMode" Description="">
<Item DisplayName="Ramp" ControlName="Ramp" />
<Item DisplayName="Jump" ControlName="Jump" />
</Step>
</Group>
<Group DisplayName="Pressure -> Rotation">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="6. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="7. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="8. Pressure Set" UnitName="mbar" ControlName="TV.SetPressure" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="9. Rotation Set" UnitName="rpm" ControlName="PMServo.SetActualSpeed" InputMode="" Min="0" Max="10000" Description=""/>
</Group>
</Catalog>
<Catalog DisplayName="StepInfo">
<Group DisplayName="Temperature -> Control Mode">
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="8. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode" Description="">
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="10. PSU Control Mode" UnitName="" ControlName="TC1.SetHeaterMode" Description="">
<Item DisplayName="Power" ControlName="Power" />
<Item DisplayName="Follow" ControlName="PyroFollow" />
<Item DisplayName="Auto" ControlName="PyroAuto" />
</Step>
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="9. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode" Description="">
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="11. PSU Set Mode" UnitName="" ControlName="SusHeaterSetMode" Description="">
<Item DisplayName="Ramp" ControlName="Ramp" />
<Item DisplayName="Jump" ControlName="Jump" />
</Step>
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="10. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2" Description="">
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="12. SCR Control Mode" UnitName="" ControlName="TC2.SetHeaterMode2" Description="">
<Item DisplayName="Power" ControlName="Power" />
<Item DisplayName="Follow" ControlName="PyroFollow" />
<Item DisplayName="Auto" ControlName="PyroAuto" />
</Step>
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="11. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode" Description="">
<Step ModuleName="" DeviceType="" InputType="ReadOnlySelection" DisplayName="13. SCR Set Mode" UnitName="" ControlName="WWHeaterSetMode" Description="">
<Item DisplayName="Ramp" ControlName="Ramp" />
<Item DisplayName="Jump" ControlName="Jump" />
</Step>
</Group>
<Group DisplayName="Temperature -> Temp Setting">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="12. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="13. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="14. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="15. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="16. Middle Temp Ratio" UnitName="%" ControlName="TC1.MiddleTempRatio" InputMode="" Min="0" Max="100" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="14. PSU Inner Temp Set" UnitName="℃" ControlName="TC1.SetL1TargetSP" InputMode="" Min="0" Max="10000" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="15. PSU Middle Temp Set" UnitName="℃" ControlName="TC1.SetL2TargetSP" InputMode="" Min="0" Max="10000" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="16. PSU Outer Temp Set" UnitName="℃" ControlName="TC1.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="17. SCR Temp Set" UnitName="℃" ControlName="TC2.SetL3TargetSP" InputMode="" Min="0" Max="10000" Description="" />
</Group>
<Group DisplayName="Temperature -> Heater Output">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="17. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="19. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="20. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="21. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="22. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU Inner Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="19. PSU Middle Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="20. PSU Outer Ratio Set" UnitName="%" ControlName="TC1.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
<!--<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="18. PSU2 Output Limit High" UnitName="%" ControlName="PSU2.SetOutputLimitHighByRecipe" InputMode="" Min="0" Max="100" Description="" />-->
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="21. SCR Upper Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL1Ratio" InputMode="" Min="0" Max="100" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="22. SCR Middle Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL2Ratio" InputMode="" Min="0" Max="100" Description="" />
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="23. SCR Lower Ratio Set" UnitName="%" ControlName="TC2.RecipeSetL3Ratio" InputMode="" Min="0" Max="100" Description="" />
</Group>
</Catalog>
@ -78,153 +81,151 @@
<Catalog DisplayName="StepInfo">
<Group DisplayName="SH Flow->Si Source->Si Source Total Flow">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="23. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="24. Si Source Total Flow" UnitName="sccm" ControlName="SiSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
</Group>
<Group DisplayName="SH Flow->Si Source->SiH4 Flow">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="25. SiH4 Flow Mode" UnitName="" ControlName="SiH4.SetValve" Description="">
<Item DisplayName="Purge" ControlName="Purge" />
<Item DisplayName="Vent" ControlName="Vent" />
<Item DisplayName="Run" ControlName="Run" />
</Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="26. SiH4 Flow (M14)" UnitName="sccm" ControlName="Mfc14.Ramp" InputMode="" Min="0" Max="10000" Description="M14.SiH4Flow"/>
</Group>
<Group DisplayName="SH Flow->Si Source->TCS Flow">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="24. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve" Description="">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="27. TCS Flow Mode" UnitName="" ControlName="TCS.SetValve" Description="">
<Item DisplayName="Purge" ControlName="Purge" />
<Item DisplayName="Vent" ControlName="Vent" />
<Item DisplayName="Run" ControlName="Run" />
</Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="25. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="26. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="27. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="28. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="28. TCS Bubb Low Flow (M11)" UnitName="sccm" ControlName="Mfc11.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="29. TCS Bubb High Flow (M10)" UnitName="sccm" ControlName="Mfc10.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="30. TCS Push Flow (M12)" UnitName="sccm" ControlName="Mfc12.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="31. TCS Bubb Pressure (PC3)" UnitName="mbar" ControlName="Pressure3.Ramp" InputMode="" Min="0" Max="10000" Description=""/>
</Group>
<Group DisplayName="SH Flow->Si Source->HCl Flow">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="29. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve" Description="">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="32. HCl Flow Mode" UnitName="" ControlName="HCl.SetValve" Description="">
<Item DisplayName="Purge" ControlName="Purge" />
<Item DisplayName="Vent" ControlName="Vent" />
<Item DisplayName="Run" ControlName="Run" />
</Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="30. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="33. HCl Flow (M13)" UnitName="sccm" ControlName="Mfc13.Ramp" InputMode="" Min="0" Max="10000" Description="M13.HClFlowsccm"/>
<!--<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="34. HCL Source Split Ratio" UnitName="" ControlName="HCLSourSplitRatio"/>-->
<!--<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. HCl Pre Split Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.HClFlowsccm"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. HCl Inner Flow (M45)" UnitName="sccm" ControlName="Mfc45.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M45.HClFlowsccm"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="37. HCl Middle Flow (M44)" UnitName="sccm" ControlName="Mfc44.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M44.HClFlowsccm"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. HCl Outer Flow (M43)" UnitName="sccm" ControlName="Mfc43.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M43.HClFlowsccm"/>-->
</Group>
<Group DisplayName="SH Flow->Si Source->Si Source Split">
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="31. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="32. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="33. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="34. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="35. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="39. Si Source Split Ratio" UnitName="" ControlName="SiSourSplitRatio"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="40. Si Source Push Pressure (PC6)" UnitName="mbar" ControlName="Pressure6.Ramp" InputMode="" Min="0" Max="10000" Description="PC6.SiSourcePushPressure"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="41. Si Source Inner Flow (M23)" UnitName="sccm" ControlName="Mfc23.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M23.SiSourceInnerFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="42. Si Source Middle Flow (M22)" UnitName="sccm" ControlName="Mfc22.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M22.SiSourceMiddleFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="43. Si Source Outer Flow (M9)" UnitName="sccm" ControlName="Mfc9.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M9.SiSourceOuterFlow"/>
</Group>
<Group DisplayName="SH Flow->C Source->C Source Total Flow">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="36. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="44. C Source Total Flow" UnitName="sccm" ControlName="CSourTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
</Group>
<Group DisplayName="SH Flow->C Source->C3H8_C2H4 Flow">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="37. C3H8_C2H4 Flow Mode" UnitName="" ControlName="C2H4.SetValve" Description="">
<Group DisplayName="SH Flow->C Source->C3H8 Flow">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="45. C3H8 Flow Mode" UnitName="" ControlName="C2H4.SetValve" Description="">
<Item DisplayName="Purge" ControlName="Purge" />
<Item DisplayName="Vent" ControlName="Vent" />
<Item DisplayName="Run" ControlName="Run" />
</Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="38. C3H8_C2H4 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="46. C3H8 Flow (M16)" UnitName="sccm" ControlName="Mfc16.Ramp" InputMode="" Min="0" Max="10000" Description="M16.C3H8Flow"/>
</Group>
<Group DisplayName="SH Flow->C Source->C Source Split">
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="39. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="40. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="41. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="42. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="43. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="47. C Source Split Ratio" UnitName="" ControlName="CSourSplitRatio"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="48. C Source Push Pressure (PC7)" UnitName="mbar" ControlName="Pressure7.Ramp" InputMode="" Min="0" Max="10000" Description="PC7.CSourcePushPressure"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="49. C Source Inner Flow (M26)" UnitName="sccm" ControlName="Mfc26.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M26.CSourceInnerFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="50. C Source Middle Flow (M25)" UnitName="sccm" ControlName="Mfc25.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M25.CSourceMidFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="51. C Source Outer Flow (M15)" UnitName="sccm" ControlName="Mfc15.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M15.CSourceOuterFlow"/>
</Group>
<Group DisplayName="SH Flow->Dope->Dope Total Flow">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="44. Dope Total Flow" UnitName="sccm" ControlName="DopeTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="52. Dope Total Flow" UnitName="sccm" ControlName="DopeTotalFlow" InputMode="" Min="0" Max="10000" Description=""/>
</Group>
<Group DisplayName="SH Flow->Dope->N2 Flow">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="45. N2 Flow Mode" UnitName="" ControlName="N2Dilution.SetValve" Description="">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="53. N2 Flow Mode" UnitName="" ControlName="N2Dilution.SetValve" Description="">
<Item DisplayName="Purge" ControlName="Purge" />
<Item DisplayName="Vent" ControlName="Vent" />
<Item DisplayName="Run" ControlName="Run" />
</Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="46. N2 Actual Flow" UnitName="sccm" ControlName="N2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="47. N2 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="48. Dilut Flow For N2 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="49. Diluted N2 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="50. N2 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="51. N2 Low Flow Mode" UnitName="" ControlName="N2NH3_8LowFlowMode.SetValve" Description="N2 Low flow mode">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="54. N2 Actual Flow" UnitName="sccm" ControlName="N2ActualFlow" InputMode="" Min="0" Max="10000" Description="N2ActualFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="55. N2 Low Flow (M4)" UnitName="sccm" ControlName="Mfc4.Ramp" InputMode="" Min="0" Max="10000" Description="M4.N2lowFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="56. Dilut Flow For N2 (M3)" UnitName="sccm" ControlName="Mfc3.Ramp" InputMode="" Min="0" Max="10000" Description="M3.DiluFlowforN2"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="57. Diluted N2 Flow (M6)" UnitName="sccm" ControlName="Mfc6.Ramp" InputMode="" Min="0" Max="10000" Description="M6.DilutedN2Flow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="58. N2 Post Dilut Pressure (PC1)" UnitName="mbar" ControlName="Pressure1.Ramp" InputMode="" Min="0" Max="10000" Description="PC1.N2PostDiluPres"/>
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="59. N2 High Flow Mode" UnitName="" ControlName="N2HighDoping.SetValve" Description="N2 HIGH FLOW MODE">
<Item DisplayName="Purge" ControlName="Purge" />
<Item DisplayName="Vent" ControlName="Vent" />
<Item DisplayName="Run" ControlName="Run" />
</Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="52. N2 High Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="53. N2 High Flow Mode" UnitName="" ControlName="N2NH3_8HighFlowMode.SetValve" Description="N2 High flow mode">
<Item DisplayName="Purge" ControlName="Purge" />
<Item DisplayName="Vent" ControlName="Vent" />
<Item DisplayName="Run" ControlName="Run" />
</Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="54. N2 High Flow (M30)" UnitName="sccm" ControlName="Mfc30.Ramp" InputMode="" Min="0" Max="10000" Description="M30.PN2Flow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="60. N2 High Flow (M5)" UnitName="sccm" ControlName="Mfc5.Ramp" InputMode="" Min="0" Max="10000" Description="M5.N2HighFlow"/>
</Group>
<Group DisplayName="SH Flow->Dope->TMA Flow">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="55. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve" Description="TMA FLOW MODE">
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="61. TMA Flow Mode" UnitName="" ControlName="TMA.SetValve" Description="TMA FLOW MODE">
<Item DisplayName="Purge" ControlName="Purge" />
<Item DisplayName="Vent" ControlName="Vent" />
<Item DisplayName="Run" ControlName="Run" />
</Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="56. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="57. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="58. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="62. TMA Bubb Flow (M7)" UnitName="sccm" ControlName="Mfc7.Ramp" InputMode="" Min="0" Max="10000" Description="M7.TMABubbFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="63. TMA Push Flow (M8)" UnitName="sccm" ControlName="Mfc8.Ramp" InputMode="" Min="0" Max="10000" Description="M8.TMA Push"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. TMA Bubb Pressure (PC2)" UnitName="mbar" ControlName="Pressure2.Ramp" InputMode="" Min="0" Max="10000" Description="PC2.TMAPost-DiluPres"/>
</Group>
<Group DisplayName="SH Flow->Dope->Dope Split">
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="59. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="60. Dope Push Pressure (PC5)" UnitName="mbar" ControlName="Pressure5.Ramp" InputMode="" Min="0" Max="10000" Description="PC5.DopePushPressure"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="60. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M20.DopeInnerFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="61. Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19.DopeMidFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="62. Dope Outer Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M2.DopeOuterFlow"/>
<Step ModuleName="" DeviceType="" InputType="Set3RatioInput" DisplayName="65. Dope Split Ratio" UnitName="" ControlName="DopeSplitRatio"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. Dope Push Pressure (PC5)" UnitName="mbar" ControlName="Pressure5.Ramp" InputMode="" Min="0" Max="10000" Description="PC5.DopePushPressure"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="67. Dope Inner Flow (M20)" UnitName="sccm" ControlName="Mfc20.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M20.DopeInnerFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. Dope Middle Flow (M19)" UnitName="sccm" ControlName="Mfc19.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M19.DopeMidFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. Dope Outer Flow (M2)" UnitName="sccm" ControlName="Mfc2.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M2.DopeOuterFlow"/>
</Group>
<Group DisplayName="SH Flow->SH Push Flow">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="63. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="64. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="65. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="66. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="67. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="68. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="69. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. SH Push Total Flow" UnitName="sccm" ControlName="SHSuppTotalFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. SH Inner Flow" UnitName="sccm" ControlName="SHInnerFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. SH Middle Flow" UnitName="sccm" ControlName="SHMidFlow" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. SH Outer Flow" UnitName="sccm" ControlName="SHOutterFlow" InputMode="" Min="0" Max="10000" DIsColumnEditable="false" escription=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. Inner Push Flow (M29)" UnitName="sccm" ControlName="Mfc29.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M29.InnerSuppFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="75. Middle Push Flow (M31)" UnitName="sccm" ControlName="Mfc31.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M31.MidSuppFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="76. Outer Push Flow (M28)" UnitName="sccm" ControlName="Mfc28.Ramp" InputMode="" Min="0" Max="10000" IsColumnEditable="false" Description="M28.OuterSuppFlow"/>
</Group>
</Catalog>
<Catalog DisplayName="StepInfo">
<Group DisplayName="Purge->SH Periphery Purge">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="70. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="71. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="77. SH Purge Flow (M27)" UnitName="sccm" ControlName="Mfc27.Ramp" InputMode="" Min="0" Max="10000" Description="M27.SHPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="78. Optic Purge Flow (M33)" UnitName="sccm" ControlName="Mfc33.Ramp" InputMode="" Min="0" Max="10000" Description="M33.OpticPurgeFlow"/>
</Group>
<Group DisplayName="Purge->Chamber Periphery Purge">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="72. GasRing Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="1000000" Description="M32.GasRingPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="73. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="74. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="75. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="76. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="79. Gas Ring Purge Flow (M32)" UnitName="sccm" ControlName="Mfc32.Ramp" InputMode="" Min="0" Max="10000" Description="M32.GasRingFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="80. Chamber Purge Flow (M35)" UnitName="sccm" ControlName="Mfc35.Ramp" InputMode="" Min="0" Max="1000000" Description="M35.ChamberPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="81. Rotation-Up Purge Flow (M36)" UnitName="sccm" ControlName="Mfc36.Ramp" InputMode="" Min="0" Max="10000" Description="M36.Rotation-upPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="82. Shutter Purge Flow (M37)" UnitName="sccm" ControlName="Mfc37.Ramp" InputMode="" Min="0" Max="10000" Description="M37.ShutterPurgeFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="83. Heater-WF Purge Flow (M38)" UnitName="sccm" ControlName="Mfc38.Ramp" InputMode="" Min="0" Max="10000" Description="M38.Heater-WFPurgeFlow"/>
</Group>
<Group DisplayName="Purge->Vent Flow">
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="77. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="78. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="79. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="80. Vent Pre-Exhaust Pressure (PC9)" UnitName="mbar" ControlName="Pressure9.Ramp" InputMode="" Min="0" Max="10000" Description="PC9.VentPre-ExhaustPres"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="81. Vent Push Flow (M17)" UnitName="sccm" ControlName="Mfc17.Ramp" InputMode="" Min="0" Max="10000" Description="M17.VentPushFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="82. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="83. Pressure (PC8)" UnitName="mbar" ControlName="Pressure8.Ramp" InputMode="" Min="0" Max="10000" Description="PC8.DiluPres"/>
<Step ModuleName="" DeviceType="" InputType="FlowModeSelection" DisplayName="84. V47Value" UnitName="" ControlName="V47Value.SetValve" Description="">
<Item DisplayName="Close" ControlName="Close" />
<Item DisplayName="Open" ControlName="Open" />
</Step>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="84. Total Vent Flow" UnitName="sccm" ControlName="TotalVentFlow" InputMode="" Min="0" Max="10000" Description=""/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="85. Vent Push Flow (M1)" UnitName="sccm" ControlName="Mfc1.Ramp" InputMode="" Min="0" Max="10000" Description="M1.VentPushFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="86. Vent Pre-Exhaust Pressure (PC4)" UnitName="mbar" ControlName="Pressure4.Ramp" InputMode="" Min="0" Max="10000" Description="PC4.VentPre-ExhaustPres"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="87. Vent Push Flow (M18)" UnitName="sccm" ControlName="Mfc18.Ramp" InputMode="" Min="0" Max="10000" Description="M18.VentPushFlow"/>
<Step ModuleName="" DeviceType="" InputType="DoubleInput" DisplayName="88. Vent Pre-Exhaust Pressure (PC9)" UnitName="mbar" ControlName="Pressure9.Ramp" InputMode="" Min="0" Max="10000" Description="PC9.VentPre-ExhaustPres"/>
</Group>
</Catalog>
<!--*************************************************************-->
<ProcessConfig DisplayName="ProcessConfig">
<Configs DisplayName="Process Config">

0
Modules/SicModules/Config/Recipe/Sic/Process/RecipeFormat.xml → App/Modules/SicModules/Config/Recipe/Sic/Process/RecipeFormat.xml
View File

0
Modules/SicModules/Config/Recipe/Sic/Routine/RecipeFormat.xml → App/Modules/SicModules/Config/Recipe/Sic/Routine/RecipeFormat.xml
View File

14
Modules/SicModules/Config/TM/DeviceModelSystem.xml → App/Modules/SicModules/Config/TM/DeviceModelSystem.xml
View File

@ -50,7 +50,7 @@
<IoSensor id="BufferWaferHigh" module="TM" display="" schematicId="" unit="" di="DI_BufferStationOptSensorHigh" textOutTrigValue="true" warningText="" alarmText="" />
<IoSensor id="BufferWaferMiddle" module="TM" display="" schematicId="" unit="" di="DI_BufferStationOptSensorMid" textOutTrigValue="true" warningText="" alarmText="" />
<IoSensor id="BufferWaferLow" module="TM" display="" schematicId="" unit="" di="DI_BufferStationOptSensorLow" textOutTrigValue="true" warningText="" alarmText="" />
<IoSensor id="LLTrayPresence" module="TM" display="" schematicId="" unit="" di="DI_LoadTrayPresence" textOutTrigValue="true" warningText="" alarmText="" />
<IoSensor id="LLTrayPresence" module="TM" display="" schematicId="" unit="" di="DI_LoaderWaferPresence" textOutTrigValue="true" warningText="" alarmText="" />
<IoSensor id="LLWaferPlaced" module="TM" display="" schematicId="" unit="" di="DI_LoadWaferPlaced" textOutTrigValue="true" warningText="" alarmText="" />
<IoSensor id="UnLoadTrayPlaced" module="TM" display="" schematicId="" unit="" di="DI_UnloadStationWaferPresence" textOutTrigValue="true" warningText="" alarmText="" />
<IoSensor id="UnLoadWaferPlaced" module="TM" display="" schematicId="" unit="" di="DI_UnloadStationWaferPresence" textOutTrigValue="true" warningText="" alarmText="" />
@ -67,10 +67,10 @@
<IoSensor id="SensorLoadDoorOpened" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_LoadDoorOpened" infoText="Information2 LoadDoor.Opened [TDI-1]" warningText="" alarmText="" />
<IoSensor id="SensorUnloadStationDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_UnloadStationDoorClosed" infoText="Information3 UnloadStationDoor.Closed [TDI-2]" warningText="" alarmText="" />
<IoSensor id="SensorUnloadStationDoorOpened" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_UnloadStationDoorOpened" infoText="Information4 UnloadStationDoor.Opened [TDI-3]" warningText="" alarmText="" />
<IoSensor id="SensorReactorADoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ReactorADoorClosed" infoText="Information5 ReactorA.Door.Closed [TDI-4]" warningText="" alarmText="" />
<IoSensor id="SensorReactorADoorOpened" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ReactorADoorOpened" infoText="Information6 ReactorA.Door.Opened [TDI-5]" warningText="" alarmText="" />
<IoSensor id="SensorReactorBDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ReactorBDoorClosed" infoText="Information7 ReactorB.Door.Closed [TDI-6]" warningText="" alarmText="" />
<IoSensor id="SensorReactorBDoorOpened" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ReactorBDoorOpened" infoText="Information8 ReactorB.Door.Opened [TDI-7]" warningText="" alarmText="" />
<IoSensor id="SensorReactorADoorClosed" module="TM" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ReactorADoorClosed" infoText="Information5 ReactorA.Door.Closed [TDI-4]" warningText="" alarmText="" />
<IoSensor id="SensorReactorADoorOpened" module="TM" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ReactorADoorOpened" infoText="Information6 ReactorA.Door.Opened [TDI-5]" warningText="" alarmText="" />
<IoSensor id="SensorReactorBDoorClosed" module="TM" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ReactorBDoorClosed" infoText="Information7 ReactorB.Door.Closed [TDI-6]" warningText="" alarmText="" />
<IoSensor id="SensorReactorBDoorOpened" module="TM" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_ReactorBDoorOpened" infoText="Information8 ReactorB.Door.Opened [TDI-7]" warningText="" alarmText="" />
<IoSensor id="SensorBufferStationDoorClosed" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_BufferStationDoorClosed" infoText="Information9 BufferStationDoor.Closed [TDI-10]" warningText="" alarmText="" />
<IoSensor id="SensorBufferStationDoorOpened" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_BufferStationDoorOpened" infoText="Information10 BufferStationDoor.Closed [TDI-11]" warningText="" alarmText="" />
<IoSensor id="SensorRobotOnBackPos" module="" display="" schematicId="" unit="" aioType="" textOutTrigValue="true" di="DI_RobotOnBackPos" infoText="Information12 RobotOnBackPos [TDI-31]" warningText="" alarmText="" />
@ -91,6 +91,7 @@
</IoSensors>
<IoPumps classType="SicModules.Devices.IoPump" assembly="SicModules">
<IoPump id="TMPump1" module="TM" display="Pump1" schematicId="TMPump1" unit="" diRunning="DI_TMDryPump1Running" diAlarm="DI_TMDryPump1Alarm" diWarning="DI_TMDryPump1Warning" />
<IoPump id="TMPump2" module="TM" display="Pump2" schematicId="TMPump2" unit="" diRunning="DI_TMDryPump2Running" diAlarm="DI_TMDryPump2Alarm" diWarning="DI_TMDryPump2Warning"/>
</IoPumps>
<IoValves classType="Aitex.Core.RT.Device.Devices.IoValve" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoValve id="LoadSlowPump" module="TM" display="V84" schematicId="LoadSlowPump" unit="" isNc="true" isDefaultOpen="false" diOpen="DI_LoadSlowPumpFB" doOpen="DO_LoadSlowPump" />
@ -110,7 +111,6 @@
<IoSlitValve id="LoadLockDoor" module="TM" display="LLDoor" Type="" unit="" schematicId="LLDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_LoadDoorOpened" diClose="DI_LoadDoorClosed" doOpen="DO_LoadDoorOpen" doClose="DO_LoadDoorClose" />
<IoSlitValve id="PM1Door" module="TM" display="PM1Door" Type="" unit="" schematicId="PM1Door" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_ReactorADoorOpened" diClose="DI_ReactorADoorClosed" doOpen="DO_RectorADoorOpen" doClose="DO_RectorADoorClose" />
<IoSlitValve id="PM2Door" module="TM" display="PM2Door" Type="" unit="" schematicId="PM2Door" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_ReactorBDoorOpened" diClose="DI_ReactorBDoorClosed" doOpen="DO_RectorBDoorOpen" doClose="DO_RectorBDoorClose" />
<IoSlitValve id="UnLoadDoor" module="TM" display="UnLoadDoor" Type="" unit="" schematicId="UnLoadDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_UnloadStationDoorOpened" diClose="DI_UnloadStationDoorClosed" doOpen="DO_UnloadStationDoorOpen" doClose="DO_UnloadStationDoorClose" />
<IoSlitValve id="BufferDoor" module="TM" display="BufferDoor" Type="" unit="" schematicId="BufferDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_BufferStationDoorOpened" diClose="DI_BufferStationDoorClosed" doOpen="DO_BufferStationDoorOpen" doClose="DO_BufferStationDoorClose" />
<IoSlitValve id="UnLoadSubDoor" module="EFEM" display="UnLoadSubDoor" Type="" unit="" schematicId="UnLoadSubDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_UnloadSubStationDoorOpened" diClose="DI_UnloadSubStationDoorClosed" doOpen="DO_UnloadSubStationDoorOpen" doClose="DO_UnloadSubStationDoorClose" />
<IoSlitValve id="LoadLockLSideDoor" module="EFEM" display="LLLSideDoor" Type="" unit="" schematicId="LLLSideDoor" scTimeout="System.SlitValveMotionTimeout" diOpen="DI_LoadLSideDoorOpened" diClose="DI_LoadLSideDoorClosed" doOpen="DO_LoadLSideDoorOpen" doClose="DO_LoadLSideDoorClose" />
@ -128,7 +128,7 @@
<IoTempMeter module="Buffer" id="BufferTemp" display="" schematicId="" aioType="float" aiFeedback="AI_BufferTemp" />
</IoTempMeters>
<IoLift4s classType="Aitex.Core.RT.Device.Unit.IoLift4" assembly="MECF.Framework.RT.EquipmentLibrary">
<IoLift4 id="LoadLidLock" module="LoadLock" display="LoadLidLock" schematicId="LoadLidLock" unit="" aioType="" diUp="DI_LoadLidLocked" diDown="DI_LoadLidUnlocked" doUp="DO_LoadLidLock" doDown="DO_LoadLidUnlock" scTimeout="10" />
<IoLift4 id="LoadLidLock" module="LoadLock" display="LoadLidLock" schematicId="LoadLidLock" unit="" aioType="" diUp="DI_LoadLidOpen" diDown="DI_LoadLidClose" doUp="DO_LoadLidOpen" doDown="DO_LoadLidClose" scTimeout="10" />
<IoLift4 id="UnLoadLift" module="UnLoad" display="UnLoadLift" schematicId="UnLoadLift" unit="" aioType="" diUp="DI_UnloadStationLifterCYUp" diDown="DI_UnloadStationLifterCYDown" doUp="DO_UnloadStationLifterCYUp" doDown="DO_UnloadStationLifterCYDown" scTimeout="10" />
</IoLift4s>
<IoClaws classType="Aitex.Core.RT.Device.Unit.IoClaw" assembly="MECF.Framework.RT.EquipmentLibrary">

21
Modules/SicModules/Config/TM/IODefinePlatform.xml → App/Modules/SicModules/Config/TM/IODefinePlatform.xml
View File

@ -16,7 +16,7 @@
<DI_ITEM Index="10" Name="DI_BufferStationDoorClosed" BufferOffset="10" Addr="10" Description="" />
<DI_ITEM Index="11" Name="DI_BufferStationDoorOpened" BufferOffset="11" Addr="11" Description="" />
<DI_ITEM Index="12" Name="DI_TMLidClosed" BufferOffset="12" Addr="12" Description="" />
<DI_ITEM Index="13" Name="DI_LoadLidClosed" BufferOffset="13" Addr="13" Description="" />
<DI_ITEM Index="14" Name="DI_UnloadStationLidClosed" BufferOffset="14" Addr="14" Description="" Visible="false"/>
<DI_ITEM Index="15" Name="DI_BufferStationLidClosed" BufferOffset="15" Addr="15" Description="" />
<DI_ITEM Index="22" Name="DI_LoadLockGateClosed" BufferOffset="22" Addr="22" Description="" />
@ -25,7 +25,7 @@
<DI_ITEM Index="26" Name="DI_LoadRSideDoorClosed" BufferOffset="26" Addr="26" Description="" Visible="false"/>
<DI_ITEM Index="27" Name="DI_LoadRSideDoorOpened" BufferOffset="27" Addr="27" Description="" Visible="false"/>
<DI_ITEM Index="31" Name="DI_RobotOnBackPos" BufferOffset="31" Addr="31" Description="" />
<DI_ITEM Index="32" Name="DI_LoadTrayPresence" BufferOffset="32" Addr="32" Description="" />
<DI_ITEM Index="33" Name="DI_LoadLeftGateINTK" BufferOffset="33" Addr="33" Description="" Visible="false"/>
<DI_ITEM Index="34" Name="DI_LoadRightGateINTK" BufferOffset="34" Addr="34" Description="" Visible="false"/>
<DI_ITEM Index="35" Name="DI_LoadWaferPlaced" BufferOffset="35" Addr="35" Description="" Visible="false"/>
@ -37,6 +37,7 @@
<DI_ITEM Index="41" Name="DI_UnloadStationGateINTK" BufferOffset="41" Addr="41" Description="" Visible="false"/>
<DI_ITEM Index="43" Name="DI_TMDryPump1Alarm" BufferOffset="43" Addr="43" Description="" />
<DI_ITEM Index="44" Name="DI_TMDryPump1Warning" BufferOffset="44" Addr="44" Description="" />
<DI_ITEM Index="47" Name="DI_LoadLidClosed" BufferOffset="47" Addr="47" Description="" />
<DI_ITEM Index="49" Name="DI_TMDryPump1Running" BufferOffset="49" Addr="49" Description="" />
<DI_ITEM Index="50" Name="DI_WaferCassetLeftInch6" BufferOffset="50" Addr="50" Description="" Visible="false"/>
<DI_ITEM Index="52" Name="DI_WaferCassetRightInch6" BufferOffset="52" Addr="52" Description="" Visible="false"/>
@ -44,6 +45,9 @@
<DI_ITEM Index="55" Name="DI_WaferCassetRightConvexSensor" BufferOffset="55" Addr="55" Description="" Visible="false"/>
<DI_ITEM Index="56" Name="DI_TrayCassetInch6" BufferOffset="56" Addr="56" Description="" Visible="false"/>
<DI_ITEM Index="58" Name="DI_TrayCassetConvexSensor" BufferOffset="58" Addr="58" Description="" Visible="false"/>
<DI_ITEM Index="59" Name="DI_LoadLidOpen" BufferOffset="59" Addr="59" Description=""/>
<DI_ITEM Index="60" Name="DI_LoadLidClose" BufferOffset="60" Addr="60" Description=""/>
<DI_ITEM Index="61" Name="DI_LoaderWaferPresence" BufferOffset="61" Addr="61" Description=""/>
<DI_ITEM Index="62" Name="DI_LoadLidLockedR" BufferOffset="62" Addr="62" Description=""/>
<DI_ITEM Index="63" Name="DI_LoadLidUnlockedR" BufferOffset="63" Addr="63" Description=""/>
<DI_ITEM Index="64" Name="DI_LoadLidLocked" BufferOffset="64" Addr="64" Description=""/>
@ -56,6 +60,9 @@
<DI_ITEM Index="73" Name="DI_UnloadStationWaferCYOpened" BufferOffset="73" Addr="73" Description="" Visible="false"/>
<DI_ITEM Index="74" Name="DI_UnloadStationLifterCYUp" BufferOffset="74" Addr="74" Description="" Visible="false"/>
<DI_ITEM Index="75" Name="DI_UnloadStationLifterCYDown" BufferOffset="75" Addr="75" Description="" Visible="false"/>
<DI_ITEM Index="78" Name="DI_TMDryPump2Alarm" BufferOffset="78" Addr="78" Description="" Visible="false"/>
<DI_ITEM Index="79" Name="DI_TMDryPump2Warning" BufferOffset="79" Addr="79" Description="" Visible="false"/>
<DI_ITEM Index="86" Name="DI_TMDryPump2Running" BufferOffset="86" Addr="86" Description="" Visible="false"/>
<DI_ITEM Index="88" Name="DI_TMPressure1ATM" BufferOffset="88" Addr="88" Description="" />
<DI_ITEM Index="89" Name="DI_TMPressure1VAC" BufferOffset="89" Addr="89" Description="" />
<DI_ITEM Index="90" Name="DI_LoadPressureATM" BufferOffset="90" Addr="90" Description="" />
@ -109,8 +116,8 @@
<DI_ITEM Index="142" Name="DI_UnloadStationLifterCYDownFB" BufferOffset="142" Addr="142" Description="" Visible="false"/>
<DI_ITEM Index="143" Name="DI_TMToPMABanlanceFB" BufferOffset="143" Addr="143" Description="" />
<DI_ITEM Index="144" Name="DI_TMToPMBBanlanceFB" BufferOffset="144" Addr="144" Description="" />
<DI_ITEM Index="157" Name="DI_UnloadFastPumpFB" BufferOffset="157" Addr="157" Description="V122" Visible="false"/>
<DI_ITEM Index="158" Name="DI_UnloadSlowPumpFB" BufferOffset="158" Addr="158" Description="V123" Visible="false"/>
<DI_ITEM Index="157" Name="DI_UnloadFastPumpFB" BufferOffset="157" Addr="157" Description="V122"/>
<DI_ITEM Index="158" Name="DI_UnloadSlowPumpFB" BufferOffset="158" Addr="158" Description="V123"/>
<DI_ITEM Index="160" Name="DI_ReactorAATMTransferReadyFB" BufferOffset="160" Addr="160" Description="" />
<DI_ITEM Index="161" Name="DI_ReactorAProcessTransferReadyFB" BufferOffset="161" Addr="161" Description="" />
<DI_ITEM Index="162" Name="DI_ReactorBATMTransferReadyFB" BufferOffset="162" Addr="162" Description="" />
@ -167,8 +174,8 @@
<DO_ITEM Index="8" Name="DO_TMLoadBanlance" BufferOffset="8" Addr="8" Description="V85" />
<DO_ITEM Index="9" Name="DO_LoadDoorClose" BufferOffset="9" Addr="9" Description="" />
<DO_ITEM Index="10" Name="DO_LoadDoorOpen" BufferOffset="10" Addr="10" Description="" />
<DO_ITEM Index="11" Name="DO_UnloadStationDoorClose" BufferOffset="11" Addr="11" Description="" />
<DO_ITEM Index="12" Name="DO_UnloadStationDoorOpen" BufferOffset="12" Addr="12" Description="" />
<DO_ITEM Index="11" Name="DO_LoadLidOpen" BufferOffset="11" Addr="11" Description="" />
<DO_ITEM Index="12" Name="DO_LoadLidClose" BufferOffset="12" Addr="12" Description="" />
<DO_ITEM Index="13" Name="DO_RectorADoorClose" BufferOffset="13" Addr="13" Description="" />
<DO_ITEM Index="14" Name="DO_RectorADoorOpen" BufferOffset="14" Addr="14" Description="" />
<DO_ITEM Index="15" Name="DO_RectorBDoorClose" BufferOffset="15" Addr="15" Description="" />
@ -203,6 +210,8 @@
<DO_ITEM Index="46" Name="DO_UnloadStationLifterCYDown" BufferOffset="46" Addr="46" Description="" Visible="false"/>
<DO_ITEM Index="47" Name="DO_TMToPMABanlance(V70-1)" BufferOffset="47" Addr="47" Description="" />
<DO_ITEM Index="48" Name="DO_TMToPMBBanlance(V70-2)" BufferOffset="48" Addr="48" Description="" />
<DO_ITEM Index="49" Name="DO_BufferStationBDoorClose" BufferOffset="49" Addr="49" Description="" />
<DO_ITEM Index="50" Name="DO_BufferStationBDoorOpen" BufferOffset="50" Addr="50" Description="" />
<DO_ITEM Index="55" Name="DO_TowerGreen" BufferOffset="55" Addr="55" Description="" />
<DO_ITEM Index="56" Name="DO_TowerYellow" BufferOffset="56" Addr="56" Description="" />

0
Modules/SicModules/Config/TM/UnitAlarmDefine/TMUnitAlarmDefine.xml → App/Modules/SicModules/Config/TM/UnitAlarmDefine/TMUnitAlarmDefine.xml
View File

40
Modules/SicModules/Config/TM/interlock.xml → App/Modules/SicModules/Config/TM/interlock.xml
View File

@ -6,6 +6,8 @@
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
<Limit di="TM.DI_LoadVentFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-101"/>
<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
<Limit di="TM.DI_TMDryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
<Limit di="TM.DI_TMDryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-86"/>
</Action>
<Action do="TM.DO_LoadFastPump" value="true" tip="" tip.zh-CN="" tip.en-US="DO-1">
@ -14,6 +16,8 @@
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
<Limit di="TM.DI_LoadVentFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-101"/>
<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
<Limit di="TM.DI_TMDryPump2Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-78"/>
<Limit di="TM.DI_TMDryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-86"/>
</Action>
<Action do="TM.DO_LoadVent" value="true" tip="" tip.zh-CN="" tip.en-US="DO-5">
@ -21,6 +25,7 @@
<Limit di="TM.DI_LoadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-97"/>
<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
<Limit di="TM.DI_LoadSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-96"/>
</Action>
<Action do="TM.DO_TMSlowPump" value="true" tip="" tip.zh-CN="" tip.en-US="DO-2">
@ -29,11 +34,10 @@
<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
<Limit di="TM.DI_TMDryPump1Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-43"/>
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
<Limit di="TM.DI_LoadSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-96"/>
<Limit di="TM.DI_LoadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-97"/>
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="TM.DI_TMVentFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-102"/>
</Action>
<Action do="TM.DO_TMFastPump" value="true" tip="" tip.zh-CN="" tip.en-US="DO-3">
@ -42,15 +46,16 @@
<Limit di="TM.DI_ReactorBDoorClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-6"/>
<Limit di="TM.DI_TMDryPump1Alarm" value="true" tip="" tip.zh-CN="" tip.en-US="DI-43"/>
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
<Limit di="TM.DI_LoadSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-96"/>
<Limit di="TM.DI_LoadFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-97"/>
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="TM.DI_TMVentFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-102"/>
</Action>
<Action do="TM.DO_TMVent" value="true" tip="" tip.zh-CN="" tip.en-US="DO-6">
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
<Limit di="TM.DI_TMSlowPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-98"/>
<Limit di="TM.DI_TMFastPumpFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-99"/>
</Action>
<Action do="TM.DO_TMCyclePurgeRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-89">
@ -108,6 +113,7 @@
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
<Limit di="TM.DI_TMDryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-86"/>
</Action>
<Action do="TM.DO_LoadLeakCheckRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-95">
@ -115,6 +121,7 @@
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
<Limit di="TM.DI_TMDryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-86"/>
</Action>
<Action do="TM.DO_LoadPumpDownRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-96">
@ -122,6 +129,7 @@
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
<Limit di="TM.DI_TMDryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-86"/>
</Action>
<Action do="TM.DO_LoadVentUpRoutineRunning" value="true" tip="" tip.zh-CN="" tip.en-US="DO-97">
@ -129,22 +137,27 @@
<Limit di="TM.DI_TMDryPump1Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-49"/>
<Limit di="TM.DI_TMLoadBanlanceFB" value="false" tip="" tip.zh-CN="" tip.en-US="DI-104"/>
<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-13"/>
<Limit di="TM.DI_TMDryPump2Running" value="true" tip="" tip.zh-CN="" tip.en-US="DI-86"/>
</Action>
<Action do="TM.DO_LoadDoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-9">
<Limit do="TM.DO_VacRobotExtenLoadEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-19"/>
<Limit di="TM.DI_RobotOnBackPos" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_LoadLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-47"/>
</Action>
<Action do="TM.DO_RectorADoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-13">
<Limit do="TM.DO_VacRobotExtendPMAEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-21"/>
<Limit di="TM.DI_RobotOnBackPos" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
</Action>
<Action do="TM.DO_RectorBDoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-15">
<Limit do="TM.DO_VacRobotExtendPMBEnable" value="false" tip="" tip.zh-CN="" tip.en-US="DO-22"/>
<Limit di="TM.DI_RobotOnBackPos" value="true" tip="" tip.zh-CN="" tip.en-US="DI-31"/>
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
</Action>
@ -152,6 +165,7 @@
<Action do="TM.DO_VacRobotExtenLoadEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-19">
<Limit di="TM.DI_LoadDoorOpened" value="true" tip="" tip.zh-CN="" tip.en-US="DI-1"/>
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
</Action>
<Action do="TM.DO_VacRobotExtendUnloadEnable" value="true" tip="" tip.zh-CN="" tip.en-US="DO-20">
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
@ -205,4 +219,22 @@
<Action do="TM.DO_TMLoadBanlance" value="true" tip="" tip.zh-CN="" tip.en-US="DO-8">
<Limit pollbool="TM.IsPressureAbs_TM_Load_DValue_In50" value="true" tip="" tip.zh-CN="" tip.en-US="" ignoreReverse="true"/>
</Action>
<Action do="TM.DO_BufferVent" value="true" tip="" tip.zh-CN="" tip.en-US="DO-4">
<Limit di="TM.DI_TMLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-12"/>
<Limit di="TM.DI_BufferStationLidClosed" value="true" tip="" tip.zh-CN="" tip.en-US="DI-15"/>
</Action>
<Action do="TM.DO_LoadLSideDoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-27">
</Action>
<Action do="TM.DO_LoadRSideDoorClose" value="true" tip="" tip.zh-CN="" tip.en-US="DO-29">
</Action>
<Action do="TM.DO_LoadLSideDoorOpen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-28">
</Action>
<Action do="TM.DO_LoadRSideDoorOpen" value="true" tip="" tip.zh-CN="" tip.en-US="DO-30">
</Action>
</Interlock>

0
Modules/SicModules/Devices/IoInterLockEx.cs → App/Modules/SicModules/Devices/IoInterLockEx.cs
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0
Modules/SicModules/Devices/IoLoadRotation.cs → App/Modules/SicModules/Devices/IoLoadRotation.cs
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0
Modules/SicModules/Devices/IoPump.cs → App/Modules/SicModules/Devices/IoPump.cs
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0
Modules/SicModules/Devices/SicAds.cs → App/Modules/SicModules/Devices/SicAds.cs
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0
Modules/SicModules/Devices/SiemensIoProvider.cs → App/Modules/SicModules/Devices/SiemensIoProvider.cs
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0
Modules/SicModules/Devices/TcAds.cs → App/Modules/SicModules/Devices/TcAds.cs
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0
Modules/SicModules/EFEMs/EFEMModule.cs → App/Modules/SicModules/EFEMs/EFEMModule.cs
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0
Modules/SicModules/EFEMs/EFEMModuleBase.cs → App/Modules/SicModules/EFEMs/EFEMModuleBase.cs
View File

0
Modules/SicModules/EFEMs/Routines/EFEMHomeRoutine.cs → App/Modules/SicModules/EFEMs/Routines/EFEMHomeRoutine.cs
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0
Modules/SicModules/EFEMs/Routines/EfemBaseRoutine.cs → App/Modules/SicModules/EFEMs/Routines/EfemBaseRoutine.cs
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0
Modules/SicModules/EFEMs/Routines/EfemSlitValveRoutine.cs → App/Modules/SicModules/EFEMs/Routines/EfemSlitValveRoutine.cs
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0
Modules/SicModules/EFEMs/Routines/TrayRobotHomeRoutine.cs → App/Modules/SicModules/EFEMs/Routines/TrayRobotHomeRoutine.cs
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0
Modules/SicModules/EFEMs/Routines/TrayRobotMapRoutine.cs → App/Modules/SicModules/EFEMs/Routines/TrayRobotMapRoutine.cs
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0
Modules/SicModules/EFEMs/Routines/TrayRobotPickRoutine.cs → App/Modules/SicModules/EFEMs/Routines/TrayRobotPickRoutine.cs
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0
Modules/SicModules/EFEMs/Routines/TrayRobotPlaceRoutine.cs → App/Modules/SicModules/EFEMs/Routines/TrayRobotPlaceRoutine.cs
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0
Modules/SicModules/EFEMs/Routines/WaferRobotHomeRoutine.cs → App/Modules/SicModules/EFEMs/Routines/WaferRobotHomeRoutine.cs
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0
Modules/SicModules/EFEMs/Routines/WaferRobotMapRoutine.cs → App/Modules/SicModules/EFEMs/Routines/WaferRobotMapRoutine.cs
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0
Modules/SicModules/EFEMs/Routines/WaferRobotPickRoutine.cs → App/Modules/SicModules/EFEMs/Routines/WaferRobotPickRoutine.cs
View File

0
Modules/SicModules/EFEMs/Routines/WaferRobotPlaceRoutine.cs → App/Modules/SicModules/EFEMs/Routines/WaferRobotPlaceRoutine.cs
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0
Modules/SicModules/EFEMs/SicEFEM.cs → App/Modules/SicModules/EFEMs/SicEFEM.cs
View File

0
Modules/SicModules/EFEMs/SicEfemRobot.cs → App/Modules/SicModules/EFEMs/SicEfemRobot.cs
View File

0
Modules/SicModules/EFEMs/TrayRobotModule.cs → App/Modules/SicModules/EFEMs/TrayRobotModule.cs
View File

0
Modules/SicModules/EFEMs/WaferRobotModule.cs → App/Modules/SicModules/EFEMs/WaferRobotModule.cs
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0
Modules/SicModules/LLs/LoadLockModule.cs → App/Modules/SicModules/LLs/LoadLockModule.cs
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0
Modules/SicModules/LLs/LoadLockModuleBase.cs → App/Modules/SicModules/LLs/LoadLockModuleBase.cs
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0
Modules/SicModules/LLs/Routines/LoadHomeRoutine.cs → App/Modules/SicModules/LLs/Routines/LoadHomeRoutine.cs
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0
Modules/SicModules/LLs/Routines/LoadLockBaseRoutine.cs → App/Modules/SicModules/LLs/Routines/LoadLockBaseRoutine.cs
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0
Modules/SicModules/LLs/Routines/LoadLockClawRoutine.cs → App/Modules/SicModules/LLs/Routines/LoadLockClawRoutine.cs
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0
Modules/SicModules/LLs/Routines/LoadLockGroupRoutine.cs → App/Modules/SicModules/LLs/Routines/LoadLockGroupRoutine.cs
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0
Modules/SicModules/LLs/Routines/LoadLockLeakCheckRoutine.cs → App/Modules/SicModules/LLs/Routines/LoadLockLeakCheckRoutine.cs
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0
Modules/SicModules/LLs/Routines/LoadLockLiftRoutine.cs → App/Modules/SicModules/LLs/Routines/LoadLockLiftRoutine.cs
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0
Modules/SicModules/LLs/Routines/LoadLockPrepareTransferRoutine.cs → App/Modules/SicModules/LLs/Routines/LoadLockPrepareTransferRoutine.cs
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0
Modules/SicModules/LLs/Routines/LoadLockPumpRoutine.cs → App/Modules/SicModules/LLs/Routines/LoadLockPumpRoutine.cs
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0
Modules/SicModules/LLs/Routines/LoadLockPurgeRoutine.cs → App/Modules/SicModules/LLs/Routines/LoadLockPurgeRoutine.cs
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0
Modules/SicModules/LLs/Routines/LoadLockServoToRoutine.cs → App/Modules/SicModules/LLs/Routines/LoadLockServoToRoutine.cs
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0
Modules/SicModules/LLs/Routines/LoadLockTrayAlignerRoutine.cs → App/Modules/SicModules/LLs/Routines/LoadLockTrayAlignerRoutine.cs
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0
Modules/SicModules/LLs/Routines/LoadLockTrayClawRoutine.cs → App/Modules/SicModules/LLs/Routines/LoadLockTrayClawRoutine.cs
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0
Modules/SicModules/LLs/Routines/LoadLockVentRoutine.cs → App/Modules/SicModules/LLs/Routines/LoadLockVentRoutine.cs
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0
Modules/SicModules/LLs/Routines/LoadRotationHomeOffsetRoutine.cs → App/Modules/SicModules/LLs/Routines/LoadRotationHomeOffsetRoutine.cs
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0
Modules/SicModules/LLs/Routines/LoadSeparateRoutine.cs → App/Modules/SicModules/LLs/Routines/LoadSeparateRoutine.cs
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0
Modules/SicModules/LLs/SicLoadLock.cs → App/Modules/SicModules/LLs/SicLoadLock.cs
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4
Modules/SicModules/PMs/PMModule.cs → App/Modules/SicModules/PMs/PMModule.cs
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@ -807,6 +807,8 @@ namespace SicModules.PMs
//ProcessIdle
Transition(STATE.ProcessIdle, MSG.SelectRecipe, FsmSelectRecipe, STATE.ProcessIdle);
Transition(STATE.ProcessIdle, MSG.RunRecipe, FsmStartPreProcess, STATE.PreProcess);
//Transition(STATE.ProcessIdle, MSG.ProcessAbort, FsmStartProcessAbort, STATE.ProcessAborting);
//Transition(STATE.ProcessIdle, MSG.Abort, FsmStartProcessAbort, STATE.ProcessAborting);
//PreProcess
Transition(STATE.PreProcess, FSM_MSG.TIMER, FsmMonitorTask, STATE.PreProcess);
@ -1514,7 +1516,7 @@ namespace SicModules.PMs
_pmInterLock.SetPMPreProcessRunning(false, out reason);
_pmInterLock.SetPMPostProcessRunning(false, out reason);
if (FsmState.Equals((int)STATE.Process))
if (FsmState.Equals((int)STATE.Process) || FsmState.Equals((int)STATE.PreProcess) || FsmState.Equals((int)STATE.PostProcess) )
{
PostMsg(MSG.ProcessAbort);
return false;

19
Modules/SicModules/PMs/PMModuleDevice.cs → App/Modules/SicModules/PMs/PMModuleDevice.cs
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@ -45,7 +45,6 @@ namespace SicModules.PMs
GasSupply,
All,
V27,
V34,
V888990,
V76,
V75,
@ -78,7 +77,7 @@ namespace SicModules.PMs
M18,
M17M18,
M21,
M2toM40,
M2toM42,
M2toM40NoFinal1MFC,
M27toM38,
M2toM26,
@ -480,7 +479,7 @@ namespace SicModules.PMs
"Mfc31", "Mfc32", "Mfc33", "Mfc34", "Mfc35", "Mfc36", "Mfc37", "Mfc38"
};
private List<int> _lstPcList = new List<int> { 1, 2, 3, 4, 5, 6, 7,8 };
private List<int> _lstPcList = new List<int> { 1, 2, 3, 4, 5, 6, 7, 8, 9};
public List<IoMFC> _mfcList
{
@ -634,7 +633,7 @@ namespace SicModules.PMs
SetMfcToDefaultByGroupRamp(MfcGroupName.M1to16,
SC.GetConfigItem($"PM.{Module}.ProcessIdle.MFC1to16RampTime").IntValue);
SetMfcToDefaultByGroupRamp(MfcGroupName.M2toM40,
SetMfcToDefaultByGroupRamp(MfcGroupName.M2toM42,
SC.GetConfigItem($"PM.{Module}.ProcessIdle.MFC19to40RampTime").IntValue);
}
@ -966,10 +965,6 @@ namespace SicModules.PMs
{
lst = new List<string>() { "V32", "V35", "V36" };
}
else if (eGroupName == IoGroupName.V34)
{
lst = new List<string>() { "V34"};
}
else if (eGroupName == IoGroupName.V35V36)
{
lst = new List<string>() { "V35", "V36" };
@ -1179,9 +1174,9 @@ namespace SicModules.PMs
{
lst = new List<int>() { 21 };
}
else if (mGroupName == MfcGroupName.M2toM40)
else if (mGroupName == MfcGroupName.M2toM42)
{
lst = new List<int>() { 2, 9, 15, 19, 20, 22, 23, 25, 26, 27, 28, 29, 31, 32, 33, 35, 36, 37, 38, 40 };
lst = new List<int>() { 2, 9, 15, 19, 20, 22, 23, 25, 26, 27, 28, 29, 31, 32, 33, 35, 36, 37, 38, 40, 41, 42 };
}
else if (mGroupName == MfcGroupName.M2toM40NoFinal1MFC)
{
@ -1239,8 +1234,8 @@ namespace SicModules.PMs
{
lst = new List<int>()
{
1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 25, 26, 27, 28, 29, 30, 40, 31,
32, 33, 35, 36, 37, 38
1, 2, 3, 4, 5, 6, 7, 8, 9, 10, 11, 12, 13, 14, 15, 16, 17, 18, 19, 20, 21, 22, 23, 25, 26, 27, 28, 29, 30, 31,
32, 33, 35, 36, 37, 38, 40, 41, 42
};
}

0
Modules/SicModules/PMs/PMModuleInterlock.cs → App/Modules/SicModules/PMs/PMModuleInterlock.cs
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0
Modules/SicModules/PMs/RecipeExecutions/CleanRecipe.cs → App/Modules/SicModules/PMs/RecipeExecutions/CleanRecipe.cs
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0
Modules/SicModules/PMs/RecipeExecutions/Fdc.cs → App/Modules/SicModules/PMs/RecipeExecutions/Fdc.cs
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0
Modules/SicModules/PMs/RecipeExecutions/IRecipeDBCallback.cs → App/Modules/SicModules/PMs/RecipeExecutions/IRecipeDBCallback.cs
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0
Modules/SicModules/PMs/RecipeExecutions/IRecipeExecutor.cs → App/Modules/SicModules/PMs/RecipeExecutions/IRecipeExecutor.cs
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6
Modules/SicModules/PMs/RecipeExecutions/PostProcess.cs → App/Modules/SicModules/PMs/RecipeExecutions/PostProcess.cs
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@ -170,14 +170,14 @@ namespace SicModules.PMs.RecipeExecutions
SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
////打开V65
//SetIoValueByGroup((int)RoutineStep.SetV65, IoGroupName.V65, true, _IoValueOpenCloseTimeout);
//打开V65
SetIoValueByGroup((int)RoutineStep.SetV65, IoGroupName.V65, true, _IoValueOpenCloseTimeout);
//打开V68
SetIoValueByGroup((int)RoutineStep.SetV68, IoGroupName.GasIn1, true, _IoValueOpenCloseTimeout);
//M2、M9、M15、M19-M40 MFC 30s ramp 到 default 值
SetMfcToDefaultByGroup((int)RoutineStep.SetM2toM40, MfcGroupName.M2toM40, 5);
SetMfcToDefaultByGroup((int)RoutineStep.SetM2toM40, MfcGroupName.M2toM42, 5);
//M1 - M16 MFC 30s ramp 到 default 值(M2、M9、M15除外)
SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16, 5);

0
Modules/SicModules/PMs/RecipeExecutions/PreProcess.cs → App/Modules/SicModules/PMs/RecipeExecutions/PreProcess.cs
View File

10
Modules/SicModules/PMs/RecipeExecutions/Process.cs → App/Modules/SicModules/PMs/RecipeExecutions/Process.cs
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@ -446,8 +446,11 @@ namespace SicModules.PMs.RecipeExecutions
_stepTimer2.Start(int.MaxValue);
Notify(
$"Running step {_currentStepNumber + 1} : {PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepName}");
Notify($"Running step {_currentStepNumber + 1} : {PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepName}");
GemManager.Instance?.TriggerEvent($"{Module}RecipeStepStart", new string[] { $"{Module}.SelectedRecipeName", $"{Module}.RecipeStepNumber",$"{Module}.RecipeStepName" },
new object[] { PmDevice.RecipeRunningInfo.RecipeName, _currentStepNumber + 1,
PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepName });
if (PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].IsDummyStep)
{
@ -686,6 +689,9 @@ namespace SicModules.PMs.RecipeExecutions
case RecipeRunningState.StepCompleted:
{
//放在前面，stepnumber后面会被更新
GemManager.Instance?.TriggerEvent($"{Module}RecipeStepComplete",
new string[] { $"{Module}.SelectedRecipeName", $"{Module}.RecipeStepNumber", $"{Module}.RecipeStepName" },
new object[] { PmDevice.RecipeRunningInfo.RecipeName, _currentStepNumber + 1,PmDevice.RecipeRunningInfo.RecipeStepList[_currentStepNumber].StepName });
_stepTimer2.Stop();

0
Modules/SicModules/PMs/RecipeExecutions/ProcessCalculate.cs → App/Modules/SicModules/PMs/RecipeExecutions/ProcessCalculate.cs
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0
Modules/SicModules/PMs/RecipeExecutions/RecipeDBCallback.cs → App/Modules/SicModules/PMs/RecipeExecutions/RecipeDBCallback.cs
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0
Modules/SicModules/PMs/RecipeExecutions/RecipeEndDataItem.cs → App/Modules/SicModules/PMs/RecipeExecutions/RecipeEndDataItem.cs
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27
Modules/SicModules/PMs/RecipeExecutions/RecipeParser.cs → App/Modules/SicModules/PMs/RecipeExecutions/RecipeParser.cs
View File

@ -142,15 +142,15 @@ namespace SicModules.PMs.RecipeExecutions
recipeStep.GrowthRate = Convert.ToDouble(dic["GrowthRate"]);
recipeStep.EndBy = EnumEndByCondition.ByTime;
if (dic.TryGetValue("Loop", out var loopStr))
{
recipeStep.IsLoopStartStep = System.Text.RegularExpressions.Regex.Match(loopStr, @"Loop\x20\d+\s*$").Success;
recipeStep.IsLoopEndStep = System.Text.RegularExpressions.Regex.Match(loopStr, @"Loop End$").Success;
if (recipeStep.IsLoopStartStep)
recipeStep.LoopCount = Convert.ToInt32(loopStr.Replace("Loop", string.Empty));
else
recipeStep.LoopCount = 0;
}
//if (dic.TryGetValue("Loop", out var loopStr))
//{
// recipeStep.IsLoopStartStep = System.Text.RegularExpressions.Regex.Match(loopStr, @"Loop\x20\d+\s*$").Success;
// recipeStep.IsLoopEndStep = System.Text.RegularExpressions.Regex.Match(loopStr, @"Loop End$").Success;
// if (recipeStep.IsLoopStartStep)
// recipeStep.LoopCount = Convert.ToInt32(loopStr.Replace("Loop", string.Empty));
// else
// recipeStep.LoopCount = 0;
//}
//if (recipeData.Count >= 2)
//{
@ -165,6 +165,8 @@ namespace SicModules.PMs.RecipeExecutions
// }
//}
//foreach (var key in dic.Keys)
// recipeStep.RecipeCommands.Add(key, dic[key]);
#region Remove
//dic.Remove("StepNo");
@ -225,7 +227,7 @@ namespace SicModules.PMs.RecipeExecutions
//{
// dic.Remove("Mfc30.Ramp");
//}
dic.Remove("HCLSourSplitRatio");
dic.Remove("SHTotalFlow");
dic.Remove("SHTotalFlowSplitRatio");
//dic.Remove("SiSourTotalFlow");
@ -243,10 +245,13 @@ namespace SicModules.PMs.RecipeExecutions
dic.Remove("SHOutterFlow");
//dic.Remove("GRPurgeHCI");
//dic.Remove("TotalVentFlow");
#endregion
if (dic.ContainsKey("Loop"))
dic.Remove("Loop");
foreach (var key in dic.Keys)
recipeStep.RecipeCommands.Add(key, dic[key]);
#endregion
}
}
catch (Exception ex)

0
Modules/SicModules/PMs/RecipeExecutions/SicRecipeFileContext.cs → App/Modules/SicModules/PMs/RecipeExecutions/SicRecipeFileContext.cs
View File

10
Modules/SicModules/PMs/Routines/Base/PMBaseRoutine.cs → App/Modules/SicModules/PMs/Routines/Base/PMBaseRoutine.cs
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@ -43,7 +43,7 @@ namespace SicModules.PMs.Routines.Base
Leavel10= 1150,
}
public List<int> _lstPcList = new List<int> { 1, 2, 3, 4, 5, 6, 7, 8, 9 };
public List<int> _lstPcList = new List<int> { 1, 2, 3, 4, 5, 6, 7, 8, 9};
protected PressureLevel GetPressure(double pressure)
{
@ -1839,14 +1839,14 @@ namespace SicModules.PMs.Routines.Base
if (!_setMfc291519to38Flag && currentPressureUpOrDown == PressureUpOrDown.Dowing && _IoThrottle.PressureFeedback < 20)
{
Notify($"Set M2toM40 value to 0 ");
_pm.SetMfcByGroup(MfcGroupName.M2toM40, 0, 2);
Notify($"Set M2toM42 value to 0 ");
_pm.SetMfcByGroup(MfcGroupName.M2toM42, 0, 2);
_setMfc291519to38Flag = true;
}
else if (!_setMfc291519to38Flag && currentPressureUpOrDown == PressureUpOrDown.Uping && _IoThrottle.PressureFeedback < 20)
{
Notify($"Set M2toM40 value to default");
_pm.SetMfcToDefaultByGroupRamp(MfcGroupName.M2toM40, 2);
Notify($"Set M2toM42 value to default");
_pm.SetMfcToDefaultByGroupRamp(MfcGroupName.M2toM42, 2);
_setMfc291519to38Flag = true;
}

0
Modules/SicModules/PMs/Routines/PMButttomSectionMoveRoutine.cs → App/Modules/SicModules/PMs/Routines/PMButttomSectionMoveRoutine.cs
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0
Modules/SicModules/PMs/Routines/PMChamberMoveBodyRoutine.cs → App/Modules/SicModules/PMs/Routines/PMChamberMoveBodyRoutine.cs
View File

12
Modules/SicModules/PMs/Routines/PMCleanRoutine.cs → App/Modules/SicModules/PMs/Routines/PMCleanRoutine.cs
View File

@ -302,8 +302,8 @@ namespace SicModules.PMs.Routines
SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
////打开V65
//SetIoValueByGroup((int)RoutineStep.SetV65, IoGroupName.V65, true, _IoValueOpenCloseTimeout);
//打开V65
SetIoValueByGroup((int)RoutineStep.SetV65, IoGroupName.V65, true, _IoValueOpenCloseTimeout);
//设置MFC和PC的模式
SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All);
@ -336,7 +336,7 @@ namespace SicModules.PMs.Routines
SetThrottleToTargetAndNoWait((int)RoutineStep.SetTv1, _IoThrottle, _pressureMin);
//M2、M9、M15、M19-M40 MFC 5s ramp 到0
SetMfcByGroup((int)RoutineStep.SetM2toM40, MfcGroupName.M2toM40, 0, 5);
SetMfcByGroup((int)RoutineStep.SetM2toM40, MfcGroupName.M2toM42, 0, 5);
SetMfcByGroup((int)RoutineStep.SetM18, MfcGroupName.M18, 0, 5);
//等待腔体压力Pump到设定值
@ -370,7 +370,7 @@ namespace SicModules.PMs.Routines
Loop((int)RoutineStep.StartLoop, _pressureLoopCount);
//M2、M9、M15、M19-M40 MFC 3s ramp 到 default 值
SetMfcToDefaultByGroup((int)RoutineStep.SetM2TOM40Default, MfcGroupName.M2toM40, 3);
SetMfcToDefaultByGroup((int)RoutineStep.SetM2TOM40Default, MfcGroupName.M2toM42, 3);
SetMfcToDefaultByGroup((int)RoutineStep.SetM18Default, MfcGroupName.M18, 3);
//先关蝶阀,再关闭EPV2
@ -393,7 +393,7 @@ namespace SicModules.PMs.Routines
SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode1, _IoThrottle, 5);
//M2、M9、M15、M19-M40 MFC 3s ramp 0
SetMfcByGroup((int)RoutineStep.SetM2toM40_1, MfcGroupName.M2toM40, 0, 3);
SetMfcByGroup((int)RoutineStep.SetM2toM40_1, MfcGroupName.M2toM42, 0, 3);
SetMfcByGroup((int)RoutineStep.SetM18_1, MfcGroupName.M18, 0, 3);
//伺服到0mbar
@ -402,7 +402,7 @@ namespace SicModules.PMs.Routines
EndLoop((int)RoutineStep.EndLoop);
//M27-M40 MFC 3s ramp 到 default 值
SetMfcToDefaultByGroup((int)RoutineStep.SetMfc2to40Default, MfcGroupName.M2toM40, 3);
SetMfcToDefaultByGroup((int)RoutineStep.SetMfc2to40Default, MfcGroupName.M2toM42, 3);
SetMfcToDefaultByGroup((int)RoutineStep.SetM18_2, MfcGroupName.M18, 3);
//打开J阀门

0
Modules/SicModules/PMs/Routines/PMExchangeMoRoutine.cs → App/Modules/SicModules/PMs/Routines/PMExchangeMoRoutine.cs
View File

0
Modules/SicModules/PMs/Routines/PMHomeRoutine.cs → App/Modules/SicModules/PMs/Routines/PMHomeRoutine.cs
View File

8
Modules/SicModules/PMs/Routines/PMLeakCheckRoutine.cs → App/Modules/SicModules/PMs/Routines/PMLeakCheckRoutine.cs
View File

@ -345,7 +345,7 @@ namespace SicModules.PMs.Routines
SetPcToDefault((int)RoutineStep.SetPC, _lstPcList);
//设置M2,M9,M15,M19-M26 3s ramp 到default 值
SetMfcToDefaultByGroup((int)RoutineStep.SetM291519to26, MfcGroupName.M2toM40, 3);//组改变，.M2toM26改变为->M2toM40，防止MFC不在正常状态
SetMfcToDefaultByGroup((int)RoutineStep.SetM291519to26, MfcGroupName.M2toM42, 3);//组改变，.M2toM26改变为->M2toM42，防止MFC不在正常状态
SetMfcToDefaultByGroup((int)RoutineStep.SetM17M18, MfcGroupName.M17M18, 3);
//打开V68
@ -368,7 +368,7 @@ namespace SicModules.PMs.Routines
SetThrottleToTargetAndNoWait((int)RoutineStep.SetTv1, _IoThrottle, _pressureMin);
//M2、M9、M15、M19-M40 MFC 3s ramp到0
SetMfcByGroup((int)RoutineStep.SetM2toM40, MfcGroupName.M2toM40, 0, 3);
SetMfcByGroup((int)RoutineStep.SetM2toM40, MfcGroupName.M2toM42, 0, 3);
SetMfcByGroup((int)RoutineStep.SetM18, MfcGroupName.M18, 0, 3);
//等待腔体压力Pump到设定值
@ -387,7 +387,7 @@ namespace SicModules.PMs.Routines
Loop((int)RoutineStep.StartLoop, _pressureLoopCount);
//M2、M9、M15、M19-M40 MFC 3s ramp 到 default 值
SetMfcToDefaultByGroup((int)RoutineStep.SetM2TOM40Default, MfcGroupName.M2toM40, 3);
SetMfcToDefaultByGroup((int)RoutineStep.SetM2TOM40Default, MfcGroupName.M2toM42, 3);
SetMfcToDefaultByGroup((int)RoutineStep.SetM18Default, MfcGroupName.M18, 3);
//先关蝶阀,再关闭EPV2
@ -410,7 +410,7 @@ namespace SicModules.PMs.Routines
SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode1, _IoThrottle, 5);
//M2、M9、M15、M19-M40 MFC 3s ramp 0
SetMfcByGroup((int)RoutineStep.SetM2toM40_1, MfcGroupName.M2toM40, 0, 3);
SetMfcByGroup((int)RoutineStep.SetM2toM40_1, MfcGroupName.M2toM42, 0, 3);
SetMfcByGroup((int)RoutineStep.SetM18_1, MfcGroupName.M18, 0, 3);
//伺服到0mbar

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