20250320 B腔工作内容 #5

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opened 2025-03-20 19:53:45 +08:00 by weiwei.wang · 0 comments
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1.load/unload腔更换6寸夹爪;
2.wafer机械手对load/unload工位调整;
3.自动传盘测试ok;

1.load/unload腔更换6寸夹爪; 2.wafer机械手对load/unload工位调整; 3.自动传盘测试ok;
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Reference: weiwei.wang/SIC-19#5
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