20250213工作内容 #2

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opened 2025-02-21 22:24:33 +08:00 by weiwei.wang · 0 comments
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A腔检查:
1.侧壁下层加热丝碳化,部分表层脱落,更换新品
2.底部外圈加热丝松动歪一边,重装;
3.底部内圈加热丝歪一边,重装;
4.底部隔热组件上两片变形,更换略好旧品;
5.吹扫筒两个耳朵松动,重新加紧;
6.更换下石墨桶和外上石墨桶一套;
7.更换两套四件套盘子
8.更换S/H石英板;

A腔检查: 1.侧壁下层加热丝碳化,部分表层脱落,更换新品 2.底部外圈加热丝松动歪一边,重装; 3.底部内圈加热丝歪一边,重装; 4.底部隔热组件上两片变形,更换略好旧品; 5.吹扫筒两个耳朵松动,重新加紧; 6.更换下石墨桶和外上石墨桶一套; 7.更换两套四件套盘子 8.更换S/H石英板;
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Reference: weiwei.wang/SIC-06#2
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