weiwei.wang/SIC-35
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20250526 A腔工作内容 #5

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opened 2025-06-04 21:41:10 +08:00 by weiwei.wang · 0 comments
weiwei.wang commented 2025-06-04 21:41:10 +08:00
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1.A腔产出片子固定位置出现DF和三角
2.开腔检查，所有石墨件取出清洁
3.清洁机台所有公共腔
4.TM腔测漏
5.传盘测试，检查机械手位置有无偏移

1.A腔产出片子固定位置出现DF和三角 2.开腔检查，所有石墨件取出清洁 3.清洁机台所有公共腔 4.TM腔测漏 5.传盘测试，检查机械手位置有无偏移
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Reference: weiwei.wang/SIC-35#5
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