20250630 B腔工作内容 #6

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opened 2025-06-30 20:47:09 +08:00 by weiwei.wang · 0 comments
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B腔飞片和表面异常
1.传盘测试检查盘子
2.机台全系统测漏
3.开腔检查加热丝
4.测Wobble
5.校温

B腔飞片和表面异常 1.传盘测试检查盘子 2.机台全系统测漏 3.开腔检查加热丝 4.测Wobble 5.校温
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Reference: weiwei.wang/SIC-35#6
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