298 lines
11 KiB
C#
298 lines
11 KiB
C#
using System.Collections.Generic;
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using System.Diagnostics;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Devices;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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using SicModules.PMs.Routines.Base;
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namespace SicModules.PMs.Routines
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{
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public class PMToAtmIdleRoutine : PMBaseRoutine
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{
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private enum RoutineStep
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{
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RotationEnable,
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HeatEnable,
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V72,
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ArSupply,
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SetGroupA,
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SetGroupB,
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SetGroupC,
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SetGroupE,
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SetGroupF,
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SetGroupH,
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SetGroupD,
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SetGroupG,
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SetGroupK,
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SetMFCMode,
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SetPCMode,
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SetM1to16,
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SetM2toM45,
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SetPC,
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SetM291519to38,
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SetGroupJ,
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SetM19to38,
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SetGasOut,
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SetTv,
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SetGasIn1, //V68
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OpenFinal1, //V91-96
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SetMfcFinal1, //M32-38
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SetMfc19to26,
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SetTVCloseMode,
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SetTvPositionToZero,
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CheckPM1000,
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SetGasIn2,
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SetGroupJOpen,
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SetM2toM26M43M44M45,
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OpenFinal2,
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SetMfcFinal2,
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WaitPmPressureUp,
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WaitPmPressureUp1,
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SetEPV1,
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SetEPV2,
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SetTvMode,
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SetEPVV1,
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SetMfc28to40Special,
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SetMfc28to40Default,
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SetPC567Close,
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SetPC567Mode,
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SetPC567Default,
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CheckFinal1Open,
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SetV76,
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SetV75,
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SetV30,
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SetV31,
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SetV32,
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SetV35V36,
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SetGroupV25,
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SetV93V95,
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SetV94,
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SetV96,
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SetV68,
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SetM35M37,
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SetM36,
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SetM38,
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TimeDelay1,
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TimeDelay2,
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TimeDelay3,
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TimeDelay4,
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TimeDelay5,
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TimeDelay6,
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TimeDelay7,
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TimeDelay8,
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TimeDelay9,
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TimeDelay10,
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TimeDelay11,
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TimeDelay18,
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TimeDelay20,
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TimeDelay21,
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TimeDelay22,
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Notify1,
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}
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private IoThrottleValve2 _IoThrottle;
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private IoInterLock _pmIoInterLock;
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private int _rotationCheckSpeed = 0; //设置旋转速度为0后检查是否转速低于此数值
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private int _rotationCloseTimeout; //旋转停止超时
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private int _IoValueOpenCloseTimeout = 10; //开关超时时间
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private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间
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private int _waitPMPressureUpTimeout = 300; //等待反应腔压力到达1000的超时时间
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private int _routineTimeOut;
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private double _ventBasePressure;
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private Stopwatch _swTimer = new Stopwatch();
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public PMToAtmIdleRoutine(ModuleName module, PMModule pm) : base(module, pm)
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{
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Module = module.ToString();
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Name = "AtmIdle";
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_IoThrottle = DEVICE.GetDevice<IoThrottleValve2>($"{Module}.TV");
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_pmIoInterLock = DEVICE.GetDevice<IoInterLock>($"{Module}.PMInterLock");
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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_rotationCloseTimeout = SC.GetValue<int>($"PM.{Module}.RotationCloseTimeout");
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_routineTimeOut = SC.GetValue<int>($"PM.{Module}.Vent.RoutineTimeOut");
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_ventBasePressure = SC.GetValue<double>($"PM.{Module}.Vent.VentBasePressure");
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_waitPMPressureUpTimeout = SC.GetValue<int>($"PM.{Module}.Vent.VentTimeout");
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if (!_pmIoInterLock.SetPMAtmIdleRountingRunning(true, out var reason))
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{
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EV.PostAlarmLog(Module, $"can not run ToATMIdle, {reason}");
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return Result.FAIL;
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}
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currentPressureUpOrDown = PressureUpOrDown.None;
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_swTimer.Restart();
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_finalOpen = false;
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Notify("Start");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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CheckRoutineTimeOut();
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//1 关闭V76,打开V75
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SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout);
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//2 旋转停止,加热停止
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SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut);
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SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout);
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//3 关闭V72,打开V25
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SetIoValueByGroup((int)RoutineStep.V72, IoGroupName.V72, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupV25, IoGroupName.V25, true, _IoValueOpenCloseTimeout);
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//4 打开V30,打开V31,打开V32
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SetIoValueByGroup((int)RoutineStep.SetV30, IoGroupName.V30, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout);
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//5 打开V35,打开V36
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SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout);
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//关闭B/C/E/F/H/K 阀门
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SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
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//打开D/G 阀门
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SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
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//设置MFC和PC的模式
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SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All);
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SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList);
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//6 M1-M16设定为default值(M2、M9、M15除外)
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SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16, 0);
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//设置所有PC到默认值
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SetPcToDefault((int)RoutineStep.SetPC, _lstPcList);
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//M2、M9、M15、M19-M45 MFC 5s ramp 到默认值
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SetMfcToDefaultByGroup((int)RoutineStep.SetM2toM45, MfcGroupName.M2toM45, 5);
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//7 关闭蝶阀
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SetThrottleToCloseMode((int)RoutineStep.SetTVCloseMode, _IoThrottle, 8);
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SetThrottleDisable((int)RoutineStep.SetTvPositionToZero, _IoThrottle, 8);
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TimeDelay((int)RoutineStep.TimeDelay1, 1);
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SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, false, _IoValueOpenCloseTimeout);
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//8 打开A 组阀
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SetIoValueByGroup((int)RoutineStep.SetGroupA, IoGroupName.A, true, _IoValueOpenCloseTimeout);
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//打开Final2阀
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SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout);
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//Final2阀对应的MFC 3s Ramp到Default值
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SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal2, MfcGroupName.Final2, 3);
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SetIoValueByGroup((int)RoutineStep.SetV93V95, IoGroupName.V93V95, true, _IoValueOpenCloseTimeout);
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TimeDelay((int)RoutineStep.TimeDelay2, 3);
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//M35、M37依次设定3S ramp 到default值 ； 等待3S。
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SetMfcToDefaultByGroup((int)RoutineStep.SetM35M37, MfcGroupName.M35M37, 3);
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//打开V68
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//SetIoValueByGroup((int)RoutineStep.SetV68, IoGroupName.V68, true, _IoValueOpenCloseTimeout);
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//打开J Valves
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SetIoValueByGroup((int)RoutineStep.SetGroupJOpen, IoGroupName.J, true, _IoValueOpenCloseTimeout);
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//设置M2,M9,M15,M19-M26 M43-M45 3s ramp 到default 值
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SetMfcToDefaultByGroup((int)RoutineStep.SetM2toM26M43M44M45, MfcGroupName.M2toM26M43M44M45, 3);
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//开V94,V96需等到腔体压力大于950
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WaitPMPressureAndSetMfcSpecial((int)RoutineStep.WaitPmPressureUp1, 950, _waitPMPressureUpTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV94, IoGroupName.V94, true, _IoValueOpenCloseTimeout);
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SetMfcToDefaultByGroup((int)RoutineStep.SetM36, MfcGroupName.M36, 5);
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TimeDelay((int)RoutineStep.TimeDelay3, 3);
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SetIoValueByGroup((int)RoutineStep.SetV96, IoGroupName.V96, true, _IoValueOpenCloseTimeout);
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SetMfcToDefaultByGroup((int)RoutineStep.SetM38, MfcGroupName.M38, 5);
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TimeDelay((int)RoutineStep.TimeDelay4, 3);
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//等待反应腔压力大于1000
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NotifyInfo((int)RoutineStep.Notify1, $"Wait pm pressure to {_ventBasePressure} mbar!");
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WaitPMPressureAndSetMfcSpecial((int)RoutineStep.WaitPmPressureUp, _ventBasePressure, _waitPMPressureUpTimeout);
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//设置M28,M29,M31,M40 3s ramp 到default 值
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//SetMfcToDefaultByGroup((int)RoutineStep.SetMfc28to40Default, MfcGroupName.M27To3540To42, 3);
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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return Result.FAIL;
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}
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_pmIoInterLock.SetPMAtmIdleRountingRunning(false, out var reason);
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Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
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_swTimer.Stop();
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return Result.DONE;
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}
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public override void Abort()
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{
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_pmIoInterLock.SetPMAtmIdleRountingRunning(false, out var reason);
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_pmIoInterLock.SetPMVentRoutineRunning(false, out _);
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PmDevice._ioThrottleValve.StopRamp();
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PmDevice.SetMfcStopRamp(PmDevice.GetMfcListByGroupName(MfcGroupName.All));
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PmDevice.SetRotationServo(0, 0);
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base.Abort();
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}
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private void CheckRoutineTimeOut()
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{
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if (_routineTimeOut > 10)
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{
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if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
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{
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EV.PostAlarmLog(Module, $"Routine TimeOut! over {_routineTimeOut} s");
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throw (new RoutineFaildException());
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}
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}
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}
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}
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}
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