SIC-12/Modules/SicModules/PMs/Routines
hanqiangqiang cac67d78d9 添加M41-M45配置
修改Routine
2026-04-07 16:08:18 +08:00
..
Base 添加M41-M45配置 2026-04-07 16:08:18 +08:00
Recipe 添加M41-M45配置 2026-04-07 16:08:18 +08:00
PMButttomSectionMoveRoutine.cs 首次上传 2026-03-24 15:04:02 +08:00
PMChamberMoveBodyRoutine.cs 首次上传 2026-03-24 15:04:02 +08:00
PMCleanRoutine.cs 添加M41-M45配置 2026-04-07 16:08:18 +08:00
PMExchangeMoRoutine.cs 添加M41-M45配置 2026-04-07 16:08:18 +08:00
PMHomeRoutine.cs 首次上传 2026-03-24 15:04:02 +08:00
PMLeakCheckRoutine.cs 添加M41-M45配置 2026-04-07 16:08:18 +08:00
PMMfcRorRoutine.cs 首次上传 2026-03-24 15:04:02 +08:00
PMPcCalibrationRoutine.cs 添加M41-M45配置 2026-04-07 16:08:18 +08:00
PMPostTransferRoutine.cs 首次上传 2026-03-24 15:04:02 +08:00
PMPrepareTransferRoutine.cs 首次上传 2026-03-24 15:04:02 +08:00
PMProcessAbortRoutine.cs 添加M41-M45配置 2026-04-07 16:08:18 +08:00
PMProcessRoutine.cs 首次上传 2026-03-24 15:04:02 +08:00
PMPumpRoutine.cs 添加M41-M45配置 2026-04-07 16:08:18 +08:00
PMPurgeRoutine.cs 添加M41-M45配置 2026-04-07 16:08:18 +08:00
PMServoToPressure.cs 首次上传 2026-03-24 15:04:02 +08:00
PMStopHeatEnableRoutine.cs 首次上传 2026-03-24 15:04:02 +08:00
PMToAtmIdleRoutine.cs 添加M41-M45配置 2026-04-07 16:08:18 +08:00
PMToIsolationRoutine.cs 添加M41-M45配置 2026-04-07 16:08:18 +08:00
PMToProcessIdleRoutine.cs 添加M41-M45配置 2026-04-07 16:08:18 +08:00
PMVacIdleRoutine.cs 添加M41-M45配置 2026-04-07 16:08:18 +08:00
PMVentRoutine.cs 添加M41-M45配置 2026-04-07 16:08:18 +08:00