465 lines
18 KiB
C#
465 lines
18 KiB
C#
using System.Collections.Generic;
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using System.Diagnostics;
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using Aitex.Core.RT.Device;
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using Aitex.Core.RT.Device.Devices;
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using Aitex.Core.RT.Event;
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using Aitex.Core.RT.Routine;
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using Aitex.Core.RT.SCCore;
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using MECF.Framework.Common.Equipment;
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using SicModules.PMs.Routines.Base;
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using static Aitex.Core.RT.Device.PmDevices.DicMode;
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namespace SicModules.PMs.Routines
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{
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public class PMToProcessIdleRoutine : PMBaseRoutine
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{
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private enum RoutineStep
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{
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ConfinementServoOn,
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RotationServoOn,
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RotationEnable,
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HeatEnable,
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VentPumpClose,
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ArSupply,
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OpenH2Valve,
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SetGroupA,
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SetGroupB,
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SetGroupC,
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SetGroupE,
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SetGroupF,
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SetGroupH,
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SetGroupD,
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SetGroupG,
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SetGroupK,
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SetMFCMode,
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SetPCMode,
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SetM1to16,
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SetPC,
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SetGroupJ,
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SetM2toM40,
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SetPC567Close,
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SetPC567Default,
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SetPC567Mode,
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SetGasOut,
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SetTv,
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SetM291519to38,
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SetGasIn1, //V68
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OpenFinal1, //V91-96
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SetMfcFinal1, //M32-38
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SetM2toM26,
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SetTVCloseMode,
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SetTvPositionToZero,
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CheckPM1000,
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SetGasIn2,
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SetGroupJOpen,
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CloseFinal2,
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OpenFinal2,
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SetMfcFinal2,
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WaitPmPressureUp,
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WaitPmPressureUp1020,
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SetTvOpen,
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SetTVEnable,
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SetTVPressMode,
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SetTV,
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SetTvMode,
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SetTVto1050,
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SetTVto300,
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WaitTvTo300,
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CheckPmVac,
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CheckPmAtm,
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CheckV72Open,
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SetV72,
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SetV25,
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SetV76,
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SetV75,
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SetV30,
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SetV31,
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SetV32,
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SetV35V36,
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SetV65,
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SetEPV1,
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SetEPV2,
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SetEPV11,
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SetEPV22,
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SetTvModeToPress,
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SetMfc28to40Special,
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SetMfc28to40Default,
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SetPressUpOrDown1,
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SetPressureDown,
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EnableRotation,
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EnableHeater,
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SetRotation1,
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WaitRotation1,
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SetTC1Mode,
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SetTC1Ratio,
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SetTC1RatioTo0,
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SetTC1Ref,
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SetTC2Mode,
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SetTC2Ratio,
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SetTC2RatioTo0,
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SetTC2Ref,
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EnableTC1,
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EnableTC2,
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CloseTC1,
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CloseTC2,
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SetFinal1ToDefault,
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SetFinal1To0,
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SetFinal2ToDefault,
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SetFinal2To0,
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CheckFinal1Open,
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CheckFinal2Open,
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CheckTvOpen,
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SetRotation2,
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SetGroupV25,
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SetScrReset,
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CheckEpv2Open,
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CheckEpv1Open,
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SetV93V95,
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SetV94,
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SetV96,
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SetV68,
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SetM35M37,
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SetM36,
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SetM38,
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WaitPmPressureUp1,
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DelayV25,
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TimeDelay0,
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TimeDelay1,
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TimeDelay2,
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TimeDelay3,
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TimeDelay4,
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TimeDelay5,
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TimeDelay6,
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TimeDelay7,
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TimeDelay8,
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TimeDelay9,
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TimeDelay10,
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TimeDelay11,
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TimeDelay12,
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TimeDelay13,
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TimeDelay14,
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TimeDelay15,
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TimeDelay16,
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TimeDelay20,
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TimeDelay21,
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TimeDelay22,
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Notify1,
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Notify2
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}
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private IoThrottleValve2 _IoThrottle;
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private int _rotationCheckSpeed = 0; //设置旋转速度为0后检查是否转速低于此数值
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private int _rotationCloseTimeout; //旋转停止超时
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private int _IoValueOpenCloseTimeout = 10; //开关超时时间
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private int _heatTimeOut = 5; //Heat关闭等待Di反馈超时时间
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private double _pmPressureMaxDiff; //蝶阀与目标压力的差值范围(认为调整到位了)
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private int _throttleTimeout; //蝶阀调整到指定压力的超时时间
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private double _throttleFinalPressure = 300;//蝶阀最终调整对的压力
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private bool _psuHeatEnable = false; //是否启用PSU 加热
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private int _psuHeatMode = 0;
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//private float _psuPowerRef = 0;
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private float _psuL1Ratio = 0;
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private float _psuL2Ratio = 0;
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private float _psuL3Ratio = 0;
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private bool _scrHeatEnable = false; //是否启用SCR 加热
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private int _scrHeatMode = 0;
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//private float _scrPowerRef = 0;
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private float _scrL1Ratio = 0;
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private float _scrL2Ratio = 0;
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private float _scrL3Ratio = 0;
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private int _rotationSpeed = 60;
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private int _routineTimeOut;
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private Stopwatch _swTimer = new Stopwatch();
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private IoInterLock _pmInterLock;
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public PMToProcessIdleRoutine(ModuleName module, PMModule pm) : base(module, pm)
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{
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Module = module.ToString();
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Name = "ProcessIdle";
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}
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public override Result Start(params object[] objs)
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{
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Reset();
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_IoThrottle = DEVICE.GetDevice<IoThrottleValve2>($"{Module}.TV");
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_pmInterLock = DEVICE.GetDevice<IoInterLock>($"{Module}.PMInterLock");
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if (!PmDevice.CheckSlitValveClose())
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{
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EV.PostAlarmLog(Module, $"can not run ProcessIdle, {Module} SlitValve Opened");
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return Result.FAIL;
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}
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if (!_pmInterLock.SetPMProcessIdleRunning(true, out string reason))
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{
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EV.PostAlarmLog(Module, $"can not run ProcessIdle, {reason}");
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return Result.FAIL;
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}
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if (!PmDevice.CheckHeadHeaterEnable(true))
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{
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EV.PostAlarmLog(Module, $"Should set HeatEnable on first!");
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return Result.FAIL;
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}
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//检查隔热罩状态
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if (PmDevice.ConfinementRing.RingServoError || PmDevice.ConfinementRing.RingIsBusy ||
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!PmDevice.ConfinementRing.RingServoOn)
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{
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EV.PostAlarmLog(Module, $"ConfinementRing State abnormal,please check");
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return Result.FAIL;
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}
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////检查磁流体状态
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//if(!PmDevice._sicServo.ServoReady)
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//{
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// EV.PostAlarmLog(Module, $"NAIS Servo State abnormal,please check");
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// return Result.FAIL;
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//}
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_v72IsOpen = false;
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_checkPMPressureOver1000 = false;
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_rotationCloseTimeout = SC.GetValue<int>($"PM.{Module}.RotationCloseTimeout");
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_pmPressureMaxDiff = SC.GetValue<double>($"PM.{Module}.ThrottlePressureMaxDiff");
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_throttleTimeout = SC.GetValue<int>($"PM.{Module}.ThrottlePressureTimeout");
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_rotationSpeed = SC.GetValue<int>($"PM.{Module}.ProcessIdle.RotationSpeed");
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_throttleFinalPressure = SC.GetValue<double>($"PM.{Module}.ProcessIdle.FinalPressure");
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_psuHeatEnable = SC.GetValue<bool>($"PM.{Module}.ProcessIdle.PSUHeaterEnable");
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_psuHeatMode = SC.GetValue<int>($"PM.{Module}.ProcessIdle.PSUHeaterMode");
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_psuL1Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.PSUInnerRatio");
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_psuL2Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.PSUMiddleRatio");
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_psuL3Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.PSUOuterRatio");
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_scrHeatEnable = SC.GetValue<bool>($"PM.{Module}.ProcessIdle.SCRHeaterEnable");
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_scrHeatMode = (int)SC.GetValue<int>($"PM.{Module}.ProcessIdle.SCRHeaterMode");
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_scrL1Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.SCRUpperRatio");
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_scrL2Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.SCRMiddleRatio");
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_scrL3Ratio = (float)SC.GetValue<double>($"PM.{Module}.ProcessIdle.SCRLowerRatio");
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_routineTimeOut = SC.GetValue<int>($"PM.{Module}.ProcessIdle.RoutineTimeOut");
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_finalOpen = false;
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_isTvOpen = false;
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currentPressureUpOrDown = PressureUpOrDown.None;
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_swTimer.Restart();
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Notify("Start");
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return Result.RUN;
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}
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public override Result Monitor()
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{
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try
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{
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CheckRoutineTimeOut();
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//1 关闭V76,打开V75
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SetIoValueByGroup((int)RoutineStep.SetV76, IoGroupName.V76, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV75, IoGroupName.V75, true, _IoValueOpenCloseTimeout);
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//2 旋转停止
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SetHeatEnable((int)RoutineStep.HeatEnable, false, _heatTimeOut);
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SetRotationValve((int)RoutineStep.RotationEnable, _rotationCheckSpeed, false, _rotationCloseTimeout);
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//3 打开V30,打开V31,打开V32
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SetIoValueByGroup((int)RoutineStep.SetV30, IoGroupName.V30, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV31, IoGroupName.V31, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetV32, IoGroupName.V32, true, _IoValueOpenCloseTimeout);
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//4 打开V35,打开V36
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SetIoValueByGroup((int)RoutineStep.SetV35V36, IoGroupName.V35V36, true, _IoValueOpenCloseTimeout);
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//关闭B/C/E/F/H/K 阀门
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SetIoValueByGroup((int)RoutineStep.SetGroupB, IoGroupName.B, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupC, IoGroupName.C, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupE, IoGroupName.E, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupF, IoGroupName.F, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupH, IoGroupName.H, false, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupK, IoGroupName.K, false, _IoValueOpenCloseTimeout);
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//打开D/G 阀门
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SetIoValueByGroup((int)RoutineStep.SetGroupD, IoGroupName.D, true, _IoValueOpenCloseTimeout);
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SetIoValueByGroup((int)RoutineStep.SetGroupG, IoGroupName.G, true, _IoValueOpenCloseTimeout);
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////打开V65
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//SetIoValueByGroup((int)RoutineStep.SetV65, IoGroupName.V65, true, _IoValueOpenCloseTimeout);
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//设置MFC和PC的模式
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SetMfcModeToNormalByGroup((int)RoutineStep.SetMFCMode, MfcGroupName.All);
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SetPcModeToNormal((int)RoutineStep.SetPCMode, _lstPcList);
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//5 M1-M16设定为default值(M2、M9、M15除外)
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SetMfcToDefaultByGroup((int)RoutineStep.SetM1to16, MfcGroupName.M1to16, 0);
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//设置所有PC到默认值
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SetPcToDefault((int)RoutineStep.SetPC, _lstPcList);
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//6 M2、M9、M15、M19-M40、M41-M45 5s ramp到default值
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SetMfcByGroup((int)RoutineStep.SetM2toM40, MfcGroupName.M2toM45, 0, 5);
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//7 打开EPV2
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SetIoValueByGroup((int)RoutineStep.SetEPV2, IoGroupName.EPV2, true, _IoValueOpenCloseTimeout);
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TimeDelay((int)RoutineStep.TimeDelay1, 3);
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//8 打开Final2阀
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SetIoValueByGroup((int)RoutineStep.OpenFinal2, IoGroupName.Final2, true, _IoValueOpenCloseTimeout);
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//9 Final2阀对应的MFC 3s Ramp到Default值
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SetMfcToDefaultByGroup((int)RoutineStep.SetMfcFinal2, MfcGroupName.Final2, 3);
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//10 打开V93（ChamberPurge.Final）、V95（ConfinementRing.Final）；等待3S
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SetIoValueByGroup((int)RoutineStep.SetV93V95, IoGroupName.V93V95, true, _IoValueOpenCloseTimeout);
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TimeDelay((int)RoutineStep.TimeDelay2, 3);
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//11 M35、M37依次设定3S ramp 到default值 ； 等待3S
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SetMfcToDefaultByGroup((int)RoutineStep.SetM35M37, MfcGroupName.M35M37, 3);
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//打开V68
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SetIoValueByGroup((int)RoutineStep.SetV68, IoGroupName.V68, true, _IoValueOpenCloseTimeout);
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//12 打开V94（RotationUpPurge.Final）、M36设定5S ramp 到default值；等待3S
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SetIoValueByGroup((int)RoutineStep.SetV94, IoGroupName.V94, true, _IoValueOpenCloseTimeout);
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SetMfcToDefaultByGroup((int)RoutineStep.SetM36, MfcGroupName.M36, 5);
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TimeDelay((int)RoutineStep.TimeDelay3, 3);
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//打开V96（HeaterWF.Final）； M38依次设定5S ramp 到default值
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SetIoValueByGroup((int)RoutineStep.SetV96, IoGroupName.V96, true, _IoValueOpenCloseTimeout);
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SetMfcToDefaultByGroup((int)RoutineStep.SetM38, MfcGroupName.M38, 5);
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TimeDelay((int)RoutineStep.TimeDelay4, 3);
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//13 打开J Valves
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SetIoValueByGroup((int)RoutineStep.SetGroupJOpen, IoGroupName.J, true, _IoValueOpenCloseTimeout);
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//设置M2,M9,M15,M19-M26 M43、M44、M45 3s ramp 到default 值
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SetMfcToDefaultByGroup((int)RoutineStep.SetM2toM26, MfcGroupName.M2toM26M43M44M45, 3);
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//设置蝶阀Enable
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SetThrottleEnableAndWait((int)RoutineStep.SetTVEnable, _IoThrottle, 5);
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//14 设置蝶阀为压力模式
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SetThrottleToPressModeAndWait((int)RoutineStep.SetTVPressMode, _IoThrottle, 5);
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//伺服压力设定值到1050mbar
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SetThrottleToTargetAndNoWait((int)RoutineStep.SetTV, _IoThrottle, 1050);
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//15 打开V72
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SetIoValueByGroup((int)RoutineStep.SetV72, IoGroupName.V72, true, _IoValueOpenCloseTimeout);
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TimeDelay((int)RoutineStep.TimeDelay5, 1);
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//关闭V25
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SetIoValueByGroup((int)RoutineStep.SetV25, IoGroupName.V25, false, _IoValueOpenCloseTimeout);
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//蝶阀调整到300
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SetPressureUpOrDown((int)RoutineStep.SetPressUpOrDown1, PressureUpOrDown.Dowing);
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SetThrottleToTargetAndNoWait((int)RoutineStep.SetPressureDown, _IoThrottle, _throttleFinalPressure);
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WaitThrottleToPressureAndSetMfcSpecial((int)RoutineStep.SetTVto300, _IoThrottle, _throttleFinalPressure, _pmPressureMaxDiff, _throttleTimeout);
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//TimeDelay((int)RoutineStep.TimeDelay8, 3);
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//16 转速Enable,加热Enable, 电流功率可配置
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EnableRotation((int)RoutineStep.EnableRotation, 5);
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SetRotationValveAndNoWait((int)RoutineStep.SetRotation1, _rotationSpeed);
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if (_psuHeatEnable)
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{
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//打开PSU加热
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SetPSUEnable((int)RoutineStep.EnableTC1, true, 5);
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SetPSUHeatMode((int)RoutineStep.SetTC1Mode, _psuHeatMode);
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TimeDelay((int)RoutineStep.TimeDelay6, 1);
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SetPSUHeatRatio((int)RoutineStep.SetTC1Ratio, _psuL1Ratio, _psuL2Ratio, _psuL3Ratio);
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}
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else
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{
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//关闭PSU加热
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SetPSUHeatRatio((int)RoutineStep.SetTC1RatioTo0, 0, 0, 0);
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SetPSUEnable((int)RoutineStep.CloseTC1, false, 5);
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}
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if (_scrHeatEnable)
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{
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//打开SCR加热
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SetSCRReset((int)RoutineStep.SetScrReset);
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TimeDelay((int)RoutineStep.TimeDelay7, 1);
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SetSCREnable((int)RoutineStep.EnableTC2, true, 5);
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SetSCRHeatMode((int)RoutineStep.SetTC2Mode, _scrHeatMode);
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TimeDelay((int)RoutineStep.TimeDelay8, 1);
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SetSCRHeatRatio((int)RoutineStep.SetTC2Ratio, _scrL1Ratio, _scrL2Ratio, _scrL3Ratio);
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}
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else
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{
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//关闭SCR加热
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SetSCRHeatRatio((int)RoutineStep.SetTC2RatioTo0, 0, 0, 0);
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SetSCREnable((int)RoutineStep.CloseTC2, false, 5);
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}
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WaitRotationValve((int)RoutineStep.WaitRotation1, _rotationSpeed, true, _rotationSpeed * 3);
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}
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catch (RoutineBreakException)
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{
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return Result.RUN;
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}
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catch (RoutineFaildException)
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{
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return Result.FAIL;
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}
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_pmInterLock.SetPMProcessIdleRunning(false, out string reason);
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Notify($"Finished ! Elapsed time: {(int)(_swTimer.ElapsedMilliseconds / 1000)} s");
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_swTimer.Stop();
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return Result.DONE;
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}
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private void CheckRoutineTimeOut()
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{
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if (_routineTimeOut > 10)
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{
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if ((int)(_swTimer.ElapsedMilliseconds / 1000) > _routineTimeOut)
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{
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Notify($"Routine TimeOut! over {_routineTimeOut} s");
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throw (new RoutineFaildException());
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}
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}
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}
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public override void Abort()
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{
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_pmInterLock.SetPMProcessIdleRunning(false, out string reason);
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PmDevice._ioThrottleValve.StopRamp();
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PmDevice.SetMfcStopRamp(PmDevice.GetMfcListByGroupName(MfcGroupName.All));
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PmDevice.SetHeaterStopRamp();
|
||
PmDevice.SetRotationStopRamp();
|
||
PmDevice.SetRotationServo(0, 0);
|
||
|
||
base.Abort();
|
||
}
|
||
}
|
||
} |