text/microsoft-resx 1.3 System.Resources.ResXResourceReader, System.Windows.Forms, Version=2.0.3500.0, Culture=neutral, PublicKeyToken=b77a5c561934e089 System.Resources.ResXResourceWriter, System.Windows.Forms, Version=2.0.3500.0, Culture=neutral, PublicKeyToken=b77a5c561934e089 Door Lift WaferClaw TrayClaw Routine Module Slot Operation Wafer Cassette Tray Cassette Open Open Clamp Clamp Vacuumon Vacuumon Vacuumoff Vacuumoff AlignAuto AlignAuto Up Up Down Down Open Clamp Aligner MeasuringCenter Align Align ReadVacuum ReadVacuum ErrorMessage ErrorMessage ClearAlarm ClearAlarm Vacuum Response