7 lines
667 B
XML
7 lines
667 B
XML
<?xml version="1.0" encoding="utf-8" ?>
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<TMUnitAlarmDefine>
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<Alarm ID="525" DI="DI_TMLidClosed" Description="TM Lid Open Alarm" GlobalDescription_en="TM Lid Open Alarm" GlobalDescription_zh="TM Lid Open Alarm" Level="Alarm" AlarmValue="0"/>
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<Alarm ID="526" DI="DI_LLLidClosed" Description="LoadLock Lid Open Alarm" GlobalDescription_en="LoadLock Lid Open Alarm" GlobalDescription_zh="LoadLock Lid Open Alarm" Level="Alarm" AlarmValue="0"/>
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<Alarm ID="527" DI="DI_BufferLidClosed" Description="Buffer Lid Open Alarm" GlobalDescription_en="Buffer Lid Open Alarm" GlobalDescription_zh="Buffer Lid Open Alarm" Level="Alarm" AlarmValue="0"/>
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</TMUnitAlarmDefine> |